BACKGROUND
As is known, sensors are used to perform various functions in a variety of applications. Some sensors include one or magnetic field sensing elements, such as a Hall effect element or a magnetoresistive element, to sense a magnetic field associated with proximity or motion of a target object, such as a ferromagnetic object in the form of a gear or ring magnet, or to sense a current, as examples. Sensor integrated circuits are widely used in automobile control systems and other safety-critical applications. There are a variety of specifications that set forth requirements related to permissible sensor quality levels, failure rates, and overall functional safety.
SUMMARY
According to aspects of the disclosure, a current sensor system is provided, comprising: a plurality of conductors that are integrated into a substrate, each of the plurality of conductors having a respective first through-hole formed therein; and a plurality of current sensors, each of the plurality of current sensors being disposed on the substrate, each of the plurality of current sensors being disposed above or below the respective first through-hole of a different one of the plurality of conductors, wherein the substrate includes a plurality of conductive traces, each of the plurality of conductive traces being coupled to at least one of the plurality of current sensors.
A current sensor system is provided, comprising: a plurality of conductors, each of the plurality of conductors having a respective notched portion and a respective first through-hole formed in the respective notched portion; and a plurality of current sensors, each of the plurality of current sensors being disposed on above or below the respective first through-hole of a different one of the plurality of conductors.
According to aspects of the disclosure, a method is provided for determining current in one or more of a plurality of conductors, the method comprising: providing a substrate including a plurality of conductors, each of the plurality of conductors having a respective first through-hole formed therein; and providing a plurality of current sensors on the substrate, each of the plurality of current sensors being provided above or below the respective first through-hole of a different one of the plurality of conductors.
BRIEF DESCRIPTION OF THE DRAWINGS
The foregoing features may be more fully understood from the following description of the drawings in which:
FIG. 1 is a diagram of an example of a system, according to aspects of the disclosure;
FIG. 2 is a diagram of an example of a current sensor, according to aspects of the disclosure;
FIG. 3 is a diagram of an example of a current sensor, according to aspects of the disclosure;
FIG. 4 is a perspective view of an example of a system, according to aspects of the disclosure;
FIG. 5A is a planar view of the system of FIG. 4, according to aspects of the disclosure;
FIG. 5B is a planar view of the system of FIG. 4, according to aspects of the disclosure;
FIG. 5C is a planar view of a portion the system of FIG. 4, according to aspects of the disclosure;
FIG. 5D is a partial view of a conductor, according to aspects of the disclosure;
FIG. 6A is a diagram of an example of a conductor, according to aspects of the disclosure;
FIG. 6B is a diagram illustrating the use of the conductor of FIG. 6A, according to aspects of the disclosure;
FIG. 7A is a diagram of an example of a conductor, according to aspects of the disclosure;
FIG. 7B is a diagram illustrating the use of the conductor of FIG. 7A, according to aspects of the disclosure;
FIG. 8A is a diagram of an example of a conductor, according to aspects of the disclosure;
FIG. 8B is a diagram illustrating the use of the conductor of FIG. 8A, according to aspects of the disclosure;
FIG. 9A is a diagram of an example of a conductor, according to aspects of the disclosure;
FIG. 9B is a diagram illustrating the use of the conductor of FIG. 9A, according to aspects of the disclosure;
FIG. 10A is a diagram of an example of a conductor, according to aspects of the disclosure;
FIG. 10B is a diagram illustrating the use of the conductor of FIG. 10A, according to aspects of the disclosure;
FIG. 10C is a diagram illustrating an alternative configuration of the conductor of FIG. 10A, according to aspects of the disclosure; and
FIG. 10D is a diagram illustrating an alternative configuration of the conductor of FIG. 10A, according to aspects of the disclosure.
DETAILED DESCRIPTION
FIG. 1 is a diagram of an example of a system 100, according to aspects of the disclosure. As illustrated, the system 100 may include a controller 101 and a power source 102 that is coupled to an electric motor 104 via an interface 106.
The interface 106 may include a printed circuit board (PCB) 107. The PCB 107 may include conductors 108A-C and conductive traces 112A-C. Each of the conductive traces 112A-C may include one or more metal layers (or layers of another conductive material) that are at least partially encapsulated in a dielectric material of the PCB 107. Each of the conductors 108A-C may also include one or more metal layers (or layers of another conductive material) that are at least partially encapsulated in the dielectric material of the PCB 107. In some implementations, the conductive traces 112A-C may differ in one or more characteristics from the conductors 108A-C. According to the example of FIG. 1, each of the conductors 108A-C may be configured to carry higher currents than any of the conductive traces 112-C. Additionally or alternatively, in some implementations, each of the conductors 108A-C may have a larger cross-section than any of the conductive traces 112-C. Additionally or alternatively, in some implementations, each of the conductors 108A-C may have larger width and/or thickness than any of the conductive traces 112-C.
Each of the conductors 108A-C may be used to deliver, to the electric motor 104, current that is supplied by the power source 102. The controller 101 may be coupled to the current sensors 110A-C via the conductive traces 112A-C. The controller 101 may use the current sensors 110A-C to measure the level of the current that is being supplied by the power source 102 to the electric motor 104 and make adjustments to the operation of the power source 102 and/or the electric motor 104 in response to the measurements. Specifically, the controller 101 may use current sensor 110A to measure the current carried by conductor 108A, current sensor 110B to measure current carried by conductor 108B, and current sensor 110C to measure current carried by conductor 108C. Although in the example of FIG. 1 the interface 106 consists of three conductors 108, alternative implementations are possible in which the interface 106 consists of any number of conductors 108 (e.g., only one conductor, only two conductors, five conductors, etc.). Although in the example of FIG. 1 the interface 106 is used to electrically couple a motor to a power source, it will be understood that the present disclosure is not limited to any specific application of the interface 106.
In some implementations, any of conductors 108A-C may have a width between 8 mm and 30 mm, whereas each of the conductive traces 112A-C may have a width between 0.1 mm and 1 mm. Moreover, each of the conductors 108A-C may include one or more layers (e.g., 1-10 layers, etc.), each having thickness between 20 μm to 200 μm. As can be readily appreciated that conductors 108A-C may be adapted to carry much higher currents than the conductive traces 112A-C. By way of example, in some implementations, each of conductors 108A-C may be configured to carry current in the range of 50-500 A, whereas each of the conductive traces may be configured to carry current in the range of 0.01 A-5 A. As noted above, in some implementations, both the conductors 108A-C and the conductive traces 112A-C may be embedded in the PCB 107. In some implementations, both the conductors 110A-C and the conductive traces 112A-C may be formed by using standard lithographic techniques that are normally applied in PCB manufacturing.
FIG. 2 is a diagram of an example of a current sensor 110, according to aspects of the disclosure. As the numbering suggests, the current sensor 110 may be the same or similar to any of the current sensors 110A-C, which are shown in FIG. 1. It will be understood that FIG. 2 is provided as an example only, and the interface 106 is not limited to using any specific type of current sensor.
Features of current sensor 110 include a lead frame 202 and a die 208 supporting magnetic field sensing elements 210A and 210B. Lead frame 202 includes a die attach paddle 204 and a plurality of leads 206. Die 208 is attached to die attach paddle 204, as may be achieved with an adhesive layer 207. While a single semiconductor die 208 is shown, the current sensor 110 can include more than one die, with each such die supporting magnetic field sensing element(s) and/or supporting circuitry. Additional features of the example current sensor 110 can include one or more cutouts, slits, slots or apertures 214A, 214B in the paddle 204 to reduce eddy currents and mold material 216 to enclose die attach paddle 204, die 208, magnetic field sensing elements 210A and 210B and portions of leads 206, shown. Aspects of current sensor 110 are shown and described in U.S. Pat. No. 10,481,181, entitled “Systems and Methods For Current Sensing” and issued on Nov. 19, 2019, which patent is hereby incorporated herein by reference in its entirety. In use, current sensor 110 is configured to be positioned proximate to a conductor, such as any of the conductors 108A-C, which are shown in the configuration of FIG. 1. Although in the example of FIG. 2, the sensor 110 includes two magnetic field sensing elements, alternative implementations are possible in which the sensor 110 includes only one magnetic field sensing element or more than two magnetic field sensing elements.
FIG. 3 is a circuit diagram illustrating one possible implementation of the electronic circuitry of the sensor 110.
The sensor 110 may be configured to output a signal VOUT that is proportional to ΔB=BR−BL where BR represents magnetic field incident on one of the magnetic field sensing elements 210A-B and BL represents magnetic field incident on the other one of the magnetic field sensing elements 210A-B. The sensor output VOUT is also affected by the sensitivity, α, of the signal path and can be represented as follows:
VOUT=α×ΔB (1)
The relationship between the conductor current to be measured and the differential field ΔB can be represented by a coupling coefficient, K(f) as follows:
ΔB=K(f)×I (2)
It will be appreciated that coupling coefficient K(f) corresponds to coupling (e.g., transfer of energy, etc.) between a given current sensor and varies with frequency. As is discussed further below, the design of the conductors 108A-C helps reduce the variation of the coupling coefficient K(f) with respect to the frequency of the current that is being transmitted over conductors 108A-C.
The sensor 110 may include a VCC (supply voltage) pin 301, a VOUT (output signal) pin 302. The VCC pin 301 is used for the input power supply or supply voltage for the current sensor 110. A bypass capacitor, CB, can be coupled between the VCC pin 301 and ground. The VCC pin 301 can also be used for programming the current sensor 110. The VOUT pin 302 is used for providing the output signal VOUT to circuits and systems (not shown) such as controller 101 (FIG. 1) and can also be used for programming. An output load capacitance CL is coupled between the VOUT pin 302 and ground. The example current sensor 110 can include a first diode D1 coupled between the VCC pin 301 and chassis ground and a second diode D2 coupled between the VOUT pin 302 and chassis ground.
The driver circuit 320 may be configured to drive the magnetic field sensing elements 210A and 210B. Magnetic field signals generated by the magnetic field sensing elements 210A and 210B are coupled to a dynamic offset cancellation circuit 312, which is further coupled to an amplifier 314. The amplifier 314 is configured to generate an amplified signal for coupling to the signal recovery circuit 316. Dynamic offset cancellation circuit 312 may take various forms including chopping circuitry and may function in conjunction with offset control circuit 334 to remove offset that can be associated with the magnetic field sensing elements 210A-B and/or the amplifier 314. For example, offset cancellation circuit 312 can include switches configurable to drive the magnetic field sensing elements (e.g., Hall plates) in two or more different directions such that selected drive and signal contact pairs are interchanged during each phase of the chopping clock signal and offset voltages of the different driving arrangements tend to cancel. A regulator (not shown) can be coupled between supply voltage VCC and ground and to the various components and sub-circuits of the sensor 110 to regulate the supply voltage.
A programming control circuit 322 is coupled between the VCC pin 301 and EEPROM and control logic circuit 330 to provide appropriate control to the EEPROM and control logic circuit. EEPROM and control logic circuit 330 determines any application-specific coding and can be erased and reprogrammed using a pulsed voltage. A sensitivity control circuit 324 can be coupled to the amplifier 314 to generate and provide a sensitivity control signal to the amplifier 314 to adjust a sensitivity and/or operating voltage of the amplifier 314. An active temperature compensation circuit 332 can be coupled to sensitivity control circuit 324, EEPROM and control logic circuit 330, and offset control circuit 334. The offset control circuit 334 can generate and provide an offset signal to a push/pull driver circuit 318 (which may be an amplifier) to adjust the sensitivity and/or operating voltage of the driver circuit 318. The active temperature compensation circuit 332 can acquire temperature data from EEPROM and control logic circuit 330 via a temperature sensor 315 and perform necessary calculations to compensate for changes in temperature, if needed. Output clamps circuit 336 can be coupled between the EEPROM and control logic circuit 330 and the driver circuit 318 to limit the output voltage and for diagnostic purposes.
FIG. 4 is a perspective view of the interface 106, according to aspects of the disclosure. As illustrated, the conductor 108A may include a through-hole 407A formed therein, and the current sensor 110A may be disposed above or below the through-hole. The sensor 110A may be mounted on the PCB 107 and the leads 206 of the sensor 110A may be electrically coupled to the conductive traces 112A. A notch 401A may be formed in the conductor 108A on one side of the through-hole 407A. And a notch 401B may be formed in the conductor 108A on the other side of the through-hole 407A. In some implementations, notches 401A-B may be altogether omitted from the conductor 108A.
The conductor 108B may include a through-hole 407B formed therein, and the current sensor 110B may be disposed above or below the through-hole, as shown. The sensor 110B may be mounted on the PCB 107 and the leads 206 of the sensor 110B may be electrically coupled to the conductive traces 112B. A notch 403A may be formed in the conductor 108B on one side of the through-hole 407B. And a notch 403B may be formed in the conductor 108B on the other side of the through-hole 407B. In some implementations, notches 403A-B may be altogether omitted from the conductor 108B.
The conductor 108C may include a through-hole 407C formed therein, and the current sensor 110C may be disposed above or below the through the hole, as shown. The sensor 110C may be mounted on the PCB 107 and the leads 206 of the sensor 110C may be electrically coupled to the conductive traces 112C. A notch 405A may be formed in the conductor 108C on one side of the through-hole 407C. And a notch 405B may be formed in the conductor 108C on the other side of the through-hole 407C. In some implementations, notches 405A-B may be altogether omitted from the conductor 108C.
The PCB 107 may have a main surface 406. The conductor 108A may have a main surface 408A that is substantially parallel to the main surface 406 of the PCB 107. The conductor 108B may have a main surface 408B that is substantially parallel to the main surface 406 of the PCB 107. And the conductor 108C may also have a main surface 408C that is substantially parallel to the main surface 406 of the PCB 107.
FIG. 5A is a planar top-down view of the interface 106, with the sensors 110A-C removed. In the example of FIG. 5A, each of the through-holes 407A-C is centered on an axis A-A. However, alternative implementations are possible in which one or more of the through-holes 407A-C are offset from axis A-A. For instance, one of the through-holes 407A-C may be situated to the left of axis A-A and another one of the through-holes 407A-C may be situated to the right of axis A-A.
In the example of FIG. 5A, each of the notches 401A-B is centered on axis A-A. However, alternative implementations are possible in which one or more of the notches 401A-B are offset from axis A-A to accommodate the placement of additional hardware on the PCB 107. For instance, one of the notches 401A-B may be formed to the left of axis A-A and the other one of the notches 401A-B may be formed to the right of axis A-A. In the example of FIG. 5A, notch 401A has the same size and shape as notch 401B. However, alternative implementations are possible in which notch 401A has a different size and/or shape than notch 401B.
In the example of FIG. 5A, each of the notches 403A-B is centered on axis A-A. However, alternative implementations are possible in which one or more of the notches 403A-B are offset from axis A-A to accommodate the placement of additional hardware on the PCB 107. For instance, one of the notches 403A-B may be formed to the left of axis A-A and the other one of the notches 403A-B may be formed to the right of axis A-A. In the example of FIG. 5A, notch 403A has the same size and shape as notch 403B. However, alternative implementations are possible in which notch 403A has a different size and/or shape than notch 403B.
In the example of FIG. 5A, each of the notches 405A-B is centered on axis A-A. However, alternative implementations are possible in which one or more of the notches 405A-B are offset from axis A-A to accommodate the placement of additional hardware on the PCB 107. For instance, one of the notches 405A-B may be formed to the left of axis A-A and the other one of the notches 405A-B may be formed to the right of axis A-A. In the example of FIG. 5A, notch 405A has the same size and shape as notch 405B. However, alternative implementations are possible in which notch 405A has a different size and/or shape than notch 405B. In some implementations providing the notches 401-405 on the conductors 108A-C, respectively, may help reduce cross-talk interference between neighboring ones of the conductors 108A-C. Cross talk between two neighboring conductors 108 may occur when the sensor 110 that is mounted over one of the conductors 108 senses a magnetic field that is generated by the other conductor 108.
FIG. 5B is a planar top-down view of the interface 106, with the sensors 110A-C present. As illustrated in FIG. 5B, the sensor 110A may have an axis of maximum sensitivity S1-S1 that is substantially perpendicular to the length and width of the conductor 108A. The sensor 110B may have an axis of maximum sensitivity S2-S2 that is substantially perpendicular to length and width of the conductor 108B. The sensor 110C may have an axis of maximum sensitivity S3-S3 that is substantially perpendicular to length and width of the conductor 108C. The phrase “substantially perpendicular” as used throughout the disclosure shall mean “within 5 degrees of being perpendicular.” It will be understood that the present disclosure is not limited to any specific orientation of the axis of maximum sensitivity of any of the sensors 110A-C for as long as the sensor is able to sense the level of the current flowing through its respective conductor 108.
FIG. 5C is a partial planar top-down view of the conductors 108A-C, according to aspects of the disclosure. As illustrated in FIG. 5C, through-hole 407A (and optionally the notches 401A-B) may define legs 411A and 411B in the conductor 108A. Legs 411A-B are denoted by dashed rectangles in FIG. 5C. Legs 411A and 411B, according to the present example, have the same width. However, alternative implementations are possible in which leg 411A has a different width than leg 411B. The distance between legs 411A and 411B may be selected, such that it is large enough to avoid the creation of eddy currents between the legs 411A and 411B, while ensuring that the coupling coefficient K(f) between the legs 411A-B and the sensor 110 is large enough to meet the specification of the sensor 110A for reliable operation. In some respects, decreasing the width of the conductor 108A by forming legs 411A-B may help reduce the variability of the coupling coefficient K(f) with respect to the frequency of the current that is carried over the conductor 108A.
Through-hole 407B (and optionally the notches 403A-B) may define legs 413A and 413B in the conductor 108B. Legs 413A-B are denoted by dashed rectangles in FIG. 5C. Legs 413A and 413B, according to the present example, have the same width. However, alternative implementations are possible in which leg 413A has a different width than leg 413B. The distance between legs 413A and 413B may be selected, such that it is large enough to avoid the creation of eddy currents between the legs 413A and 413B, while ensuring that the coupling factor K(f) between the legs 413A-B and the sensor 110B is large enough to meet the specification of the sensor 110B for reliable operation. In some respects, decreasing the width of the conductor 108B by forming legs 413A-B may help reduce the variability of the coupling coefficient K(f) with respect to the frequency of the current that is carried over the conductor 108B.
Through-hole 407C (and optionally the notches 405A-B) may define legs 415A and 415B in the conductor 108C. Legs 415A-B are denoted by dashed rectangles in FIG. 5C. Legs 415A and 415B, according to the present example, have the same width. However, alternative implementations are possible in which leg 415A has a different width than leg 415B. The distance between legs 415A and 415B may be selected, such that it is large enough to avoid the creation of eddy currents between the legs, while ensuring that the coupling factor K(f) between legs 415A-B and the sensor 110C is large enough to meet the specification of the sensor 110C for reliable operation. In some respects, decreasing the width of the conductor 108C by forming legs 415A-B may help reduce the variability of the coupling coefficient K(f) with respect to the frequency of the current that is carried over the conductor 108C.
In some respects, the increase in resistance of the conductor 108A-C, which results from reducing the width of the conductors 108A-C (at legs 411-415 respectively) may be calculated by using Equation 3 below:
Dimensions W, S, Ls, NL, WT are shown in FIG. 5D. In addition, T is the thickness of any of conductors 108A-C. In implementations in which a conductor 108 includes multiple layers, the thickness of the conductor 108 may be equal to the sum of the thicknesses of the conductor's constituent layers. The thickness of each 108A-C may be a dimension that is perpendicular to both of dimensions NL and W. Although FIG. 5D shows a partial view of conduction 108A, it will be understood that conductors 108B and 108C may have a similar configuration. In one example ρ=2e-8 Ωm. Additionally or alternatively, in some implementations, dimensions W, T, S, Ls, NL, WT may have the following values: W=25 mm, T=0.5 mm, S=5 mm, Ls=5 mm, NL=20 mm, and WT=9 mm. In some respects, Equation 3 illustrates that introducing a respective through-hole in each of the conductors 108A-C to form two separate legs results in a smaller increase in resistance of the conductors 108A-C in comparison to similar techniques that rely solely on notching.
FIGS. 6A-B illustrate an example of the conductor 108A, in accordance with an alternative implementation. FIGS. 6A-B illustrate that in some implementations, the conductor 108A may include only one notch (e.g., notch 401). Although FIGS. 6A-B show the conductor 108A only, it will be understood that in some implementations, any or all of conductors 108B-C may have the same configuration.
FIGS. 7A-B illustrate an example of the conductor 108A, in accordance with an alternative implementation. FIGS. 7A-B illustrate that in some implementations the conductor 108A may be provided with an additional through-hole 707A, as well as an additional sensor 710A that is mounted over the through-hole 707A. The sensor 710A may be the same or similar to the sensor 110A. In some implementations, the sensor 710A may have a function that is redundant to that of the sensor 110A and it may be provided to increase the reliability of the interface 106. For instance, the sensor 710A may be provided to achieve a higher Automotive Safety Integrity Level (ASIL) rating of the interface 106. According to the example of FIGS. 7A-B, the through-holes 407A and 707A are centered on an axis B-B, which extends along the width W of the conductor 108A. However, alternative implementations are possible in which at least one of the through-holes 407A and 707B is offset from the axis B-B. For instance, through-hole 407A may be formed to the left of axis B-B and through-hole 707A may be formed to the right of axis B-B. According to the example of FIGS. 7A-B, through-holes 407A and 707A are the same size and shape. However, alternative implementations are possible in which the through-holes 407A and 707A have different shapes and/or sizes. Although FIGS. 7A-B show the conductor 108A only, it will be understood that in some implementations, any or all of conductors 108B-C may have the same configuration.
FIGS. 8A-B illustrate an example of the conductor 108A, in accordance with an alternative implementation. FIGS. 8A-B illustrate that in some implementations, the notches 401A and 401B of the conductor 108A may have different shapes and sizes. Although FIGS. 8A-B show the conductor 108A only, it will be understood that in some implementations, any or all of conductors 108B-C may have the same configuration.
FIGS. 9A-B illustrate an example of the conductor 108A, in accordance with an alternative implementation. FIGS. 9A-B illustrate that in some implementations, the notches 401A and 401B of the conductor 108A may be spaced apart from one another along the length L of the conductor 108A. This is in contrast to the preceding examples, in which the notches 401A-B are spaced apart from one another along the width of the conductor 108A. Although FIGS. 9A-B show the conductor 108A only, it will be understood that in some implementations, any or all of conductors 108B-C may have the same configuration. In the example of FIGS. 9A-B, the sensor 110A may have an axis of maximum sensitivity that is perpendicular (or otherwise transverse) to the length L and width W of the conductor 108A. The configuration shown in FIGS. 9A-B may prevent the sensor 110A from sensing magnetic field(s) generated by neighboring conductor(s). In other words, arranging the sensor 110A in the manner shown in FIGS. 9A-B may help reduce crosstalk between the sensor 110A and neighboring conductors (e.g., the conductors 110B-C, etc.). It will be understood that the present disclosure is not limited to any specific orientation of the axis of maximum sensitivity of the sensors 110A for as long as the sensor is able to sense the level of the current flowing through conductor 108A.
FIG. 10A is a cross-sectional side view of the interface 106 that is taken along axis C-C (shown in FIG. 5A). Depicted in FIG. 10A is the structure of the conductor 108A in accordance with one particular implementation. In this implementation, the conductor 108A includes a plurality of metal layers 1002 that are separated from each other by layers of dielectric material 1004. Each of the metal layers 1002 may have the same width W as the rest of the metal layers 1002. However, alternative implementations are possible in which at least two of the metal layers 1002 have different widths. In the example of FIG. 10A, each of the metal layers 1002 has the same thickness. However, alternative implementations are possible in which at least two of the metal layers 1002 have different thicknesses. Furthermore, in the example of FIG. 10A, the metal layers 1002 are situated directly over one another, such that none of the metal layers 1002 overhangs another one of the metal layers 1002. However, alternative implementations are possible in which at least one of the metal layers 1002 overhangs another one of the metal layers 1002. (e.g., see FIG. 10C). Furthermore, in the example of FIG. 10A each of the metal layers 1002 has a main surface that are substantially parallel to the main surface 406 of the PCB 107.
FIG. 10B is a cross-sectional side view of the interface 106 that is taken along axis A-A (shown in FIG. 5A). FIG. 10B illustrates that the through-hole 407A may extend through all metal layers of the conductor 108A. FIG. 10B further illustrates that the through-hole 407A may be filled with a dielectric material.
FIG. 10C shows an example of the conductor 108A, in accordance with an alternative implementation. More particularly, FIG. 10C is a cross-sectional side view of the conductor 108A that is taken along axis A-A (shown in FIG. 5A). In the example of FIG. 10C, leg 411A is formed of metal layers 1002A-E. As illustrated, each of the metal layers 1002A-E may be formed in a different plane. At least some of the metal layers 1002A-E may have a different width and they may overhang one another, as shown. According to the example of FIG. 10C, metal layers 1002B-1002E are integral metal layers and metal layer 1002A is a segmented metal layer. Metal layer 1002A may include a plurality of segments 1003 that are separated from one another by the dielectric material (which is also used to separate the metal layers 1002A-E). Each of the segments 1003 may have a width that is smaller than a width of the metal layer 1002E and/or the width of one or more of the metal layers 1002B-D.
In the example of FIG. 10C, leg 411B is formed of metal layers 1002F-J. As illustrated, each of the metal layers 1002F-J may be formed in a different plane. Each of the metal layers may be formed of a conductive material (e.g., metal). Furthermore, at least some of the metal layers 1002 F-J may have a different width and they may overhang one another, as shown. According to the example of FIG. 10C, metal layers 1002F-G and 1002I-J are integral metal layers and metal layer 1002H is a segmented metal layer. Metal layer 1002H may include a plurality of segments 1005 that are separated from one another by the dielectric material (which is also used to separate the metal layers 1002F-J). Each of the segments 1005 may have a width that is smaller than the width of the metal layer 1002E and/or the width of one or more of the metal layers 1002B-D. In some implementations, the remaining portions of the conductor 108A also have the configuration shown in FIG. 10C. Although FIG. 10C shows the conductor 108A only, it will be understood that in some implementations, any of conductors 108B-C may have the same configuration.
FIG. 10D shows an example of the conductor 108A, in accordance with an alternative implementation. More particularly, FIG. 10D is a cross-sectional side view of the conductor 108A that is taken along axis A-A (shown in FIG. 5A). In the example of FIG. 10D, leg 411A is formed of metal layers 1002 (depicted as solid black rectangles). The metal layers 1002 may be partially separated by layers of dielectric material that are disposed between the metal layers 1002. The metal layers 1002 may be electrically coupled to one another by conductive vias 1008 that are formed in the ends of the metal layers 1002, and which are depicted as cross-hatched rectangles. Leg 411B is similarly formed of metal layers 1002 (depicted as solid black rectangles). The metal layers 1002 may be partially separated by layers of dielectric material that are disposed between the metal layers 1002. The metal layers 1002 may be electrically coupled to one another by conductive vias 1008 that are formed in the ends of the metal layers 1002, and which are depicted as cross-hatched rectangles. In some implementations, the remaining portions of the conductor 108A also have the configuration shown in FIG. 10D. Although FIG. 10D shows the conductor 108A only, it will be understood that in some implementations, any of conductors 108B-C may have the same configuration.
The concepts and ideas described herein may be implemented, at least in part, via a computer program product, (e.g., in a non-transitory machine-readable storage medium such as, for example, a non-transitory computer-readable medium), for execution by, or to control the operation of, data processing apparatus (e.g., a programmable processor, a computer, or multiple computers). Each such program may be implemented in a high-level procedural or object-oriented programming language to work with the rest of the computer-based system. However, the programs may be implemented in assembly, machine language, or Hardware Description Language. The language may be a compiled or an interpreted language, and it may be deployed in any form, including as a stand-alone program or as a module, component, subroutine, or another unit suitable for use in a computing environment. A computer program may be deployed to be executed on one computer or multiple computers at one site or distributed across multiple sites and interconnected by a communication network. A computer program may be stored on a non-transitory machine-readable medium that is readable by a general or special purpose programmable computer for configuring and operating the computer when the non-transitory machine-readable medium is read by the computer to perform the processes described herein. For example, the processes described herein may also be implemented as a non-transitory machine-readable storage medium, configured with a computer program, where upon execution, instructions in the computer program cause the computer to operate in accordance with the processes. A non-transitory machine-readable medium may include but is not limited to a hard drive, compact disc, flash memory, non-volatile memory, or volatile memory. The term unit (e.g., a addition unit, a multiplication unit, etc.), as used throughout the disclosure may refer to hardware (e.g., an electronic circuit) that is configured to perform a function (e.g., addition or multiplication, etc.), software that is executed by at least one processor, and configured to perform the function, or a combination of hardware and software.
According to the present disclosure, a magnetic field sensing element can include one or more magnetic field sensing elements, such as Hall effect elements, magnetoresistance elements, or magnetoresistors, and can include one or more such elements of the same or different types. As is known, there are different types of Hall effect elements, for example, a planar Hall element, a vertical Hall element, and a Circular Vertical Hall (CVH) element. As is also known, there are different types of magnetoresistance elements, for example, a semiconductor magnetoresistance element such as Indium Antimonide (InSb), a giant magnetoresistance (GMR) element, for example, a spin valve, an anisotropic magnetoresistance element (AMR), a tunneling magnetoresistance (TMR) element, and a magnetic tunnel junction (MTJ). The magnetic field sensing element may be a single element or, alternatively, may include two or more magnetic field sensing elements arranged in various configurations, e.g., a half bridge or full (Wheatstone) bridge. Depending on the device type and other application requirements, the magnetic field sensing element may be a device made of a type IV semiconductor material such as Silicon (Si) or Germanium (Ge), or a type III-V semiconductor material like Gallium-Arsenide (GaAs) or an Indium compound, e.g., Indium-Antimonide (InSb).
Having described preferred embodiments, which serve to illustrate various concepts, structures and techniques, which are the subject of this patent, it will now become apparent that other embodiments incorporating these concepts, structures and techniques may be used. Accordingly, it is submitted that the scope of the patent should not be limited to the described embodiments but rather should be limited only by the spirit and scope of the following claims.
Patent Application
20230071087
