| Number | Date | Country | Kind |
|---|---|---|---|
| 1-64130 | Mar 1989 | JPX |
| Number | Name | Date | Kind |
|---|---|---|---|
| 3923705 | Smith | Dec 1975 | |
| 4743670 | Yoshida et al. | May 1988 | |
| 4868251 | Reich et al. | Nov 1989 |
| Number | Date | Country |
|---|---|---|
| 0153700 | Sep 1985 | EPX |
| 0154411 | Sep 1985 | EPX |
| Entry |
|---|
| Patent Abstracts of Japan, vol. 10, No. 235 (C-366) [2291], Aug. 14, 1986; JP-A-61 069 865 (Toray Silicon) Oct. 4, 1986. |
| WPIL, File Supplier, Nr. 89-176253, Derwent Publications Ltd., London, GB. |