Microelectromechanical systems (MEMS) include micro mechanical elements, actuators, and electronics. Micromechanical elements may be created using deposition, etching, and/or other micromachining processes that etch away parts of substrates and/or deposited material layers or that add layers to form electrical and electromechanical devices. One type of MEMS device is called an interferometric modulator. As used herein, the term interferometric modulator or interferometric light modulator refers to a device that selectively absorbs, transmits, and/or reflects light using the principles of optical interference. In certain embodiments, an interferometric modulator may comprise a pair of conductive plates, one or both of which may be transparent and/or reflective in whole or part and capable of relative motion upon application of an appropriate electrical signal. In a particular embodiment, one plate may comprise a stationary layer deposited on a substrate and the other plate may comprise a metallic membrane separated from the stationary layer by an air gap. As described herein in more detail, the position of one plate in relation to another can change the optical interference of light incident on the interferometric modulator. Such devices have a wide range of applications, and it would be beneficial in the art to utilize and/or modify the characteristics of these types of devices so that their features can be exploited in improving existing products and creating new products that have not yet been developed.
One aspect of the invention is a dimming mirror, comprising a plurality of interferometric light modulators and a control circuit adapted to configure the plurality of interferometric light modulators to at least one of a plurality of predefined states, including a first state having a substantially reflective appearance and a second state having a dimmed visual appearance as contrasted with the first state.
Another aspect of the invention is a method of using a dimming mirror, comprising receiving a signal indicative of one of a plurality of predefined states, including a first state having a substantially reflective appearance and a second state having a dimmed visual appearance as contrasted with the first state and setting a plurality of interferometric light modulators into the indicated state.
Typical usage of an interferometric light modulator involves taking advantage of the optical properties of the device. In some embodiments, the interferometric light modulator is a bistable device having two states, each with different optical properties. The state a particular modulator is in is controllable by the application of an appropriate electrical signal. Thus, the interferometric light modulator is well-suited for display applications. Interferometric modulators can be used in a variety of display applications, including motion (e.g., video) or stationary images (e.g., still image), and whether textual or pictorial. Interferometric modulators may be used in or associated with a variety of electronic devices such as, but not limited to, mobile telephones, wireless devices, personal data assistants (PDAs), hand-held or portable computers, GPS receivers/navigators, cameras, MP3 players, camcorders, game consoles, wrist watches, clocks, calculators, television monitors, flat panel displays, computer monitors, auto displays (e.g., odometer display, etc.), cockpit controls and/or displays, display of camera views (e.g., display of a rear view camera in a vehicle), electronic photographs, electronic billboards or signs, projectors, architectural structures, packaging, and aesthetic structures (e.g., display of images on a piece of jewelry).
More simply, taking advantage of the bistable nature of a modulator, an array of interferometric modulators can take on a plurality of states, wherein each state represents a transition from fully reflective to a dimmed state. Such an array could find use, among other applications, as the rear-view mirror of a vehicle. Such a designed mirror could be dimmed to reduce glare from the headlights of other vehicles. The user of a dimming mirror comprising an array of interferometric modulators may set the array in one of a plurality of preconfigured states, wherein each state represents a transition from a reflective state to a dimmed state. It is also possible to equip the dimming mirror with a sensor, which would sense the amount of light impinging on the mirror and adjust the array of interferometric modulators accordingly.
The optical stacks 16a and 16b (collectively referred to as optical stack 16), as referenced herein, typically comprise several fused layers, which can include an electrode layer, such as indium tin oxide (ITO), a partially reflective layer, such as chromium, and a transparent dielectric. The optical stack 16 is thus electrically conductive, partially transparent, and partially reflective, and may be fabricated, for example, by depositing one or more of the above layers onto a transparent substrate 20. The partially reflective layer can be formed from a variety of materials that are partially reflective such as various metals, semiconductors, and dielectrics. The partially reflective layer can be formed of one or more layers of materials, and each of the layers can be formed of a single material or a combination of materials.
In some embodiments, the layers of the optical stack 16 are patterned into parallel strips, and may form row electrodes in a display device as described further below. The movable reflective layers 14a, 14b may be formed as a series of parallel strips of a deposited metal layer or layers (orthogonal to the row electrodes of 16a, 16b) deposited on top of posts 18 and an intervening sacrificial material deposited between the posts 18. When the sacrificial material is etched away, the movable reflective layers 14a, 14b are separated from the optical stacks 16a, 16b by a defined gap 19. A highly conductive and reflective material such as aluminum may be used for the reflective layers 14, and these strips may form column electrodes in a display device.
With no applied voltage, the gap 19 remains between the movable reflective layer 14a and optical stack 16a, with the movable reflective layer 14a in a mechanically relaxed state, as illustrated by the pixel 12a in
As the above described dimming mirror includes an array of interferometric light modulators, it may be possible to use the same array for other purposes, such as displaying images or information.
The foregoing description sets forth various preferred embodiments and other exemplary but non-limiting embodiments of the inventions disclosed herein. The description gives some details regarding combinations and modes of the disclosed inventions. Other variations, combinations, modifications, modes, and/or applications of the disclosed features and aspects of the embodiments are also within the scope of this disclosure, including those that become apparent to those of skill in the art upon reading this specification. Thus, the scope of the inventions claimed herein should be determined only by a fair reading of the claims that follow.
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