BRIEF DESCRIPTION OF THE DRAWINGS
FIGS. 1A to 1D are diagrams showing an example of a current detection printed board 1 according to the invention.
FIG. 2 is a diagram showing a case where a power transmission conductor 66, in which an AC current flows, and an insulator 69 covering the power transmission conductor 66 are disposed to pass through a penetration hole 101 provided in the current detection printed board 1.
FIGS. 3A to 3E are diagrams showing another example of the current detection printed board 1 according to the invention.
FIGS. 4A and 4B are diagram showing another example of a coiled wire 10.
FIG. 5 is diagram showing another example of the current detection printed board 1 according to the invention.
FIG. 6 is a connection diagram of the current detection printed board 1 shown in FIG. 5.
FIG. 7 is a diagram showing another example of the current detection printed board 1 according to the invention.
FIGS. 8A to 8E are diagrams showing the arrangement examples of the first coiled wire 10-1 and the second coiled wire 10-2.
FIGS. 9A to 9D are diagrams showing an example of a voltage detection printed board 2 according to the invention.
FIGS. 10A to 10E are diagrams showing another example of the voltage detection printed board 2 according to the invention.
FIGS. 11A and 11B show another example of a ring-shaped wire 30.
FIGS. 12A to 12C are schematic exterior views of a current/voltage detector 3 according to a third embodiment of the invention.
FIGS. 13A and 13B are diagrams showing the schematic configuration of the current/voltage detector 3 shown in FIGS. 12A to 12C.
FIGS. 14A to 14C are diagrams of a casing main body 300.
FIGS. 15A and 15B are diagrams three-dimensionally showing the casing main body 30.
FIGS. 16A and 6B are diagrams when the current detection printed board 1 and the voltage detection printed board 2 are mounted on the casing main body 300 in a state where a current detector cover 301 and a voltage detector cover 302 are not mounted.
FIG. 17 is a cross-sectional view showing a case where the power transmission conductor 66 and the insulator 69 covering the power transmission conductor 66 penetrate the current/voltage detector 3.
FIGS. 18A and 18B show an example of an application of a second shield portion 314.
FIGS. 19A and 19B show a modification of the current detection printed board 1, the voltage detection printed board 2, and the casing.
FIG. 20 is a diagram showing an example where the current detection printed board 1 and the voltage detection printed board 2 are accommodated in separate casings, thereby forming the current detector 310 and the voltage detector 320 separately.
FIG. 21 is a diagram showing an application when the current detector 310 and the voltage detector 320 are provided separately.
FIG. 22 is a diagram showing a case where the voltage detector 320 is disposed near the input and the current detector 310 is disposed at the back of the voltage detector 320.
FIG. 23 is a diagram showing a fixing method of the insulator 69.
FIG. 24 is a diagram showing a fixing method of the insulator 69 when only the current detector 310 is used separately.
FIG. 25 is a diagram showing a case where the sizes of the power transmission conductor 66 and the insulator 69 are suited to the size of the current/voltage detector 3 in the current/voltage detector 3 shown in FIG. 23.
FIG. 26 is a block diagram of an example of a high-frequency power supply system that uses an impedance matching device.
FIG. 27 is a schematic circuit diagram of a current detector 80 and a voltage detector 90 provided between an input terminal and a matching circuit 67 of an impedance matching device 63.
FIG. 28 is a schematic exterior view of the current detector 80 and the voltage detector 90.
FIGS. 29A to 29C are explanatory views illustrating the configuration of the current detector 80 and the voltage detector 90 shown in FIG. 28.
FIG. 30 is a circuit diagram showing a case where the current detector 80 and the voltage detector 90 are provided between the matching circuit and the output terminal in the impedance matching device.