| Number | Name | Date | Kind |
|---|---|---|---|
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| 5218471 | Swanson et al. | Jun 1993 | |
| 5446588 | Missig et al. | Aug 1995 | |
| 5526185 | Herloski | Jun 1996 | |
| 5538674 | Nisper et al. | Jul 1996 | |
| 5581405 | Meyers et al. | Dec 1996 | |
| 5619380 | Ogasawara et al. | Apr 1997 | |
| 5631779 | Kashima | May 1997 | |
| 5715090 | Meyers | Feb 1998 | |
| 5768030 | Estelle et al. | Jun 1998 | |
| 5880879 | Foo | Mar 1999 | |
| 5966244 | Mukai et al. | Oct 1999 |
| Entry |
|---|
| G. J. Swanson, "Binary Optics Technology: The Theory and Design of Multi-Level Diffractive Optical Elements", Technical Report 854, Massachusetts Inst. Techn., Lincoln Laboratory, Aug. 1989. |