Claims
- 1. A data brokering system for semiconductor wafer data, comprising:
a FAB having at least one automated semiconductor wafer manufacturing tool; a plurality of OEMS, coupled to said FAB via a secure service net; means for providing data about a semiconductor wafer manufactured by said tool to one of said OEMs without revealing information about said tool; and means for collecting fees based on characteristics of said provided data.
- 2. The system of claim 1, wherein said characteristics of provided data include a size of data, a type of data and a type of wafer.
- 3. The system of claim 1, wherein said means for providing data is automated by automatically feeding wafer data from a tool at a later part of the manufacturing process to a tool earlier in the manufacturing process.
- 4. The system of claim 1, wherein said means for collecting fees includes providing a list of available data with a charge for that data.
- 5. The system of claim 1, wherein said wafer data is stored in XML format.
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] The present application claims the benefit of U.S. Provisional Patent Application No. 60/363,251, Confirmation No. 3918, filed Mar. 12, 2002 entitled “Diagnostic System and Method for Integrated Remote Tool Access, Data Collection, and Control,” to Stuart Perry et al, the contents of which are incorporated herein by reference in their entirety.
[0002] The present application is related to U.S. patent application filed Mar. 12, 2003, Attorney Docket number 40005-187899, entitled “Diagnostic System and Method for Integrated Remote Tool Access, Data Collection, and Control,” of common assignee; and to U.S. patent application filed Mar. 12, 2003, Attorney Docket number 40005-187900, entitled “Data Sharing and Networking System for Integrated Remote Tool Access, Data Collection, and Control,” of common assignee, both of which are incorporated by reference in their entirety.
Provisional Applications (1)
|
Number |
Date |
Country |
|
60363251 |
Mar 2002 |
US |