The present invention relates to methods and apparatus for imprinting a curable layer coated on a substrate.
Imprint lithography is a method of forming three-dimensional structures on a substrate. The three-dimensional structures can provide high-resolution patterns, large manufacturing throughput, low cost, and potentially large area coverage. In imprint lithography, a mold with a pattern of projecting and recessed features is pressed into a moldable surface, typically a thin film, deforming the shape of the film and forming a relief pattern in the film. The film is hardened, for example with ultra-violet or thermal curing, and the mold and imprinted substrate are separated. After the mold is removed, the underlying substrate is available for further processing. Imprint lithography can be used to replicate patterns having high-resolution features in the micro-scale and nano-scale ranges. For example, U.S. Pat. No. 5,772,905 issued Jun. 30, 1998 and entitled “Nanoimprint Lithography” describes high-resolution imprint methods and is incorporated herein by reference.
Flexing of the mold and the substrate during the mechanical imprinting step is a technical limitation on the resolution of structures manufactured using imprint lithography. There is a need, therefore, for improved equipment and an improved method for high-resolution imprint lithography.
In accordance with an embodiment of the present invention, a method for making an imprinted double-sided structure comprises:
providing a substrate having first and second substantially planar and parallel opposing sides;
providing a first imprinting stamp having a substantially flat support side and an opposed imprinting side, the support side having a first portion and a second portion;
providing a second imprinting stamp having a substantially flat support side and an opposed imprinting side, the support side having a first portion and a second portion;
providing a first roller having a surface and a first-roller axis about which the first roller surface rotates;
providing a second roller having a surface and a second-roller axis about which the second roller surface rotates;
forming a first curable layer on the first side of the substrate and a second curable layer on the second side of the substrate;
locating the imprinting side of the first imprinting stamp facing the first side of the substrate;
locating the imprinting side of the second imprinting stamp facing the second side of the substrate;
locating the first roller facing the first portion of the support side of the first imprinting stamp;
locating the second roller facing the first portion of the support side of the second imprinting stamp;
simultaneously pressing the first roller against the first portion of the first imprinting stamp and pressing the second roller against the first portion of the second imprinting stamp, the first-roller axis located substantially parallel to the first side, the second-roller axis located substantially parallel to the second side, and a line intersecting the first-roller axis, the second-roller axis, and the substrate substantially perpendicular to the first and second sides of the substrate;
simultaneously rotating the first roller about the first-roller axis rotating the second roller about the second-roller axis and simultaneously rolling the surface of the first roller over and in contact with the surface of the support side of the first imprinting stamp from the first portion to the second portion of the first imprinting stamp and rolling the surface of the second roller over and in contact with the surface of the support side of the second imprinting stamp from the first portion to the second portion of the second imprinting stamp;
simultaneously curing the first curable layer to form a first cured imprinted layer on the first side of the substrate and curing the second curable layer to form a second cured imprinted layer on the second side of the substrate;
removing the first imprinting stamp from the first side and removing the second imprinting stamp from the second side.
Advantages of the present invention include a method and equipment for imprinting a curable layer coated on a substrate with improved resolution and accuracy.
The above and other features and advantages of the present invention will become more apparent when taken in conjunction with the following description and drawings wherein identical reference numerals have been used to designate identical features that are common to the figures, and wherein:
The Figures are not necessarily to scale, since the range of dimensions in the drawings is too great to permit depiction to scale.
The present invention is directed toward making an imprinted structure on each side of a substrate by simultaneously pressing rollers against support sides of stamps imprinting a curable layer formed on each side of the substrate. The invention provides a method and equipment for imprinting a curable layer coated on a substrate with improved resolution and accuracy. In useful embodiments, both the stamp and the substrate are flexible and the method reduces substrate and stamp flexing and the amount of air trapped in the curable layer, thereby improving the accuracy and resolution of the imprinted structure.
Referring to the structure and equipment illustrated in
First and second imprinting stamps 20, 30 and first and second rollers 40, 50 are provided in step 110. The first imprinting stamp 20 has a substantially flat support side 22 and an opposed imprinting side 24. The flat support side 22 of the first imprinting stamp 20 has first and second portions 26 and 28. Similarly, the second imprinting stamp 30 has a substantially flat support side 32 and an opposed imprinting side 34. The flat support side 32 of the second imprinting stamp 30 has first and second portions 36 and 38. The imprinting sides 24, 34 of the first and second stamps 20, 30 each have a non-planar surface for imprinting a three-dimensional structure. The support sides 22, 32 of the first and second stamps 20, 30 are substantially flat. By substantially flat is meant that the first and second rollers 40, 50, can roll over the support side of the imprinting sides 24, 34 without sufficiently displacing in any dimension the non-planar surface of the imprinting sides 24, 34 a distance greater than one half of any of the three-dimensional structure sizes defined by the corresponding imprinting side 24, 34. The three-dimensional structure formed by the imprinting sides 24, 34 of the first and second stamps 20, 30 can be the same in one embodiment and different in another embodiment (as shown). Methods of constructing imprinting stamps are known in the art, as are materials useful for imprinting stamps, such as PDMS. In various embodiments, the imprinting stamps are transparent, substantially transparent, or translucent, for example transmitting 50% or more of visible, infrared, or ultraviolet radiation.
The first roller 40 has a first-roller surface 42 and a first-roller axis 44 about which the first-roller surface 42 of the first roller 40 rotates or revolves as the first roller 40 is rolled over the support side 22 of the first stamp 20. Similarly, the second roller 50 has a second-roller surface 52 and a second-roller axis 54 about which the second-roller surface 52 of the second roller 50 rotates or revolves as the second roller 50 is rolled over the support side 32 of the second stamp 30.
A first curable layer 60 is formed in step 120, for example by coating or laminating curable material on the first side 12 of the substrate 10 and a second curable layer 70 on the second side 14 of the substrate 10. Curable layers and curable materials are known in the art, for example cross-linkable polymers and resins that can be cured by heat or by exposure to electromagnetic radiation such as ultraviolet radiation. In step 130, the first roller 40 is located facing the first portion 26 of the support side 22 of the first imprinting stamp 20. Likewise, the second roller 50 is located facing the first portion 36 of the support side 32 of the second imprinting stamp 30.
In step 140, and referring also to
Referring also to
Referring to
In an embodiment, the first or second roller 40, 50 is a partial cylinder having a surface arc length greater than the length of the first or second portions 26, 28, 36, 38 of the first or second stamps 20, 30, respectively. Such an arrangement can improve stability of the first or second stamps 20, 30 and rollers 40, 50, thereby improving the accuracy and resolution of the double-sided imprinted structure 5.
Referring to
Referring to
providing a flexible substrate 10 having the first substrate side 12 and opposing second substrate sides 14 in step 101;
providing in step 110 the first imprinting stamp 20 having the rollable support side 22 and the opposing imprinting side 24, the rollable support side 22 of the first imprinting stamp 20 having the first portion 26 and the second portion 28, the imprinting side 24 of the first imprinting stamp 20 disposed opposite the first side 12 of the flexible substrate 10;
providing the second imprinting stamp 30 having the rollable support side 32 and the opposing imprinting side 34, the rollable support side 32 of the second imprinting stamp 30 having a first portion 36 and a second portion 38, the imprinting side 34 of the second imprinting stamp 30 disposed opposite a second side 14 of the flexible substrate 10 in step 220;
in step 230, disposing the first roller 40 having the surface 42 and an axis 44 about which the first roller 40 rotates adjacent to the first portion 26 of the rollable support side 22 of the first imprinting stamp 20, wherein the axis 44 of the first roller 40 is located substantially parallel to the first side 12 of the flexible substrate 10;
disposing the second roller 50 having the surface 52 and an axis 54 about which the second roller 50 rotates adjacent to the first portion 36 of the rollable support side 32 of the second imprinting stamp 30, wherein the axis 54 of the second roller 50 is located substantially parallel to the second side 14 of the flexible substrate 10, and wherein a perpendicular line 8 intersecting the axes 44, 54 of the first and second rollers 40, 50 is substantially perpendicular to the first and second substrate sides 12, 14;
in step 140, simultaneously pressing the surface 42 of the first roller 40 against the first portion 26 of the first imprinting stamp 20 and pressing the surface 52 of the second roller 50 against the first portion 36 of the second imprinting stamp 30 so that the imprinting side 24 of the first stamp 20 and the imprinting side 34 of the second stamp 30 are both at least partially in contact with the first and second curable layers 60, 70;
in step 150, simultaneously rolling the surface 42 of the first roller 40 over and in contact with the support side 22 of the first imprinting stamp 20 from the first portion 26 to the second portion 28 of the first imprinting stamp 20 and rolling the surface 52 of the second roller 50 over and in contact with the support side 32 of the second imprinting stamp 30 from the first portion 36 to the second portion 38 of the second imprinting stamp 30;
in step 160, simultaneously curing the first and second curable layers 60, 70 on the first and second sides 12, 14 of the flexible substrate 10 to form cured imprinted layers 60, 70 on the first and second sides 12, 14 of the flexible substrate 10; and
in step 170, removing the first imprinting stamp 20 from the imprinted first cured layer 60 and removing the second imprinting stamp 30 from the imprinted second cured layer 70 to form the double-sided imprinted structure 5.
In one embodiment of the present invention, the first and second curable layers 60, 70 are formed simultaneously. In various methods, the first and second curable layers 60, 70 are formed by laminating sheets on the substrate 10, by extrusion onto a surface, by curtain coating, by hopper coating, or by dip coating. These methods are known in the art.
Referring to
In another embodiment, and as shown in
In an embodiment, the first and second sides of the flexible substrate are located in a vertical orientation. In a vertical orientation, the difference in the pressure exerted by the first and second stamps 20, 30 on the first and second curable layers 60, 70 is reduced. The effect of gravity on both the first and second curable layers 60, 70 is the same when the substrate is in a vertical orientation. In another embodiment, the first and second sides of the flexible substrate are located in a horizontal orientation. In a horizontal orientation, the thickness of the first and second curable layers 60, 70 is substantially the same, despite the effects of gravity.
Referring to
The substrate 10 can be rigid or flexible made of, for example, a glass or polymer material, can be transparent, and can have opposing substantially parallel and extensive surfaces on the first and second sides 12, 14. Substrates 10 such as glass, metal, or plastic can be used and are known in the art together with methods for providing suitable surfaces. In a useful embodiment, substrate 10 is substantially transparent, for example having a transparency of greater than 90%, 80% 70% or 50% in the visible range of electromagnetic radiation. Substrates 10 can include a dielectric material useful for capacitive touch screens and can have a wide variety of thicknesses, for example 10 microns, 50 microns, 100 microns, 1 mm, or more. In various embodiments of the present invention, substrates 10 are provided as a separate structure. Substrate 10 can be an element of other devices, for example the cover or substrate of a display or a substrate, cover, or dielectric layer of a touch screen. Electrically conductive micro-wires in double-sided imprinted structures 5 of the present invention are useful, for example in touch screens such as projected-capacitive touch screens that use transparent micro-wire electrodes and in displays.
The present invention is useful in a wide variety of electronic devices. Such devices can include, for example, photovoltaic devices, OLED displays and lighting, LCD displays, plasma displays, inorganic LED displays and lighting, electrophoretic displays, electrowetting displays, dimming mirrors, smart windows, transparent radio antennae, transparent heaters and other touch screen devices such as resistive touch screen devices.
The invention has been described in detail with particular reference to certain embodiments thereof, but it will be understood that variations and modifications can be effected within the spirit and scope of the invention.
5 imprinted double-sided structure
8 perpendicular line
10 substrate
12 first side
14 second side
16 imprinted surface of first cured layer
17 imprinted surface of second cured layer
18 imprinted micro-channel of first cured layer
19 imprinted micro-channel of second cured layer
20 first stamp
22 support side of first stamp
24 imprinting side of second stamp
26 first portion of first stamp
28 second portion of first stamp
30 second stamp
32 support side of second stamp
34 imprinting side of second stamp
36 first portion of second stamp
38 second portion of second stamp
40 first roller
42 first-roller surface
44 first-roller axis
50 second roller
52 second-roller surface
54 second-roller axis
60 first curable/cured layer
70 second curable I cured layer
80 radiation
90 curable/cured ink
100 provide substrate step
101 provide flexible substrate step
110 provide first stamp, first roller, second stamp, and second roller step
120 form first and second curable layers step
130 locate first and second stamps step
140 press first and second rollers against first and second stamps step
150 rotate first and second rollers step
160 simultaneously cure first and second curable layer step
170 remove first and second stamps step
220 dispose first and second stamps step
230 dispose first and second rollers step
300 simultaneously coat first and second layers step
310 remove curable ink step
320 cure conductive ink step
330 coat first and second layers step
340 simultaneously remove curable ink step