The present disclosure relates to the technical field of photoelectric detection, and in particular to a detection substrate, a noise reduction method therefor, and a detection device.
X-ray inspection technology is widely used in industrial non-destructive testing, container scanning, circuit board inspection, medical treatment, security, industry and other fields, and has broad application prospects. Traditional X-Ray imaging technology belongs to analog signal imaging, which has a low resolution and a poor image quality. The X-ray digital radiography (DR) technology that appeared in the late 1990s uses X-ray flat panel detectors to directly convert X-ray images into digital images, because the converted digital images are clear, having a high resolution, and easy to save and transmit, the X-ray DR technology has become a hot research topic at present.
The present disclosure provides a detection substrate, a noise reduction method therefor, and a detection device.
In an aspect, embodiments of the present disclosure provide a detection substrate, including:
In some embodiments, in the above detection substrate according to embodiments of the present disclosure, at least one of a gate, a first electrode or a second electrode of the first transistor is floating.
In some embodiments, in the above detection substrate according to embodiments of the present disclosure, the gate of the first transistor is electrically connected with the scanning line, the first electrode of the first transistor is electrically connected with the first photosensitive device, and the second electrode of the first transistor is floating.
In some embodiments, in the above detection substrate according to embodiments of the present disclosure, the gate of the first transistor is electrically connected with the scanning line, the first electrode of the first transistor is floating, and the second electrode of the first transistor is electrically connected with the reading line.
In some embodiments, in the above detection substrate according to embodiments of the present disclosure, the gate of the first transistor is floating, the first electrode of the first transistor is electrically connected with the first photosensitive device, and the second electrode of the first transistor is electrically connected with the reading line.
In some embodiments, in the above detection substrate according to embodiments of the present disclosure, the gate, the first electrode and the second electrode of the first transistor are all floating.
In some embodiments, in the above detection substrate according to embodiments of the present disclosure, at least one of the gate, the first electrode or the second electrode of the first transistor is absent.
In some embodiments, in the above detection substrate according to embodiments of the present disclosure, the gate of the first transistor is electrically connected with the scanning line, the first electrode of the first transistor is electrically connected with the first photosensitive device, and the second electrode of the first transistor is absent.
In some embodiments, in the above detection substrate according to embodiments of the present disclosure, the gate of the first transistor is electrically connected with the scanning line, the first electrode of the first transistor is absent, and the second electrode of the first transistor is electrically connected with the reading line.
In some embodiments, in the above detection substrate according to embodiments of the present disclosure, the gate of the first transistor is absent, the first electrode of the first transistor is electrically connected with the first photosensitive device, and the second electrode of the first transistor is electrically connected with the reading line.
In some embodiments, in the above detection substrate according to embodiments of the present disclosure, the gate, the first electrode and the second electrode of the first transistor are all absent.
In some embodiments, in the above detection substrate according to embodiments of the present disclosure, the base substrate further includes a photosensitive region, and the noise reduction region is located on at least one side of the photosensitive region in an extending direction of the reading line;
In some embodiments, in the above detection substrate according to embodiments of the present disclosure, the base substrate further includes a photosensitive region, and the noise reduction region is located on at least one side of the photosensitive region in an extending direction of the scanning line;
In some embodiments, in the above detection substrate according to embodiments of the present disclosure, the detection substrate further includes a plurality of second photosensitive devices and a plurality of second transistors in the photosensitive region,
In another aspect, embodiments of the present disclosure provide a noise reduction method of the above detection substrate, including:
In another aspect, embodiments of the present disclosure provide a detection device, including the above detection substrate according to embodiments of the present disclosure.
In order to make the purpose, technical solutions and advantages of the embodiments of the present disclosure clearer, the technical solutions of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present disclosure. It should be noted that the size and shape of each figure in the drawings do not reflect the true scale, but are only intended to illustrate the present disclosure. And the same or similar reference numerals represent the same or similar elements or elements having the same or similar functions throughout.
Unless otherwise defined, the technical terms or scientific terms used herein shall have the usual meanings understood by those having ordinary skill in the art to which the present disclosure belongs. “First”, “second” and similar words used in the present disclosure and claims do not indicate any order, quantity or importance, but are only used to distinguish different components. “Comprising” or “including” and similar words mean that the elements or items appearing before the word include the elements or items listed after the word and their equivalents, without excluding other elements or items. “Inner”, “outer”, “upper”, “lower” and so on are only used to express the relative positional relationship, when the absolute position of the described object changes, the relative positional relationship may also change accordingly.
The X-ray flat panel detector includes reading lines and scanning lines crossing over each other. Because there is a coupling capacitance between the scanning lines and the reading lines due to the crossing, the reading lines will collect a photoelectric signal while collecting a coupled noise signal on the scanning lines; and, the reading lines themself will also generate certain noise, which will affect the image quality. If the noise on the scanning lines and the reading lines can be accurately read out, then the noise can be eliminated through the subsequent image processing algorithms, thereby improving image quality. In addition, in the related art, a metal layer is used to block a photosensitive device in a noise reduction region, so that it cannot sense light, to improve image quality. However, since the photosensitive device still has leakage current in the dark state, which has a certain impact on the gray value of the image, moreover, the metal layer cannot completely block all visible light, so that the photosensitive device will still produce a certain response and generate electrical signals, which will also have a certain impact on image quality.
In order to alleviate the above-mentioned technical problems existing in the related art, an embodiment of the present disclosure provides a detection substrate, as shown in
In the above detection substrate according to an embodiment of the present disclosure, a gate g1, a first electrode s1, and a second electrode d1 of the first transistor 105 are processed, so that the first transistor 105 cannot normally conduct the first photosensitive device 102 and the reading line 103, the first transistor 105 is disconnected from at least one of the first photosensitive device 102, the reading line 103 or the scanning line 104, the leakage current of the first photosensitive device 102 in the dark state will not be read out, the signal read by the reading line 103 is completely the coupled noise signal of the scanning line 104; by not setting the scanning line 104 in the noise reduction region BB, the first transistor 105 is disconnected from the scanning line 104, the leakage current of the first photosensitive device 102 in the dark state will not be read out, and the signal read by the reading line 103 is the self-noise signal of the reading line 103. Subsequently, the image processing method in the related art is used to eliminate the coupled noise signal of the scanning line 104 and the self-noise signal of the reading line 103, which can effectively avoid the impact of the first photosensitive device 102, the reading line 103 and the scanning line 104 on image quality, to further significantly improve image quality.
In some embodiments, in the above detection substrate according to embodiments of the present disclosure, the first photosensitive device 102 may include a bottom electrode 1021, a photoelectric conversion structure 1022, and a top electrode 1023 that are stacked, where the photoelectric conversion structure 1022 maybe a PN structure or a PIN structure. The PIN structure 1022 includes an N-type semiconductor layer with N-type impurities, an intrinsic semiconductor layer without impurities (also called an I-type semiconductor layer), and a P-type semiconductor layer with P-type impurities, which are sequentially stacked on the bottom electrode 1021. Here, a thickness of the intrinsic semiconductor layer can be greater than a thickness of the P-type semiconductor layer and a thickness of the N-type semiconductor layer, the top electrode 1023 and the photoelectric conversion structure 1022 can be prepared by one mask process, and an orthographic projection of the top electrode 1023 on the base substrate 101 is located within an orthographic projection of the photoelectric conversion structure 1022 on the base substrate 101, that is, an area of the top electrode 1023 is slightly smaller than an area of the photoelectric conversion structure 1022, for example, a distance between an edge of the top electrode 1023 and an edge of the photoelectric conversion structure 1022 maybe set to 1 μm to 3 μm, such as 1.0 μm, 1.5 μm, 1.8 μm, 2.0 μm, 2.5 μm, 3.0 μm and so on. Through the above setting, the leakage current caused by the etching damage of the sidewall of the photoelectric conversion structure 1022 can be reduced.
Optionally, the first transistor 105 may be an amorphous silicon transistor, a polysilicon transistor, an oxide transistor, etc., which is not limited herein. The first transistor 105 may be a top-gate transistor, a bottom-gate transistor, a double-gate transistor, etc., which is not limited herein. The first electrode s1 of the first transistor 105 is the source and the second electrode d1 is the drain, or the first electrode s1 of the first transistor 105 is the drain and the second electrode d1 is the source, which will not be distinguished here.
In some embodiments, in the detection substrate according to embodiments of the present disclosure, as shown in
In some embodiments, in the detection substrate according to embodiments of the present disclosure, at least one of the gate g1, the first electrode s1 or the second electrode d1 of the first transistor 105 is floating, which may include the following possible implementations: as shown in
In some embodiments, in the display substrate according to embodiments of the present disclosure, as shown in
In some embodiments, in the detection substrate according to embodiments of the present disclosure, at least one of the gate g1, the first electrode s1 or the second electrode d1 of the first transistor 105 is set absent, which may include the following possibilities: as shown in
It should be noted that when at least one of the gate g1, the first electrode s1 or the second electrode d1 of the first transistor 105 is set floating or absent, since the first transistor 105 does not need to be turned on, an active layer a1 of a first transistor 105 may exist or be absent, which is not limited here.
In some embodiments, in the detection substrate according to embodiments of the present disclosure, as shown in
Correspondingly, embodiments of the present disclosure provide a detection image (as shown in
In some embodiments, in the detection substrate according to embodiments of the present disclosure, as shown in
In some embodiments, the detection substrate according to embodiments of the present disclosure, as shown in
Here, the gate g2 of the second transistor 107 is electrically connected with the scanning line 104, the first electrode s2 of the second transistor 107 is electrically connected with the second photosensitive device 106 (it can be the bottom electrode 1061 of the second photosensitive device 106), and the second electrode d2 of the second transistor 107 is electrically connected with the reading line 103. Optionally, the structure of the second photosensitive device 106 is the same as that of the first photosensitive device 102, and the same functional film layers of the second photosensitive device 106 and the first photosensitive device 102 can be arranged in the same layer, for example, the bottom electrode 1061 of the second photosensitive device 106 is set on the same layer as the bottom electrode 1021 of the first photosensitive device 102, the photoelectric conversion structure 1062 of the second photosensitive device 106 is set on the same layer as the photoelectric conversion structure 1022 of the first photosensitive device 102, and the top electrode 1063 of the second photosensitive device 106 and the top electrode 1023 of the first photosensitive device 102 are arranged on the same layer; the second transistor 107 has the same structure as the first transistor 105, and the same functional film layers of the second transistor 107 and the first transistor 105 can be arranged on the same layer, for example, the gate g2 of the second transistor 107 is set on the same layer as the gate g1 of the first transistor 105, the first electrode s2 of the second transistor 107 is set on the same layer as the first electrode s1 of the first transistor 105, and the second electrode d2 of the second transistor 107 is set on the same layer as the second electrode d1 of the first transistor 105, so as to reduce the number of masking times and the number of film layers, save manufacturing cost, and improve production efficiency.
In some embodiments, in the detection substrate according to embodiments of the present disclosure, as shown in
19 and
Generally, in the detection substrate according to embodiments of the present disclosure, as shown in
Other essential components of the detection substrate should be understood by those of ordinary skill in the art and are not described herein, nor should they be used as a limitation on the present disclosure.
Based on the same inventive concept, embodiments of the present disclosure provide a noise reduction method for the detection substrate according to embodiments of the present disclosure. Since the problem-solving principle of the noise reduction method is similar to the problem-solving principle of the above-mentioned detection substrate, the implementation of the noise reduction method can refer to the above-mentioned embodiments of the detection substrate, and repeated descriptions will not be repeated.
The noise reduction method of the detection substrate according to embodiments of the present disclosure, as shown in
S221, collecting at least one of a coupled noise signal of the scanning line or a self-noise signal of the reading line through the reading line. When collecting the coupled noise signal of the scanning line and the self-noise signal of the reading line, the scanning line controls the second transistor to be in an off state, so as to ensure that the reading line collects only noise signals without photoelectric signals.
S222, performing noise reduction processing on a photoelectric signal of the detection substrate based on the at least one of the coupled noise signal of the scanning line or the self-noise signal of the reading line. In some embodiments, the photoelectric signal of the detection substrate can be equivalent to the photoelectric signal of the second photosensitive device, the second transistor can be controlled to be in an on state through the scanning line, so that the photoelectric signal of the second photosensitive device can be transmitted to the reading line via the second transistor for collecting. Subsequently, an image processing algorithm in the related art may be used to perform noise reduction processing on the photoelectric signal of the second photosensitive device.
Based on the same inventive concept, an embodiment of the present disclosure provides a detection device, including the above-mentioned detection substrate according to embodiments of the present disclosure. Since the problem-solving principle of the detection device is similar to the problem-solving principle of the above-mentioned detection substrate, the implementation of the detection device can refer to the above-mentioned embodiments of the detection substrate, and the repetition will not be repeated.
In some embodiments, the detection device according to embodiments of the present disclosure can be used for X-ray detection and imaging, or for identifying fingerprints, palm prints and other lines. In addition, other essential components in the detection device should be understood by those of ordinary skill in the art, and will not be repeated here, nor should they be used as a limitation on the present disclosure.
Although embodiments of the present disclosure have been described, those skilled in the art can make various changes and modifications to the embodiments of the present disclosure without departing from the spirit and scope of the embodiments of the present disclosure. In this way, if these modifications and variations of the embodiments of the present disclosure fall within the scope of the claims of the present disclosure and their equivalent technologies, the present disclosure also intends to include these modifications and variations.
This application is a continuation application of International Application No. PCT/CN2021/139116, filed on Dec. 17, 2021, which is hereby incorporated by reference in its entirety.
Number | Date | Country | |
---|---|---|---|
Parent | PCT/CN2021/139116 | Dec 2021 | WO |
Child | 18614540 | US |