The present application claims priority from Japanese application JP 2008-302852 filed on Nov. 27, 2008, the content of which is hereby incorporated by reference into this application.
The present invention relates to a display device and a manufacturing method of the display device, and more particularly to a flexible display device and a manufacturing method of the display device.
Recently, the development of flexible (bendable) display device has been extensively made. As one of methods of manufacturing a flexible display device, there has been proposed a method which directly forms a TFT array on a bendable resin substrate. However, the resin substrate has difficulty in heat resistance and hence, it is difficult to apply a TFT array forming process using a glass substrate to a resin substrate. Accordingly, there has been proposed a method which manufactures a flexible display device by a so-called transfer technique in which a TFT array is formed on a glass substrate having high heat resistance and, thereafter, the glass substrate is removed or a thin glass film is left and the TFT array is adhered to a resin substrate. On the resin substrate to which the TFT array is adhered, a background film which is formed on a glass substrate using silicon nitride or silicon oxide and a circuit which is formed on the background film and includes switching elements such as thin film transistors are arranged.
The background film which is formed on the glass substrate and is transferred to a substrate having flexibility such as a resin substrate is formed of a dense hard film for preventing contamination from the glass substrate in general. Accordingly, cracks are liable to occur in the background film due to the deformation of the plastic substrate and hence, the enhancement of flexibility is limited.
The present invention has been made under such circumstances, and it is an object of the present invention to enhance flexibility of a display device in which a background film is formed on a substrate having flexibility.
To briefly explain the summary of typical inventions among inventions disclosed in this specification, they are as follows.
According to one aspect of the present invention, there is provided a display device which includes: a substrate; a plurality of pixels which are mounted on the substrate, each pixel including a pixel electrode; and switching elements which are mounted on the substrate, each switching element being connected to the pixel electrode, wherein the substrate includes: a flexible insulation substrate; and a first insulation layer which is formed over the insulation substrate and includes a plurality of insulation films which are spaced apart from each other, and the switching element is formed on any one of the respective insulation films.
In one mode of the present invention having the above-mentioned constitution, each insulation film may contain silicon nitride or silicon oxide.
In another mode of the present invention having the above-mentioned constitution, the switching element may be a thin film transistor.
In still another mode of the present invention having the above-mentioned constitution, each insulation film may be formed corresponding to each switching element.
In still another mode of the present invention having the above-mentioned constitution, the plurality of switching elements may be formed on at least one insulation film.
In still another mode of the present invention having the above-mentioned constitution, the plurality of switching elements which are arranged in a row in the predetermined direction may be formed on at least one insulation film.
In still another mode of the present invention having the above-mentioned constitution, side walls of each insulation film may be formed in a tapered shape which expands in the direction toward the insulation substrate.
In still another mode of the present invention having the above-mentioned constitution, an electrode which is connected to the switching element may be formed on each insulation film, and a line which is connected to the electrode may be arranged between the plurality of insulation films.
In still another mode of the present invention having the above-mentioned constitution, the line may be formed of an organic conductive film.
In still another mode of the present invention having the above-mentioned constitution, the line may be formed of a thin metal film.
In still another mode of the present invention having the above-mentioned constitution, an organic leveling film may be formed below the line.
According to another aspect of the present invention, there is provided a manufacturing method of a display device which includes the steps of: forming an insulation layer on a glass substrate; forming a plurality of insulation films which are spaced apart from each other by patterning the insulation layer; forming a plurality of switching elements which are respectively formed on any one of the respective insulation films; removing or thinning the glass substrate; and adhering the insulation layer and the switching elements to an insulation substrate havingl flexibility.
According to the present invention, it is possible to enhance flexibility of the display device in which the background film is formed on the substrate having flexibility.
Hereinafter, an embodiment of the present invention is explained in detail in conjunction with drawings. A display device according to this embodiment is a TN (Twisted Nematic)-type liquid crystal display device. The display device includes a TFT array substrate, a color filter substrate which faces the TFT array substrate in an opposed manner and mounts color filters and a counter electrode thereon, and a liquid crystal material sealed in a region sandwiched by both substrates. Both the TFT array substrate and the color filter substrate are formed of a flexible (bendable) resin substrate.
A switching element SW is arranged corresponding to each portion where the gate signal line GL and the video signal line DL intersect with each other. The switching element SW is a thin film transistor having the so-called multi-gate structure. In the switching element SW, gate electrodes of two transistors are connected to each other thus forming a gate electrode of the switching element SW, a source electrode of one transistor and a drain electrode of the other transistor are connected to each other, and an unconnected source electrode and an unconnected drain electrode constitute a source electrode and a drain electrode of the switching element SW respectively. The gate electrode of the switching element SW is connected to the gate signal line GL, and the drain electrode of the switching element SW is connected to the video signal line DL. A pixel electrode PX is formed in each pixel circuit, and the pixel electrode PX is connected to a source electrode of the switching element SW. In a liquid crystal display device, polarities of voltages applied to the source electrode and the drain electrode of the switching element SW is suitably inverted depending on a drive method. Accordingly, although the source electrode and the drain electrode of the switching element SW are determined based on polarities of applied voltages, for the sake of convenience, the source electrode and the drain electrode are determined based on their connection destinations in this specification.
In the circuit constitution described above, a reference voltage is applied to the counter electrode formed on the color filter substrate, and a gate voltage is applied to the gate signal line GL thus selecting a pixel row. Further, a video signal is supplied to each video signal line DL at such selection timing so that a voltage of a video signal is applied to the pixel electrode PX of each pixel. Due to such application of voltages, a vertical electric field having intensity corresponding to the voltage of the video signal is generated between the pixel electrode PX and the counter electrode, and the alignment of liquid crystal molecules is determined corresponding to the intensity of the electric field.
The rectangular pixel electrode PX is arranged at a center portion of the drawing. The pixel electrode PX having the same shape is arranged also on left and right sides of such a pixel electrode PX with a fixed distance therebetween. Although not shown in the drawing, the pixel electrode PX having the same shape is arranged also on upper and lower sides of such a pixel electrode PX with a fixed distance therebetween. An island-shaped and rectangular background film UL is provided on a left lower side of the pixel electrode PX arranged at the center portion of the drawing corresponding to the pixel electrode PX. Here, the background film is a film made of silicon nitride or the like and having insulation property which is arranged between a resin substrate SBF (formed on a glass substrate during the manufacture) and the switching element SW. This background film is formed for preventing impurities contained in the glass substrate which constitutes a lower layer at the time of forming thin film transistors and the like on the glass substrate from contaminating the thin film transistors and the like. Particularly, when a thin film transistor formed by using polycrystalline silicon is used as the switching element SW, characteristics of a channel of the transistor are changed due to such contamination and hence, the provision of the background film is inevitable.
On left and right sides of the above-mentioned background film UL, the background films UL which are spaced apart from the above-mentioned background film UL and respectively correspond to the left and right pixel electrodes PX are provided. Further, also on a left upper side and a right upper side of the pixel electrode PX arranged at the center portion of the drawing, the background films UL are provided corresponding to the pixel electrodes PX not shown in the drawing which are arranged above the pixel electrode PX arranged at the center portion of the drawing. A video signal connection line DCL extends in the vertical direction between the pixel electrode PX arranged at the center portion of the drawing and the pixel electrode PX arranged on a left side of such a pixel electrode PX, and the video signal connection line DCL reaches an upper edge portion of the background film UL arranged on a left lower side of the drawing and a lower edge portion of the background film UL arranged on a left upper portion of the drawing. In the same manner, a video signal connection line DCL extends in the vertical direction in a region sandwiched between the pixel electrode PX arranged at the center portion of the drawing and the pixel electrode PX arranged on a right side of such a pixel electrode PX, and the video signal connection line DCL reaches an upper edge portion of the background film UL arranged on a right lower side of the drawing and a lower edge portion of the background film UL arranged on a right upper portion of the drawing.
The structure of the background film UL and a circuit formed on the background film UL is explained hereinafter. On the upper edge portion of the background film UL, two terminals are arranged for one background film UL, wherein the left terminal is connected to one of the above-mentioned video signal connection lines DCL, and the right terminal is connected to a metal film AL made of aluminum or an aluminum alloy, for example. The metal film AL is formed so as to overlap with a lower edge portion of the pixel electrode PX in plane, and is connected to the pixel electrode PX via a contact hole not shown in the drawing. Accordingly, the metal film AL electrically connects the switching element SW and the pixel electrode PX with each other. Here, the left terminal constitutes an upper end portion of the video signal line DHL which extends in the vertical direction on the background film UL. A lower end portion of the video signal line DHL also constitutes a terminal and is connected to another video signal connection line DCL. A gate signal line GHL extends in the lateral direction slightly above the center of the background film UL. A right end of the gate signal line GHL constitutes a terminal, and is connected to a gate connection line GCL. The gate connection line GCL is connected to another gate signal line GHL at a left edge portion of the background film UL arranged adjacent to the above-mentioned background film UL on a right side. Further, a left end of the gate signal line GHL (a portion of the left edge of the background film UL) also constitutes a terminal, and another gate connection line GCL is connected to the left end of the gate signal line GHL.
The right terminal arranged on a right side of an upper edge portion of the background film UL constitutes a portion of a semiconductor film SC, and the semiconductor film SC extends in a strip shape. The semiconductor film SC extends downwardly from the terminal thereof, intersects with the gate signal line GHL below gate signal line GHL and, thereafter, is bent in the left direction in the drawing and advances straightly. Then, the semiconductor film SC is directed upwardly below the video signal line DHL, advances straightly in such a manner that the semiconductor film SC is concealed by the video signal line DHL in plane, intersects with the gate signal line GHL below the gate signal line GHL and, further, extends to and reaches an upper edge portion of the background film UL. The semiconductor film SC has an upper end portion thereof connected to a terminal portion of the video signal line DHL. The semiconductor film SC is mainly formed using polycrystalline silicon (p-Si) or microcrystalline silicon (pc-Si), for example. Here, microcrystalline silicon is crystalline silicon whose crystal grain size falls within a range from approximately 10 nm to 100 nm. Polycrystalline silicon is one kind of crystalline silicon. The semiconductor film SC may be formed using amorphous silicon (a-Si).
Here, the gate signal line GHL, the semiconductor film SC, a metal portion on the upper end of the video signal line DHL and the metal film AL constitute the switching element SW formed of a double-gate-type thin film transistor. The thin film transistor used in this embodiment is a top-gate-type transistor. A portion of the gate signal line GHL which overlaps with the semiconductor film SC constitutes a gate electrode of the switching element SW (thin film transistor), a portion where the semiconductor film SC and the video signal line DHL are connected to each other constitutes a drain electrode of the switching element SW, and a portion where the semiconductor film SC and the metal film AL are connected to each other constitutes a source electrode of the switching element SW. In the drawing, the gate signal line GHL and the gate connection line GCL correspond to the gate signal line GL shown in
Next, the layer structure of the TFT array substrate according to this embodiment in the vicinity of the background film UL is explained in conjunction with
At terminal portions on left and right edges of the background film UL shown in
Next, the layer structure of the TFT array substrate according to this embodiment in the vicinity of the pixel electrode PX is explained in conjunction with
By providing the hardest background film UL in a separated manner as described above, it is possible to prevent the occurrence of cracks which may take place in the background film UL when the substrate of the display device is deformed or bent due to the application of an external force. This is because that a part which is deformed is not the background film UL but a region around the background film UL which is relatively soft. Accordingly, it is possible to prevent disconnection of a line caused by cracks thus enhancing flexibility of the display device. Further, by forming the side walls of the background film UL in a forward tapered shape, it is possible to suppress the disconnection of the gate connection line GCL or the video signal connection line DCL. Further, with the provision of the lower leveling film FL, the stepped portion at the peripheral portion of the background film UL can be reduced thus eventually suppressing the disconnection of the gate connection line GCL or the video signal connection line DCL. The formation of the lower leveling film FL is not inevitable and hence, it may be possible to adopt the structure having no such a film. Although not shown in
Next, a semiconductor layer is formed on the glass substrate SBG on which the background films UL are formed. To be more specific, the semiconductor layer is formed such that an amorphous silicon film is formed by a CVD method, dehydration or the like is applied to the amorphous silicon film and, thereafter, amorphous silicon is crystallized into polycrystalline silicon by laser annealing such as annealing using an excimer laser or the like. The semiconductor layer is formed into semiconductor films SC having a shape shown in
Next, a film is formed using metal for forming the gate signal lines GHL, for example, high-melting-point metal such as molybdenum, tungsten or tantalum or an alloy of these metals, and the film is patterned by photolithography and etching thus forming the gate signal lines GHL. The interlayer insulation film MI is formed so as to cover the gate signal lines GHL and the gate insulation film GI. The interlayer insulation film MI is formed such that a film is formed by a CVD method or the like using silicon dioxide (SiO2), for example, and the film is patterned by photolithography and etching. Then, the video signal lines DHL are formed on the interlayer insulation film MI. To be more specific, a film is formed using metal for forming the video signal lines DHL, for example, high-melting-point metal such as molybdenum, tungsten or tantalum or an alloy of these metals, and the film is patterned by photolithography and etching thus forming the video signal lines DHL.
Next, the lower leveling film FL is formed. To be more specific, for example, a photosensitive organic resin film is formed by coating such that a thickness of the organic resin film becomes substantially equal to a thickness of the background film UL formed finally, and photolithography is applied to the organic resin film so as to remove the organic resin film above the background film UL. Next, the gate connection lines GCL and the video signal connection lines DCL are formed. To be more specific, the gate connection lines GCL and the video signal connection lines DCL may be formed by applying an organic conductive film, for example, or by forming a flexible thin metal film and by patterning the organic conductive film or the thin metal film. The upper leveling film FU is formed on the gate connection lines GCL and the video signal connection lines DCL. To be more specific, for forming contact holes which connect the pixel electrodes PX and the metal films AL, for example, it is preferable that a photosensitive organic resin film is applied and photolithography is applied to the organic resin film. Next, the pixel electrodes PX are formed on the upper leveling film FU. To be more specific, the pixel electrodes PX are formed by forming a film made of ITO at a low temperature and by patterning the film.
Due to the above-mentioned steps, on the glass substrate SBG, the background films UL and the circuits which include the switching elements SW formed on the background films UL, and the flexible circuits which include the pixel electrodes PX formed between the background films UL, the gate connection lines GCL, the video signal connection lines DCL and the like are formed (
In the transfer steps, firstly, glass of the glass substrate SBG is removed (
The resin substrate SBF having flexibility is adhered to lower surfaces of the background films UL and the above-mentioned circuits in a state shown in
In the above-mentioned manufacturing method, the step carried out at the relatively high temperature for forming the background films UL, the thin film transistors and lines above the background films UL, and the step carried out at a relatively low temperature for forming the gate connection lines GCL, the video signal connection lines DCL and the like in regions where the background films UL are not formed are clearly separated from each other. Accordingly, after the former step carried out at a high temperature is finished, the gate connection lines GCL and the video signal connection lines DCL can be formed using an organic conductive material having high flexibility but low heat resistance. These two connection lines can be simultaneously formed thus also simplifying the steps.
The rectangular pixel electrode PX is arranged in the vicinity of a center portion of the drawing. The pixel electrode PX having the same shape is arranged also on left and light sides of such a pixel electrode PX respectively with a fixed distance therebetween. Although not shown in the drawing, the pixel electrode PX having the same shape is arranged also on upper and lower sides of such a pixel electrode PX with a fixed distance therebetween. One strip-shaped background film UL is provided on a lower side of the pixel electrode PX arranged at the center portion of the drawing corresponding to one row of pixel electrodes PX in the lateral direction. In the same manner, a strip-shaped background film UL is also provided on an upper side of the pixel electrode PX arranged at the center portion of the drawing. A video signal connection line DCL extends straightly in the vertical direction between the pixel electrode PX arranged at the center portion of the drawing and the pixel electrode PX arranged on a left side of such a pixel electrode PX until the video signal connection line DCL reaches the background film UL. In the same manner, a video signal connection line DCL extends in the vertical direction in a region sandwiched between the pixel electrode PX arranged at the center portion of the drawing and the pixel electrode PX arranged on a right side of such a pixel electrode PX.
The structure of the background film UL and a circuit formed on the background film UL is explained hereinafter. On the upper edge portion of the background film UL, two terminals are arranged for one pixel electrode PX, wherein the left terminal is connected to one of the above-mentioned video signal connection lines DCL, and the right terminal is connected to a metal film AL. The metal film AL is formed so as to overlap with a lower edge portion of the pixel electrode PX in plane in the drawing, and is connected to the pixel electrode PX via a contact hole not shown in the drawing. Here, the left terminal constitutes an upper end portion of the video signal line DHL which extends in the vertical direction on the background film UL. A lower end portion of the video signal line DHL also constitutes a terminal and is connected to another video signal connection line DCL. A gate signal line GL extends in the lateral direction slightly above the center of the background film UL.
The right terminal arranged on an upper edge portion of the background film UL constitutes a portion of a semiconductor film SC. The semiconductor film SC extends in a strip shape. The semiconductor film SC extends downwardly from the right terminal, intersects with the gate signal line GL below the gate signal line GL and, thereafter, is bent in the left direction in the drawing and advances straightly. Then, the semiconductor film SC is directed upwardly below the video signal line DHL, advances straightly in such a manner that the semiconductor film SC overlaps with a video signal line DHL in plane, intersects with the gate signal line GHL below the gate signal line GHL, and extends to an upper edge portion of the background film UL. The semiconductor film SC has an upper end portion thereof connected to an electrode of the video signal line DHL.
The example shown in
Although the embodiment of the present invention has been explained heretofore, the present invention is not limited to the above-explained embodiment. For example, the present invention is also applicable to an IPS (In Plane Switching)-type liquid crystal display device without causing any problem. This is because common electrode can be formed using the same material for forming pixel electrodes so that flexibility of the display device is not influenced by the materials. Further, the present invention is also applicable to an organic EL display device. This is because although the number of switching elements per one sub pixel differs between the display device of the embodiment and the organic EL display device, there may be a case where the organic EL display device also forms background films and uses a transfer technique.
Number | Date | Country | Kind |
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2008-302852 | Nov 2008 | JP | national |