The present application relates to a field of display technology, in particular to a field of manufacturing technology of display panels, and specifically to display panels and electronic terminals.
Sub-millimeter light-emitting diode (mini LED) display technology and micron light-emitting diode (micro LED) display technology are widely used in small and medium-sized high-value-added displays, and have the advantages of high contrast ratios, high brightness, and being thin and light.
At present, in order to use less photomasks and achieve seamless splicing technology, there are less non-metallic layers used to separate metal layers in electronic terminals made with mini-LED display technology or micro-LED display technology, and a cover plate and a sealant are not omitted during an encapsulating process. As a result, the ambient moisture and oxygen can easily enter an active layer of a transistor device through an encapsulating structure and film layers, thereby reducing the operation reliability of the transistor device.
Therefore, conventional electronic terminals made with mini-LED display technology or micro-LED display technology have a high risk of failure/malfunction of transistor devices, and improvement is urgently needed.
The present application provides a display panel and an electronic terminal, so as to solve a technical problem that a transistor device has a high risk of failure/malfunction in conventional electronic terminals manufactured using mini-LED display technology or micro-LED display technology.
The present application provides a display panel, including:
The present application further provides an electronic terminal, wherein the electronic terminal includes the display panel mentioned above.
The present application provides a display panel and an electronic terminal, including: a substrate; an active layer disposed on the substrate, the active layer including a channel portion and conductive portions located on two sides of the channel portion; a first conductive layer disposed at one side of the active layer close to or away from the substrate, wherein the first conductive layer includes a gate, and a projection of the gate electrode projected on the substrate overlaps with a projection of the channel portion projected on the substrate; and a second conductive layer disposed at one side of the active layer away from the substrate, wherein the second conductive layer includes a source electrode connected to one of the conductive portions. The source electrode is disposed in a different layer from the drain electrode connected to the other one of the conductive portions, and the source electrode extends toward to the drain electrode, so that a projection of the source electrode projected on the substrate overlaps the projection of the gate electrode projected on the substrate. On the premise of ensuring the electrical insulation between the source electrode and the drain electrode, a projection of the source electrode projected on the active layer can also overlap the channel portion to cover more portions of the active layer and reduce a risk of failure/malfunction of the active layer caused by the entry of moisture.
The present application will be described with reference to the accompanying drawings. It should be noted that the drawings are merely for the purposes of illustrating some embodiments of the present disclosure, and a person having ordinary skill in this field can obtain other figures according to these figures without inventive work.
The technical solutions in the present application will be described clearly and completely below with reference to the accompanying drawings and in conjunction with specific embodiments. Obviously, the described embodiments are only some of the embodiments of the present application, but not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the present application.
The terms such as “first” and “second” in the present application are used to distinguish different objects, rather than to describe a specific order. Furthermore, the terms like “comprising”, “including”, and any variations thereof are intended to fully cover non-exclusive inclusion. For example, a process, method, system, product, or device comprising a series of steps or modules is not limited to the listed steps or modules, but optionally also includes unlisted steps or modules, or optionally also includes other steps or modules inherent to these processes, methods, products, or devices. It should be noted that the term “overlapping arrangement” used to describe two structures located at different layers in this application can be understood as that orthogonal projections of the corresponding two structures projected on the same plane overlap each other.
Reference herein to an “embodiment” means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the present application. This term appearing in various places in the specification does not necessarily refer to the same embodiment, nor separate or alternative embodiments that are exclusive of other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.
The present application provides a display panel, and the display panel includes, but is not limited to, the following embodiments and combinations of the following embodiments.
In one embodiment, as shown in
The substrate 10 can be a flexible substrate or a rigid substrate. A material of the active layer 20 can include a semiconductor material such as amorphous silicon, polysilicon, organic semiconductor materials, and metal oxides. The conductive portions 202 can be formed by doping particles including but not limited to hydrogen, phosphorus ions, or boron ions at two ends of the active layer 20. As shown in
Specifically, as shown in
In one embodiment, as shown in
In one embodiment, as shown in
It can be understood that the drain electrode 50 and the gate electrode 301 in the present embodiment are in the same layer and spaced apart from each other. That is to say, both the drain electrode 50 and the gate electrode 301 are located on the same film layer. Further, the drain electrode 50 and the gate electrode 301 can be made of the same material. As a result, the same manufacturing process and the same photomask to form the first conductive layer 30 including the drain electrode 50 and the gate electrode 301, which saves the types of photomasks for manufacturing the display panel 100 and improves the manufacturing efficiency of the display panel 100. Specifically, based on the fact that the drain electrode 50 and the gate electrode 301 are in the same layer and spaced apart from each other, the same manufacturing process and the same photomask can be used to form the first conductive layer 30 including the drain electrode 50 and the gate electrode 301, so the drain electrode 50 and the gate electrode 301 can have lower resistance and higher conductivity.
In one embodiment, as shown in
It should be noted that relative positions of the source electrode 401 and the first conductive layer 30 are not limited in the present embodiment. For example, the first conductive layer 30 can be disposed at one side of the source electrode 401 close to the substrate 10 (as shown in
In one embodiment, as shown in
In particular, the elements doped in the first conductive portion 2021 and the second conductive portion 2022 in the present embodiment can be the same. For example, both the first conductive portion 2021 and the second conductive portion 2022 can be doped with hydrogen. Specifically, before the passivation layer 60 is formed, two ends of the active layer 20 can be doped with hydrogen to form the first conductive portion 2021 with the higher hydrogen concentration. After the passivation layer 60 is formed, hydrogen is doped through the first gap and the corresponding via structure to form the second conductive portion 2022 with the lower hydrogen concentration.
In one embodiment, as shown in
In one embodiment, as shown in
It can be understood that in the present embodiment, the first electrode portion 402 and the active layer 20 are arranged to define the second gap 02 in the horizontal direction. Similarly, the first electrode portion 402 and the source electrode 401 can be made of the same material, so that the second conductive layer 40 including the first electrode portion 402 and the source electrode 401 can be formed using the same manufacturing process and the same photomask, which saves the types of photomasks for manufacturing the display panel 100 and improves the manufacturing efficiency of the display panel 100. Further, one end of the source electrode 401 close to the gate electrode 301 overlaps the second gap 02. That is to say, the source electrode 401 is arranged in a continuous manner and extends to completely cover the active layer 20, so that a portion of the second conductive layer 40 overlapping with the active layer 20 is fully occupied by the continuously arranged source electrode 401, which further improves the ability of the source electrode 401 in blocking the entry of moisture into the active layer 20 and further reduces the risk of failure/malfunction of the active layer 20.
In one embodiment, as shown in
Specifically, based on the above discussion, the first electrode portion 402 and the source electrode 401 arranged spaced apart in the same layer can be made of the same material. Further, the material of the source electrode 401 and the material of the first electrode portion 402 in the present embodiment both include metal or metal oxide. For example, when the materials of the source electrode 401 and the first electrode portion 402 both include metal, they can have higher barrier ability to further improve the barrier ability against moisture, and can also have higher conductivity. In another example, when the materials of the source electrode 401 and the first electrode portion 402 include metal oxide, they can have lower reflectivity, so as to reduce a risk of reflecting external light to, but is not limited to, the light emitting device, so as to improve the reliability and stability of a display image of the display panel 100.
In one embodiment, as shown in
It can be understood that in the present embodiment, the drain electrode 50, the source electrode 401, and the gate electrode 301 are further arranged in different layers, and the drain electrode 50 also extends toward the source electrode 401 to overlap the gate electrode 301. Similarly, in this way, on the premise that the gate electrode 301, the source electrode 401, and the drain electrode 50 are electrically insulated from each other, a projection of the drain electrode 50 projected on the active layer 20 can also overlap the channel portion 201 to cover more portions of the active layer 20. As a result, the present application can increase the size of the drain electrode 50 for blocking the entry of moisture into the active layer 20, and reduce the risk of failure/malfunction of the active layer 20 caused by the entry of moisture.
For example, as shown in
Furthermore, as shown in
In one embodiment, as shown in
The relative positional relationship between the source electrode 401 and the drain electrode 50 is not limited in the present embodiment. Basically, the source electrode 401 is disposed close to one conductive portion 202 in the active layer 20, and the drain electrode 50 is disposed close to the other conductive portion 202 in the active layer 20. In the present embodiment, a side portion of the light shielding layer 70 is connected to at least one of the source electrode 401 or the drain electrode 50. Based on the above discussion, a first gate insulating layer 901, an insulating layer 903, and a second gate insulating layer 902 are provided with via holes connected to the side portion of the light shielding layer 70 and at least one of the source electrode 401 or the drain electrode 50. The via holes are filled with conductive substances to electrically connect the light shielding layer 70 to at least one of the source electrode 401 and the drain electrode 50.
Specifically, in terms of the light shielding layer 70 mentioned above as shown in
It can be understood that, based on the above discussion, the conductive substance in the via hole connected to the light shielding layer 70 and at least one of the source electrode 401 and the drain electrode 50 in the present embodiment can shield side portions of the active layer 20 to reduce the risk of moisture entering the active layer 20 from the side, the conductive substance forms an equipotential with the light-shielding layer 70 and at least one of the source electrode 401 and the drain electrode 50, which can shield an additional electric field generated by moisture molecules adsorbed on a surface of the active layer 20, and prevent the additional electric field from accelerating corrosion of the active layer 20.
The present application also provides a manufacturing method of a display panel, which can include, but is not limited to, the following steps and a combination of the following steps.
S1: forming a light shielding layer 70 on a substrate 10 by patterning.
The substrate 10 and the light shielding layer 70 can refer to the above related descriptions. Specifically, the light shielding layer 70 can be a single-layer film made of Mo, or an “A/B” type composite film layer or an “A/B/C” type composite film layer made of various materials, wherein A is located on B, and B is located on C. For example, the light shielding layer 70 can be, but not limited to, an Mo/Al film layer, an Mo/Cu film layer, an MoTi/Cu film layer, an MoTi/Cu/MoTi film layer, a Ti/Al/Ti film layer, a Ti/Cu/Ti film layer, an Mo/Cu/IZO film layer, an IZO/Cu/IZO film layer, or an Mo/Cu/ITO film layer.
S2: forming a buffer layer 80 on the light shielding layer 70 and the substrate 10, and forming a semiconductor layer 209 on the buffer layer 80 by patterning.
The buffer layer 80 can refer to the above related description. Specifically, the buffer layer 80 can be produced by chemical vapor deposition. For example, the buffer layer 80 can be a single-layer film layer made of silicon oxide, or can include a single-layer film layer made of silicon oxide, and a single-layer film made of silicon nitride disposed on the single-layer film made of silicon oxide. A material of the semiconductor layer 209 can include, but is not limited to, metal oxides with low leakage current, such as IGZO, IGTO, IGZO, IGO, IZO, AIZO, or ATZO.
S3: forming a first gate insulating film on the buffer layer 80 and the semiconductor layer 209, and patterning the first gate insulating film at positions corresponding to two ends of the semiconductor layer 209 to form three first holes 001 at positions corresponding to a side portion of the light shielding layer 70 to form the first gate insulating layer 901, and performing a conductorization process on two sides of the semiconductor layer 209 through the two first holes 001 on two sides of the semiconductor layer 209 to form the first conductive portion 2021.
For details about the first gate insulating layer 901 and the first conductive portion 2021, reference can be made to the above related descriptions. Specifically, the first gate insulating layer 901 can be a single-layer film layer made of silicon oxide or silicon nitride, or an “A/B” type composite film made of various materials, or an “A/B/C” type composite film layer, wherein A is located on B, and B is located on C. For example, the first gate insulating layer 901 can be, but not limited to, Al2O3/SiNx/SiOx film layer or SiOx/SiNx/SiOx film layer. The conductorization process can be, but not limited to, doping with hydrogen. Further, the three first holes 001 formed corresponding to the side portion of the light shielding layer 70 can also extend into the buffer layer 80.
S4: forming a first conductive layer 30 on the first gate insulating layer 901 by patterning, wherein the first conductive layer 30 includes a gate electrode 301 and a drain electrode 50.
For details about the first conductive layer 30, the gate electrode 301, and the drain electrode 50, reference can be made to the above related descriptions. Specifically, the first conductive layer 30 can be a single-layer film layer made of Mo, or an “A/B” type composite film layer, or an “A/B/C” type composite film layer made of various materials, wherein A is located on B, and B is located on C. For example, the first conductive layer 30 can be, but not limited to, an Mo/Al film layer, an Mo/Cu film layer, an MoTi/Cu film layer, an MoTi/Cu/MoTi film layer, a Ti/Al/Ti film layer, a Ti/Cu/Ti film layer, an Mo/Cu/IZO film layer, an IZO/Cu/IZO film layer, or an Mo/Cu/ITO film layer.
S5: forming a passivation film on the first conductive layer 30 and the first gate insulating layer 901, and forming three second holes 002 in a passivation film by patterning in the passivation film at least a portion corresponding to the drain electrode 50 and portions corresponding to the other two first holes 001 to form the passivation layer 60.
For details about the passivation layer 60, reference can be made to the above related descriptions. Specifically, the passivation layer 60 can be a single-layer film layer made of silicon oxide, silicon nitride, or silicon oxynitride, or an “A/B” type composite film made of various materials, wherein A is located on B. For example, the passivation layer 60 can be, but not limited to, SiNx/SiOx. Specifically, the active layer 20 can be performed a conductorization process by having hydrogen diffusion in the passivation film first to form the second conductive portion 2022, and then the patterning process can be performed to form the at least three second holes 002.
S6: forming a second conductive layer 40 on the passivation layer 60 by patterning, and the second conductive layer 40 includes a first electrode portion 402, a second electrode portion 403, and a source electrode 401.
About details about the first electrode portion 402, the second electrode portion 403, and the source electrode 401, reference can be made to the above related descriptions. Specifically, the second conductive layer 40 can be a single-layer film layer made of ITO or IZO, or an “A/B” type composite film layer or an “A/B/C” type composite film layer made of various materials, wherein A is located on B, and B is located on C. For example, the second conductive layer 40 can be, but not limited to, an ITO/Ag/ITO film layer, an IZO/Ag/IZO film layer, an Mo/Cu film layer, or an MoTi/Cu/MoTi film layer.
The present application further provides an electronic terminal, and the electronic terminal includes any display panel described above.
The present application provides a display panel and an electronic terminal, including: a substrate; an active layer disposed on the substrate, the active layer including a channel portion and conductive portions located on two sides of the channel portion; a first conductive layer disposed at one side of the active layer close to or away from the substrate, wherein the first conductive layer includes a gate, and a projection of the gate electrode projected on the substrate overlaps with a projection of the channel portion projected on the substrate; and a second conductive layer disposed at one side of the active layer away from the substrate, wherein the second conductive layer includes a source electrode connected to one of the conductive portions. The source electrode is disposed in a different layer from the drain electrode connected to the other one of the conductive portions, and the source electrode extends toward to the drain electrode, so that a projection of the source electrode projected on the substrate overlaps the projection of the gate electrode projected on the substrate. On the premise of ensuring the electrical insulation between the source electrode and the drain electrode, a projection of the source electrode projected on the active layer can also overlap the channel portion to cover more portions of the active layer and reduce a risk of failure/malfunction of the active layer caused by the entry of moisture.
The display panel and electronic terminal of the present application have been described in detail above. Working principles and embodiments of the present application are described in the present disclosure with specific examples. The descriptions of the above embodiments are only for ease of understanding technical solutions and main ideas of the present application. Those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements to some of the technical features. Such modifications or replacements are within the protection scope of the technical solutions of the present application.
Number | Date | Country | Kind |
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202211000809.5 | Aug 2022 | CN | national |