The present invention relates to a drive system for a variable vacuum capacitor.
Variable vacuum capacitors often comprise a first set of electrodes movably arranged with respect to a second set of electrodes. The electrodes may be arranged, for example, as concentric rings. Principally, in a variable vacuum capacitor, a first set of concentric rings may be moved into a second set of concentric rings. Due to such a movement, the area is increased of parts of the first concentric rings and of parts of the second concentric rings that lie opposite to each other. This leads to an increase of the relevant active area and therefore to an increase of the capacitance of the variable vacuum capacitor. The relative movement of the first and the second electrodes is performed by means of a mechanical drive system. Such a mechanical drive system may comprise a drive screw and a nut. The drive screw may be manufactured out of stainless steel and the nut may be manufactured out of lead bronze. Apart of the electrodes and the drive system, a variable vacuum capacitor includes further elements. These further elements may comprise, for example, a housing bottom, an insulator, a housing top and a spring bellow. A first set of electrodes may be arranged in the housing bottom. Together with the spring bellow and the drive system, a second set of electrodes may be arranged in the housing top. By means of the drive system, the second set of electrodes can be moved in a given direction. The insulator may be arranged between the housing bottom and the housing top. The vacuum of the vacuum capacitor is basically surrounded by parts of the housing top and the bellows on one side, and by parts of the housing top, the insulator and the housing bottom on the other side.
Variable vacuum capacitors are used in a wide variety of industrial applications. Such applications comprise radio broadcasting systems, manufacturing systems for flat panel displays, manufacturing systems for semiconductors, or other industrial applications. For such applications, variable vacuum capacitors are needed capable of withstanding currents of about 50 A to 200 A, or currents of up to 900 A, or higher currents, and voltages of up to 90 kV, or higher voltages. The range of the variable capacitance of a variable vacuum capacitor may be 20 pF for the lowest value and
5000 pF for the highest value. Depending on the application, a variable vacuum capacitor may be constructed to provide other ranges of a variable capacitance. Further requirements for variable vacuum capacitors may comprise operating conditions as, for example, a certain nominal frequency, a temperature range for running the capacitor, and other requirements.
Variable vacuum capacitors have to be constructed for a long lasting operational life. Therefore, the parts of a variable capacitor have to be manufactured in a high quality. In recent years, the requirements regarding the speed for changing the capacitance of a variable vacuum capacitor have increased. Basically, a change of the capacitance of a variable vacuum capacitor is performed by rotating the drive screw. By means of such a rotation, the capacitance of the variable vacuum capacitor is changed accordingly. If a last change of the capacitance is needed, a high rotation speed of the rotating screw is needed equally well. In recent years, the required rotation speed has increased from about 100 rpm to 600 rpm or higher. These demands have led the manufacturers to introduce new hardening techniques for the drive screw and to introduce new lubricants. However, the results achieved by these techniques have not fully satisfied the needed requirements, especially with respect to the durability of the drive system.
It is desirable to propose a new drive system for a variable vacuum capacitor, which drive system does not have the drawbacks of the prior art. In particular, the new drive system should have an improved life expectancy, while increasing the allowable speed for changing between different capacitance values of the variable vacuum capacitor. Preferably, the mechanical drive system comprises a drive screw and a nut, wherein the nut is arranged in a housing of the vacuum capacitor, wherein the drive screw is screwed through the nut, wherein a first electrode is arranged on one side of the drive screw, wherein, by means of a rotation of the drive screw, the first electrode is movable relative to a second electrode.
According to an aspect of the present invention the .nut of the mechanical drive system of a vacuum capacitor is at least partially manufactured from plastic material. In particular, such a drive system has the advantage that a high speed in the change of the capacitance of the variable vacuum capacitor can be achieved and that the durability of the drive system can be improved significantly.
In an embodiment variant, the nut is substantially manufactured fully out of plastic material. In particular, such a drive system has the advantage that the number of needed parts can be minimized.
In another embodiment variant, the part of the nut for screwing the drive screw through the nut is manufactured out of plastic material and the part of the nut for arranging the nut in the housing of the vacuum capacitor is manufactured out of metallic material. Such an embodiment has the advantage that the physical properties of the nut can be adapted to the physical properties of the material contacting the nut when installed.
In a further embodiment variant, the plastic material comprises a high performance plastic material. Such an embodiment has the advantage that a high performance plastic material with well known physical properties can be used for achieving desired results with respect to durability and speed of operation of the mechanical drive system.
In another embodiment variant, the plastic material comprises a high performance and high temperature up to 250° Celsius polymer plastic material with a friction factor of <0.1 @ 100° Celsius. Such an embodiment variant has the advantage that well known products may be used for achieving the desired results with respect to durability and speed of operation of the mechanical drive system.
In a further embodiment variant, the metallic material comprises a stainless steel. Such an embodiment has the advantage that a well known material for achieving durability and speed of operation can be used.
In another embodiment variant, the drive screw comprises a PVD (PVD: Physical Vapor Deposition) coating or a coating of a similar process, with a Vickers hardness of 6'000 HV or higher. Such an embodiment has the advantage that durability and speed of operation can be significantly improved.
An embodiment of the present invention will be described in the following with references to an example. The example of the embodiment is illustrated by
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When the mechanical drive system is installed, a lubricant may be applied to the drive screw, such that the friction between the drive screw and the nut is reduced further. Such a lubricant may comprise synthetic oil.
The drive screw may comprise a PVD (PVD: Physical Vapor Deposition) coating, which coating may be manufactured by means of well known methods and procedures.
The plastic material may be manufactured in such a manner that the variable vacuum capacitor may be operated in a temperature range from about 0° Celsius to about 125° Celsius. For example, the plastic material may comprise a high performance and high temperature polymer plastic material, which may have the following properties: maintenance free, wear-resistant, low friction, impact-resistant, vibration-resistant, well-priced, easy to process (e.g. chipping, grinding, burnishing), adapted to be glued or to be welded, anti-adhesive. The features of the plastic material may comprise: usable in a temperature range of −50° Celsius to 140° Celsius, maximal permissible temperature of 250° Celsius, dynamic coefficient of friction of <0.1 (for dry run @ a temperature of 100° Celsius), and wear factor of <0.15 mm/100 km.
Filing Document | Filing Date | Country | Kind | 371c Date |
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PCT/EP2007/059236 | 9/4/2007 | WO | 00 | 3/4/2010 |