The present invention relates to a discharge surface-treatment method and a discharge surface-treatment apparatus for forming a film on a surface of a workpiece using an electric discharge machining technology, and, more particularly to a discharge surface-treatment method and a discharge surface-treatment apparatus for forming a dense and relatively thick film.
It is known that, under a high-temperature environment chrome (Cr) and Mo (molybdenum) act as lubricants when they get oxidized. Thus, conventionally, on a surface of a component on which a material having strength and lubricity under the high-temperature environment is required to be coated or built up, for example, a turbine blade of a gas turbine engine for airplanes, a film formed by a material containing Cr or Mo is built up thick by a method such as welding or thermal spraying.
The welding is a method of melting a material of a welding rod and depositing the material on a workpiece by generating an electric discharge between the workpiece and the welding rod. The thermal spraying is a method of melting a metal material and spraying the metal material on a workpiece to form a film.
The welding and the thermal spraying are performed manually and therefore require high skills. Thus, it is difficult to incorporate the work of the welding and the thermal spraying in a production line, resulting in an increase in cost. In particular, in the welding, the workpiece gets heated to high temperatures, so that if the workpiece is thin and/or fragile, such as directional control alloys including a single crystal alloy and a unidirectional coagulated alloy, welding crack tends to occur in the workpiece and yield becomes low.
A surface-treatment method (a discharge surface-treatment method) by electric discharge machining can solve the problems. The discharge surface-treatment method is a method of causing pulse-like electric discharge between an electrode, which is obtained by compression-molding metal powder, powder of a metal compound, or powder of ceramics, and a workpiece to form a film on a surface of the workpiece with energy of the electric discharge. The film is made of the material of the electrode itself or a substance formed by reaction between the materials of the electrode due to thermal energy. The discharge surface-treatment method is a known technology (see, for example, patent document 1 and nonpatent literatures 1 to 3).
For example, in an electrode manufacturing method disclosed in the patent document 1, supply of an electrode material by electric discharge is controlled while a certain degree of hardness is given to an electrode. A hard ceramic film is formed on a workpiece surface by sufficiently melting the material supplied.
In the nonpatent literatures 1 and 2, a method of forming a hard film by an electric discharge is described. In the nonpatent literature 3, it is reported that a thick film is formed by an electrode of WC-Co.
Patent Document 1: Japanese Patent No. 3227454
In the method disclosed in the patent document 1, a film formed is limited to a thin film having thickness not larger than about 10 micrometers. However, there is a demand for formation of a dense and relatively thick film having thickness equal to or larger than about 100 micrometers as a film required to have strength and lubricity under a high-temperature environment and a film used for building up in repair of a component. In the formation of a thick film by the discharge surface treatment, factors such as supply of a material from an electrode, melting of the material supplied on a workpiece surface, and a way of combination of the material and a workpiece material affect film affect the most. Thus, development of a new technology is necessary from such a viewpoint.
The present invention has been devised in view of the circumstances and it is an object of the present invention to obtain a discharge surface-treatment method and a discharge surface-treatment apparatus that are capable of performing treatment for forming a dense and relatively thick film.
To achieve the above objects, according to an aspect of the present invention, a discharge surface-treatment method of causing pulse-like electric discharge in inter-electrode gap between a discharge electrode, which is obtained by compression-molding any one of metal powder, powder of a metal compound, and powder of ceramics or a mixture of these kinds of powder, and a workpiece and forming a film made of an electrode material or a substance formed by reaction of the electrode material to thermal energy on a workpiece surface with energy of the electric discharge, includes a discharge detecting step of detecting occurrence of electric discharge in the inter-electrode gap; and a current supplying step of adjusting an amount of an electric current supplied to the inter-electrode gap and a time width in response to the detection of occurrence of the electric discharge at the discharge detecting step, generating a discharge pulse current of a high current value and a short pulse width at least having rising speed equal to or higher than 40 A/μs, and performing surface treatment.
According to the present invention, it is possible to melt only a necessary portion of an electrode material in a short time and include, at a high ratio, the electrode material melted in an electrode material moved to a workpiece side by thermal energy of electric discharge or a substance formed by combination of the electrode material. This makes it possible to form a film made of melted metal on a workpiece surface.
According to the present invention, there is an effect that it is possible to perform treatment for forming a dense and relatively thick film.
Exemplary embodiments of a discharge surface-treatment method and a discharge surface-treatment apparatus according to the present invention are explained in detail below with reference to the drawings.
In this first embodiment, basic matters of a discharge surface-treatment method according to the present invention are explained. In the conventional discharge surface treatment, a compression-molded material containing impalpable powder of, for example, titanium (Ti) as a main component is used for an electrode to cause spark discharge between the electrode and a matrix (a workpiece) in a machining fluid (oil) with a dedicated pulse power supply. In the machining fluid, the electrode material melts with thermal energy at that point and Ti elutes. At the same time, the oil is exposed to the heat to dissolve and emit free carbon (C). Ti and C chemically bond together to change to hard carbide called titanium carbide (TiC), which is ceramics, and form a film on a matrix surface. Consequently, a hard film (a TiC film in the present example) is formed over the entire matrix surface. The matrix surface is finished as a matrix surface with characteristics such as heat conduction and a melting point changed.
In this way, in electrode components used for the conventional discharge surface treatment, the electrode contains a large amount of materials (Ti, etc.) easily forming carbide. As a result of conducting an experiment by increasing a ratio of a material less easily carbonized (a material less easily generating carbide) contained in electrode components, the inventors have found that, when oil is used as a machining liquid, for example, as shown in
First, details of the experiment are specifically explained with reference to
The change in the film thickness (μs) when the content of cobalt (Co) (volume %), which is a material less easily forming carbide contained in an electrode, is increased to 0, 10, 20, . . . , and 80 is shown in
In other words, the electrode is an electrode manufactured by compression-molding, with a method shown in
A relation between the pulse voltage applied and a flowing discharge pulse current is, in principle, as shown in
It is seen that, as shown in
In
This is explained from another point of view. When a film is formed on a workpiece based on the conditions described above, when a Co content in an electrode is 0 volume %, that is, when chromium carbide is 100 weight %, as shown in
According to
In other words,
In the explanation with reference to
It is understood that, by increasing the material remaining in the film as metal in this way, a film containing a metal component not changed to carbide can be formed and it is easy to form a dense thick film stably. Moreover, necessary conditions of formation are learned. Based on the results, a method of forming a film on a material on which it is desired to actually form a film is explained with reference to
A process of forming a discharge electrode obtained by compression-molding powder of a Co alloy is as shown in
The discharge electrode formed in this way is heated at temperature in a range of 600° C. to 800° C. to increase strength of the electrode itself and remove the mixed wax. Note that the appropriate heating temperature can be different depending on factors a material of powder, a particle diameter of the powder, a pressure at the time of compression, and the like.
A compounding ratio of an alloy of Co alloy powder 1 is 25 weight % of Cr, 10 weight % of Ni, 7 weight % of tungsten (W), and the remaining weight % of Co. This ratio indicates a combination of metals used as a material for abrasion resistance under a high-temperature environment. The electrode in which the metals are compounded at such a ratio shows hardness inherent in the material. The electrode also shows an effect of abrasion resistance because Cr2O3 (chromium oxide), which is formed when Cr is oxidized under the high-temperature environment, shows lubricity.
Other examples of a similar material for the discharge electrode include stellite alloys with compounding ratios of 28 weight % of Mo, 17 weight % of Cr, 3 weigh % of silicon (Si), the remaining weight % of Co and 20 weight % of Cr, 10 weight % of Ni, 15 weight % of W, and the remaining weight % of Co. The stellite alloys are excellent in corrosion resistance and high-temperature hardness. Thus, the stellite alloys are materials usually coated on a component requiring these characteristics by welding or the like and are suitable for coating at the time when corrosion resistance and high-temperature hardness are required.
In an application in which such functions are not required and a thick film is simply formed such as repair of a component, for example, it is possible to form the thick film even if an electrode made of only powder of Co, Ni, or Fe is used.
In
In the inter-electrode gap between the discharge electrode 11 and the workpiece 12, as shown in
In
In other words, in
Therefore, to form a dense and thick film according to the discharge surface treatment, it is necessary that an amount of supply of the electrode material to the inter-electrode gap by the pulse-like electric discharge and an amount of supply of the electrode material to the workpiece surface after that are appropriate and the electrode material supplied is melted by the pulse-like electric discharge to be firmly combined with the workpiece surface. The pulse conditions of electric discharge explained with reference to
The mechanism of film formation is explained with reference to
The state of a film formed on a workpiece under the pulse conditions of electric discharge explained with reference to
A large number of voids 19 are formed in the film 18 in this way. This is considered to be because an electrode material not melted sufficiently is supplied when the electrode material is supplied from the discharge electrode to the workpiece side. Looking at the surface photograph of
A phenomenon in which film formation progresses while the voids 19 are formed can be explained using the mechanism of film formation shown in
Thus, based on a result of experiments at varying discharge pulse conditions, the inventors assumed that, concerning the formation of the film 18 having the voids 19 shown in
On the electrode side, when the pulse width increases, since time of heat input due to the electric discharge increases, a range of an influence of heat from a portion completely melted directly below an arc extends to a material portion not completely melted. As a result, in the material portion not completely melted, energy sufficient for weakening combination of the powder of the discharge electrode is given. Thus, the electrode material not melted moving to the workpiece side increases. Conversely, when the pulse width decreases, on the electrode side, the influence of heat does not expand and the electrode material completely melted moves to the workpiece side. Thus, it is possible to form a dense film.
However, when the pulse width decreases, problems described below occur. When the pulse width decreases, since energy of a discharge pulse current decreases, if the electrode material contains powder with a large particle diameter, the material may not be melted. Since the energy of the discharge pulse current is small, it is difficult to move a sufficient amount of electrode material to the workpiece side. Thus, speed of formation of a film may be extremely low.
It has been clarified by the experiment of the inventors that, to solve such problems, it is effective to increase, although a pulse width is short, the energy of the discharge pulse current, or increase a peak current value. It has also been clarified by the experiment of the inventors that, to form a film dense, or lower a percentage of voids, it is necessary to decide conditions of a discharge pulse current actually used according to whether a discharge electrode to which the conditions are applied is easily melted. A relation between conditions of a discharge pulse current and a discharge electrode to which the conditions are applied is explained as second and third embodiments. According to the embodiments, it is possible to improve machining speed to form a dense film.
A negative pole (minus) of a first power supply 23 and a negative pole (minus) of a second power supply 28 are connected to the electrode 21. A positive pole (plus) of the first power supply 23 is connected to the workpiece 22 via series circuits of a switching element group 24 and a resistor group 25. A positive pole (plus) of the second power supply 28 is connected to the workpiece 22 via a series circuit of a switching element 29 and a resistor 30. In other words, a plurality of series circuits of switching elements and resistors are provided in parallel between the workpiece 22 and the positive pole (plus) of the first power supply 23. A discharge detecting circuit 31 is connected between the discharge electrode 21 and the workpiece 22. A discharge detection signal “a” of the discharge detecting circuit 31 is inputted to a control circuit 26. The control circuit 26 ON/OFF-controls the respective switching elements of the switching element group 24 and the switching element 29 and controls application of a voltage from the first power supply 23 and the second power supply 28 to the inter-electrode gap.
Operations of the discharge surface-treatment apparatus constituted as described above are explained with reference to
At the time of start of the discharge surface treatment, when the control circuit 26 drives the corresponding switching elements of the switching element group 24 to turn ON (FIG. 9(3)), a voltage (a no-load voltage ui) of a predetermined value is applied to the inter-electrode gap from the first power supply 23. The inter-electrode gap voltage is maintained at the no-load voltage ui until a discharge delay time td elapses. Electric discharge occurs after the elapse of the discharge delay time td and the inter-electrode gap voltage drops from the no-load voltage ui to the predetermined discharge voltage ue.
The discharge detecting circuit 31 raises a level of the discharge detection signal “a” outputted to the control circuit 26 to the H level in response to the start of the discharge surface treatment. The discharge detecting circuit 31 monitors the inter-electrode gap voltage and, when it is detected that the inter-electrode gap voltage drops to the predetermined discharge voltage ue, recognizes that electric discharge occurs in the inter-electrode gap and sets the level of the discharge detection signal “a” outputted to the control circuit 26 to a low level (L level) (FIG. 9(4)).
The control circuit 26 drives, in response to the discharge detection signal “a” set to the L level, the switching element 29 to turn ON in the predetermined time 34 after the elapse of the predetermined time 33 and applies a voltage of a predetermined value to the inter-electrode gap from the second power supply 28. When the predetermined time 34 elapses, the control circuit 26 drives to turn OFF the corresponding switching elements of the switching element group 24 and the switching element 29 (FIGS. 9(5) and 9(3)). In other words, during the predetermined time 34, a voltage outputted by the first power supply 23 and a voltage outputted by the second power supply 28 are superimposed and applied to the inter-electrode gap.
As a result, as shown in FIG. 9(2), a rectangular discharge current of a low value flows to the inter-electrode gap during the predetermined time 33 immediately after the electric discharge begins. However, a discharge current rising substantially linearly at fast rising having a certain inclination (A/μs) flows simultaneously with the elapse of the predetermined time 33. The rising characteristic (A/μs) at this point is decided from the voltage applied by the second power supply 28 and an inductance component present in the current path. When the predetermined time 34 elapses, since power supply from both the power supplies is stopped, with the discharge current at the time of the elapse of the predetermined time 34 as a peak current value ie, thereafter, the discharge current discharges through an inductance component present in a not-shown overvoltage-generation preventing circuit and decreases substantially linearly with a certain inclination to disappear. A period from the start of flowing of the discharge current until the disappearance of the discharge current is the pulse width te. A period from the disappearance of the discharge current until the next voltage application is the quiescent time to.
As shown in FIG. 9(2), the discharge pulse current according to this second embodiment is generated such that the discharge pulse current flows in a rectangular shape of a low value at an initial stage of electric discharge but most of the current flows in a triangular shape having a large peak current value according to input of the second power supply 28. A period in which the second power supply 28 applies a voltage, that is, the period 34 in which the switching element 29 is driven to turn ON is decided from an inductance component present in a current path between the second power supply and the inter-electrode gap and the peak current value ie required.
To reduce the pulse width te and generate a pulse current with a high peak current value ie, an inductance component present in a current path between the first and the second power supplies and the inter-electrode gap is preferably as small as possible. However, realistically, the current path has an inductance component of a certain value. Thus, it is a good method for obtaining a high peak current value to set a resistance of the current path between the second power supply 28 and the inter-electrode gap as small as possible (e.g., not to provide the resistor 30) and cause the switching element 29 to perform an ON operation during the predetermined time 34 to have a rectangular waveform shown in FIG. 9(2). It goes without saying that, if it is possible to set the inductance component of the current path between the first and the second power supplies and the inter-electrode gap ideally small, it is possible to limit a peak current value with the resistor 30 and obtain a rectangular discharge pulse current having a high peak current value.
In this way, the first power supply 23 has the purpose of causing electric discharge in the inter-electrode gap between the discharge electrode 21 and the workpiece 22 and the second power supply 28 has the purpose of increasing speed of rising of a discharge pulse current flowing to the inter-electrode gap. Thus, it is desirable to set a power supply voltage at the second power supply 28 higher.
Specific numerical value examples (conditions of a discharge pulse current) are described. As described above, to form a film dense, a discharge pulse current for sufficiently melting only a necessary portion of an electrode material in a short time is required. To obtain such a discharge pulse current, a waveform of a high-peak short pulse with high rising speed of a discharge pulse current is required. According to the experiment of the inventors, it has been found that improvement of density of a film is facilitated when a pulse width is equal to or smaller than 1 microsecond and a peak current value is equal to or higher than about 10 amperes to 30 amperes.
Thus, a resistance of the resistor 30 is set to a value smaller than that of the resistor group 25 or the resistor 30 is not connected. The period 34 in which a voltage is superimposed and applied from the second power supply 28 is set to be equal to or shorter than 1 microsecond. In this short time equal to or shorter than 1 microsecond, a discharge pulse current of a value as high as 10 amperes to 30 amperes is fed. Rising speed of the discharge pulse current is decided based on
It is seen from
In this way, according to the second embodiment, when occurrence of electric discharge based on voltage application by the first power supply is detected, a voltage (preferably a voltage higher than that of the first power supply) is applied from the second power supply for a predetermined period (e.g., a period equal to or shorter than 1 microsecond) and a current generated by the second power supply (a second current) is added to a current generated by the first power supply (a first current) to feed a discharge pulse current with high rising speed and a high-peak short pulse to the inter-electrode gap. Thus, it is possible to perform discharge surface treatment for melting only a necessary portion of an electrode material in a short time, moving the electrode material melted to a workpiece side such that the workpiece contains the electrode material at a high ratio, and forming a film of melted metal on a workpiece surface. Therefore, there is an effect that it is possible to decrease a percentage of voids and form a dense film.
In
In a third embodiment of the present invention, conditions of a discharge pulse current applied when a material less easily melted is contained in a discharge electrode or, even when the discharge electrode contains a material easily melted, a particle diameter of powder forming the discharge electrode is large and the discharge electrode is less easily melted are explained.
Since there are many portions of the material melted in
The powder with a large particle size is mixed because it has been clarified by the experiment of the inventors that moldability is better in press-molding a discharge electrode. It has been clarified that, only with powder having a small particle diameter, when a pressure is released after press, a green compact serving as a compact expands but, by mixing powder having a large particle diameter, a flow of powder is improved and a pressure of press is uniformly transmitted to an electrode (a compact) to substantially eliminate expansion of the electrode after releasing the pressure.
The film shown in
In this way, when the material less easily melted is contained in the discharge electrode or, even when the discharge electrode contains the material easily melted, a particle diameter of powder forming the electrode is large and the discharge electrode is less easily melted, a portion near an arc column of the electrode moves is melted to move to the workpiece side if the discharge pulse current of the high-peak short pulse used in the second embodiment is applied. However, since a portion not completely melted is mixed and moves, a film is formed with the portion not melted remaining in the film. In a state in which the electrode material not melted remains in the film, there is a problem because a dense film having sufficient strength cannot be formed in some cases.
Thus, in the third embodiment, the discharge pulse current of the high-peak short pulse used in the second embodiment is slightly changed to cope with the problem. The third embodiment is explained with reference to
In
The discharge detecting circuit 31 raises a level of the discharge detection signal “a” outputted to the control circuit 26 to the H level in response to the start of the discharge surface treatment. The discharge detecting circuit 31 monitors the inter-electrode gap voltage and, when it is detected that the inter-electrode gap voltage drops to the predetermined discharge voltage ue, recognizes that electric discharge occurs in the inter-electrode gap and sets the level of the discharge detection signal “a” outputted to the control circuit 26 to the L level (FIG. 14(4)).
The control circuit 26 drives, in response to the discharge detection signal “a” set to the L level, the switching element 29 to turn ON in a predetermined time 38 after the elapse of a predetermined time 37 and applies a voltage of a predetermined value to the inter-electrode gap from the second power supply 28. When the predetermined time 38 elapses, the control circuit 26 drives to turn OFF only the switching element 29 (FIG. 14(5)). The corresponding switching elements of the switching element group 24 continue the ON operation even after the elapse of the predetermined time 38 and perform an OFF operation after the elapse of a period 36 (FIG. 14(3)). In other words, during the predetermined time 38, a voltage outputted by the first power supply 23 and a voltage outputted by the second power supply 28 are superimposed and applied to the inter-electrode gap.
As a result, as shown in FIG. 14(2), a rectangular discharge current of a low value flows to the inter-electrode gap during the predetermined time 37 immediately after the electric discharge begins. However, a discharge current rising substantially linearly at fast rising having a certain inclination (A/μs) flows simultaneously with the elapse of the predetermined time 37. The rising characteristic (A/μs) at this point is decided from the voltage applied by the second power supply 28 and an inductance component present in the current path. When the predetermined time 38 elapses, power supply from both the second power supply 28 is stopped. Thus, with the discharge current at the time of the elapse of the predetermined time 38 as the peak current value ie, thereafter, the discharge current discharges through an inductance component present in a not-shown overvoltage-generation preventing circuit and decreases substantially linearly with a certain inclination to be switched to the rectangular discharge current of a low value maintained by the first power supply 22. The rectangular discharge current of a low value in this latter half portion disappears after the elapse of the period 36. A period from the start of flowing of the discharge current until the disappearance of the discharge current is the pulse width te. A period from the disappearance of the discharge current until the next voltage application is the quiescent time to.
As shown in FIG. 14(2), the discharge pulse current according to this third embodiment is generated to flow in a rectangular shape of a low value at an initial stage of electric discharge, flow in a triangular shape having a large current value in a short period after that, and flow in a rectangular shape of a low value in a long period after that. As a specific example of a numerical value, the discharge current of a triangular shape having a large peak current value is, for example, about 10 amperes to 20 amperes as in the second embodiment. A current value of the rectangular discharge current of a low value continuing for a long period after that is, for example, about 1 ampere to 5 amperes (an actual example of application is shown in
This makes it possible to collapse, in a short period in which a discharge current of a high peak and a short pulse width flows, the electrode with thermal energy of the electric discharge and move the electrode material to the workpiece side and, in a period in which a long-pulse-width discharge current of a low value flows following the short period, continue to heat the electrode material moved on the workpiece side and facilitate melting of the electrode material. In this case, in the period in which the long-pulse-width discharge current of a low value flows in the latter half portion, the action of moving the electrode material to the workpiece side is small. For example, even if a pulse width, which is the period in which the current flows, is changed, an amount of electrode consumption per pulse does not substantially change.
Consequently, when the material less easily melted is contained in the discharge electrode or, even when the discharge electrode contains the material easily melted, a particle diameter of powder forming the electrode is larger and the discharge electrode is less easily melted, it is possible to prevent the electrode material not melted from remaining the film (see
In FIG. 14(2), the discharge current of a low value by the first power supply 23 takes a fixed value during the discharge period. However, for example, the discharge current may be set high immediately after occurrence of electric discharge and, then, changed to a low value. In this case, there are the following advantages. A voltage at the inter-electrode gap before the electric discharge occurs is a voltage at the first voltage source 23. In this case, when impedance of a circuit is large, or a resistor having a large value in the resistor group 25 is connected to the first power supply 23 via a corresponding switching element in the switching element group 24 and present in the current path, the voltage tends to be affected by the inter-electrode gap. When the inter-electrode gap is soiled by shavings or the like, the voltage tends to drop. Thus, until electric discharge occurs, a resistor having a small value in the resistor group 25 is connected to the first power supply 23 via a corresponding switching element in the switching element group 24 and, after electric discharge occurs, a resistor having a large value in the resistor group 25 changes the connection with the first power supply 23 to a corresponding switching element in the switching element group 24. This makes it easy to stably cause electric discharge.
A relation between waveform requirements of the discharge pulse current shown in FIG. 14(2) generated for forming a dense relatively thick film and an electrode is explained. First, a pulse width of a low-peak long pulse portion following a triangular high-peak short pulse portion has an optimum value. When the pulse width is too short, a material not melted increases to form voids in the film. When the pulse width is too long, since thermal energy of electric discharge accumulates in the electrode, even a current value of a low peak moves the electrode material to the workpiece side and forms voids in the same manner.
A pulse width of the triangular high-peak low pulse portion also has an optimum value. When the pulse value is too small, since the electrode cannot be melted and collapsed, it is difficult to form a film. Conversely, when the pulse value is too large, since even not-melted portions of the electrode are collapsed and moved to the workpiece side, a weak film having a large number of voids is obtained.
These optimum values substantially depend on a structure of an electrode. When the electrode has weak connection among powder particles, it is possible to form a film even if a peak current value of the high-peak short pulse portion is low. However, when the electrode has strong connection among powder particles, it is necessary to increase a peak current value of the high-peak short pulse portion to cut the connection among powder particles.
Peeling of a film is briefly explained with reference to
In
Since a film thickness of a film increases as a treatment time elapses, as shown in
Thus, a peeling phenomenon of a film due to the discharge surface treatment occurs because the film is in a porous state of voids. Thus, the peeling phenomenon does not occur if a dense film can be formed from the beginning. In other words, according to the discharge surface-treatment method according to this embodiment explained above, since it is possible to form a film dense, it is possible to prevent peeling of the film.
According to this third embodiment, the discharge pulse current is formed by the discharge current of the high-peak short pulse and the discharge current of the low-peak long pulse following the discharge current. Thus, it is possible to collapse a compact electrode with high thermal energy in a short time to move the compact electrode to the workpiece side and continue to heat the compact electrode with low thermal energy in a long time to facilitate melting on the workpiece side. Even if an electrode material from which it is difficult to form a film dense is used, it is possible to lower a percentage of voids of a film and form a dense film.
In short, according to the second and the third embodiments, it is possible to control a quantity of an electrode material supplied from the electrode to the inter-electrode gap according to a state of the electrode. This makes it possible to efficiently perform treatment for forming a dense and relatively thick film.
In this third embodiment, as in the first and the second embodiments, it is possible to reduce an inductance component present in the circuit. If a voltage value of the first power supply is increased to be equal to or higher than that of the second power supply, the second power supply is not always necessary. It is possible to generate the discharge pulse current formed by the discharge current of the high-peak low pulse and the discharge current of the low-peak long pulse following the discharge current only with the first power supply.
This can be realized by causing a switching element, to which a resistor of a low value in the resistor group 25 is connected, in the switching element group 24 to perform an ON operation for a short period in the high-peak short pulse portion and causing a switching element, to which a resistor of a high value in the resistor group 25 is connected, in the switching element group 24 to perform an ON operation in the low-peak and long-pulse portion after the high-peak short pulse portion.
In the above explanation, the discharge surface treatment is performed in the machining fluid. However, the present invention is not limited to this. For example, a gas may be used instead of the machining fluid. For example, when it is desired to form a film of a material having high reactivity such as Ti, it is possible to stably perform treatment if the material is treated in an atmosphere of an inert gas such as argon (Ar). When the treatment is performed in nitrogen, it is possible to form a nitride film. Naturally, it is also possible to perform the treatment in the atmosphere. However, since the material is oxidized, it is necessary to pay attention when the oxidization causes inconvenience.
In this way, it is possible to treat the material in the gas. However, since an inter-electrode gap distance between an electrode and a workpiece is reduced compared with the treatment in the machining fluid, it is desirable to increase a voltage at a power supply to prevent short-circuit. A power supply that can apply a voltage equal to or higher than 300 volts, more desirably, equal to or higher than 500 volts in a no-load state before electric discharge is desirable. When oil is used as the machining fluid, if a material easily carbonized is used as an electrode, a part of the film material is formed as carbide. If the treatment is performed in an inert gas, it is possible to form a film from the material easily carbonized without forming carbide.
As described above, the discharge surface-treatment method and the discharge surface-treatment apparatus according to the present invention are useful for treatment for forming a dense and relatively thick film. In particular, the discharge surface-treatment method and the discharge surface-treatment apparatus are suitable for treatment for forming a film required to have strength and lubricity under a high-temperature environment such as a turbine blade of a gas turbine engine for airplanes and a film used for building up in, for example, repair of a component.
Filing Document | Filing Date | Country | Kind | 371c Date |
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PCT/JP05/21683 | 11/25/2005 | WO | 00 | 6/6/2007 |