Claims
- 1. A vacuum electrode assembly having a vacuum chamber for communicating with a vacuum source and an absorber adapted to take up contaminants from a surface against which the assembly holds an electrode, the absorber comprising:
- an absorbing element held within the vacuum chamber and having a first side for facing the electrode and the surface and a second side for communicating with the vacuum source; and
- a non-absorbing element for preventing the absorbing element from transporting the contaminants from a region of the surface adjacent the electrode and permitting the absorbing element to transport contaminants from the surface not adjacent the electrode as vacuum is applied to the vacuum chamber.
- 2. A vacuum electrode assembly according to claim 1, wherein the non-absorbing element includes a capillarity-interrupting member disposed on the first side of the absorbing element.
- 3. A vacuum electrode assembly according to claim 1, wherein the non-absorbing element comprises a separate disk which covers a portion of the first side of the absorbing element.
- 4. A vacuum electrode assembly according to claim 1, wherein the non-absorbing element comprises a member integrated in the first side of the absorbing element.
Priority Claims (3)
Number |
Date |
Country |
Kind |
9200516 |
Feb 1992 |
SEX |
|
9201336 |
Apr 1992 |
SEX |
|
9203045 |
Feb 1993 |
SEX |
|
CROSS REFERENCE TO RELATED APPLICATION
This application is a division of U.S. patent application Ser. No. 08/290,911, filed Aug. 22, 1994, now U.S. Pat. No. 5,553,612.
US Referenced Citations (10)
Foreign Referenced Citations (5)
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0 289 905 |
Nov 1988 |
EPX |
0 352 596 |
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Aug 1991 |
EPX |
39 20 755 |
May 1990 |
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639524 |
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SUX |
Divisions (1)
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Number |
Date |
Country |
Parent |
290911 |
Aug 1994 |
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