Number | Name | Date | Kind |
---|---|---|---|
2851497 | Stearns et al. | Sep 1958 | |
3009005 | Schaffel | Nov 1961 | |
4134811 | De Poortere et al. | Jan 1979 | |
4758639 | Koyanagi et al. | Jul 1988 |
Number | Date | Country |
---|---|---|
1000000 | Nov 1976 | CAX |
Entry |
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Chemical Abstracts vol. 98, 1983 No. 98:82425c "Multilayer Interconnecting Structure". |
Chemical Abstracts vol. 100, No. 100:219136r "Dry Photochemical Etching for Pattern Formation". |
Chemical Abstracts vol. 101, 1984 No. 101:46307n "Negative-type Photoresist". |
David M. Wiles, "Polymerization of Alpha-Beta-Unsaturated Carbonyl Compounds" pp. 223-281 from Structure and Mechanism in Vinyl Polymerization 1969. |