Crystal Growth Chamber With O-Ring Seal For Czochralski Growth Station

Abstract

A growth chamber or a Czochralski crystal growth station has one or more re-sealable caps that are inserted into the chamber body. An O-ring seals the cap within its mating portion of the chamber body. The re-sealable caps facilitate re-use of the chamber body for a future crystal growth cycle.

Description

BACKGROUND OF THE INVENTION

1. Field of the Invention

The invention relates to growth chambers for Czochralski process crystal growth stations. More particularly the invention relates to reusable growth chambers employing one or more re-sealable caps with O-ring seals.

2. Description of the Prior Art

Known growth chambers used in Czochralski process crystal growth stations generally employ a temperature resistant chamber body with open ends that are sealed by mating caps, so that the chamber interior is isolated from ambient atmosphere. The chamber body is typically constructed of quartz with metal end caps. The open ends of the chamber body and the mating caps are typically sealed with a self-curing caulk, such as RTV silicone caulk. When RTV or other caulk is employed to seal the growth chamber for all practical purposes the sealed joint is permanently sealed. It becomes challenging to separate the cap or caps from the chamber body ends without damaging the chamber. Typically the chamber body damage caused during RTV caulk sealed component separation renders the chamber unserviceable for future crystal growth fabrication.

Known chamber caps often include cooling channels for circulation of cooling fluid during a crystal growth cycle, in order to compensate for their relatively faster and greater thermal expansion rate than the chamber body material, in order to avoid cracking of the latter. Chamber cracks developed during a crystal growth cycle greatly risks damage of the crystal boule and also destroys the growth chamber, with the consequences of either result causing undesirable economic loss. Therefore the cap cooling flow rate needs to be monitored so that the cap does not expand too quickly relative to the chamber body. Conversely the cap cooling flow rate must not be so fast, so that chamber body expansion does not break the chamber body/cap seal junction.

SUMMARY OF THE INVENTION

In accordance with exemplary embodiments described and shown herein, Czochralski growth station growth chambers are constructed with selectively re-sealable caps, such as lid caps or base caps, which are inserted into one or more open ends of the chamber body. The gap between the cap and chamber body end is sealed with an O-ring that is interposed between the two mating components. The O-ring facilitates selective assembly of the growth chamber prior to initiation of a crystal growth cycle, disassembly of the chamber after a crystal growth cycle without damage to the chamber body or caps, and reuse of the undamaged chamber components for future crystal growth. The O-ring seals are relatively compliant for preservation of chamber sealing despite disparate thermal expansion rates between the cap and chamber body materials. A sufficiently large gap between the cap and chamber body can be selectively chosen to compensate for those varying thermal expansion rates, while maintaining desired chamber sealing properties. Accordingly, this thermal compensation sealing flexibility reduces cap cooling flow and flow monitoring sensitivity compared to chambers that are sealed with RTV or other caulk compounds.

Exemplary embodiments of the invention feature a growth chamber apparatus for a Czochralski crystal growth station. The growth chamber comprises a hollow chamber body having open upper and lower ends; a base cap having a necked portion for slidable insertion into the chamber body lower end; and a lid cap having a necked portion for slidable insertion into the chamber body upper end. An O-ring is interposed between the at least one of the chamber body ends and its corresponding necked portion of the base or lid, for selective sealing of the growth chamber there between.

Other exemplary embodiments of the invention feature a growth chamber apparatus for a Czochralski crystal growth station, comprising a hollow chamber body having open upper and lower ends; a base cap having a necked portion for slidable insertion into the chamber body lower end; and a lid cap having a necked portion for slidable insertion into the chamber body upper end. An O-ring is interposed between the at least one of the chamber body ends and its corresponding necked portion of the base or lid, for selective sealing of the growth chamber there between.

Additional exemplary embodiments of the invention feature a method for sealing a growth chamber apparatus for a Czochralski crystal growth station, comprising providing a hollow chamber body having an open end and a cap having a necked portion for slidable insertion into the chamber body open end and orienting an O-ring between the chamber body open end and the necked portion. The method is completed by sliding the necked portion into the chamber body open end, thereby interposing the O-ring there between.

The respective features of the exemplary embodiments of the invention may be applied jointly or severally in any combination or sub-combination by those skilled in the art.

BRIEF DESCRIPTION OF THE DRAWINGS

The teachings of the exemplary embodiments of the invention can be readily understood by considering the following detailed description in conjunction with the accompanying drawings, in which:

FIG. 1 is a fragmented perspective view of an exemplary Czochralski crystal growth station that includes a growth chamber constructed in accordance with an exemplary embodiment of the invention;

FIG. 2 is a perspective view of an assembled growth chamber that is constructed in accordance with an exemplary embodiment of the invention;

FIG. 3 is a partial cross sectional view of a chamber body upper end and base cap of the growth chamber of FIG. 2; and

FIG. 4 is an axial cross sectional view of a chamber body lower end cap of the growth chamber of FIG. 2.

To facilitate understanding, identical reference numerals have been used, where possible, to designate identical elements that are common to the figures.

DETAILED DESCRIPTION

After considering the following description, those skilled in the art will realize that the exemplary embodiments of the invention can be utilized in Czochralski crystal growth station growth chambers that facilitate selective assembly, disassembly and reassembly for reuse in future crystal growth cycles. O-ring seals are used to seal the chamber body ends one or more of their respective caps, such as a base cap or a lid cap. The O-rings enable selective insertion and separation of necked portions of base or lid caps from their mating chamber body open ends without causing permanent damage to the chamber body that otherwise would render it unserviceable for future re-use. In some embodiments the O-ring sealing properties facilitate establishment of a thermal expansion gap between the cap and the chamber body mating end surfaces to compensate for varying expansion rates of those component materials while maintaining a sealed condition between the components. In this manner the growth chamber is isolated from ambient atmosphere during a crystal growth cycle. In some embodiments the lid and base caps incorporate cooling channels for circulation of cooling fluid, so that the O-rings are not overheated during a crystal growth cycle.

FIG. 1 shows an exemplary known Czochralski crystal growth station 10 that incorporates an exemplary embodiment of a growth chamber apparatus 20 of the invention. The growth station 10 has a base 12 that supports a radio frequency (RF) heater 14 into which is inserted the growth chamber 20. The growth chamber 20 is selectively positioned relative to the RF heater 14 during a crystal growth cycle, as shown by the double arrow, by a known pulling head, which is not shown for simplicity of the figure. The pulling head independently pulls a growing crystal boule relative to the chamber body and its contained crucible (not shown). Again for simplicity of the figure, known internal components within the growth chamber 20, such as the crucible, ceramic insulation layers, apparatus for introducing and evacuating inert gas within the chamber, etc. are not shown.

The assembled growth chamber 20 is shown in FIG. 2 and includes a chamber body 22 with a lower end 24 and an upper end 26. Exemplary chamber bodies 20 are constructed of quartz material, with upper 26 and lower 24 ends swaged to a desired—here cylindrical—profile for mating with caps. While a tubular profile chamber body 22 is shown in FIG. 2, other shapes may be substituted for the tubular profile.

Referring to FIGS. 2 and 4, Base cap 30 has a base necked portion 32 that is sized to be slidably inserted into the tube lower end 24. The neck portion 32 has an O-ring recess 34 for receipt of O-ring 35. The O-ring 35 seals the gap between the neck portion 32 of the base cap 30 and the chamber body lower end 24, in order to isolate the chamber 20 from ambient atmospheric air. Exemplary O-rings are constructed of resilient FKM-type elastomer materials, such as VITON® elastomers, sold by DuPont Performance Elastomers LLC. While a circular cross section O-ring 34 is shown, other configurations of sealing rings, such as rectangular or square cross section rings can be substituted for circular ones. Similarly, while the O-ring recess 34 is shown in the base cap 30, the mating cap and chamber body opposed surfaces can be constructed with the recess in either component or both. In some embodiments the recess 34 feature can be eliminated entirely. The base inner face 36 defines a floor of the growth chamber 20. Optional known construction cooling channels can be constructed in the base cap 30, in order to prevent overheating of the cap or the O-ring. In FIG. 4 the base 30 base cooling channels communicate with cooling inlet 38 and the coolant is exhausted through cooling outlet 39.

The exemplary growth chamber 20 also includes a lid cap 40, as shown in FIGS. 2 and 3. The lid cap 40 includes sealing structures similar to those of the previously described base cap 30. More particularly the lid 40 has a lid necked portion 42 that is slidably engaged in the upper end 26 of the chamber body 22, an optional O-ring recess 44 that retains O-ring 45 and a lid inner face 46 that defines the top of the growth chamber 20. Optional known construction cooling channels can be constructed in the lid cap 40, in order to prevent overheating of the cap or the O-ring. In FIG. 3 the lid 40 cooling channels communicate with cooling inlet 48 and the coolant is exhausted through cooling outlet 49.

While the exemplary embodiment growth chamber 20 is shown with O-ring sealed removable base cap 30 and lid cap 40, a single cap can be utilized in a growth chamber of the invention and the cap does not have to be oriented directly on the bottom or top of the chamber body 22.

The growth chamber 20 is assembled by inserting the respective O-rings 35 and 45 into their respective O-ring recesses 34, 44 and thereafter sliding the respective base cap 30 and lid cap 40 necked portions 32, 42 into engagement with the chamber body 22 lower 24 and upper 26 ends. After a crystal boule is grown the growth chamber 20 is opened by withdrawal of the base 30 and lid 40 caps from engagement with the chamber body respective ends 24 and 26. O-rings facilitate insertion and withdrawal of the caps 30, 40 from the chamber body 22 without damaging the latter's relatively delicate, brittle quartz engagement surfaces. By preserving service life of the chamber body 22 it can be reused in a subsequent crystal boule fabrication cycle.

Although various embodiments that incorporate the teachings of the present invention have been shown and described in detail herein, those skilled in the art can readily devise many other varied embodiments that still incorporate these teachings. The invention is not limited in its application to the exemplary embodiment details of construction and the arrangement of components set forth in the description or illustrated in the drawings. The invention is capable of other embodiments and of being practiced or of being carried out in various ways. Also, it is to be understood that the phraseology and terminology used herein is for the purpose of description and should not be regarded as limiting. The use of “including,” “comprising,” or “having” and variations thereof herein is meant to encompass the items listed thereafter and equivalents thereof as well as additional items. Unless specified or limited otherwise, the terms “mounted,” “connected,” “supported,” and “coupled” and variations thereof are used broadly and encompass direct and indirect mountings, connections, supports, and couplings. Further, “connected” and “coupled” are not restricted to physical or mechanical connections or couplings.

Claims

1. A growth chamber apparatus for a Czochralski crystal growth station, comprising: a hollow chamber body having open upper and lower ends;a base cap having a necked portion for slidable insertion into the chamber body lower end;a lid cap having a necked portion for slidable insertion into the chamber body upper end; andan O-ring interposed between the at least one of the chamber body ends and its corresponding necked portion of the base or lid, for selective sealing of the growth chamber there between.

2. The apparatus of claim 1, further comprising an O-ring recess for retaining the O-ring.

3. The apparatus of claim 1, the O-ring recess formed in the corresponding necked portion of the base or the lid.

4. The apparatus of claim 1, the chamber body comprising a quartz tube.

5. The apparatus of claim 4, the quartz tube having swaged upper and lower ends.

6. The apparatus of claim 4, having O-rings between both the respective lid and base necked portions and their corresponding chamber body upper and lower ends.

7. The apparatus of claim 1, the base and lid having cooling fluid channels for circulation of cooling fluid.

8. A method for sealing a growth chamber apparatus for a Czochralski crystal growth station, comprising: providing a hollow chamber body having an open end and a cap having a necked portion for slidable insertion into the chamber body open end;orienting an O-ring between the chamber body open end and the necked portion; andsliding the necked portion into the chamber body open end, thereby interposing the O-ring there between.

9. The method of claim 8, the provided chamber body having upper and lower ends and provided corresponding lid and base caps, the method further comprising orienting upper and lower O-rings between corresponding chamber body open ends and their corresponding lid and base necked portions and sliding those necked portions into their corresponding open ends.

10. The method of claim 9, further comprising providing respective upper and lower gaps between the chamber body open ends and their corresponding lid and base cap necked portions to compensate for variances in thermal expansion during crystal growth fabrication.

11. The method of claim 8, further comprising providing a gaps between the chamber body open end and the cap necked portion to compensate for variances in thermal expansion during crystal growth fabrication.

12. The method of claim 11, further comprising disassembling the growth chamber after a crystal growth fabrication by retracting the necked portion from the open end without damaging the chamber body and reusing the chamber body for future crystal growth fabrication.

13. The method of claim 8, further comprising disassembling the growth chamber after a crystal growth fabrication by retracting the necked portion from the open end without damaging the chamber body and reusing the chamber body for future crystal growth fabrication.

14. The method of claim 13 further comprising providing a cooling channel in the cap and circulating cooling fluid through the cooling channel during crystal growth fabrication in order to reduce likelihood of O-ring thermal damage.

15. The method of claim 8 further comprising providing a cooling channel in the cap and circulating cooling fluid through the cooling channel during crystal growth fabrication in order to reduce likelihood of O-ring thermal damage.

16. A growth chamber apparatus for a Czochralski crystal growth station, comprising: a hollow chamber body having an open end;a cap having a necked portion for slidable insertion into the chamber body open end;an O-ring interposed between the chamber body end and the cap necked portion, for selective sealing of the growth chamber there between.

17. The apparatus of claim 16, the chamber body open end and the cap necked portion defining a gap there between to compensate for variances in thermal expansion during crystal growth fabrication. an O-ring interposed between the chamber body end and the cap necked portion, for selective sealing of the growth chamber there between.

18. A Czochralski crystal growth station, comprising: the growth chamber apparatus of claim 16;a radio frequency (RF) heater circumscribing the growth chamber; anda base supporting the RF heater and the growth chamber apparatus.

19. A Czochralski crystal growth station, comprising: the growth chamber apparatus of claim 1;a radio frequency (RF) heater circumscribing the growth chamber; anda base supporting the RF heater and the growth chamber apparatus.