Number | Name | Date | Kind |
---|---|---|---|
3579998 | Thibault et al. | May 1971 | |
3721101 | Sheppard et al. | Mar 1973 | |
4277951 | Longsworth | Jul 1981 | |
4555907 | Bartlett | Dec 1985 | |
4599869 | Ozin et al. | Jul 1986 | |
5056319 | Strasser | Oct 1991 | |
5062271 | Okumura et al. | Nov 1991 | |
5156007 | Bartlett et al. | Oct 1992 | |
5231840 | Yagi et al. | Aug 1993 | |
5261244 | Lessard et al. | Nov 1993 | |
5537833 | Matte et al. | Jul 1996 | |
5542257 | Mattern-Klosson et al. | Aug 1996 |
Entry |
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Longsworth, R.C., et al., "Cryopump vacuum recovery after pumping Ar and H.sub.2," J. Vac. Sci. Technol., 9(5):2766-2770, (1991). |