Patent Application
20250073848
This application claims priority to and the benefit of Chinese Patent Application No. 202221625633.8, filed in the China National Intellectual Property Administration on Jun. 27, 2022, the disclosure of which is hereby incorporated by reference in its entirety.
The present disclosure relates to solar monocrystal detection, and in particular to a device for automatically measuring a side length of a monocrystal after grinding.
In the manufacture of solar monocrystal silicon wafers, it is necessary to grind and square a monocrystal silicon rod. After the grinding is completed, detection of a side length of the monocrystal after grinding needs to be performed. Conventionally, a vernier caliper is used by an operator to detect the monocrystal after grinding, which may have a large measurement error and low accuracy and thus cannot ensure subsequent production. Moreover, manual measurement is slow and has a lower work efficiency.
In view of the above, according to an embodiment of the present disclosure, a device for automatically measuring the side length of the monocrystal after grinding includes:
Some embodiments of the present disclosure will be described below with reference to the accompanying drawings.
As shown in
Specifically, the mechanical arm 5 is provided with a first sensor 7, and the side surface of the detection table 1 is the sensing surface for the first sensor 7. When the first driver drives the column 3 and the mechanical arm 5 to move horizontally, to drive the probe assembly to move, and the distance of the first sensor 7 with respect to the sensing surface is changed, so that the horizontal movement distance of the probe assembly may be detected.
In an embodiment of the present disclosure, a second driver is provided at one end of the mechanical arm 5 close to the column 3, and the second driver may drive the mechanical arm 5 to move horizontally. In order to facilitate the placement of the crystal to be detected on the detection table 1, a second driver is mounted at one end of the mechanical arm 5 close to the column 3, and the second driver may drive the mechanical arm 5 to be horizontally telescoped.
Specifically, the first driver and the second driver may be cylinders or electric telescopic rods.
Specifically, the probe assembly includes a probe 6 and a second sensor 8, the probe 6 is horizontally disposed at one end of the mechanical arm 5 away from the column 3, and the second sensor 8 is disposed at one end of the probe 6 away from the detection table 1, the probe 6 is retractable in a horizontal direction, and the second sensor 8 is used to measure the retraction distance of the probe 6. When the second sensor 8 senses that the probe 6 is in contact with the surface of the object to be measured, and the probe 6 is no longer moved, the first sensor 7 detects the horizontal movement distance of the probe 6. The distance from the column 3 to the center of the detection table 1 is known and constant, and the distance from the column 3 to the probe 6 is also known, so that the distance from the side surface of the crystal to be measured to the center of the operation table may be calculated, and the distance from another side surface of the crystal to be measured to the center of the operation table may be measured by a measuring device symmetrically arranged. The side lengths of the monocrystal 10 to be measured may be obtained by adding the distances from the opposite sides to the center of the operation table. When the probe 6 contacts the side of the crystal to be detected, the probe 6 continues to move, the probe 6 contracts, and the second sensor 8 is able to detect the retraction distance of the probe 6.
Specifically, as shown in
Specifically, as shown in
In an embodiment of the present disclosure, one end of the probe bar 62 close to the monocrystal is arc-shaped. In order to avoid scratching the monocrystal 10 to be detected when the probe bar 62 is in contact with the monocrystal 10 to be detected, the one end of the probe bar 62 close to the monocrystal 10 is disposed in an arc shape.
In an embodiment of the present disclosure, the probe assembly includes three probes 6 and three second sensors 8, the three probes 6 are placed horizontally and arranged vertically at one end of the mechanical arm 5 away from the column 3, the three sensors are arranged at one end of the three probes 6 away from the detection table 1, respectively. One probe 6 and one sensor are arranged to measure only one side length, and the upper, middle and lower groups of probes 6 are arranged to measure the upper, middle and lower groups of side lengths of the monocrystal, and at the same time, the side length error of the monocrystal 10 to be detected may be monitored to obtain the taper of the monocrystal, thereby ensuring the flatness of the monocrystal.
A device for automatically measuring the side length of a monocrystal after grinding includes a detection table 1, a first cylinder 2, an column 3, a second cylinder 4, a mechanical arm 5, a probe 6, a first sensor 7, and a second sensor 8. The detection devices are symmetrically arranged on both sides of the detection table 1. One end of the first cylinder 2 is connected to a side of the detection table 1, the other end of the first cylinder 2 is fixed to the column 3, one end of the second cylinder 4 is connected to a side of the column 3 close to the detection table 1, the other end of the second cylinder 4 is connected to one end of the mechanical arm 5, and the other end of the mechanical arm 5 is provided with three probes 6, which are horizontally placed and vertically arranged on the mechanical arm 5. The mechanical arm 5 is provided with a mounting bracket 9 for mounting the first sensor 7, and a side surface of the detection table 1 is a sensing surface for the first sensor 7. Second sensors 8 are provided at one ends of the three probes 6 away from the monocrystal 10 to be detected, respectively. The probe 6 is composed of a base 61 and a probe bar 62, the base 61 is provided at one end of the mechanical arm away from the second cylinder 4, and the one end of the base 61 adjacent to the probe bar 62 in a horizontal direction is provided with a stepped hole, the probe bar 62 is in clearance fit with the stepped hole and horizontally movable along the stepped hole. The one end of the probe bar 62 away from the monocrystal 10 to be detected is provided with a top plate 63, one side of the top plate 63 is in contact with the stepped hole, and a spring 64 is provided between the other side of the top plate 63 and the base 61. A second sensor 8 is mounted at one end of the base 61 away from the probe bar 62. The end of the base 61 provided with the second sensor 8 is provided with a light-transmitting hole 65. The top plate 63 is a sensing surface for the second sensor 8. The second sensor 8 may sense the retraction distance of the top plate 63 through the light-transmitting hole 65. In the present embodiment, both the first sensor 7 and the second sensor 8 are laser sensors.
Working flow: the monocrystal 10 to be detected is placed on the detection table 1, and the length direction of the monocrystal 10 to be detected is perpendicular to the connection line of the measuring devices on both sides. The second cylinder 4 is activated to move the mechanical arm 5 horizontally in the direction toward the monocrystal 10 to be detected, and the second cylinder 4 stops moving when the mechanical arm 5 is fully extended. The first cylinder 2 is activated, and the first cylinder 2 moves the column 3, the second cylinder 4, the mechanical arm 5, and the probe 6 horizontally toward the monocrystal 10 to be detected. When all three probes 6 contact the monocrystal 10 to be detected, the first cylinder 2 stops moving, completes the measurement, and then resets.
Measurement principle: since there may be taper on the side of the monocrystal, the three probes 6 do not contact the monocrystal 10 to be detected at the same time. When the last probe 6 contacts the monocrystal 10 to be detected, the first cylinder 2 stops moving, and the probe 6 also stops moving. The first sensor 7 on the mechanical arm 5 detects the horizontal movement distance of the probe 6. The distance from the column 3 to the center of the detection table 1 is known and constant. The distance from the column 3 to the probe 6 is also known. Therefore, the distance from the side of the monocrystal to be detected to the center of the operation table may be calculated. The distance from the side of the crystal to be detected to the center of the operation table on the symmetrical side may be measured by the measuring device arranged symmetrically. The side length of the monocrystal 10 to be detected at this position may be obtained by adding the distances from the opposite sides to the center of the operation table. The remaining two probes 6 are moved in the horizontal direction due to the push of the monocrystal 10 to be detected, to push the respective top plates 63 to move, and the second sensors 8 mounted on the probes 6 measure the respective retraction distances, so that the side length errors of the contact positions of the three probes 6 may be calculated.
The present disclosure has the advantage and the positive effect that the side lengths and the side length errors at the upper, middle and lower positions may be quickly measured by the three probes 6 vertically arranged, so that the measurement time is shortened, the measurement accuracy is improved, the error of the manual measurement is avoided, and the work efficiency is improved.
Some embodiments of the present disclosure have been described in detail above, but should not be considered as limiting the scope of the present disclosure. All equivalents and modifications made in accordance with the present disclosure shall still fall within the scope of the present disclosure.
| Number | Date | Country | Kind |
|---|---|---|---|
| 202221625633.8 | Jun 2022 | CN | national |
| Filing Document | Filing Date | Country | Kind |
|---|---|---|---|
| PCT/CN2023/102456 | 6/26/2023 | WO |
