Number | Name | Date | Kind |
---|---|---|---|
5053351 | Fazan et al. | Oct 1991 | |
5188975 | Kojima et al. | Feb 1993 | |
5231043 | Chan et al. | Jul 1993 | |
5428235 | Shimizu et al. | Jun 1995 | |
5434812 | Tseng | Jul 1995 | |
5459345 | Okudaira et al. | Oct 1995 | |
5504704 | Sato et al. | Apr 1996 | |
5696395 | Tseng | Dec 1997 | |
5705838 | Jost et al. | Jan 1998 |
Entry |
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"Fully Self-Aligned 6F.sup.2 Cell Technology for Low Cost 1 Gb DRAM," by Masami Aoki, et al., 1996 Symposium on VLSI Technology Digest of Technical Papers, pp. 22-23. |
"3-Dimensional Stacked Capacitor Cell For 16M and 64M DRAMs," by T. Ema, et al., IEDM., 1988, pp. 592-595. |