Patent Application
20180213656
The present invention relates to a decompression container that is decompressed inside, a processing apparatus including the decompression container, a processing system including the processing apparatus, and a method of producing a flat panel display using the decompression container.
For example, in a processing apparatus such as a film forming apparatus that is used for producing a semiconductor device or a flat panel display: FPD, processes such as a film forming process is performed in a decompression container. In a decompression container of this type, the inside of the container is decompressed and thus a pressure is applied to the wall of the container. At this time, if the strength of the wall of the container is low, the wall will be deformed, and thus there will arise a problem such as air getting into the container through a joined portion or the like and thus the pressure inside the container failing to be maintained, or the deformation of the wall interfering with contained objects disposed in the container. Therefore, the decompression container needs to have strength against the pressure. In addition, since the applied pressure becomes higher as the size of the container becomes larger, the strength of the container needs to be increased when increasing the size of the container. Therefore, a larger decompression container becomes heavier. For example, in a processing apparatus such as a film forming apparatus used for producing a semiconductor device or an FPD, since the size of a decompression container increases in accordance with the increase of the size of a wafer or a glass substrate, the weight of the decompression container also tends to increase. This means that the costs for the material of the decompression and the costs for flooring for installing the decompression container increase. Therefore, it is desired that a decompression container as light as possible while having sufficient strength to bear the pressure is provided.
As a means for reinforcing a decompression container, for example, Japanese Patent Laid-Open No. 2010-243015 proposes a rib structure. By providing ribs standing on a wall surface to be subjected to the pressure, a decompression container stronger and lighter than a decompression container having a simple planar structure can be obtained.
However, although the rib structure of Japanese Patent Laid-Open No. 2010-243015 can realize a decompression container stronger and lighter than a decompression container not provided with a rib, further reduction of weight has been desired for a decompression container used in a processing apparatus or the like.
According to a first aspect of the present invention, a decompression container includes an outer wall including a first member, the first member including a first base portion and a first rib portion, the first base portion including a first surface having a quadrilateral shape, the first rib portion being disposed on the first surface. The first rib portion includes a first rib surrounding a center of the first surface, a plurality of second ribs connected to the first rib and extending toward sides of the quadrilateral shape of the first surface, and a plurality of third ribs that are respectively disposed to oppose respective corners of the quadrilateral shape of the first surface, extend toward respective pairs of sides forming the respective corners of the quadrilateral shape of the first surface, and are apart from one another.
According to a second aspect of the present invention, a method of producing a flat panel display includes disposing a substrate inside a decompression container comprising an outer wall, the outer wall comprising a member, the member comprising a base portion and a rib portion, the base portion comprising a surface having a quadrilateral shape, the rib portion being disposed on the surface, the rib portion comprising a first rib, a plurality of second ribs, and a plurality of third ribs, the first rib surrounding a center of the surface, the plurality of second ribs being connected to the first rib and extending toward sides of the quadrilateral shape of the surface, the plurality of third ribs being respectively disposed to oppose respective corners of the quadrilateral shape of the surface, extending toward respective pairs of sides forming the respective corners of the quadrilateral shape of the surface, and being apart from one another, forming a film of a material of the flat panel display on the substrate in the decompression container, and taking out the substrate from the decompression container.
Further features of the present invention will become apparent from the following description of exemplary embodiments with reference to the attached drawings.
Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to drawings.
The processing system 100 includes decompression containers 101 to 110 that are vacuum chambers. The decompression containers 101, 102, and 103 are conveyance chambers in which a substrate serving as a workpiece is conveyed by robots 120 disposed therein and serving as conveyance mechanisms. The decompression containers 101 and 102 are interconnected via a decompression container 107, and the decompression containers 102 and 103 are interconnected via another decompression container 107. The decompression containers 107 are passing chambers in which the substrate is passed over.
A plurality of decompression containers 104, a decompression container 105, and a decompression container 106 are connected to the decompression container 101. A plurality of decompression containers 104 and a decompression container 106 are connected to the decompression container 102. A decompression container 108, a decompression container 109, and a decompression container 110 are connected to the decompression container 103.
The decompression containers 104 are deposition chambers in which a thin film of a material such as a metal material or an organic material is deposited on a substrate supported on a tray. The decompression container 105 is a substrate supply chamber through which a substrate is supplied from the outside. The decompression containers 106 are accommodation chambers in which trays for supporting the substrate are accommodated, and a tray is conveyed thereto each time a film of a predetermined thickness or a thicker film is deposited on a tray in a decompression container 104. By taking out a tray conveyed to a decompression container 106, the tray can be cleaned.
The decompression container 108 is a glass supply chamber through which sealing glass is supplied, and the decompression container 109 is a sticking chamber in which the sealing glass is stuck on the substrate on which a film has been formed. The decompression container 110 is a taking-out chamber through which a produced OLED display is taken out.
A method of producing an OLED display will be described. A substrate supplied to the decompression container 105 is sequentially conveyed to the respective decompression containers 104 by the robot 120 in the decompression container 101, and is subjected to film forming processes. After film formation is completed by vapor deposition apparatuses disposed in the respective decompression containers 104, the substrate is conveyed to a decompression container 107, and thus the substrate is passed over to the robot 120 in the decompression container 102. Then, the substrate is sequentially conveyed to the respective decompression containers 104 by the robot 120 in the decompression container 102, and is subjected to film forming processes. After film formation is completed in the respective decompression containers 104, the substrate is conveyed through a decompression container 107 serving as a conveyance path to be passed over to the robot 120 in the decompression container 103, and is conveyed to the decompression container 109. Sealing glass supplied to the decompression container 108 is conveyed to the decompression container 109 by the robot 120, the substrate and the sealing glass are stack together, and thus the OLED display is produced. The produced OLED display is conveyed to the decompression container 110 by the robot 120, and is thus taken out.
A processing portion 210 is disposed in the decompression container 104. The processing portion 210 is a processing portion configured to perform a process on the substrate W serving as a workpiece disposed in the decompression container 104, and includes a deposition source 8. A tray 1 that supports the substrate W is disposed to oppose the deposition source 8. A deposition preventing member 2 is disposed on the deposition source side of the tray 1. A mask 4 is set on the tray 1. The substrate W is conveyed to the decompression container 104 by the robot 120 illustrated In
The control device 500 is configured to control film formation, and opens the shutter 6 and starts film formation on the substrate W when a monitored value of the deposition rate monitor 10 becomes stable at a desired value. The decompression container 104 is connected to an exhaustion device 220 such as a pump, and the inside of the decompression container 104 can be decompressed by causing the exhaustion device 220 to operate.
As illustrated in
An outer surface 1521 of a plate member 1511 is square, and an outer surface 1522 of a plate member 1512 is rectangular. In addition, a plate member 1511 of the upper surface portion or the lower surface portion of the container body 150 and two plate members 1512 constituting side surface portions are disposed adjacent to one another so as to be perpendicular to one another. In addition, two plate members 1512 constituting adjacent side surface portions of the container body 150 are also disposed adjacent to each other so as to be perpendicular to each other.
The rib portion 160 for reinforcement is provided to stand on the outer surface 152 of each of the six plate members 151. Since the plate member 151 is reinforced by the rib portion 160, the thickness of the plate member 151 can be reduced while increasing the strength of the decompression container 104, and thus the weight of the decompression container 104 can be reduced. It suffices as long as the rib portion 160 is provided on at least one of the plurality of plate members 151. A plate member 151 not provided with the rib portion 160 may be, to maintain a high strength, thicker than the plate member 151 provided with the rib portion 160. Therefore, on the more plate members 151 the rib portion 160 is provided, the more weight of the decompression container 104 can be reduced. Hereinafter, a rib portion 160 provided on a plate member 1511 will be referred to as a rib portion 1601, and a rib portion 160 provided on a plate member 1512 will be referred to as a rib portion 1602.
The rib portion 1601 on the upper surface portion and the lower surface portion of the container body 150 will be described. The rib portion 1601 includes a rib 1611 serving as a first rib, four ribs 1621 serving as a plurality of second ribs, and four ribs 1631 serving as a plurality of third ribs.
The rib 1611 serving as a first rib is a rib disposed on the outer surface 1521 to surround a center P1 of the quadrilateral outer surface 1521 as illustrated in
A rib 1621 serving as a second rib is disposed on the outer surface 1521 so as to be connected to the rib 1611 and extend toward one of sides S11 to S41 of the quadrilateral shape of the outer surface 1521. In the first exemplary embodiment, the four ribs 1621 extend radially toward the respective sides S11 to S41. Although each of the ribs 1621 does not have to reach the corresponding one of the sides S11 to S41, it is preferable that each of the ribs 1621 reaches the corresponding one of the sides S11 to S41. In the first exemplary embodiment, the ribs 1621 reach the sides S11 to S41, and thus the effect of reinforcement of the ribs 1621 is enhanced, the strength of the decompression container 104 is further increased, and deformation of the decompression container 104 can be suppressed more effectively. In the case where the ribs 1621 do not reach the sides S11 to S41, it is preferable that the distances from ends of the ribs 1621 to the sides of the outer surface 1521 are 100 mm or shorter as viewed in the direction perpendicular to the outer surface 1521. That is, the ribs 1621 are disposed so as to extend to positions reaching the sides S11 to S41 or positions in the vicinity of the sides S11 to S41, specifically, positions 100 mm or closer from the sides S11 to S41.
The ribs 1621 are each a linear rib perpendicular to the corresponding one of the sides S11 to S41 as viewed in the direction perpendicular to the outer surface 1521. By disposing the ribs 1621 to he respectively perpendicular to the sides S11 to S41, the strength of the decompression container 104 is further increased, and deformation of the decompression container 104 can be suppressed more effectively. That is, the weight of the decompression container 104 can be further reduced.
In addition, the four ribs 1621 include a pair of ribs 1621 respectively extending toward two opposing sides S11 and S31 of the quadrilateral and a pair of ribs 1621 extending toward two opposing sides S21 and S41 of the quadrilateral. Deformation of the decompression container 104 can foe effectively suppressed by the pair of ribs 1621 respectively extending toward the two sides S11 and S31. Deformation of the decompression container 104 can be also affectively suppressed by the pair of ribs 1621 respectively extending toward the two sides S11 and S41. Since the ribs 1621 extend in four directions toward the four sides S11 to S41 in the first exemplary embodiment, deformation of the decompression container 104 can be suppressed more effectively. That is, the weight of the decompression container 104 can be further reduced.
In addition, the four ribs 1621 respectively extend from corners C51, C61, C71, and C81 of the polygonal rib 1611 toward the sides S11 to S41. Since the ribs 1621 extend from the corners C51, C61, C71, and C81, the effect of reinforcing the plate member 1511 is increased compared with a case where the ribs 1621 extend from the middle of the ribs 611, and the weight of the decompression container 104 can be further reduced.
The ribs 1631 serving as third ribs are disposed on the outer surface 1521 so as to respectively oppose corners C11, C21, C31, and C41 of the quadrilateral outer surface 1521. That is, one or more ribs 1631 are disposed in correspondence with each of the corners C11, C21, C31, and C41. In the first exemplary embodiment, one rib 1631 is provided for each of the corners C11, C21, C31, and C41. That is, four ribs 1631 are provided in total.
The four ribs 1631 are disposed on the outer surface 1521 so as to respectively extend toward pairs of adjacent sides forming the respective corners C11, C21, C31, and C41, that is, toward sides S11 and S21, sides S21 and S31, sides S31 and S41, and sides S41 and S11. Although the ribs 1631 do not have to reach the sides S11 to S41, it is preferable that the ribs 1631 reach the sides S11 to S41. In the first exemplary embodiment, the ribs 1631 are each disposed so as to reach two adjacent sides, that is, connect two adjacent sides. In the first exemplary embodiment, since the ribs 1631 reach the sides S11 to S41, the affect of reinforcement of the ribs 1631 is enhanced, the strength of the decompression container 104 is further increased, and deformation of the decompression container 104 can be suppressed more effectively. In the case where the ribs 1631 do not reach the sides S11 to S41, it is preferable that distances between ends of the ribs 1631 and the sides S11 to S41 of the outer surface 1521 are 100 mm or shorter as viewed in the direction perpendicular to the outer surface 1521. That is, the ribs 1631 are disposed so as to extend to positions reaching the sides S11 to S41 or positions in the vicinity of the sides S11 to S41, specifically, positions 100 mm or closer from the sides S11 to S41.
The ribs 1631 serving as third ribs are not connected to one another at the sides S11 to S41. That is, a third rib 1631 disposed on a quadrilateral outer surface is apart from another third rib 1631 disposed on the quadrilateral outer surface. Taking the side S11 as an example, two ribs 1631 reach the side S11, and the two ribs 1631 are not connected to each other at the side S11. That is, the two ribs 1631 are not in contact with each other. The same applies to the sides S21 to S41. A rib 1631 is a linear rib inclined with respect to both of two adjacent sides forming a corner that the rib 1631 opposes. Each rib 1631 is disposed on the outer surface 1521 in parallel with a rib 611 that the rib 1631 opposes.
Next, the rib portion 1602 on the side surface portion of the container body 150 will be described. That is, as illustrated in
The rib 1612 serving as a first rib is disposed on the outer surface 1522 so as to surround a center P2 of the quadrilateral outer surface 1522 similarly to the rib 1611. A region R2 inside the rib 1612 is a region in which no other rib is disposed similarly to the region R1. A rib 1622 serving as a second rib is connected to the rib 1612 similarly to a rib 1621, and extends radially toward corresponding one of sides S12 to S42 of the quadrilateral shape of the outer surface 1522. Specifically, the ribs 1622 respectively extend from corners C52; C62, C72, and C82 of the polygonal rib 1612 toward the sides S12 to S42. A rib 1632 serving as a third rib is disposed so as to be inclined with respect to both of two adjacent sides of the quadrilateral outer surface 1522 similarly to a rib 1631.
According to the configurations of the rib portions 1601 and 1602 described above, deformation of the decompression container 104 can be suppressed effectively, and thus the weight of the container body 150 can be reduced. That is, the weight of the decompression container 104 can be reduced while maintaining a high strength of the decompression container 104.
In the first exemplary embodiment, with regard to two adjacent members 1551 and 1552 respectively constituting the upper surface and a side surface of the container body 150, the four ribs 1621 of the member 1551 serving as a first member include a rib 1621 extending toward a boundary B1 between the two outer surfaces 1521 and 1522. Similarly, the four ribs 1622 of the member 1552 serving as a second member include a rib 1622 extending toward the boundary B1. The rib 1621 extending toward the boundary B1 and the rib 1622 extending toward the boundary B1 are connected to and integrated with each other at the boundary B1.
In addition, with regard to two adjacent members 1552 constituting two side surfaces of the container body 150, four ribs 1622 of one member 1552 serving as a first member include a rib 1622 extending toward a boundary B2 between two adjacent outer surfaces 1522. Similarly, four ribs 1622 of the other member 1552 serving as a second member include a rib 1622 extending toward the boundary B2. The two ribs 1622 extending toward the boundary B2 are connected to and integrated with each other at the boundary B2.
Meanwhile, a rib 1631 serving as a third rib and a rib 1632 serving as a third rib are, although close to or in contact with each other, not connected to or integrated with each other at the boundary B1 between two adjacent members 1551 and 1552. This is because connecting and integrating these ribs cause unnecessary increase of the weight.
As a result of connecting a rib 1621 and a rib 1622 to each other and connecting ribs 1622 to each other as described above, the effect of reinforcement is further enhanced, deformation of the decompression container 104 can be suppressed effectively, and thus the weight of the decompression container 104 can be further reduced.
Next, a decompression container according to a second exemplary embodiment will be described.
The rib 161A serving as a first rib is a rib disposed on the outer surface 152A to surround a center PA of the quadrilateral outer surface 152A. In the second exemplary embodiment, the rib 161A is a rib formed by joining four linear ribs 61A into a quadrilateral shape. That is, the rib 161A has a quadrilateral shape as viewed in a direction perpendicular to the outer surface 152A. The rib 161A has a closed shape continuous in a circumferential direction so as to secure strength. A region RA surrounded by the rib 161A is a region inside the rib 161A. This region is a region in which no other rib is disposed.
A rib 162A serving as a second rib disposed on the outer surface 152A so as to be connected to the rib 161A and extend toward one of sides S1A to S4A of the quadrilateral shape of the outer surface 152A. In the second exemplary embodiment, two of the four ribs 162A extend toward the side S1A, and the other two of the four ribs 162A extend toward the side S3A. Although each of the ribs 162A does not have to reach the corresponding one of the aides S1A and S3A, it is preferable that each of the ribs 162A reaches the corresponding one of the sides S1A and S3A. In the second exemplary embodiment, the ribs 162A reach the sides S1A and S3A, and thus the effect of reinforcement of the ribs 162A is enhanced, the strength of the decompression container 104A is further increased, and deformation of the decompression container 104A can be suppressed more effectively. In the case where the ribs 162A do not reach the sides S1A and S3A, it is preferable that the distances from ends of the ribs 162A to the sides of the outer surface 152A are 100 mm or shorter as viewed in the direction perpendicular to the outer surface 152A. That is, the ribs 162A are disposed so as to extend to positions reaching the sides S1A and S3A or positions in the vicinity of the sides S1A and S3A, specifically, positions 100 mm or closer from the sides S1A and S3A.
The ribs 162A are each a linear rib perpendicular to the corresponding one of the sides S1A and S3A as viewed in the direction perpendicular to the outer surface 152A. By disposing the ribs 162A to be perpendicular to the sides S1A and S3A, the strength of the decompression container 104A is further increased, and deformation of the decompression container 104A can be suppressed more effectively.
In addition, the four ribs 162A include two pairs of ribs 162A respectively extending toward the two opposing sides S1A and S3A of the quadrilateral shape of the outer surface 152A. The two pairs of ribs 162A effectively prevent deformation of the decompression container 104A. Since hinges, a pull, and so forth are attached to the left side and right side of the door body 151A, the ribs 162A are configured to extend only in the vertical direction.
In addition, the four ribs 162A respectively extend from corners C5A, C6A, C7A, and C8A of the polygonal rib 161A toward the sides S1A and S3A. Since the ribs 162A extend from the corners C5A, C6A, C7A, and C8A, the effect of reinforcing the door body 151A is increased compared with a case where the ribs 162A extend from the middle of the ribs 61A, and the weight of the decompression container 104A can be further reduced.
The ribs 163A serving as third ribs are disposed on the outer surface 152A so as to respectively oppose corners C1A, C2A, C3A, and C4A of the quadrilateral outer surface 152A. That is, one or more ribs 163A are disposed in correspondence with each of the corners C1A, C2A, C3A, and C4A. In the second exemplary embodiment, one rib 163A is provided for each of the corners C1A, C2A, C3A, and C4A. That is, four ribs 163A are provided in total.
The four ribs 163A are disposed on the outer surface 152A so as to respectively extend toward pairs of adjacent sides forming the respective corners C1A, C2A, C3A, and C4A, that is, toward sides S1A and S2A, sides S2A and S3A, sides S3A and S4A, and sides S4A and S1A.
The ribs 163A serving as third ribs are not connected to one another at the respective sides S1A to S4A. Further, one end of each of the ribs 163A does not reach the side S1A or S3A and is connected to the corresponding one of the ribs 162A, and the other end reaches the side S2A or S4A. That is, a third rib 163A disposed on the quadrilateral outer surface 152A is apart from another third rib 163A disposed on the quadrilateral outer surface 152A on a side of the quadrilateral outer surface 152A.
Taking the side S1A as an example, two ribs 163A extending toward the side S1A do not reach the side S1A, and the two ribs 163A are not connected to each other at the side S1A. That is, the two ribs 163A are not in contact with each other. A rib 163A is a linear rib inclined with respect to both of the corresponding pair of adjacent sides of the quadrilateral shape of the outer surface 152A.
A window 171A is provided in the region RA. The window 171A is a viewing port for an operator to visually observe the inside of the decompression container 104A, and, for example, a glass type material is mainly used. Glass has lower rigidity and lower strength than stainless steel, and thus is easily deformed or broken. In the second exemplary embodiment, the rib 161A is disposed so as to surround the window 171A, and thus deformation of the window 171A can be suppressed. To be noted, an opening for connection to another decompression container may be provided in the region RA instead of the window 171A.
Distance D between the rib 161A and the window 171A, more specifically, distance D from an inner edge of the rib 161A to an edge of the window 171A is preferably 100 mm or shorter. As a result of setting the distance D to 100 mm or shorter, the rib 161A and the window 171A are close to each other, and deformation of the window 171A can be suppressed effectively. Although the lower limit value of the distance D is not particularly limited, the lower limit value is preferably 10 mm from the viewpoint of securing a clearance between the rib 161A and the window 171A.
In addition, in the second exemplary embodiment, the rib portion 160A includes a rib 164A connecting a pair of ribs 162A parallel to each other. In addition, a window 172A is disposed on the upper side of the rib 161A and a window 173A is disposed on the lower side of the rib 164A.
Deformation of the decompression container 104A can be suppressed effectively according to the configuration of the rib portion 160A described above, and thus the weight of the door 155A can be reduced. That is, the weight of the decompression container 104A can be reduced while maintaining high strength of the decompression container 104A.
In a vapor deposition apparatus used for producing an organic electroluminescence device, film formation is performed after performing alignment of a substrate and a mask. The substrate and the mask need to be aligned with a precision of the order of micrometers, and thus it takes a long time to perform the alignment. In particular, in the case where the size of the substrate is larger than a substrate of the so-called fourth generation, that is, 680 mm×880 mm, vibration or distortion occurs in the substrate, and the time required for the alignment increase. Therefore, it can be considered that the rate of operation of the apparatus is improved by using a decompression container having a volume twice as large as a volume required for forming a film on a substrate of a corresponding size and, while performing the alignment in a half of space in a decompression container, performing film formation in the other half of the space in the decompression container. However, in the case of such a vapor deposition apparatus, the size and weight of the decompression container further increases.
Therefore, in the case of such a large decompression container, it is preferable that, as illustrated in
According to such a configuration, the size of an opening provided in the decompression container can be reduced, thus the weight of the doors can be reduced while maintaining the strength of the decompression container, and the weight of the decompression container can be reduced while maintaining high strength of the decompression container as a whole.
Simulation was performed for the decompression container 104 described in the first exemplary embodiment. The dimensions of the substrate W were set to a width of 925 mm, a length of 1500 mm, and a thickness of 0.4 mm, and the container body 150 excluding the rib portion 160 was configured as a rectangular parallelepiped having a width of 4000 mm, a length of 4000 mm, and a height of 2000 mm. SUS304 was used as the material of the container body 150, and the thickness of the plate member 151 was set to 30 mm. The heights of the ribs were determined in accordance with the upper limit of the size of the external shape of the apparatus, and the height limit was set to 300 mm. As performance of the decompression container 104, the amount of maximum displacement of each surface in a state where the inside of the container was in vacuum and the outside of the container was in normal pressure, that is, in a state where a pressure of 0.1 MPa was applied to each surface of the decompression container 104 was obtained.
In addition, both ends of each third rib were chamfered by 100 mm, and connecting portions between second ribs were each chamfered by 200 mm.
Here, simulation was also performed for a decompression container of Comparative Example 1.
As illustrated in
The simulation was performed by a finite element method. The finite element method is a technique widely used for performance evaluation of structures and estimation of displacement and stress. The amounts of maximum displacement when a pressure of 0.1 MPa is applied to all the surfaces of the bodies of the decompression containers 104 and 104X perpendicularly in a state where four corners of each lower surface portion of the decompression containers 104 and 104X are fixed with respect to six-axes directions were calculated by using the finite element method.
Specifications of finite element models of Example 1 and Comparative Example 1 are shown in Table 1 below.
Weights [t] and amounts of maximum displacement [mm] obtained by the simulation are shown in Table 2 below. The center point of the lower surface portion was the position with the maximum displacement in both of the model of Example 1 and the model of Comparative Example 1.
As shown in Table 2, although the amounts of maximum displacement of the model of Example 1 and the model of Comparative Example 1 were similar, the weight of the model of Example 1 was smaller. As a result of this, it was revealed that the weight of the decompression container 104 could be reduced by the structure of the rib portion 160 of Example 1.
Simulation was performed for the decompression container 104A described in the second exemplary embodiment.
Here, simulation was also performed for a decompression container of Comparative Example 2.
Since the rib structure disclosed in Japanese Patent Laid-Open No. 2010-243015 cannot be applied to Examples 2 or 3 in which a window is provided in the center, a simple lattice-shaped rib structure as illustrated in
The amounts of maximum displacement when a pressure of 0.1 MPa is applied to the entire surfaces of the doors perpendicularly in a state where outer circumferential ends of the back surfaces of the doors were fixed were calculated by using the finite element method. Specifications of finite element models of Examples 2 and 3 and Comparative Example 2 are shown in Table 3 below.
Weights [t] and amounts of maximum displacement [mm] obtained by the simulation are shown in Table 4 below.
In the model of Example 2, the amount of deformation was smaller than in the model of Comparative Example 2, and the weight was also smaller than in the model of Comparative Example 2. In addition, in the model of Example 3, although the amount of deformation was the same as in the model of Comparative Example 2, the weight was smaller than in the model of Comparative Example 2 by 92 kg. That is, by applying the rib structure of Example 2 or 3 to a door of a decompression container, the weight of the decompression container can be reduced while maintaining the rigidity of the decompression container.
The present invention is not limited to the exemplary embodiments described above, and can be modified within the technical concept of the present invention.
In addition, although a case where the decompression container 104 or 104A of the processing apparatus 200 includes the rib portion 160 or 160A has been described, the configuration is not limited to this. For example, the decompression containers 101 to 103 and 105 to 110 may include the rib portion 160 or 160A.
In addition, each edge of the plate member may be chamfered. In this case, the second ribs or the third ribs may be disposed only on flat surfaces avoiding chamfered portions. In the case of disposing the second ribs or the third ribs only on the flat surfaces, the ribs have simple shapes and thus an operation of connecting the ribs to the flat surfaces such as welding can be performed easily. In addition, in the case where the second ribs or the third ribs extend to the chamfered portions, the strength increases; and thus the weight of the decompression container can be reduced by a corresponding amount.
In addition, although a case where the rib portion is disposed on the outer surface of a plate member has been described in the exemplary embodiments described above, the rib portion may be disposed on the inner surface.
In addition, although rib portions are disposed on all the outer surfaces of the decompression container, that is, on all of the upper surface, lower surface, and four side surfaces, in the exemplary embodiment, illustrated in
In addition, the ribs illustrated in
In addition, the door provided with ribs illustrated in
In addition, the door provided with ribs illustrated in
While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. The scope of the following claims is to be accorded the broadest interpretation so as to encompass all such modifications and equivalent structures and functions.
This application claims the benefit of Japanese Patent Application No.2017-009001, filed Jan. 20, 2017, which is hereby incorporated by reference herein in its entirety.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2017-009001 | Jan 2017 | JP | national |
