This application claims priority from Japanese Patent Application Serial No. 2011-116960 filed May 25, 2011, the contents of which are incorporated herein by reference in its entirety.
The present invention relates to a discharge lamp lighting apparatus, which can be suitably used, for example, as a light source for a projector apparatus, an exposure apparatus etc.
A short arc type discharge lamp, in which a pair of electrodes is arranged so as to face each other in an arc tube, may be used as a light source of a projector apparatus, an exposure apparatus etc. Japanese Patent Application Publication No. 2009-193768 describes such a discharge lamp with electrodes that each comprise an electrode head portion and an electrode axis portion that are integrally formed with each other by cutting and a coil that is wound around the electrode head portion. Japanese Patent Application Publication No. 2005-19262 describes a discharge lamp with an electrode in which a coil portion is formed by melting a coil wound around an electrode head portion. Moreover, Japanese Patent Application Publication No. 20010-165661 describes a discharge lamp with an electrode in which a cylindrical portion whose outer diameter is the same as a diameter of a back end of an electrode head portion is formed on a back end face of the electrode head portion.
However, as to these discharge lamps, if the lamp is lighted for a long time, there is a problem that damage such as a crack and an electrode crease, etc. arises in, for example, part of an electrode axis portion, which projects in the arc tube.
However, as a result of the inventors' earnest examination into the causes of such damage of the electrode axis portion, it turns out that vibration of the electrode is generated by a ripple in alternating current supplied to such a discharge lamp, so that the electrode axis portion is damaged.
Specifically, as shown in
The present invention was made in view of the above-mentioned background, and it is an object of the present invention to offer a discharge lamp lighting apparatus capable of preventing or suppressing damage of an axis portion of an electrode, even when the discharge lamp is lighted for a long time.
A discharge lamp lighting apparatus according to embodiments of the present invention comprises a short arc type discharge lamp including an arc tube in which a pair of tungsten electrodes is arranged so as to face each other, each electrode having an electrode head portion, which is formed at the tip of an electrode axis portion, the electrode axis portion including a projection portion that projects into the arc tube, and a power supply unit, which supplies alternating current to the discharge lamp, configured to supply the alternating current such that a relation of a natural frequency fe (Hz) of the electrodes in the arc tube, which is obtained by a formula (1) shown below, a ripple frequency fd (Hz) of the alternating current, and a ripple power Pr (W) of the alternating current, satisfies a formula (2) shown below:
In the formula (1), for a given electrode, an eigenvalue of bending vibration of a cantilever having a concentrated mass in the electrode is represented as “a”, a value obtained by multiplying 0.623 by a distance (mm) from a base end of the projection portion of the electrode axis portion to the center of gravity of the electrode head portion, is represented as “le”, a Young's modulus of the electrode is represented as “E”, a second moment of area of the electrode axis portion is represented as “I”, and a density of the electrode is represented as “ρ”, and a cross-sectional area of a cross-section of the electrode axis portion taken along a direction perpendicular to an axial direction is represented as “S”.
In the formula (2), the volume (mm3) of the electrode head portion is represented as “Vh” and the volume (mm3) of the projection portion of the electrode axis portion is represented as “Va”.
In the discharge lamp lighting apparatus according to the present invention, it is desirable that the purity of the tungsten, which forms the electrodes, is 5N or more.
According to the discharge lamp lighting apparatus of the present invention, when alternating current supplied to the discharge lamp from a power supply unit satisfies the above-mentioned formula (2), since vibration produced in the electrode(s) during lighting of the discharge lamp is small, even if the discharge lamp is lighted for a long time, it is possible to prevent or control damage or breakage in the electrode axis portion.
Other features and advantages of the present discharge lamp lighting apparatus will be apparent from the ensuing description, taken in conjunction with the accompanying drawings, in which:
A discharge lamp lighting apparatus according to embodiments of the present invention is explained below. The discharge lamp lighting apparatus according to the present invention comprises a short arc type discharge lamp and a power supply unit, which supplies alternating current to the discharge lamp.
The arc tube 11 is made of, for example, silica glass, and, for example, mercury, a noble gas, and a halogen are enclosed in the light emission section 12 of the arc tube 11. The mercury is enclosed as light emitting material and the amount of the enclosed mercury is, for example, 0.08 mg/mm3 or more. The noble gas is enclosed in order improve the lighting starting nature of the lamp. The pressure of the enclosed noble gas is 10-26 kPa in static pressure. Moreover, as the noble gas, argon gas, for example, can be suitably used. The halogen forms a halogen cycle in the light emission section 12, and controls tungsten, which is an electrode substance, so that it does not to adhere to the inner wall of the light emission section 12. The amount of the enclosed halogen is, for example, 1×10−6 to 1×10−2 μmol/mm2. Moreover, iodine, bromine, chlorine, etc. can be used as the halogen.
The step down chopper circuit 21 comprises a switching element Qx, which is connected to a plus terminal (+) of a power supply, direct current voltage being supplied to the switching element Qx; a reactor Lx; a diode Dx whose cathode side terminal is connected between a connection point of the switching element Qx and the reactor Lx, and a minus terminal (−) of the power supply; a smoothing capacitor Cx connected to an output side terminal of the reactor Lx; and a resistor Rx for current detection, which is connected between the minus side terminal of the smoothing capacitor Cx and the anode side terminal of the diode Dx. The switching element Qx is driven so as to be turned on and off at a predetermined duty, thereby stepping down direct current voltage Vdc to voltage which corresponds to the duty ratio. Moreover, a series circuit Vd for voltage detection, which is made up of resistors R1 and R2, is connected to an output side terminal of the step down chopper circuit 21.
The full bridged circuit 22 comprises four switching elements Q1-Q4 connected to one another so as to form a shape of a bridge. These switching elements Q1-Q4 are driven by operating drive circuits G1-G4, which correspond to the respective switching elements Q1-Q4, based on signals outputted from the driver 24. When the switching elements Q1 and Q4 and the switching element Q2 and Q3, which are diagonally arranged respectively, are turned on by turns, rectangle wave alternating current voltage occurs between a connection point of the switching elements Q1 and Q2 and a connection point of the switching element Q3 and Q4.
The starter circuit 23 comprises a series circuit, which is made up of a resistor R3 and a switching element Q5, a capacitor C2, and a transformer T1. In such a starter circuit 23, when the switching element Q5 is turned on by a drive circuit G5, electric charges charged in the capacitor C2 are discharged through the switching element Q5 and the primary side winding of the transformer T1, whereby pulse-like high voltage occurs in the secondary side of the transformer T1. And the discharge lamp 10 is lighted by impressing the high voltage to an auxiliary electrode Et of the discharge lamp 10.
The ripple control unit 26 in the control unit 25 has a function of controlling ripple power and ripple frequency of alternating current, which is supplied to the discharge lamp 10. Specifically, when an ON-OFF cycle of the switching element Qx of the step down chopper circuit 21 is made long and short, the ripple power and the ripple frequency of the alternating current supplied to the discharge lamp 10 change according to the ON-OFF cycle. Therefore, the ripple power and the ripple frequency of the alternating current supplied to the discharge lamp 10 are controlled so as to satisfy a formula (2) shown below, by adjusting the ON-OFF cycle of the switching element Qx by the ripple control unit 26.
In the discharge lamp lighting apparatus according to an embodiment of the present invention, the discharge lamp 10 is lighted by supplying alternating current to the discharge lamp 10 from the power supply unit 20. The electric power of the alternating current supplied to the discharge lamp 10 is, for example, 180-450 W. And the alternating current supplied to the discharge lamp 10 is controlled by the power supply unit 20 to satisfy a formula (2) set forth below, wherein in the present invention, the natural frequency of the electrodes 14 and 15 in the arc tube 11, which is obtained by a formula (1) set forth below, is represented as fe (Hz), the ripple frequency of the alternating current supplied to the discharge lamp 10 is represented as fd (Hz) and the ripple power of the alternating current is represented as Pr (W).
In the formula (1), the eigenvalue of bending vibration of a cantilever having a concentrated mass in the electrode is represented as “a”. A value obtained by multiplying, by 0.623, a distance L (mm) from a base end E (refer to
The “portion T of the electrode axis portion 14b (15b), which projects in the arc tube 12” means a portion which is spaced from the inner wall of the arc tube 11. However, in a portion located in the sealing portion 13 of the electrode axis portion 14b (15b), there may be a very slight gap between the sealing portion 13 and the electrode axis portion 14b (15b). Therefore, in the present invention, the “portion T of the electrode axis portion 14b (15b), which projects in the arc tube 11”, is defined as a portion where a separation distance between the outer circumferential surface of the electrode axis portion 14b (15b) and the arc tube 11 is 10 μm (micrometers) or more. Moreover, in case where there is unevenness in the electrode axis portion 14b (15b), the “portion T of the electrode axis portions 14b (15b), which projects in the arc tube 11” is defined as a portion where a separation distance between a convex portion of the electrode axis portion 14b (15b) and the arc tube 11 is 10 μm or more.
In addition, in the formula (2), the volume (mm3) of the electrode head portion 14a (15a) is represented as “Vh”, and the volume (mm3) of the portion T, which projects in the arc tube 11, is represented as “Va”. Moreover, the ripple power [Pr] is obtained from an expression Pr=VL×ΔI, wherein a voltage value of alternating current supplied to the discharge lamp 10 is represented as VL and a value which is twice the magnitude of the amplitude (ripple amplitude) of ripple in the alternating current is represented as ΔI.
In the discharge lamp lighting apparatus according to the present invention, the formula (2) was experimentally obtained by a test set forth below.
Production of Discharge Lamp
Based on the structure shown in
Specification of Discharge Lamp A
ARC TUBE (11): The material of an arc tube (11) was silica glass. The maximum outer diameter of a light emission section (12) was 10 mm. The internal volume of the light emission section (12) was 66 mm3.
ELECTRODE (14, 15): The material of electrodes (14, 15) was tungsten (the purity thereof was 99.999%), and the diameter (d) of each of electrode axis portions (14b, 15b) was 0.4 mm. The volume (Vh) of each of electrode head portions (14a, 15a) was 2.7 mm3. A distance from a base end portion of the electrode axis portion (14b, 15b), which projected in an arc tube (11), to the center of gravity of the electrode head portion (14a, 15a) was 2.5 mm. The volume of each of the electrode axis portions (14b, 15b), which projected in the arc tube (11) was 0.63 mm3. The natural frequency fe of each of the electrodes (14, 15) in the arc tube (11) was 76 kHz (a=3.927, le=1.5575, E=280,000 MPa, I=1.256×10−3, ρ=19.2×10−6 kg/mm3, and S=0.1256 mm)2.
ENCLOSED MATERIAL: Mercury of 0.2 mg/mm3 as the light emitting material, and bromine of 4×10−4 μmol/mm3 as the halogen, were enclosed in the arc tube (11). Argon gas of 13 kPa enclosure pressure (static pressure) was enclosed as the noble gas therein.
Specification of Discharge Lamp B
ARC TUBE (11): The material of an arc tube (11) was silica glass. The maximum outer diameter of a light emission section (12) was 11.3 mm. The internal volume of the light emission section (12) was 80 mm3.
ELECTRODES (14, 15): The material of electrodes (14, 15) was tungsten (the purity thereof was 99.999%). The diameter (d) of each of electrode axis portion (14b, 15b) was 0.4 mm. The volume (Vh) of each of electrode head portions (14a, 15a) was 4.0 mm3. A distance from a base end portion of the electrode axis portion (14b, 15b), which projected in an arc tube (11), to the center of gravity of the electrode head portion (14a, 15a) was 2.9 mm. The volume of each of the electrode axis portions (14b, 15b), which projected in the arc tube (11) was 0.5=3. The natural frequency fe of each of the electrodes (14, 15) in the arc tube (11) was 71 kHz (a=3.927, le=1.813, E=280,000 MPa, I=1.256×10−3, ρ=19.2×10−6 kg/mm3, and S=0.1256 mm2).
ENCLOSED MATERIAL: Mercury of 0.2 mg/mm as the light emitting material, and bromine of 4×10−4 μmol/mm3 as the halogen, were enclosed in the arc tube (11). Argon gas of 13 kPa enclosure pressure (static pressure) was enclosed as the noble gas therein.
Specification of Discharge Lamp C
ARC TUBE (11): The material of an arc tube (11) was silica glass, and the maximum outer diameter of a light emission section (12) was 13 mm, and the internal volume of the light emission section (12) was 120 mm3.
ELECTRODES (14, 15): The material of electrodes (14, 15) was tungsten (the purity thereof was 99.999%), and the diameter (d) of each of electrode axis portions (14b, 15b) was 0.5 mm. The volume (Vh) of each of electrode head portions (14a, 15a) was 5.0 mm3. The distance from a base end portion of each of the electrode axis portions (14b, 15b), which projected in the arc tube (11), to the center of gravity of the electrode head portion (14a, 15a) was 3.2 mm. The volume of each of the electrode axis portions (14b, 15b), which projected in the arc tube (11) was 0.4 mm3. The natural frequency fe of each of the electrodes (14, 15) in the arc tube (11) was 50.8 kHz (a=3.927, le=1.9936, E=280,000 MPa, I=3.066×10−3, ρ=19.2×10−6 kg/mm3, and S=0.19625 mm2).
ENCLOSED MATERIAL: Mercury of 0.2 mg/mm3 as the light emitting material, and bromine of 4×10−4 μmol/mm3 as the halogen, were enclosed in the arc tube (11). Argon gas of 13 kPa enclosure pressure (static pressure) was enclosed as the noble gas therein.
Continuous Lighting Test of Discharge Lamps
Two or more discharge lamps with the above specification of each of the discharge lamps A-C were respectively prepared. In these discharge lamps, a low frequency component of 46.25 Hz was inserted by one cycle every 100 msec of fundamental frequency component of 370 Hz. The continuous lighting test for continuously lighting these lamps for 300 hours by alternating current with rated input electric power value, was carried out by changing the ripple power and the ripple frequency of the alternating current supplied to the discharge lamps, whereby a state of each discharge lamp was examined. A result thereof is shown in
Analysis of Test Result
As is clear from
P r≦|fe−fd|×g Formula (2-1):
Moreover, the function of the straight line Sc, which was a critical line, was obtained. That is, in
The above-mentioned discharge lamps A-C are referred to below. As to the discharge lamp A whose rated input electric power was 210 W, a ratio [Vh/Va] of the volume [Vh] of the electrode head portion to the volume [Va] of the electrode axis portion, which projected from the arc tube (hereinafter referred to as “head axis volume ratio”), was 4.28. As to the discharge lamp B whose rated input electric power was 275 W, the head axis volume ratio [Vh/Va] was 7.94. As to the discharge lamp C whose rated input electric power was 330 W, the head axis volume ratio [Vh/Va] was 12.5.
As shown in
g=−0.13×(Vh/Va)+0.3 Formula (2-2):
The formula (2) was obtained by substituting the formula (2-2) into the formula (2-1).
According to the discharge lamp lighting apparatus of an embodiment of the present invention, when alternating current supplied to the discharge lamp from the power supply unit satisfies the above-mentioned formula (2), since vibration produced in the electrode during lighting of the discharge lamp 10 is small, even if the discharge lamp is lighted for a long time, it is possible to prevent or control damage in the electrode axis portion.
The discharge lamp lighting apparatus according to the present invention is not limited to the above-described embodiments, and various modifications can be made thereto. For example, as long as the electrodes 14 and 15 of the discharge lamp 10 are made of tungsten and the electrode head portions 14a and 15a are formed at the tips of the respective electrode axis portions 14b and 15b, the structure thereof is not limited specifically. For example, as shown in
The preceding description has been presented only to illustrate and describe exemplary embodiments of the present discharge lamp lighting apparatus. It is not intended to be exhaustive or to limit the invention to any precise form disclosed. It will be understood by those skilled in the art that various changes may be made and equivalents may be substituted for elements thereof without departing from the scope of the invention. In addition, many modifications may be made to adapt a particular situation or material to the teachings of the invention without departing from the essential scope. Therefore, it is intended that the invention not be limited to the particular embodiment disclosed as the best mode contemplated for carrying out this invention, but that the invention will include all embodiments falling within the scope of the claims. The invention may be practiced otherwise than is specifically explained and illustrated without departing from its spirit or scope.
Number | Date | Country | Kind |
---|---|---|---|
2011-116960 | May 2011 | JP | national |
Number | Name | Date | Kind |
---|---|---|---|
2563585 | Dällenbach | Aug 1951 | A |
3758815 | Paget | Sep 1973 | A |
5061841 | Richardson | Oct 1991 | A |
5789723 | Hirst | Aug 1998 | A |
6087783 | Eastlund et al. | Jul 2000 | A |
6225754 | Horiuchi et al. | May 2001 | B1 |
6456015 | Lovell et al. | Sep 2002 | B1 |
7514878 | Crandall et al. | Apr 2009 | B2 |
8054000 | Mizojiri et al. | Nov 2011 | B2 |
8294382 | DeVincentis et al. | Oct 2012 | B2 |
20020074953 | Lovell et al. | Jun 2002 | A1 |
20050007023 | Arimoto et al. | Jan 2005 | A1 |
20050104537 | Crandall et al. | May 2005 | A1 |
20100060183 | Tamai | Mar 2010 | A1 |
20100156288 | Imamura et al. | Jun 2010 | A1 |
20100171436 | DeVincentis et al. | Jul 2010 | A1 |
Number | Date | Country |
---|---|---|
05-045994 | Jun 1993 | JP |
2005-019262 | Jan 2005 | JP |
2009-101887 | May 2009 | JP |
2009-193768 | Aug 2009 | JP |
2010-165661 | Jul 2010 | JP |
2011-060641 | Mar 2011 | JP |
Entry |
---|
Office Action issued in Japansese Patent Application No. 2011-116960, dated Apr. 16, 2013. |
Number | Date | Country | |
---|---|---|---|
20120299504 A1 | Nov 2012 | US |