| Number | Date | Country | Kind |
|---|---|---|---|
| 1-96977 | Apr 1989 | JPX |
| Number | Name | Date | Kind |
|---|---|---|---|
| 4980440 | Kendziorski et al. | Dec 1990 | |
| 4985526 | Kishita et al. | Jan 1991 |
| Number | Date | Country |
|---|---|---|
| 0147826 | Oct 1985 | EPX |
| 0279706 | Aug 1988 | EPX |
| 0311262 | Apr 1989 | EPX |
| Entry |
|---|
| Patent Abstracts of Japan vol. 12 No. 22 (C-470)(2869), Jan. 22, 1988; & JP-A-62174260 (Shin-Etsu) 31.07.1987 *Abstract*. |