Disclosed are devices that include a near field transducer (NFT), the NFT having a peg and a disc and the peg including peg material and at least one associated amorphous blocker layer, wherein the amorphous blocker layer includes an amorphous metal alloy and the amorphous blocker layer is within the peg material, on one or more surfaces of the peg material, or both.
Also disclosed are devices that include such NFTs and additional components such as energy sources and waveguides, for example.
The above summary of the present disclosure is not intended to describe each disclosed embodiment or every implementation of the present disclosure. The description that follows more particularly exemplifies illustrative embodiments. In several places throughout the application, guidance is provided through lists of examples, which examples can be used in various combinations. In each instance, the recited list serves only as a representative group and should not be interpreted as an exclusive list.
The figures are not necessarily to scale. Like numbers used in the figures refer to like components. However, it will be understood that the use of a number to refer to a component in a given figure is not intended to limit the component in another figure labeled with the same number.
Heat assisted magnetic recording (referred to through as HAMR) utilizes radiation, for example from a laser, to heat media to a temperature above its curie temperature, enabling magnetic recording. In order to deliver the radiation, e.g., a laser beam, to a small area (on the order of 20 to 50 nm for example) of the medium, a NFT is utilized. During a magnetic recording operation, the NFT absorbs energy from a laser and focuses it to a very small area; this can cause the temperature of the NFT to increase. The temperature of the NFT can be elevated up to about 400° C. or more.
In some embodiments, a NFT can include a small peg and a large disk. Current materials have been shown to exhibit many grain boundaries that arise from deposition and annealing processes. Such grain boundaries can act as pathways for diffusion of any seed material, dopant materials, plasmonic materials, adjacent structure materials, ambient atmospheric materials, or any combinations thereof. Diffusion of various materials along these grain boundaries can contribute to failure of the NFT and heads containing the NFTs.
A HAMR transducer includes a magnetic writer for generating a magnetic field to write to a magnetic medium (e.g. magnetic medium 16) and an optical device to heat a portion of the magnetic medium proximate to the write field.
Devices disclosed herein can also include other structures. Devices disclosed herein can be incorporated into larger devices. For example, sliders can include devices as disclosed herein. Exemplary sliders can include a slider body that has a leading edge, a trailing edge, and an air bearing surface. The write pole, read pole, optical near field transducer and contact pad (and optional heat sink) can then be located on (or in) the slider body. Such exemplary sliders can be attached to a suspension which can be incorporated into a disc drive for example. It should also be noted that disclosed devices can be utilized in systems other than disc drives such as that depicted in
Disclosed devices include one or more layers of amorphous alloy materials configured to stop the diffusion away from, into or through the NFT. Amorphous alloy blocker layers, as they are referred to herein, can be utilized at various different locations in the NFT, adjacent or around the NFT structure, or combinations thereof.
The remaining portions of the NFT, or more specifically the peg, can generally be made of a plasmonic material or can be substantially made of a plasmonic material. Illustrative NFT materials can include plasmonic materials including, for example gold (Au), silver (Ag), aluminum (Al), copper (Cu), ruthenium (Ru), rhodium (Rh), iridium (Ir), or alloys thereof; thermally conductive oxides, and indium tin oxide (ITO). In some embodiments, illustrative NFT materials can also include those disclosed in U.S. Pat. No. 9,251,837, U.S. Pat. No. 8,427,925, and U.S. Pat. No. 8,830,800, and U.S. Pat. No. 8,934,198, the disclosures of which are incorporated herein by reference thereto. In some embodiments, an intermixing layer can include gold as a first material.
In some embodiments, amorphous alloy materials can be co-deposited by co-sputtering or co-evaporation from one or more than one targets. In other embodiments, amorphous alloy materials can be prepared by atomic layer deposition (ALD) by using multiple precursors of metals or by pulsed laser deposition, for example. An amorphous material is one that is not crystalline in nature and does not have a long range ordered lattice structure. In some embodiments, an amorphous material can be described as having a smaller grain size than that of a crystalline layer. In some embodiments, an amorphous material is one in which the average grain size is not greater than 5 nm, or in some embodiments not greater than 3 nm. In some embodiments, the average grain size of a material could be measured using high resolution transmission electron microscopy (TEM), for example.
In some embodiments, amorphous alloy materials can include two (or more) elements having a relatively large difference (e.g., greater than or equal to 10%) in atomic radii, a relatively large (e.g., at least 5 KJ/mole (or more specifically at least 7 KJ/mole, which is typically a negative heat of mixing, exothermic) heat of mixing, or combinations thereof. Such alloys may show an amorphous nature over relatively large concentration gradients. Illustrative examples of alloys that can be used in amorphous alloy blocker layers can include, for example Ta—Cr, Zr—Cr, Nb—Cr, Ni—Zr, Nb—Pd, Nb—Sb, Nb—Ir, Nb—Pt, Nb—Au, Zr—Pt, Zr—Ir, Zr—Au, Rh—Tb, Rh—Ta, Ta—Cr—N, Zr—Cr—N, Nb—Cr—N, or combinations thereof. In some embodiments, examples of alloys that can be used in amorphous alloy blocker layers can include, for example Ta—Cr, Zr—Cr, Nb—Cr, Ni—Zr, or combinations thereof. Further information regarding materials can be found in Materials Transactions, vol. 46, No. 12 (2005) pp. 2817 to 2829), the disclosure of which is incorporated herein by reference thereto.
In some embodiments, an amorphous alloy blocker layer can be used within the material of the NFT. In some embodiments, an amorphous alloy blocker layer can be used at least within the peg of a NFT that includes a peg and disc.
It should also be noted that more than one interlayer amorphous blocker layer could be present in a single peg (or other NFT portion). An illustrative embodiment of such a device can be seen in
In some embodiments, an amorphous alloy blocker layer can be used on an upper surface of the peg material. Such an embodiment is depicted in
In some embodiments, amorphous blocker layers can be utilized on or adjacent to one or more surfaces (more than simply as a seed, cap or both as depicted in
In some embodiments, when the NFT is in a larger device, the second surface 309 and the first surface 307 are facing the write pole and core of the waveguide respectively. In some embodiments, when the NFT is in a larger device, the third surface 308 and the fourth surface 311 are not facing the write pole or the core of the waveguide. More specifically, the third surface 308 would be located in front of the paper on which
Disclosed devices can include one or more amorphous blocker layers located on one or more surfaces of a NFT. In some embodiments, disclosed devices can include one or more amorphous blocker layers located on one or more surfaces of a peg of a NFT. In some embodiments, disclosed devices can include amorphous blocker layers located on two or more surfaces of a peg of a NFT. In some embodiments, disclosed devices can include amorphous blocker layers located on three or more surfaces of a peg of a NFT. In some embodiments, disclosed devices can include amorphous blocker layers located on four or more surfaces of a peg of a NFT. In some embodiments, disclosed devices can include amorphous blocker layers located on all five surfaces of a peg of a NFT. In some embodiments disclosed devices can include amorphous blocker layers located on each of the first surface 307, the second surface 309, the third surface 308, and the fourth surface 311.
Amorphous blocker layers such as those disclosed herein could also optionally be utilized in portions of the NFT other than the peg. For example, they could be utilized in the disc portion of the NFT, the heat sink portion of the NFT, or combinations thereof (it should be noted that in some embodiments, the disc and heat sink are considered to be the same structure and as such the disc will be referred to as a disc/heatsink hereafter).
In another example, not specifically depicted herein, an amorphous blocker layer can be disposed on one or more than one surface of the entire rod, for example. The rod can generally be described as the back portion of the peg (in a direction directed away from the ABS of the peg). Alternatively, the rod can be described by the process by which it is formed in that the peg is part of the rod, and the peg is described as the front portion (towards the ABS) only of the rod. In some embodiments, the rod can be the peg.
In some embodiments, amorphous blocker layers can have thicknesses of not less than 5 Å, or not less than 10 Å for example. In some embodiments, amorphous blocker layers can have thicknesses of not greater than 20 Å, or not less than 15 Å for example. The thickness (e.g., the average thickness) of an amorphous blocker layer can be measured using, for example, transmission electron microscopy (TEM), X-ray reflectivity (XRR), or x-ray photoelectron spectroscopy (XPS). The thickness can be determined using calibration from standard samples having known thicknesses, for example.
All scientific and technical terms used herein have meanings commonly used in the art unless otherwise specified. The definitions provided herein are to facilitate understanding of certain terms used frequently herein and are not meant to limit the scope of the present disclosure.
As used in this specification and the appended claims, “top” and “bottom” (or other terms like “upper” and “lower”) are utilized strictly for relative descriptions and do not imply any overall orientation of the article in which the described element is located.
As used in this specification and the appended claims, the singular forms “a”, “an”, and “the” encompass embodiments having plural referents, unless the content clearly dictates otherwise.
As used in this specification and the appended claims, the term “or” is generally employed in its sense including “and/or” unless the content clearly dictates otherwise. The term “and/or” means one or all of the listed elements or a combination of any two or more of the listed elements.
As used herein, “have”, “having”, “include”, “including”, “comprise”, “comprising” or the like are used in their open ended sense, and generally mean “including, but not limited to”. It will be understood that “consisting essentially of”, “consisting of”, and the like are subsumed in “comprising” and the like. For example, a conductive trace that “comprises” silver may be a conductive trace that “consists of” silver or that “consists essentially of” silver.
As used herein, “consisting essentially of,” as it relates to a composition, apparatus, system, method or the like, means that the components of the composition, apparatus, system, method or the like are limited to the enumerated components and any other components that do not materially affect the basic and novel characteristic(s) of the composition, apparatus, system, method or the like.
The words “preferred” and “preferably” refer to embodiments that may afford certain benefits, under certain circumstances. However, other embodiments may also be preferred, under the same or other circumstances. Furthermore, the recitation of one or more preferred embodiments does not imply that other embodiments are not useful, and is not intended to exclude other embodiments from the scope of the disclosure, including the claims.
Also herein, the recitations of numerical ranges by endpoints include all numbers subsumed within that range (e.g., 1 to 5 includes 1, 1.5, 2, 2.75, 3, 3.80, 4, 5, etc. or 10 or less includes 10, 9.4, 7.6, 5, 4.3, 2.9, 1.62, 0.3, etc.). Where a range of values is “up to” a particular value, that value is included within the range.
Use of “first,” “second,” etc. in the description above and the claims that follow is not intended to necessarily indicate that the enumerated number of objects are present. For example, a “second” substrate is merely intended to differentiate from another infusion device (such as a “first” substrate). Use of “first,” “second,” etc. in the description above and the claims that follow is also not necessarily intended to indicate that one comes earlier in time than the other.
Thus, embodiments of devices including a near field transducer (NFT) having at least one amorphous alloy layer are disclosed. The implementations described above and other implementations are within the scope of the following claims. One skilled in the art will appreciate that the present disclosure can be practiced with embodiments other than those disclosed. The disclosed embodiments are presented for purposes of illustration and not limitation.
This application is a continuation of U.S. application Ser. No. 15/372,512 filed on Dec. 8, 2016 and which claims priority to U.S. Provisional Application No. 62/264,574 filed on Dec. 8, 2015, the disclosure of which is incorporated herein by reference thereto
Number | Name | Date | Kind |
---|---|---|---|
4492873 | Dmitriev | Jan 1985 | A |
5482611 | Helmer | Jan 1996 | A |
5849093 | Andra | Dec 1998 | A |
5945681 | Tokiguchi | Aug 1999 | A |
6130436 | Renau | Oct 2000 | A |
6144098 | Iyer | Nov 2000 | A |
6589676 | Gui | Jul 2003 | B1 |
6632483 | Callegari | Oct 2003 | B1 |
6641932 | Xu | Nov 2003 | B1 |
6683426 | Kleeven | Jan 2004 | B1 |
6909103 | Platzgummer | Jun 2005 | B2 |
7018729 | Pocker | Mar 2006 | B2 |
7377228 | Mack | May 2008 | B2 |
7476855 | Huang | Jan 2009 | B2 |
7544958 | Low | Jun 2009 | B2 |
7609003 | Horsky | Oct 2009 | B2 |
7965464 | Batra | Jun 2011 | B2 |
7998607 | Ikeda | Aug 2011 | B2 |
8031561 | Hellwig | Oct 2011 | B2 |
8040761 | Kawamori | Oct 2011 | B2 |
8248891 | Lee | Aug 2012 | B2 |
8339740 | Zou | Dec 2012 | B2 |
8351151 | Katine | Jan 2013 | B2 |
8391108 | Peng | Mar 2013 | B2 |
8400902 | Huang | Mar 2013 | B2 |
8405056 | Amaldi | Mar 2013 | B2 |
8411393 | Zou | Apr 2013 | B2 |
8427925 | Zhao | Apr 2013 | B2 |
8514673 | Zhao | Aug 2013 | B1 |
8830800 | Pitcher | Sep 2014 | B1 |
8867322 | Chernyshov | Oct 2014 | B1 |
8913468 | Peng | Dec 2014 | B1 |
8934198 | Zou | Jan 2015 | B2 |
8971161 | Cheng | Mar 2015 | B2 |
8976634 | Cheng | Mar 2015 | B2 |
9099117 | Wessel | Aug 2015 | B2 |
9218829 | Cheng | Dec 2015 | B2 |
9224416 | Zhao | Dec 2015 | B2 |
9245573 | Sahoo | Jan 2016 | B2 |
9251830 | Duda | Feb 2016 | B1 |
9263074 | Huang | Feb 2016 | B2 |
9281002 | Brons | Mar 2016 | B2 |
20050012052 | Platzgummer | Jan 2005 | A1 |
20060238133 | Horsky | Oct 2006 | A1 |
20080230724 | Low | Sep 2008 | A1 |
20100123965 | Lee | May 2010 | A1 |
20100123967 | Batra | May 2010 | A1 |
20100190036 | Komvopoulos | Jul 2010 | A1 |
20100320403 | Amaldi | Dec 2010 | A1 |
20100329085 | Kawamori | Dec 2010 | A1 |
20110006214 | Bonig | Jan 2011 | A1 |
20110026161 | Ikeda | Feb 2011 | A1 |
20110096431 | Hellwig | Apr 2011 | A1 |
20110205863 | Zhao | Aug 2011 | A1 |
20120045662 | Zou | Feb 2012 | A1 |
20130161505 | Pitcher | Jun 2013 | A1 |
20130164453 | Pitcher | Jun 2013 | A1 |
20130164454 | Pitcher | Jun 2013 | A1 |
20130288077 | Dhawam | Oct 2013 | A1 |
20140004384 | Zhao | Jan 2014 | A1 |
20140113160 | Pitcher | Apr 2014 | A1 |
20140307534 | Zhou | Oct 2014 | A1 |
20140376352 | Cheng | Dec 2014 | A1 |
20150340052 | Sankar | Nov 2015 | A1 |
20160133277 | Cheng | May 2016 | A1 |
20160133280 | Cheng | May 2016 | A1 |
20160133288 | Zhao | May 2016 | A1 |
20160275972 | Zhao | Sep 2016 | A1 |
20160275979 | Sahoo | Sep 2016 | A1 |
20160284365 | Brons | Sep 2016 | A1 |
20160351211 | Blaber | Dec 2016 | A1 |
20160351221 | Blaber | Dec 2016 | A1 |
20160351222 | Blaber | Dec 2016 | A1 |
Number | Date | Country |
---|---|---|
0240088 | Oct 1987 | EP |
0580368 | Jan 1994 | EP |
0942072 | Sep 1999 | EP |
1328027 | Jul 2003 | EP |
2106678 | Oct 2008 | EP |
WO 9745834 | Dec 1997 | WO |
WO 2013163195 | Oct 2013 | WO |
WO 2013163470 | Oct 2013 | WO |
Entry |
---|
Al-Bayati et al., Junction Profiles of Sub keV Ion Implantation for Deep Sub-Quarter Micron Devices, IEEE, 2000, pp. 87-90. |
Angel et al., “Enhanced Low Energy Drift-Mode Beam Currents in a High Current Ion Implanter,” IEEE, 1999, pp. 219-222. |
Druz et al., “Diamond-Like Carbon Films Deposited Using a Broad, Uniform Ion Beam from an RF Inductively Coupled CH4-Plasma Source”, Diamond and Related Materials, vol. 7, No. 7, Jul. 1998, pp. 965-972. |
Liu et al., “Influence of the Incident Angle of Energetic Carbon Ions on the Properties of Tetrahedral Amorphous Carbon (ta-C) films”, Journal of Vacuum Science and Technology, vol. 21, No. 5, Jul. 25, 2003, pp. 1665-1670. |
Metallization: “Metallization”; chapter 5, In: Kris v. Srikrishnan and Geraldine C. Schwartz: “Handbook of Semiconductor Interconnection Technology, Second Edition”, 2006, CRC Press, Boca Raton, FL, USA, XP002711255, ISBN:978-1-4200-1765-6, pp. 311-382, Section 5.4.1.2 Adhesion; p. 320. |
Piazza et al., “Large Area Deposition of Hydrogenated Amorphous Carbon Films for Optical Storage Disks”, Diamond and Related Materials, vol. 13, No. 4-8, Apr. 2004, pp. 1505-1510. |
Robertson, J., “Diamond-Like Amorphous Carbon,” Materials Science and Engineering R 37, 2002, pp. 129-281. |
Satoh et al., “Evaluation of Adhesion Materials for Gold Line-and-Space Surface Plasmon Antenna on SO1-MOS Photodiode”, Silicon Nanoelectronics Workshop (SNW), 2010, IEEE, Piscataway, NJ, USA, Jun. 13, 2010, pp. 1-2. |
Vogt, K.W. et al., “Characterization of Thin Titanium Oxide Adhesion Layers on Gold Resistivity, Morphology, and Composition”, Surface Science, North-Holland, Amsterdam, NL, vol. 301, No. 1-3, Jan. 10, 1994, pp. 203-213. |
Number | Date | Country | |
---|---|---|---|
62264574 | Dec 2015 | US |
Number | Date | Country | |
---|---|---|---|
Parent | 15372513 | Dec 2016 | US |
Child | 15845227 | US |