Patent Application
20210389580
The present invention concerns a digital microscope for capturing images of a sample to be microscopically examined with an extended depth of field. Furthermore, the present invention concerns a microscopic set.
The paper by Häusler, G. “A method to increase the depth of focus by two step image processing” in Optics Communications, Volume 6, Issue 1, September 1972, Pages 38-42, teaches a method to obtain an increased depth of field. That method consists of two steps. The first step is to produce a modified incoherent image of a three dimensional object which, though degraded, has the same degradation for all object planes. The second step is to filter this modified image in a coherent image processor to obtain an undegraded image with increased depth of focus.
US 2005/0057812 A1 shows a variable focus system that includes an electrovariable optic and a controller operatively configured for changing the focal configuration of the electrovariable optic. The electrovariable optic includes a plurality of movable optical elements that may be moved substantially in unison with one another so as to change either the focal length of the electrovariable optic, the direction of the focal axis of the electrovariable optic, or both. The variable focus system may be used in conjunction with an image source to construct a 3D floating image projector that projects a series of 2D image.
US 2013/0187669 A1 shows a calibration method for a micro-mirror array device. The micro-mirror array device may operate as a variable focal length lens. The calibration method comprises determining a capacitance value for each micro-mirror element in the array device at a number of predetermined reference angles to provide a capacitance-reference angle relationship. From the capacitance values, an interpolation step is carried to determine intermediate tilt angles for each micro-mirror element in the array. A voltage sweep is applied to the micro-mirror array and capacitance values, for each micro-mirror element in the array, are measured. For a capacitance value that matches one of the values in the capacitance-reference angle relationship, the corresponding voltage is linked to the associated tilt angle to provide a voltage-tilt angle characteristic which then stored in a memory for subsequent use.
US 2005/0225884 A1 teaches a three-dimensional imaging device with a variable focal micromirror array lens that is also known as Micromirror Array Lens System (MALS) and Micromirror Array Lens (MMAL). The MMAL is a reflective Fresnel lens. The imaging device further comprises an optical unit on which an image of an object at a given focal length of the MMAL is formed.
US 2014/0368920 A1 shows micro-mirror arrays that are configured for use in a variable focal length lens. The variable focal length lens comprises a micro-mirror array having a plurality of micro-mirror element arranged in at least a first section and a second section. Each micro-mirror element has a tilt axis and comprises, on each of two opposing sides of the tilt axis, at least one actuation electrode, at least one measurement electrode, and at least one stopper. Additionally, each micro-mirror element in the first section has a first tilt axis range. Each micro-mirror element in the second section has a second tilt axis range. The first tilt axis range is less than the second tilt axis range.
DE 10 2017 101 188 A1 is related to a method for viewing a specimen using a microscope which comprises an objective lens and an image sensor for converting an image formed on the image sensor by the objective lens. A field of view of the microscope can be varied by selecting a section of the image sensor. In one step of the method, an initial image of at least a partial section of the specimen is captured with the microscope, for which a first field of view is selected on the microscope. The initial image is analysed to determine at least two differing fields of view forming a partial area image. A partial area of the initial image is formed by each of the fields of view forming a partial area image. Images of the partial areas of the specimen are captured for each of the determined fields of view forming a partial area image.
DE 10 2017 107 489 B3 is related to a microscope assembly for the three-dimensional capture of a sample to be microscopically examined and for the display of three-dimensional images of the sample under the microscope. The microscope assembly comprises an image capture unit for obtaining photographs of the sample and an image processing unit for generating three-dimensional images of the sample from the photographs. In addition, the microscope assembly comprises at least one display unit for the three-dimensional display of the generated three-dimensional images of the sample. The microscope assembly is configured with an image refresh rate of at least 1 frame per second.
DE 10 2017 123 510 A1 is related to a method for acquiring a stack of microscopic images of a specimen. The microscopic images of the stack are acquired from different focus positions. A plurality of the microscopic images of the specimen is respectively acquired from at least some of the focus positions using different settings of an illumination unit for illuminating the specimen. The illumination settings with which the microscopic images of the specimen are acquired are decided upon individually in each case at least for several of the focus positions.
WO 2005/119331 A1 teaches a variable focal length lens comprising a plurality of micromirrors with two degrees of freedom rotation and one degree of freedom translation. The two degrees of freedom rotation and one degree of freedom translation of the micromirrors are controlled to change the focal length of the lens and to satisfy the same phase conditions for the lights. The lens is diffractive Fresnel lens.
U.S. Pat. No. 6,934,073 B1 teaches a micromirror array lens that is also known as Micromirror Array Lens System (MALS) and Micromirror Array Lens (MMAL). The micromirror array lens consists of many micromirrors with one degree of freedom rotation and one degree of freedom translation and actuating components. As a reflective variable focal length lens, the array of micromirrors makes all lights scattered from one point of an object have the same periodic phase and converge at one point of image plane. As operational methods for the lens, the actuating components control the positions of micromirrors electrostatically and/or electromagnetically. The optical efficiency of the micromirror array lens is increased by locating a mechanical structure upholding micromirrors and the actuating components under micromirrors. The lens can correct aberration by controlling each micromirror independently.
WO 2007/134264 A2 shows a three-dimensional imaging system with a variable focal length micromirror array lens. The micro mirror array lens comprises a plurality of micromirrors, wherein each of the micromirrors is controlled to change the focal length of the Micromirror Array Lens. The imaging system further comprises an optical unit and an image processing unit which produces three-dimensional image data using the images captured by the optical unit and the focal length information of the Micromirror Array Lens.
EP 3 486 706 A1 teaches a functional module for a microscope. That functional module comprises a mechanical interface for removable mounting the functional module to a module support of the microscope. The functional module further comprises an optical interface for establishing an optical path from an objective of the microscope to the functional module. Furthermore, the functional module comprises at least one image sensor as well as a first microelectromechanical optical system and a second microelectromechanical optical system. The first microelectromechanical optical system is configured for enhancing a depth of field on a first optical subpath that is directed to the image sensor. The second microelectromechanical optical system is configured for enhancing a depth of field on a second optical subpath that is directed to the image sensor.
An object of the present invention is to provide a digital microscope and a microscopic set that allow recording microscopic images with an improved image quality with extended depth of field and maintaining lateral resolution over extended depth of field.
The aforementioned object is achieved by a microscope according to the enclosed claim 1 and by a microscopic set according to the enclosed claim 12.
The microscope according to the invention is a digital microscope in which microscopic images are recorded electronically and processed digitally. This digital microscope preferably does not comprise any oculars.
The digital microscope is configured for capturing microscopic images of a sample to be microscopically examined, wherein these images show an extended depth of field. The depth is preferably increased by a factor of at least 5 and more preferably of at least 10, and more preferably of at least 20, and even more preferably of at least 40. The digital microscope is preferably configured for processing the microscopic images with an extended depth of field to an image with 2.5 or three dimensions. The digital microscope is preferably configured for processing of at least 1 image with 2.5 or three dimensions per second. The digital microscope is further preferably configured for processing of at least 10 images with 2.5 or three dimensions per second.
The digital microscope comprises a stand with an opening for receiving an optical unit. The stand is configured to be placed onto a surface of a workspace, e. g. onto a table.
Further, the digital microscope comprises an optical unit for capturing microscopic images of the sample to be microscopically examined. The optical unit is removably mounted onto the stand. The optical unit is carried by the stand.
The optical unit comprises an objective for gathering light from the sample to be microscopically examined. The objective preferably comprises a plurality of optical lenses.
The optical unit comprises at least one image sensor for converting an image transferred from the objective to the image sensor into an electrical signal. From there, the image sensor converts an image taken by the objective into an electrical signal. The image sensor is preferably a semiconductor, e.g., a CMOS. The image sensor is preferably further equipped with an FPGA-based circuitry or a CPU-based circuitry to further enhance speed or quality of image processing or a processing of a stack of images.
Furthermore, the optical unit comprises a microelectromechanical optical system on an optical path from the objective to the image sensor. The microelectromechanical optical system is configured for extending a depth of field on the optical path from the objective to the image sensor. The microelectromechanical optical system is preferably a Micromirror Array Lens System (MALS) or a Micromirror Array Lens (MMAL)
According to the invention, the optical unit comprises a mounting unit. That mounting unit performs at least three functions. The mounting unit comprises a first portion for removable mounting the mounting unit into the opening of the stand. Thereby, the optical unit is mounted into the opening of the stand. Hence, the optical unit can be removable mounted onto the stand.
The mounting unit further comprises a second portion for removable mounting an illumination unit onto the mounting unit. Hence, the illumination unit can be removable mounted onto the optical unit. The illumination unit is configured to illuminate the sample to be microscopically examined. The microscope preferably comprises at least one illumination unit, wherein this one illumination unit and one of the illumination units, respectively, is removably mounted onto the second portion of the mounting unit. Preferably, the illumination unit can alternatively be mounted onto the objective. The mounting of the illumination unit is preferably further supported by providing an interface for recognition of the illumination unit and preferably for further integration of the illumination unit into functional communication path between different sub-modules. The interface is preferably an electric, wireless, optical, or contactless interface.
The mounting unit further comprises a third portion for removable mounting an additional lens onto the mounting unit into an optical axis of the objective. Hence, the objective can be supplemented by the exchangeable additional lens. A magnification of the microscope is changed by the additional lens. The microscope preferably comprises at least one additional lens, wherein this one additional lens and one of the additional lenses, respectively, is removably mounted onto the third portion of the mounting unit.
The additional lens and the additional lenses, respectively, preferably comprise a mounting interface for mounting a further illumination unit. The third portion of the mounting unit can be preferably used for mounting further components like an additional opto-mechanical unit, a set of mirrors for tilted 360 degree observation or a sample manipulation tool, that can apply magnetic or electric field on a sample.
A special benefit of the microscope according to the invention is that images with an extended depth of field (EDoF) can be captured with different optical magnifications by adding and/or exchanging the additional lens. A large object field on the low magnification side and a high optical resolution on the high magnification side can be provided. Since the microscope is configured for removable mounting the additional lens a high reproducibility of the optical configuration is guaranteed. The mounting unit ensures a robustness of the mounted additional lens against vibrations in a shop floor. Since the microscope is configured for removable mounting of the additional lens different additional lenses can be exchanged against each other many times during an operation time of the microscope, preferably, at least 100 times during the operation time of the microscope. The mounting unit allows an easy exchange of the additional lenses and it prevents errors by the user. Furthermore, the mounting unit allows a flexible mounting of the optical unit to different types of the stand and a flexible mounting of different types of the optical unit to the stand.
In preferred embodiments of the microscope according to the invention, the opening of the stand shows a circular cross section. The first portion of the mounting unit shows a circular cross section that fits into the circular cross section of the opening of the stand. The circular cross sections allow an easy removable mounting of the optical unit onto the stand. The optical unit is mounted by putting the first portion of the mounting unit into the opening of the stand. The stand comprises preferably a clamping element for clamping the first portion of the mounting unit within the opening of the stand. In alternative embodiments, the cross sections of the first portion of the mounting unit and the opening of the stand may be of rectangular, polygonal elliptical or irregular shape.
Preferably, the first portion of the opening unit is of cylindrical shape. That cylindrical shape can be easily put into the opening of the stand. That cylindrical shape can be reliably fixed within the opening of the stand. That cylindrical shape is preferably arranged coaxially to the optical axis that is preferably arranged vertically. It is a standard in the technical field of microscopes that opening units of stands are of cylindrical shape. Many types of stands provide such an opening.
Preferably, the second portion of the opening unit is of cylindrical shape. It is a standard in the technical field of microscopes that illumination units can be removably mounted onto portions of cylindrical shape. Many types of microscopes provide such a portion. Hence, many types of illumination units can be mounted onto the microscope of the invention.
In preferred embodiments of the microscope according to the invention, the first portion and the second portion of the mounting unit are arranged coaxially. Preferably, the first portion and the second portion are arranged coaxially to the optical axis that is preferably arranged vertically. The first portion and the second portion of the mounting unit are preferably arranged one upon the other. The first portion and the second portion of the mounting unit are preferably arranged immediately next to each other. The mounting unit may comprise an extension at the first portion or the second portion.
Preferably, a diameter of the first portion of the mounting unit is bigger than a diameter of the second portion of the mounting unit. Hence, a circumferential step is formed between the first portion and the second portion.
In preferred embodiments of the microscope according to the invention, the diameter of the first portion of the mounting unit is between 50 mm and 100 mm. That diameter is preferably 76 mm since that is a common standard in the technical field of microscopes. Hence, that diameter of the first portion of the mounting unit is preferably configured according to the 76 mm standard. The diameter of the second portion of the mounting unit is preferably between 50 mm and 100 mm. That diameter is preferably 66 mm since that is a common standard in the technical field of microscopes. Hence, that diameter of the second portion of the mounting unit is preferably configured according to the 66 mm standard.
In preferred embodiments of the microscope according to the invention, the third portion of the mounting unit is formed as a part of a bayonet mount for receiving a counterpart of the bayonet mount. That counterpart is formed at the additional lens. Hence, the additional lenses can be mounted easily and reliably onto the optical unit. That counterpart of the bayonet mount is preferably also formed at a further illumination or at a set of mirrors for tilted 360 degree observation or at a manipulation tool for manipulating the sample.
In preferred embodiments of the microscope according to the invention, the first portion of the mounting unit, the second portion of the mounting unit, and the third portion of the mounting unit are arranged coaxially. Preferably, the first portion of the mounting unit, the second portion of the mounting unit, and the third portion of the mounting unit are arranged coaxially to the optical axis that is preferably arranged vertically. The first portion of the mounting unit, the second portion of the mounting unit, and the third portion of the mounting unit are preferably arranged one upon the other. The second portion of the mounting unit and the third portion of the mounting unit are preferably arranged immediately next to each other.
The third portion of the mounting unit shows a diameter that is preferably between 10 mm and 50 mm.
In preferred embodiments of the microscope according to the invention, the counterpart of the bayonet mount is formed by at least two wings at a circumference of the additional lens. Preferably, there are three wings at a circumference of the additional lens. These wings and/or spaces between these wings show arcs that are preferably different in order to allow only one rotational position when mounting the bayonet mount. Accordingly, these wings are preferably not symmetrical. The part of the bayonet mount that is formed by the third portion of the mounting unit is preferably formed by an opening in the mounting unit. This opining shows at least two slots for receiving the wings at a circumference of the additional lens. Each of the additional lenses comprises the counterpart of the bayonet mount, wherein all of the counterparts fit to the part of the bayonet mount that is formed by the third portion of the mounting unit.
In preferred embodiments of the microscope according to the invention, the third portion of the mounting unit comprises first electrical contacts for electrically contacting second electrical contacts that are comprised by the additional lens. The first electrical contacts electrically contact the second electrical contacts when the additional lens is mounted onto the third portion of the mounting unit. The second electrical contacts of the additional lens are electrically connected to an identification circuit that is arranged within or at a ring of the lens. Preferably, each of the additional lenses shows such second electrical contacts. Hence, an identification of the mounted additional lens is possible at the microscope. The number of the first electrical contacts is preferably four. The number of the second electrical contacts is preferably four.
In preferred embodiments of the microscope according to the invention, the at least one additional lens is optically configured for providing an additional optical magnification of the sample to be microscopically examined. Hence, the optical magnification of the microscope is changed when one of the additional lenses is removably mounted onto the mounting unit. The optical magnification of the microscope as a whole depends on the optical magnification of the objective and on the optical magnification of the mounted additional lens. That optical magnification of the microscope is preferably between 0.2 and 5. In the case that no additional lens is mounted onto the microscope the optical magnification of the microscope only depends on the optical magnification of the objective. The optical magnification of the objective is preferably between 1 and 1.5.
The image sensor shows a length and/or a width that is preferably between ¾ inches (1.905 cm) and 3/2 inches (3.8 cm). A field of view in relation to the image sensor with a length of 1 inch (2.54 cm) shows a length of preferably at least 30 mm if the optical magnification of the microscope including the mounted additional lens is less than 0.5. A field of view in relation to the image sensor with a length of 1 inch (2.54 cm) shows a length of preferably at most 6 mm if the optical magnification of the microscope including the mounted additional lens is more than 2.
If the optical magnification of the microscope including the mounted additional lens is more than 2 an extended depth of field effectuated by the microelectromechanical optical system is preferably at least ±0.5 mm. If the optical magnification of the microscope including the mounted additional lens is less than 0.5 an extended depth of field effectuated by the microelectromechanical optical system is preferably at least ±30 mm.
Each of the additional lenses preferably comprises a spacer ring that defines a distance between a lens element of the additional lens and a mounting element of the additional lens. Additionally or alternatively to the spacer, a further element like a dedicated illumination unit is preferably mounted between the lens element of the additional lens and the mounting element of the additional lens. The mounting element of the additional lens is preferably the counterpart of the bayonet mount. A correct function of the additional lens together with the objective is ensured by the defined distance. A working distance preferably extends from the removably mounted additional lens, especially, from the lens element of the removably mounted additional lens to a sample holder of the microscope. The sample holder is preferably a part of the stand. The working distance is preferably vertical. The working distance is preferably variable from 10 mm to 150 mm. The working distance is preferably variable over a range of at least 70 mm, more preferably at least 100 mm.
In preferred embodiments of the microscope according to the invention, the stand comprises a lift for lifting and lowering the optical unit. The working distance is variable by using the lift. The working distance is preferably also variable by adjusting the sample holder. The lift preferably comprises a vertical pillar and a horizontal arm. The arm is borne by the pillar.
In preferred embodiments of the microscope according to the invention, the optical unit comprises a housing that covers at least the image sensor and the microelectromechanical optical system. The housing is preferably permanently fixed to the mounting unit. The housing is preferably permanently fixed to the objective.
In preferred embodiments of the microscope according to the invention, the optical unit is configured for an operation in a fixed combination of at least the microelectromechanical optical system, the mounting unit and the objective. That fixed combination preferably comprises the housing, too. A special benefit of this fixed combination is that it guarantees high reproducibility of the optical configuration since the user has not to exchange anything of this combination. The user has to exchange the additional lenses.
In preferred embodiments of the microscope according to the invention, the image sensor is also exchangeable. Hence, different types of the image sensor can be mounted into the optical unit.
In preferred embodiments of the microscope according to the invention, the optical unit comprises a first beam splitter for optically coupling the microelectromechanical optical system into the optical path from the objective to the image sensor. Hence, the microelectromechanical optical system is configured for extending a depth of field on the optical path. The optical unit preferably comprises a first mirror for directing light from the first beam splitter to the image sensor.
In preferred embodiments of the microscope according to the invention, the microelectromechanical optical system comprises an array of moveable micromirrors that is also known as Micromirror Array Lens System (MALS) and Micromirror Array Lens (MMAL). Each of the movable micromirrors shows at least one degree of freedom rotation and one degree of freedom translation. The degree of freedom translation of the moveable micromirrors of the microelectromechanical optical system is preferably along to the optical path.
The microelectromechanical optical system is preferably a mirror array lens system. Such mirror array lens systems are also known as Micromirror Array Lens System (MALS) and Micromirror Array Lens (MMAL) and they are offered under the trademark MALS.
In preferred embodiments of the microscope according to the invention, the removable mountable illumination unit is formed as a ring-light illumination. If the illumination unit is removably mounted to the third portion of the mounting unit the ring-light illumination is coaxial to the optical axis that is preferably vertical. The ring-light illumination preferably surrounds the mounted additional lens.
The removable mountable illumination unit is preferably of circular ring shape. The illumination unit preferably comprises a plurality of lighting elements that are arranged on circles on the circular ring shape. The lighting elements are preferably light-emitting diodes (LED). Each circle comprises a plurality of the LEDs. The circles are preferably concentric. The circles preferably lie in a plane that is perpendicular to the optical axis of the microscope. That plane is preferably horizontal. Preferably, there are multiple illumination planes possible with different or with the same orientation of the lighting elements.
In preferred embodiments of the microscope according to the invention, the circles of the lighting elements are separately powerable. Hence, each of the circles can individually controlled for emitting light.
Each of the circles of the lighting elements is preferably subdivided into at least four sectors. These sectors are preferably equal. These sectors of the lighting elements are separately powerable. Hence, each of the sectors can individually controlled for emitting light. Preferably, each of the sectors of each of the circles is separately powerable. The number of the sectors is preferably eight.
Each of the circles of the lighting elements shows a diameter. These diameters are different. The biggest of these diameters is preferably bigger than the twofold smallest of these diameters. The biggest of these diameters is preferably between 5 cm and 15 cm. The smallest of these diameters is preferably between 2 cm and 7 cm.
The circles and/or sectors of the lighting elements of the illumination unit allow a homogenous illumination of the sample over the complete field of view and for the different magnifications by the additional lenses.
In preferred embodiments of the microscope according to the invention, the optical unit comprises a coaxial illumination unit that is fixedly mounted to the objective. The coaxial illumination unit is preferably located in the housing. The coaxial illumination unit preferably comprises a single full-area illumination unit or a set of illumination areas. The number of illumination areas is preferably two or four or more. The optical unit preferably comprises a second beam splitter for coupling light of the coaxial illumination unit into the optical path from the image sensor to the sample. The optical unit preferably comprises a second mirror for directing light of the illumination unit to the second beam splitter. The second mirror is preferably moveable in order to compensate the additional distances caused by the mounting unit. The second beam splitter and the second mirror are preferably also located in the housing.
Preferred embodiments of the microscope according to the invention further comprise a control circuitry for controlling the microelectromechanical optical system and the image sensor. Preferably, the control circuitry is further configured for processing images converted by the image sensor.
Preferably, the control circuitry is further configured for forming a lens surface of the microelectromechanical optical system that is preferably a Micromirror Array Lens System (MALS) or Micromirror Array Lens (MMAL).
Preferably, the control circuitry is further configured for taking a plurality of images with different values of focus resulting in a stack of images. The different values of focus are obtained by controlling the microelectromechanical optical system, especially, by moving the movable micromirrors of the microelectromechanical optical system, more especially; by moving the movable micromirrors of the microelectromechanical optical system to form a lens surface of the microelectromechanical optical system each with varying values of the focal length.
Preferably, the control circuitry is further configured for processing the stack of images to an image with an extended depth of field.
Preferably, the control circuitry is further configured for processing the stack of images or the image with an extended depth of field to achieve a 2.5-dimensional image or a three-dimensional image. Preferably, the control circuitry is further configured for processing a plurality of the stacks of images or a plurality of the images with an extended depth of field to achieve a three-dimensional image.
Preferably, the control circuitry is further configured to identify the mounted additional lens by reading out the identification circuit of the mounted additional lens. Preferably, calibration data for each of the additional lenses are stored in the control circuitry or in the identification circuit. The control circuitry is preferably configured for using these data in order to calibrate the microscope adequately to the mounted additional lens.
Preferably, the control circuitry is further configured to control the mounted illumination unit, especially, to control the individual circles and/or individual sectors of the lighting elements of the mounted illumination unit.
The control circuitry is preferably located in the housing.
The optical unit preferably comprises an electrical power supply that supplies the microelectromechanical optical system and the image sensor. The electrical power supply preferably further supplies the coaxial illumination unit. The electrical power supply preferably further supplies the control circuitry. The electrical power supply preferably further supplies the mounted illumination unit.
The optical unit preferably comprises a first data interface. The optical unit is controllable via this first data interface, e.g., by a PC. This first data interface is preferably a USB interface, a GigE interface, a CamerLink interface, or a CoaxExpress interface.
The optical unit preferably comprises a second data interface that is connected to a light controller for controlling the mounted illumination unit.
The microscopic set comprises the microscope according to the invention and at least two of the additional lenses each mountable onto the third portion of the mounting unit. The additional lenses show different optical magnifications. The microscopic set preferably comprises a preferred embodiment of the microscope according to the invention.
A special benefit of the microscopic set according to the invention is that it provides a microscope and additional lenses for capturing images with an extended depth of field with different optical magnifications. The optical magnification can be changed easily by exchanging the additional lenses.
The optical magnification of the microscope as a whole depends on the optical magnification of the objective and on the optical magnification of the mounted additional lens. That common optical magnification of the objective and the mounted additional lens is preferably between 0.2 and 5. A common optical magnification of the objective and the additional lens showing the biggest optical magnification is preferably bigger than a fivefold common optical magnification of the objective and the additional lens showing the smallest optical magnification. The common optical magnification of the objective and the additional lens showing the smallest optical magnification is preferably smaller than 0.6. The common optical magnification of the objective and the additional lens showing the biggest optical magnification is preferably bigger than 2.
The microscopic set preferably comprises at least two different illumination units each mountable onto the second portion of the mounting unit. Hence, the microscope can be easily adapted in order to illuminate different samples or in order to microscopically examine a sample with different optical magnifications.
Additional advantages, details and refinements of the invention will become apparent from the following description of preferred embodiments of the invention, making reference to the drawing. There are shown:
The microscope further comprises an optical unit 07 that is held by the stand 01. The optical unit 07 comprise an objective 08, an image sensor 09 (shown in
A second function is to allow a removable mounting of a ring-light illumination unit 17 (shown in
A third function is to allow a removable mounting of an additional lens 19 (shown in
The ring-light illumination unit 17 can alternatively be mounted on the additional lens 19 (shown in
The mounting unit 13 is hollow and surrounds the objective 08. After the additional lens 19 (shown in
Light 33 of the coaxial illumination unit 27 is directed via the second mirror 28 to the illumination beam splitter 31 in order to direct it through the objective 08, a second λ/4 waveplate 36, and the removably mounted additional lens 19 to a sample 34.
Light 37 reflected by the sample 34 is directed through the removably mounted additional lens 19, the second λ/4 waveplate 36, the objective 08, the illumination beam splitter 31, the detection beam splitter 32, and the first λ/4 waveplate 26 to the microelectromechanical optical system 12.
Light 38 reflected by the microelectromechanical optical system 12 is directed through the first λ/4 waveplate 26, the detection beam splitter 32, and the first mirror 29 to the image sensor 09.
The removably mounted ring-light illumination unit 17 also illuminates the sample 34. Hence, the sample 34 can be illuminated by the fixed coaxial illumination unit 27 and/or the removably mounted ring-light illumination unit 17.
01 stand
02 base plate
03 pillar
04 arm
05
06 knob
07 optical unit
08 objective
09 image sensor
10
11 housing
12 microelectromechanical optical system
13 mounting unit
14 first portion
15
16 opening
17 ring-light illumination unit
18 second portion
19 additional lens
20
21 third portion
22 optical axis
23
24
25
26 first λ/4 waveplate
27 coaxial illumination unit
28 second mirror
29 first mirror
30
31 illumination beam splitter
32 detection beam splitter
33 light
34 sample
35
36 second λ/4 waveplate
37 reflected light
38 reflected light
39
40
42 circle
43 sector
| Number | Date | Country | Kind |
|---|---|---|---|
| 20 180 212.1 | Jun 2020 | EP | regional |
