| Number | Date | Country | Kind |
|---|---|---|---|
| 199 28 410 | Jun 1999 | DE |
| Number | Name | Date | Kind |
|---|---|---|---|
| 5571410 | Swedberg et al. | Nov 1996 | A |
| 5863801 | Southgate et al. | Jan 1999 | A |
| 5955028 | Chow | Sep 1999 | A |
| 5989402 | Chow et al. | Nov 1999 | A |
| Number | Date | Country |
|---|---|---|
| 19928412 | Mar 2002 | DE |
| Entry |
|---|
| DEPATISnet inventor name search for Manfred Berndt.* |
| Shoji and Esashi, “Microflow devices and systems”, J. Micromech. Michroeng., 4 (1994) 157-171. |