Claims
- 1. A method of estimating a diamond wafer comprising the steps of;coating a surface of the diamond wafer with a thin opaque film of a thickness less than 100 nm, launching laser beams to the coated diamond surface from a laser scanning surface defect detection apparatus for letting the laser beams reflect at a surface of the coating film and at an interface between the coating film and the diamond surface, and counting the beams scattered by surface defects or particles on the diamond surface.
- 2. A method as claimed in claim 1, wherein the opaque film for coating the diamond wafer is a metal film or a non-metal film of a reflection rate of more than 50%.
- 3. A method as claimed in claim 2, wherein the opaque film for coating the diamond wafer is an aluminum film deposited by sputtering.
Priority Claims (1)
Number |
Date |
Country |
Kind |
9-290262 |
Oct 1997 |
JP |
|
Parent Case Info
This is a division of application Ser. No. 09/166,840, filed Oct. 6, 1998 now U.S. Pat. No. 6,210,780.
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Non-Patent Literature Citations (2)
Entry |
Gahlin, et al, The Effects of Compressive Stresses on the Abrasion of Diamond Coatings, Elsevier Science S.A., 1996, pp. 226-233, (No month). |
Choi, et al, “Surface Characterization of Diamond Films Polished by Thermomechanical Polishing Method”, Elsevier Science S.A., 1996, pp. 110-114, (No month). |