Number | Date | Country | Kind |
---|---|---|---|
43 42 526.7 | Dec 1993 | DEX |
Filing Document | Filing Date | Country | Kind | 102e Date | 371c Date |
---|---|---|---|---|---|
PCT/DE94/01492 | 12/15/1994 | 5/29/1996 | 5/29/1996 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO95/16908 | 6/22/1995 |
Number | Name | Date | Kind |
---|---|---|---|
3674008 | Johnson | Jul 1972 | |
4281645 | Jobsis | Aug 1981 | |
4495949 | Stoller | Jan 1985 | |
5371368 | Alfano et al. | Dec 1994 | |
5419320 | Kawaguchi | May 1995 | |
5451785 | Faris | Sep 1995 |
Number | Date | Country |
---|---|---|
0 585 620 A1 | Sep 1994 | EPX |
2092856 | Aug 1982 | GBX |
Entry |
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"Edge Inspection of Semiconductor Substrates", Technical Disclosure Bulletin vol. 33, No. 4, Sep. 1990. |
"Reticle Inspection Using Diffraction Pattern Masking", Xerox Disclosure Journal, vol. 9, No. 1, Jan./Feb. 1984. |