The present invention relates to a current-injection organic semiconductor laser diode and a method for producing it. The present invention also relates to a program for designing a current-injection organic semiconductor laser diode.
The properties of optically pumped organic semiconductor lasers (OSLs) have dramatically improved in the last two decades as a result of major advances in both the development of high-gain organic semiconductor materials and the design of high-quality-factor resonator structures1-5. The advantages of organic semiconductors as gain media for lasers include their high photoluminescence (PL) quantum yields, large stimulated emission cross sections, and broad emission spectra across the visible region along with their chemical tunability and ease of processing. Owing to recent advances in low-threshold distributed feedback (DFB) OSLs, optical pumping by electrically driven nanosecond-pulsed inorganic light-emitting diodes was demonstrated, providing a route toward a new compact and low-cost visible laser technology6. However, the ultimate goal is electrically driven organic semiconductor laser diodes (OSLDs). In addition to enabling the full integration of organic photonic and optoelectronic circuits, the realization of OSLDs will open novel applications in spectroscopy, displays, medical devices (such as retina displays, sensors, and photodynamic therapy devices), and LIFI telecommunications.
The problems that have prevented the realization of lasing by the direct electrical pumping of organic semiconductors are mainly due to the optical losses from the electrical contacts and the triplet and polaron losses taking place at high current densities4,5,7-9. Approaches that have been proposed to solve these fundamental loss issues include the use of triplet quenchers10-12 to suppress triplet absorption losses and singlet quenching by singlet-triplet exciton annihilation as well as the reduction of the device active area13 to spatially separate where exciton formation and exciton radiative decay occur and minimize the polaron quenching processes. However, even with the advances that have been made in organic light-emitting diodes (OLEDs) and optically pumped organic semiconducting DFB lasers5, a current-injection OSLD has still not been conclusively demonstrated.
Patent LiteratureP1 describes realization of current-injection OSLD. According to the literature, the device is produced by forming a 500 nm-pitch grating (resonator) on an ITO film, then forming a 250 nm-thick hole transport layer of N,N′-diphenyl-N,N′-bis(3-methylphenyl)-1,1′-biphenyl-4,4′-diamine (TPD) by vapor deposition, further forming a 100 nm-thick light emitting layer by spin coating with a dichloromethane solution of an aromatic polycarbonate resin, forming a 250 nm-thick electron transport layer of 2-(4-tert-butylphenyl)-5-(4-biphenylyl)-1,3,4-oxadiazole by vapor deposition, and forming a 200 mm-thick Mg.Ag alloy layer. This literature describes laser emission by voltage application of 30 V to this device. However, in fact, when a dichloromethane solution of a polycarbonate is applied onto the TPD layer by spin coating, the TPD layer dissolves and, naturally, therefore the device could not be reproduced. In addition, this device has an organic hole transport layer and an organic electron transport layer each having a thickness of 250 am formed in addition to the 100 nm-thick organic light entitling layer therein, and therefore the total thickness of the organic layers therein is considerably large. It is impossible to attain laser oscillation by application of a direct current of 30 V to a device having a large total thickness of organic layers therein.
Other patent literaturesP2,P3 describe a possibility of realizing current-injection OSLDs. However, these patent literatures merely make general description relating to current-injection OSLDs, not showing at all any specific current-injection OSLD that has confirmed laser oscillation.
Patent Literature 1: JP-A-2004-186599
Patent Literature 2: JP-A-H10-321941
Patent Literature 3: JP-A-2008-524870
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To that effect, a laser oscillation current-injection OSLD is not yet provided. An object of the present invention is to provide a laser oscillation current-injection OSLD. As a result of assiduous studies, the present inventors have found that the object can be attained by the present invention. The present invention provides a current-injection organic semiconductor laser diode comprising a pair of electrodes, an optical resonator structure, and one or more organic layers including a light amplification layer composed of an organic semiconductor, which may satisfy at least one of “2” to “16” below and/or may have at least one embodiment described below. The present invention includes the following embodiments:
1. A current-injection organic semiconductor laser diode comprising a pair of electrodes, an optical resonator structure, and one or more organic layers including a light amplification layer composed of an organic semiconductor, which has a sufficient overlap between the distribution of exciton density and the electric field intensity distribution of the resonant optical mode during current injection to emit laser light.
2. The current-injection organic semiconductor laser diode according to item 1, wherein the optical resonator structure has a distributed feedback (DFB) structure.
3. The current-injection organic semiconductor laser diode according to item 2, wherein the optical resonator structure is composed of a second-order Bragg scattering region surrounded by a first-order Bragg scattering region.
4, The current-injection organic semiconductor laser diode according to item 2, wherein the second-order Bragg scattering region and the first-order Bragg scattering region are formed alternately in the optical resonator structure.
5. The current-injection organic semiconductor laser diode according to any one of items 1 to 4, wherein the number of the one or more organic layers is 2 or less.
6. The current-injection organic semiconductor laser diode according to any one of items 1 to 5, wherein the thickness of the light amplification layer relative to the total thickness of the one or more organic layers is more than 50%.
7, The current-injection organic semiconductor laser diode according to any one of items 1 to 6, wherein the organic semiconductor contained in the light amplification layer is amorphous. 8. The current-injection organic semiconductor laser diode according to any one of items 1 to 7, Wherein the molecular weight of the organic semiconductor contained in the light amplification layer is 1000 or less.
9. The current-injection organic semiconductor laser diode according to any one of items 1 to 8, wherein the organic semiconductor contained in the light amplification layer is a non-polymer.
10, The current-injection organic semiconductor laser diode according to any one of items I to 9, wherein the organic semiconductor contained in the light amplification layer has at least one stilbene unit.
11. The current-injection organic semiconductor laser diode according to any one of items 1 to 10, wherein the organic semiconductor contained in the light amplification layer has at least one carbazole unit.
12. The current-injection organic semiconductor laser diode according to any one of items 1 to 11, wherein the organic semiconductor contained in the light amplification layer is 4,4′-bisl(N-carbazole)styrylibiphenyl (BSBCz).
13. The current-injection organic semiconductor laser diode according to any one of items 1 to 12, which has an electron injection layer as one of the organic layers.
14. The current-injection organic semiconductor laser diode according to item 13, wherein the electron injection layer contains Cs.
15. The current-injection organic semiconductor laser diode according to any one of items 1 to 14, which has a hole injection layer as an inorganic layer.
16. The current-injection organic semiconductor laser diode according to item 15, wherein the hole injection layer contains molybdenum oxide.
17. A method for designing a current-injection organic semiconductor laser diode, comprising:
selecting materials and designing structure of the diode so as to increase the overlap between the distribution of exciton density and the electric field intensity distribution of the resonant optical mode during current injection,
18. A method for producing a current-injection organic semiconductor laser diode, comprising:
evaluating the overlap between the exciton density distribution and the electric field intensity distribution of the resonant optical mode during current injection in a designed or existing diode,
changing at least one of the material and the structure of the diode to so design a new diode as to increase the overlap between the distribution of exciton density and the electric field intensity distribution of the resonant optical mode during current injection, and
producing the new diode.
19. A current-injection organic semiconductor laser diode produced by the method of item 18.
20. A program for designing current-injection organic semiconductor laser diode, which designs a current-injection organic semiconductor laser diode to increase the overlap between the distribution of exciton density and the electric field intensity distribution of the resonant optical mode during current injection.
(HOD) and electron-only devices (EOD) under DC operation (filled symbols) and pulse operation (empty symbols) on log and linear (inset) scales. Device area is 200×200 um. These J-V curves indicate good transport of holes and electrons in the high voltage region in the laser diodes fabricated in this study. Current at low voltages is higher for electrons than holes because of trap limiting of the hole current.
The contents of the invention will be described in detail below. The constitutional elements may be described below with reference to representative embodiments and specific examples of the invention, but the invention is not limited to the embodiments and the examples, In the present specification, a numerical range expressed by “from X to Y” means a range including the numerals X and Y as the lower limit and the upper limit, respectively.
All the literatures and the description of PCT/JP2017/033366 as referred to herein are incorporated herein by reference.
The current-injection OSLD of the present invention contains at least a pair of electrodes, an optical resonator structure and one or more organic layers containing a light amplification layer composed of an organic semiconductor. The current-injection OSLD of the present invention is provided with a. constitution where the overlap between the distribution of exciton density and the electric field intensity distribution of the resonant optical mode during current injection is sufficient to emit laser light. The “constitution where the overlap between the distribution of exciton density and the electric field intensity distribution of the resonant optical mode during current injection is sufficient to emit laser light” is a constitution to enable laser oscillation, and means selection and combination of materials and structures to be described below.
The constitution and the characteristics of the present invention are described in detail hereinunder.
(Light Amplification Layer)
The light amplification layer to constitute the current-injection OSLD of the present invention includes an organic semiconductor compound containing a carbon atom but not containing a metal atom. Preferably, the organic semiconductor compound is composed of one or more atoms selected from the group consisting of a carbon atom, a hydrogen atom, a nitrogen atom, an oxygen atom, a sulfur atom, a phosphorous atom, and a boron atom. For example, there may be mentioned an organic semiconductor compound composed of a carbon atom, a hydrogen atom and a nitrogen atom. A preferred example of the organic semiconductor compound is a compound having at least one of a stilbene unit and a carbazole unit, and a more preferred example of the organic semiconductor compound is a compound having both of a stilbene unit and a carbazole unit. The stilbene unit and the carbazole unit may be substituted with a substituent such as an alkyl group or the like, or may be unsubstituted. Preferably, the organic semiconductor compound is a non-polymer not having a repeating unit. Preferably, the molecular weight of the compound is 1000 or less, for example, it may be 750 or less. The light amplification layer may contain 2 or more kinds of organic semiconductor compounds, but preferably contains only one kind of an organic semiconductor compound.
The organic semiconductor compound for use in the present invention may be selected from laser gain organic semiconductor compounds that enable laser oscillation when used in an organic light emitting layer of a photoexcitation organic semiconductor laser, One of the most preferable organic semiconductor compound is 4,4′-bis[(N-carbazole)styryl]biphenyl (BSBCz) (chemical structure in
The thickness of the light amplification layer to constitute the current-injection OSLD of the present invention is preferably 80 to 350 nm, more preferably 100 to 300 nm, even more preferably 150 to 250 nm.
(Other Layers)
The current-injection OSLD of the present invention may have an electron injection layer, a hole injection layer and others in addition to the light amplification layer. These may be organic layers or inorganic layers free from organic materials. In the case where the current-injection OSLD has two or more organic layers, it preferably has a laminate structure of organic layers alone not having any non-organic layer therebetween. In this case, the two or more organic layers may contain the same organic compound as in the light amplification layer. The performance of the current-injection OSLD tends to be better when the number of the heterointerfaces of the organic layers therein is smaller, and therefore, the number of the organic layers therein is preferably 3 or less, more preferably 2 or less, most preferably 1. In the case where the current-injection OSLD has 2 or more organic layers, preferably, the thickness of the light amplification layer is more than 50% of the total thickness of the organic layers, more preferably more than 60%, even more preferably more than 70%, When the current-injection OSLD has 2 or more organic layers, the total thickness of the organic layers may be, for example, 100 nm or more, 120 nm or more, or 170 or more, and may be 370 nm or less, 320 nm or less, or 270 nm or less. Preferably, the refractive index of the electron injection layer and the hole injection layer is smaller than the refractive index of the light amplification layer.
In the case where an electron injection layer is provided, a substance facilitating electron injection into the light amplification layer is made to exist in the electron injection layer. In the case where a hole injection layer is provided, a substance facilitating hole injection into the light amplification layer is made to exist in the hole injection layer, These substances may be an organic compound or an inorganic substance. For example, the inorganic substance for the electron injection layer includes an alkali metal such as Cs, etc., and the concentration thereof in the electron injection layer containing an organic compound may be, for example, 1% by weight more, or 5% by weight or more, or 10% by weight or more, and may be 40% by weight or less, or 30% by weight or less, The thickness of the electron injection layer may be, for example, 3 nm or more, 10 nm or more, or 30 nm or more, and may be 100 nm or less, 80 nm or less, or 60 nm or less.
As one preferred embodiment of the present invention, a current-injection OSLD provided with an electron injection layer and a light amplification layer as organic layers, and with a hole injection layer as an inorganic layer may be exemplified. The inorganic substance to constitute the hole injection layer includes a metal oxide such as molybdenum oxide, etc. The thickness of the hole injection layer may be, for example, 1 nm or more, 5 nm or more, or 10 nm or more, and may be 100 nm or less. 50 nm or less, or 20 nm or less,
(Optical Resonator Structure)
The current-injection OSLD of the present invention has an optical resonator structure. The optical resonator structure may be a one-dimensional resonator structure or a two-dimensional resonator structure. Examples of the latter include a circulator resonator structure, and a whispering gallery type optical resonator structure. A distributed feedback (DFB) structure and a distributed Bragg reflector (DBR) structure are also employable. For DFB, a mixed-order DEB grating structure is preferably employed. Namely, a mixed structure of DFB grating structures differing in point of the order relative to laser emission wavelength may be preferably employed. Specific examples thereof include an optical resonator structure composed of a second-order Bragg scattering region surrounded by the first-order Bragg scattering region and a mixed structure where a second-order Bragg scattering region and a first-order scattering region are formed alternately. For details of preferred optical resonator structures, specific examples to be given hereinunder may be referred to. As the optical resonator structure, the current-injection OSLD may be further provided with an external optical resonator structure
For example, the optical resonator structure may be formed preferably on an electrode. The material to constitute the optical resonator structure includes an insulating material such as SiO2, etc. For example, a grating structure is formed, the depth of the grating is preferably 75 nm or less, and is more preferably selected from a range of 10 to 75 nm. The depth may be, for example, 40 nm or more, or may be less than 40 nm.
(Electrode)
The current-injection OSLD of the present invention has a pair of electrodes. For light output, one electrode is preferably transparent. For the electrode, an electrode material generally used in the art may he appropriately selected in consideration of the work function thereof, etc. Preferred electrode materials include, though not limited thereto, Ag, Al, Au, Cu, ITO, etc.
(Preferred Current-Injection OSLD)
In the current-injection OSLD, excitons are generated by current excitation. The laser oscillation characteristics of the current-injection OSLD is improved by enlarging the overlap between the distribution region of the generated exciton density and the electric field intensity distribution of the resonant optical mode. Namely, when the exciton density overlaps with the optical resonant mode of the optical resonator structure, the laser oscillation characteristics can be thereby improved. The exciton density distribution and the electric field intensity distribution of the resonant optical mode can be controlled by changing the structure and the material of the current-injection OSLD. For example, by employing a current narrowing structure with grating or the like, and by controlling the depth and the period of the grating, the distributions can be controlled. By specifying or controlling the materials and the thickness of the light amplification layer, and also the materials and the thickness of an electron injection layer and a hole injection layer, if any, the distributions can also be controlled. Further, a more accurate distribution control is also possible in view of the conditions taken into consideration in the simulation calculation to be given below. Preferable current-injection OSLD has an overlap between the distribution of exciton density and the electric field intensity distribution of the resonant optical mode during current injection to an extent equal to or more than the overlap in the specific current-injection OSLD shown as a working example below.
In the current-injection OSLD of the present invention, preferably, the ratio of an electron mobility to a hole mobility in the organic optical gain layer is controlled to fall within a range of preferably 1/10 to 10/1, more preferably 1/5 to 5/1, still more preferably 1/3 to 3/1, still further more preferably 1/2 to 2/1. By controlling the ratio to fall within the range, the overlap between the exciton density distribution and the electric field intensity distribution of the resonant optical mode can be readily enlarged.
In the current-injection OSLD of the present invention, preferably, the excitons generated by current excitation do not substantially undergo annihilation. The loss by the exciton annihilation is preferably less than 10%, more preferably less than 5%, further more preferably less than 1%, still further more preferably less than 0.1%, still further more preferably less than 0.01%, and most preferably 0%.
Also preferably, the current-injection OSLD of the present invention shows no substantial polaron absorption loss at a lasing wavelength. In other words, preferably, there is no substantial overlap between the polaron absorption spectrum and the emission spectrum of the organic semiconductor laser. The loss by the polaron absorption is preferably less than 10%, more preferably less than 5%, further more preferably less than 1%, still further more preferably less than 0.1%, still further more preferably less than 0.01%, and most preferably 0%.
Preferably, the oscillation wavelength of the current-injection OSLD of the present invention does not substantially overlap with the absorption wavelength region of an excited state, a radical cation, or a radical anion. Absorption in them may be caused by singlet-singlet, triplet-triplet, or polaron absorption. The loss by absorption in an excited state is preferably less than 10%, more preferably less than 5%, further more preferably less than 1%, still further more preferably less than 0.1%, still further more preferably less than 0.01%, and most preferably 0%.
Preferably, the current-injection OSLD of the present invention is free from a triplet quencher.
(Production Method for Current-Injection OSLD)
The present invention also provides a production method for the current-injection OSLD where the current-injection OSLD is designed and produced so that the overlap between the distribution of the exciton density generated by current excitation and the electric field intensity distribution of the resonant optical mode can be large, in designing it, simulation is carried out on the basis of various conditions, for example, the depth and the period of grating, and the constituent material and the thickness of the light amplification layer, the electron injection layer and the hole injection layer, etc., and the overlap between the excitors density distribution and the electric field intensity distribution of the resonant optical mode is thereby evaluated. As a result of simulation under various conditions, ones with no problem in production are selected from those where the overlap is evaluated to be large, and the thus-selected ones may be actually produced. Accordingly, current-injection OSLDs having excellent laser oscillation characteristics can be efficiently provided.
In designing the above, a design program for current-injection OSLDs having a function of so designing them in such a manner that the overlap between the distribution of the excitons to be generated by current excitation and the electric field intensity distribution of the resonant optical mode can he enlarged may be previously formed and used. The program can be stored in a media such as a hard disc and a compact disc.
Also, the present invention provides a method for improving the laser oscillation characteristics of designed or existing current-injection OSLDs. The overlap between the excitors density distribution and the electric field intensity distribution of the resonant optical mode in designed or existing current-injection OSLDs is evaluated according to simulation calculation, and the distribution overlap in the case where the materials and the structure have been changed is also calculated through the same simulation calculation, and accordingly, current-injection OSLDs that have improved laser oscillation characteristics can be thereby provided.
Hereinunder the present invention will be described concretely with reference to the preferred embodiment shown in
The properties of optically pumped organic semiconductor lasers (OSLs) have dramatically improved in the last two decades as a result of major advances in both the development of high-gain organic semiconductor materials and the design of high-quality-factor resonator structures1-5. The advantages of organic semiconductors as gain media for lasers include their high photoluminescence (PL) quantum yields, large stimulated emission cross sections, and broad emission spectra across the visible region along with their chemical tunability and ease of processing. Owing to recent advances in low-threshold distributed feedback (DFB) OSLs, optical pumping by electrically driven nanosecond-pulsed inorganic light-emitting diodes was demonstrated, providing a route toward a new compact and low-cost visible laser technology6. However, the ultimate goal is electrically driven organic semiconductor laser diodes (OSLDs). In addition to enabling the full integration of organic photonic and optoelectronic circuits, the realization of OSLDs will open novel applications in spectroscopy, displays, medical devices (such as retina displays, sensors, and photodynamic therapy devices), and LIFI telecommunications.
The problems that have prevented the realization of lasing by the direct electrical pumping of organic semiconductors are mainly due to the optical losses from the electrical contacts and the triplet and polaron losses taking place at high current densities4,5,7-9. Approaches that have been proposed to solve these fundamental loss issues include the use of triplet quenchers10-12 to suppress triplet absorption losses and singlet quenching by singlet-triplet exciton annihilation as well as the reduction of the device active area13 to spatially separate where exciton formation and exciton radiative decay occur and minimize the polaron quenching processes. However, even with the advances that have been made in organic light-emitting diodes (OLEDs) and optically pumped organic semiconducting DM lasers5, a current-injection OSLD has still not been conclusively demonstrated.
Previous studies have suggested that current densities over a few kA/cm2 would be required to achieve lasing from an OSLD if additional losses associated with the electrical pumping were completely suppressed14. One of the most promising molecules for the realization of an OSLD is 4,4′-bis[(N-carbazole)styryl]biphenyl (BSBCz) (chemical structure in
The architecture and fabrication of the OSLDs developed in this study are schematically represented in
The scanning electron tnicroscopy (SEM) images in
The OSLDs fabricated in this work have a simple inverted OLED structure of ITO (100 nm)/20 wt % Cs:BSBCz (60 nm)/BSBCz (150 nm)/MoO3 (10 nm)/Ag (10 nm) /Al (90 nm) with the energy levels as shown in
OLEDs, more intense emission can be seen from the second-order DFB grating regions, which were specifically designed to promote vertical light outcoupling, in the OSLDs (
The maximum current densities before device breakdown of the reference OLEDs increased from 6.6 A cm−2 under DC operation to 5.7 kA cm−2 under pulse operation because of reduced. Joule heating with pulse operation13,27. Under DC operation, all of the devices exhibited maximum ηEQE higher than 2% at low current densities and strong efficiency rolloff at current densities higher than 1 A cm −2, which is presumably due to thermal degradation of the devices. On the other hand, efficiency roll off in the OLEDs under pulse operation (
While the EL spectra of the OLEDs are similar to the steady-state PL spectrum of a neat BSBCz film (
The output intensity and full-width-at-half-maximum (FWHM) of an OSLD are plotted in
The slope efficiency of the output intensity abruptly changes with increasing current and can be used to determine a threshold of 600 A cm −2 (8.1 mA). Above 4.0 kA cm−2, the output intensity decreases with increasing current, presumably because of a strong increase of temperature leading to the onset of device breakdown, but the emission spectrum remains extremely sharp. This increase and subsequent decrease is consistent with the ηEQU-J curve. The maximum output power measured with a power meter placed in front of an OSLD at a distance of 3 cm away from the ITO glass substrate (
Beam polarization and shape were characterized to provide further evidence that this is lasing9. The output beam of an OSLD is strongly linearly polarized along the grating pattern (
Before the inventors can claim lasing, several phenomena that have been misinterpreted as lasing in the past must be ruled out as the cause of the observed behavior9. The emission from the inventors' OSLDs is detected in the direction normal to the substrate plane and shows a clear threshold behavior, so line narrowing arising from edge emission of waveguided modes without laser amplification can be dismissed20,28,29. ASE can appear similar to lasing, but the FWHM in OSLDs of the invention (<0.2 nm) is much narrower than the typical ASE linewidth of an organic thin film (a few nanometers) and is consistent with the typical FWHM of an optically pumped organic DFB lasers (<1 nm)5. A very narrow emission spectrum obtained by inadvertently exciting an atomic transition in ITO has also been mistaken for emission from an organic layer30. However, the emission peak wavelength of the OSLD in
If this truly is lasing from a DFB structure, then the emission of the OSLD should be characteristic of the resonator modes and the output should be very sensitive to any modifications of the laser cavity. Thus, OSLDs with different DFB geometries, labeled OSLD-1 through OSLD-5 (Table 1), were fabricated and characterized (
To verify that the lasing threshold of the electrically driven OSLD is consistent with that obtained by optical pumping, the lasing characteristics of an OSLD (OLSD-6) optically pumped through the ITO side using a N2 laser (excitation wavelength of 337 nm) delivering 3.0-ns pulses were measured (
These results suggest that the additional losses (including exciton annihilation, triplet and polaron absorption, quenching by the high electric field, and Joule heating) generally taking place in OLEDs at high current densities34 have been nearly suppressed in the BSBCz OSLDs. This is fully consistent with the fact that EL efficiency rolloff was not observed in the OSLDs under intense pulse electrical excitation. The suppression of losses can be explained based on the properties of BSBCz and the devices. As previously mentioned, BSBCz films do not show significant triplet losses (
Electrical and optical simulations of the devices were performed to further confirm that current-injection lasing is occurring in the OSLDs (
Light outcoupling from the second-order grating and light trapping in the ITO layer, which forms a waveguide loss, are clearly visible in the simulated electric field distribution E(x, y) of the optical field at the calculated resonant wavelength λ0=483 nm in the OSLD (
In conclusion, the present invention proves that lasing from a current-driven organic semiconductor is possible through proper design and choice of the resonator and organic semiconductor to suppress losses and enhance coupling. The lasing demonstrated here has been reproduced in multiple devices and fully characterized to exclude other phenomena that could be mistaken for lasing. The results fully support the claim that this is the first observation of electrically pumped lasing in organic semiconductors. The low losses in BSBCz are integral to enabling lasing, so the development of strategies to design new laser molecules with similar or improved properties is an important next step. This report opens new opportunities in organic photonics and serves as a basis for the future development of an organic semiconductor laser diode technology that is simple, cheap, and tunable and can enable fully and directly integrated organic-based optoelectronic platforms.
(Device Fabrication)
Indium tin oxide (IT(.3)-coated glass substrates (100-nm-thick ITO, Atsugi Micro Co.) were cleaned by ultrasonication using neutral detergent, pure water, acetone, and isopropanol followed by UV-ozone treatment. A 100-nm-thick layer of SiO2, which would become the DFB grating, was sputtered at 100° C. onto the ITO-coated glass substrates. The argon pressure during the sputtering was 0.66 Pa. The RF power was set at 100 W. Substrates were again cleaned by ultrasonication using isopropanol followed by UV-ozone treatment. The SiO2 surfaces were treated with hexamethyldisilazane (HMDS) by spin coating at 4,000 rpm for 15 s and annealed at 120° C. for 120 s. A resist layer with a thickness of around 70 nm was spin-coated on the substrates at 4,000 rpm for 30 s from a ZEP520A-7 solution (ZEON Co.) and baked at 180° C. for 240 s.
Electron beam lithography was performed to draw grating patterns on the resist layer using a JBX-5500SC system (JEOL) with an optimized dose of 0.1 nC cm−2. After the electron beam irradiation, the patterns were developed in a developer solution (ZED-N50, ZEON Co.) at room temperature. The patterned resist layer was used as an etching mask while the substrate was plasma etched with CHF3 using an EIS-200ERT etching system (ELIONIX). To completely remove the resist layer from the substrate, the substrate was plasma-etched with O2 using a FA-1EA etching system (SAMCO). The etching conditions were optimized to completely remove the SiO2 from the grooves in the DFB until the ITO was exposed. The gratings formed on the SiO2 surfaces were observed with SEM (SU8000, Hitachi) (
The DFB substrates were cleaned by conventional ultrasonication. Organic layers and a metal electrode were then vacuum-deposited by thermal evaporation under a. pressure of 1.5×10−4 Pa with a total evaporation rate of 0.1-0.2 nm s−1 on the substrates to fabricate OSLDs with the structure indium tin oxide (ITO) (100 nm)/20 wt % BSBCz:Cs (60 nm)/BSBCz (150 nm)/MoOs (10 nm)/Ag (10 nm)/Al (90 nm), The SiO2 layers on the ITO surface acted as insulators in addition to a DFB grating. Therefore, the current flow regions of the OLEDs were limited to the DFB regions where BSBCz is in direct contact with ITO. Reference OLEDs with an active area of 30×45 μm were also prepared with same current flow region.
(Device Characterization)
All the devices were encapsulated in a nitrogen-filled glove box using glass lids and UV-cured epoxy to prevent any degradation resulting from moisture and oxygen. Current density-voltage-ηEQE (J-V-ηEQE) characteristics (DC) of the OSLDs and OLEDs were measured using an integrating sphere system (A10094, Hamamatsu Photonics) at room temperature. For pulse measurements, rectangular pulses with a pulse width of 400 ns, pulse period of 1 ms, repetition frequency of 1 kHz, and varying peak currents were applied to the devices at ambient temperature using a pulse generator (NF, WF1945). Using these conditions, the inventors could apply to a properly working OSLD from a good batch roughly 50 pulse at 1 kA cm−2 (near threshold), 20 pulses at 2 kA cm−2, and 10 pulse at 3 kA cm −2 before electrical breakdown. Approximately 500 devices were fabricated in this work with a yield of about 5%, The J-V-luminance characteristics under pulse driving were measured with an amplifier (NF, HSA4101) and a photomultiplier tube (PMT) (C9525-02, Hamamatsu Photonics). Both the PMT response and the driving square wave signal were monitored on a multi-channel oscilloscope (Agilent Technologies, MS06104A). The I1EQE was calculated by dividing the number of photons, which was calculated from the PMT-response EL intensity with a correction factor, by the number of injected electrons, which was calculated from the current. Output power was measured using a laser power meter (OPHIR Optronics Solution Ltd., StarLite 7Z01565). To measure the spectra, emitted laser light for both optically and electrically pumped OSLDs was collected normal to the device surface with an optical fiber connected to a multichannel spectrometer (PMA-50, Hamamatsu Photonics) and placed 3 cm away from the device. The beam profile of the OSLDs was checked by using a CCD camera (beam profiler WimCatriD-LCM, DataRay). For characteristics of OSLD-6 and OSL under optical pumping, pulsed excitation light from a nitrogen-gas laser (NL100, N2 laser, Stanford Research System) was focused in a 6×10−3 cm2 area of the device through a lens and slit. The excitation wavelength was 337 nm, pulse width was 3 ns, and repetition rate was 20 Hz. The excitation light was incident upon the devices at around 20° with respect to the normal to the device plane, Excitation intensities were controlled using a set of neutral density filters. Steady-state PL spectroscopy was monitored using a spectrofluorometer (FP-6500, JASCO) in
The lower limit for the electrical lasing threshold was determined from the optical threshold using the equation
where Pth, λ, h, c, ηout, φPL, ηEQE, and e are the optical pumping threshold and wavelength, Planck constant, speed of light, device outcoupling efficiency, photoluminescence quantum yield of BSBCz, external quantum efficiency of a BSBCz OSLD, and elementary charge, respectively. This equation simply solves for the current density at which the rate of singlets generated under electrical excitation should be equal to that under an optical excitation of Pth, This equation does not account for additional loss mechanisms that occur under electrical excitation at high current densities. The inventors used an ηout of 20% and on of 76% (from Table 2). Iterating over several values in
(Device Modeling and Parameters)
The optical simulation of the resonant DFB cavity was performed using Comsol Multiphysics 5.2a software, The Helmholtz equation was solved for every frequency using the Finite Element Method (FEM) in the Radio Frequency module of Comsol software. Each layer was represented by its complex refractive index and thickness. The computation domain was limited to one supercell composed of a second-order grating surrounded by first-order gratings. The Floquet periodic boundary conditions were applied for lateral boundaries, and scattering boundary conditions were used for the top and bottom domains. Only TE modes were considered since TM modes are suppressed because they experience more losses than the TE modes (due to metal absorption).
The charge transport through the OSLD was described using the two-dimensional time-independent drill-diffusion equation coupled to the Poisson equation and the continuity equation for charge carriers using the Technology Computer Aided Design (TCAD) software from Silvaco. The electron and hole concentrations were expressed using parabolic density of states (DOS) and Maxwell-Boltzmann statistics. A Gaussian distribution was used to model the trap distribution within the organic semiconductor37. The charge carrier mobilities were assumed to be field dependent and have a Pool-Frenkel form38,39. In this model the energetic disorder was not taken into account, so the inventors assumed the validity of Einstein's relation to calculate the charge carrier diffusion constant from the charge carrier mobility. The recombination rate R was given by the Langevin model40. The continuity equation for singlet excitors is solved by taking into account the excitor diffusion, the radiative and non-radiative processes.
Experimental data for hole-only and electron-only devices (energy diagrams and structures in
where L is cavity length (only the second-order grating region) and d is the active film thickness.
Near- and far-field patterns were simulated using the OptiFDTD software package (Opti wave). Near-field patterns were simulated using the FDTD method. From these patterns, the Fraunhofer approximation was used to calculate the far-field pattern. Perfect matched layer and periodic conditions were used as the boundary conditions.
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20220037860 A1 | Feb 2022 | US |
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