Cover ring for use in semiconductor processing chamber

Information

  • Patent Grant
  • D1038049
  • Patent Number
    D1,038,049
  • Date Filed
    Wednesday, November 18, 2020
    4 years ago
  • Date Issued
    Tuesday, August 6, 2024
    3 months ago
  • US Classifications
    Field of Search
    • US
    • D13 123
    • D13 154
    • D13 173
    • D13 178
    • D13 182
    • D13 184
    • D13 199
    • D15 144
    • D15 1441
    • D15 199
    • D24 127
    • D24 129
    • CPC
    • H01L21/67303
    • H01L21/67306
    • H01L21/67309
    • H01L21/67126
    • H01L21/67757
    • H01L21/67748
    • H01L21/683
    • H01L21/68728
    • H01L21/6875
    • H01L51/56
    • H01L51/0001
    • H01L43/12
    • H01L43/22
    • H01L31/18
    • H01L35/34
    • H01L39/24
    • C23C16/44
    • C23C16/45
    • C30B25/10
  • International Classifications
    • 1303
    • Term of Grant
      15Years
Abstract
Description


FIG. 1 is a bottom isometric view of a cover ring for use in a semiconductor processing chamber in accordance with some embodiments.



FIG. 2 is a top plan view thereof.



FIG. 3 is a bottom plan view thereof.



FIG. 4 is a front elevation view thereof.



FIG. 5 is a back elevation view thereof.



FIG. 6 is a right side elevation view thereof; and,



FIG. 7 is a left side elevation view thereof.


The broken lines in the drawings illustrate portions of the cover ring for use in a semiconductor processing chamber that form no part of the claimed design.


Claims
  • The ornamental design for a cover ring for use in a semiconductor processing chamber, as shown and described.
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Entry
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