Patent Application
20230354577
The present disclosure relates to dynamic flash memory (DFM) apparatuses, systems, and methods, for example, tri-gate DFM apparatuses, systems, and methods to increase storage efficiency in a three-dimensional (3D) memory device.
Dynamic random-access memory (DRAM) is a volatile memory that uses charge stored on a capacitor to represent information. DRAM stores each bit in a memory cell that includes a transistor and a capacitor (e.g., 1T1C). Charge levels greater than a certain threshold can represent a first logic level (e.g., 1 state) and charge levels less than another threshold amount can represent a second logic level (e.g., 0 state). Leakage currents and various parasitic effects limit the length of time a capacitor can hold charge and regular refresh cycles are needed. DRAM retention times can be as low as 32 ms during high temperature operations (e.g., above 85° C.) and can require refresh rates of about 31 Hz.
Flash memory (flash) is a non-volatile memory that uses charge stored on a floating gate to represent information. Flash stores each bit in a memory cell that includes a transistor with a floating gate. The amount of charge on the floating gate will determine whether the transistor will conduct when a fixed set of read bias conditions are applied. Flash can retain charge for a long period of time (e.g., about 10 years at 85° C.) since the floating gate is completely surrounded by insulators. Further, the act of reading the data can be performed non-destructively without loss of the information. In addition, flash can quickly erase entire blocks or pages of data simultaneously (e.g., NAND flash).
Current 1T1C DRAM is approaching a process limit. The manufacturing of 1T1C DRAM devices with small-node capacitors to retain charge is becoming more difficult due to increased current leakage, increased power consumption, degraded operating voltage margins, and decreased retention times. Further, current single transistor (1T) capacitor-free DRAM (e.g., ZRAM, TTRAM, ARAM, etc.) devices need further improvement and optimization for manufacturable integration and operation solutions.
Accordingly, there is a need to, e.g., provide a capacitor-free dynamic random-access memory device to increase memory storage efficiency. Further, there is a need to provide tri-gate control with different programming options (e.g., impact ionization, gate-induced drain leakage (GIDL), gate-induced source leakage (GISL)). Further, there is a need to increase read, program, and erase operation rates. Further, there is a need to decrease leakage current, decrease junction current, and decrease power consumption. Further, there is a need to increase charge retention times and decrease refresh rates.
In some aspects, a three-dimensional (3D) memory device includes a memory cell, a top contact coupled to the memory cell, and a bottom contact coupled to the memory cell. In some aspects, the 3D memory device can increase memory storage efficiency, provide tri-gate control, provide different programming options (e.g., impact ionization, GIDL, GISL), increase read, program, and erase operation rates, decrease leakage current, decrease junction current, decrease power consumption, increase charge retention times, and decrease refresh rates.
In some aspects, the memory cell can include a pillar, an insulating layer, a first gate contact, a second gate contact, and a third gate contact. In some aspects, the pillar can be configured to store an electrical charge. In some aspects, the insulating layer can surround the pillar. In some aspects, the first gate contact can surround a first portion of the insulating layer. In some aspects, the first gate contact can be coupled to a word line configured to address and non-destructively read the pillar. In some aspects, the second gate contact can surround a second portion of the insulating layer. In some aspects, the second gate contact can be coupled to a plate line configured to program the pillar. In some aspects, the third gate contact can surround a third portion of the insulating layer. In some aspects, the third gate contact can be configured to control electrical charge conduction between the first gate contact and the second gate contact.
In some aspects, the top contact can be coupled to a bit line configured to flow electrical charge through and/or away from the memory cell. In some aspects, the bottom contact can be coupled to a source line configured to flow electrical charge through and/or away from the memory cell. In some aspects, different voltage combinations can be applied to the bit line, the word line, the plate line, the third gate contact, and the source line to perform read (e.g., non-destructively), program (e.g., 1 state), and erase (e.g., 0 state) operations on the 3D memory device.
In some aspects, the pillar can be a monolithic vertical pillar. In some aspects, the monolithic vertical pillar can be a single semiconductor material (e.g., silicon, doped silicon, monocrystalline silicon, etc.). In some aspects, the monolithic vertical pillar can decrease defect concentrations, increase charge conduction, decrease leakage current, and increase manufacturing efficiency.
In some aspects, the insulating layer can be a monolithic insulating layer. In some aspects, the monolithic insulating layer can be a single dielectric material (e.g., high-k dielectric, oxide, nitride, silicon oxide, silicon nitride, glass, SOG, etc.). In some aspects, the monolithic insulating layer can decrease defect concentrations, increase gate capacitance, decrease leakage current, and increase manufacturing efficiency.
In some aspects, the third gate contact can be configured to increase a program rate of the pillar. In some aspects, the third gate contact can increase the flow of electrical charge to the pillar of the memory cell.
In some aspects, the 3D memory device can be configured for impact ionization programming, GIDL programming, or both.
In some aspects, the third gate contact can be coupled to a dummy line. In some aspects, for impact ionization programming, the dummy line can be configured to increase a charge flow from the first gate contact to the second gate contact. In some aspects, for impact ionization programming, the dummy line can apply a voltage to increase a charge flow from the first gate contact to the second gate contact. In some aspects, the charge flow can have a charge density greater than about 1×1017 cm−3.
In some aspects, the third gate contact can be coupled to a top select gate (TSG) line or a bottom select gate (BSG) line. In some aspects, for GIDL programming, the TSG line or the BSG line can be configured to create a charge barrier between the first gate contact and the second gate contact to selectively program the pillar. In some aspects, for GIDL programming, the TSG line or the BSG line can apply a voltage to create a charge barrier between the first gate contact and the second gate contact to selectively program the pillar. In some aspects, the charge barrier can have a charge density of no greater than 1×1017 cm−3.
In some aspects, the third gate contact can be between the first gate contact and the second gate contact.
In some aspects, in a first configuration (e.g., 1 state), the top contact can have a HIGH level voltage (e.g., about 0.8 V), the first gate contact can have a HIGH level voltage (e.g., about 1.5 V), the second gate contact can have a HIGH level voltage (e.g., about 0.8 V), the third gate contact can have a HIGH level voltage (e.g., about 1 V), the bottom contact can have a LOW level voltage (e.g., about 0 V or GND), and the memory cell can include the electrical charge.
In some aspects, in a second configuration (e.g., 0 state), the top contact can have a LOW level voltage (e.g., about 0 V or GND), the first gate contact can have a LOW level voltage (e.g., about 0 V or GND), the second gate contact can have a HIGH level voltage (e.g., about 1 V), the third gate contact can have a HIGH level voltage (e.g., about 0.8 V), the bottom contact can have a HIGH level voltage (e.g., about −2 V), and the memory cell can include substantially no electrical charge.
In some aspects, the 3D memory device can perform a block erase operation. In some aspects, different voltage combinations can be applied to the bit line, the word line, the plate line, the third gate contact, and the source line to perform a block erase (e.g., 0 state) operation on a plurality of 3D memory devices in a memory block simultaneously.
In some aspects, the 3D memory device can perform a refresh operation. In some aspects, different voltage combinations can be applied to the bit line, the word line, the plate line, the third gate contact, and the source line to perform a refresh (e.g., “0 state” refresh, “1 state” refresh) operation on the memory cell.
In some aspects, the 3D memory device can perform a block refresh operation. In some aspects, different voltage combinations can be applied to the bit line, the word line, the plate line, the third gate contact, and the source line to perform a block refresh (e.g., “0 state” refresh, “1 state” refresh) operation on a plurality of 3D memory devices in a memory block simultaneously.
In some aspects, the 3D memory device can have a charge retention time of at least 100 ms. In some aspects, the 3D memory device can have a charge retention time of at least 100 ms during high temperature operation (e.g., greater than 85° C.).
In some aspects, the 3D memory device can have a refresh rate of no greater than 10 Hz. In some aspects, the 3D memory device can have a refresh rate of no greater than 10 Hz during high temperature operation (e.g., greater than 85° C.).
In some aspects, the 3D memory device can include a dynamic flash memory (DFM) device. In some aspects, the top contact, the memory cell, and the bottom contact can form a DFM device. In some aspects, the DFM device can increase memory storage efficiency, provide tri-gate control, provide different programming options (e.g., impact ionization, GIDL, GISL), increase read, program, and erase operation rates, decrease leakage current, decrease junction current, decrease power consumption, increase charge retention times, and decrease refresh rates.
In some aspects, the 3D memory device comprises a NAND DFM device. In some aspects, the 3D memory device can include floating-gate transistors (e.g., memory strings) connected in series that resemble a NAND gate.
In some aspects, the top contact can be n-type (e.g., n+), the memory cell can be p-type (e.g., p), and the bottom contact can be n-type (e.g., n+) so that the 3D memory device forms p-type surrounding gate transistors (SGTs) with hole charge carriers. In some aspects, when activated (e.g., source line voltage applied) hole carriers flow through the memory cell from the bottom contact (e.g., source) to the top contact (e.g., drain).
In some aspects, a three-dimensional (3D) memory device can include a memory cell, a top contact coupled to the memory cell, and a bottom contact coupled to the memory cell. In some aspects, the 3D memory device can increase memory storage efficiency, provide tri-gate control, provide different programming options (e.g., impact ionization, GIDL, GISL), increase read, program, and erase operation rates, decrease leakage current, decrease junction current, decrease power consumption, increase charge retention times, and decrease refresh rates.
In some aspects, the memory cell can include a pillar, an insulating layer, a first gate contact, a second gate contact, and a third gate contact. In some aspects, the pillar can be configured to store an electrical charge. In some aspects, the insulating layer can surround the pillar. In some aspects, the first gate contact can surround a first portion of the insulating layer. In some aspects, the first gate contact can be coupled to a TSG line configured to address and non-destructively read the pillar. In some aspects, the second gate contact can surround a second portion of the insulating layer. In some aspects, the second gate contact can be coupled to a plate line configured to program the pillar. In some aspects, the third gate contact can surround a third portion of the insulating layer. In some aspects, the third gate contact can be coupled to a BSG line configured to increase charge retention in the pillar.
In some aspects, the top contact can be coupled to a bit line configured to flow electrical charge through and/or away from the memory cell. In some aspects, the bottom contact can be coupled to a source line configured to flow electrical charge through and/or away from the memory cell. In some aspects, different voltage combinations can be applied to the bit line, the TSG line, the plate line, the BSG line, and the source line to perform read (e.g., non-destructively), program (e.g., 1 state), and erase (e.g., 0 state) operations on the 3D memory device.
In some aspects, the second gate contact can be between the first gate contact and the third gate contact. In some aspects, the third gate contact can be between the second gate contact and the bottom contact. In some aspects, the third gate contact can be configured to increase a distance between the second gate contact and the bottom contact.
In some aspects, in a first configuration (e.g., 1 state), the top contact can have a HIGH level voltage (e.g., about 0.8 V), the first gate contact can have a HIGH level voltage (e.g., about 1.5 V), the second gate contact can have a HIGH level voltage (e.g., about 0.8 V), the third gate contact can have a HIGH level voltage (e.g., about 1 V), the bottom contact can have a LOW level voltage (e.g., about 0 V or GND), and the memory cell can include the electrical charge.
In some aspects, in the first configuration, the third gate contact can be configured to increase a depletion area of the pillar. In some aspects, in the first configuration, the third gate contact applies the HIGH level voltage (e.g., about 1 V) to increase a depletion area of the pillar. In some aspects, in the first configuration, the third gate contact can be configured to decrease a junction leakage in the memory cell. In some aspects, in the first configuration, the third gate contact can be between the second gate contact and the bottom contact to decrease a junction leakage in the memory cell. In some aspects, in the first configuration, the third gate contact can be configured to increase a retention rate of the pillar and decrease a refresh rate of the memory cell. In some aspects, in the first configuration, the third gate contact can apply the HIGH level voltage (e.g., about 1 V) to increase a retention rate of the pillar and decrease a refresh rate of the memory cell.
In some aspects, in a second configuration (e.g., 0 state), the top contact can have a LOW level voltage (e.g., about 0 V or GND), the first gate contact can have a LOW level voltage (e.g., about 0 V or GND), the second gate contact can have a HIGH level voltage (e.g., about 1 V), the third gate contact can have a HIGH level voltage (e.g., about 0.8 V), the bottom contact can have a HIGH level voltage (e.g., about −2 V), and the memory cell can include substantially no electrical charge.
In some aspects, a method for forming a three-dimensional (3D) memory device can include forming an alternating dielectric stack atop a substrate. In some aspects, the method can further include forming a channel trench in the alternating dielectric stack. In some aspects, the method can further include forming a bottom contact in the channel trench. In some aspects, the method can further include forming a pillar atop the bottom contact. In some aspects, the method can further include forming a top contact atop the pillar. In some aspects, the method can further include forming a gate line trench in the alternating dielectric stack. In some aspects, the method can further include removing a portion of the alternating dielectric stack. In some aspects, the method can further include forming a high-k dielectric and conductive gate stack in the removed portion of the alternating dielectric stack to form a memory cell. In some aspects, the memory cell can include a first gate contact, a second gate contact, and a third gate contact. In some aspects, the method can further include forming a gate line slit in the gate line trench. In some aspects, the method can further include forming interconnects to the top contact, the first gate contact, the second gate contact, the third gate contact, and the bottom contact.
In some aspects, the first gate contact can be coupled to a word line configured to address and non-destructively read the pillar. In some aspects, the second gate contact can be coupled to a plate line configured to program the pillar. In some aspects, the third gate contact can be coupled to a dummy line configured to increase a charge flow from the first gate contact to the second gate contact. In some aspects, the third gate contact can be between the first gate contact and the second gate contact.
In some aspects, the first gate contact can be coupled to a word line configured to address and non-destructively read the pillar. In some aspects, the second gate contact can be coupled to a plate line configured to program the pillar. In some aspects, the third gate contact can be coupled to a TSG line configured to create a charge barrier between the first gate contact and the second gate contact to selectively program the pillar. In some aspects, the third gate contact can be between the first gate contact and the second gate contact.
In some aspects, the first gate contact can be coupled to a TSG line configured to address and non-destructively read the pillar. In some aspects, the second gate contact can be coupled to a plate line configured to program the pillar. In some aspects, the third gate contact can be coupled to a BSG line configured to increase charge retention in the pillar. In some aspects, the second gate contact can be between the first gate contact and the third gate contact.
In some aspects, the forming the bottom contact can include epitaxially growing a conductive layer. In some aspects, the forming the bottom contact can include epitaxially growing a doped semiconductor (e.g., silicon). In some aspects, the forming the bottom contact can include a selective epitaxial growth (SEG) process.
In some aspects, the forming the pillar can include epitaxially growing a semiconductor layer. In some aspects, the pillar can be a monolithic vertical pillar. In some aspects, the pillar can be a single semiconductor material (e.g., silicon, doped silicon, monocrystalline silicon, etc.). In some aspects, the pillar can be a monocrystalline material (e.g., silicon, germanium, Group IV semiconductor, Group III-V semiconductor, Group II-VI semiconductor, graphene, sapphire, etc.).
In some aspects, the forming the top contact can include doping the pillar to form a conductive layer. In some aspects, the doping the pillar can include ion implantation. In some aspects, the pillar can include ion implanted dopants to form the top contact. In some aspects, forming the top contact can include epitaxially growing a doped semiconductor (e.g., silicon). In some aspects, forming the top contact can include a SEG process.
In some aspects, the removing the portion of the alternating dielectric stack can include isotropically etching silicon nitride from a lateral edge of the 3D memory device.
In some aspects, the method can include forming a DFM device. In some aspects, forming the top contact, the memory cell, and the bottom contact can form a DFM device. In some aspects, the formed DFM device can increase memory storage efficiency, provide tri-gate control, provide different programming options (e.g., impact ionization, GIDL, GISL), increase read, program, and erase operation rates, decrease leakage current, decrease junction current, decrease power consumption, increase charge retention times, and decrease refresh rates.
In some aspects, the method can include forming a NAND DFM device. In some aspects, forming the NAND DFM device can include forming floating-gate transistors (e.g., memory strings) connected in series that resemble a NAND gate.
Implementations of any of the techniques described above may include a system, a method, a process, a device, and/or an apparatus. The details of one or more implementations are set forth in the accompanying drawings and the description below. Other features will be apparent from the description and drawings, and from the claims.
Further features and exemplary aspects of the aspects, as well as the structure and operation of various aspects, are described in detail below with reference to the accompanying drawings. It is noted that the aspects are not limited to the specific aspects described herein. Such aspects are presented herein for illustrative purposes only. Additional aspects will be apparent to persons skilled in the relevant art(s) based on the teachings contained herein.
The accompanying drawings, which are incorporated herein and form part of the specification, illustrate the aspects and, together with the description, further serve to explain the principles of the aspects and to enable a person skilled in the relevant art(s) to make and use the aspects.
DFM devices shown in
The features and exemplary aspects of the aspects will become more apparent from the detailed description set forth below when taken in conjunction with the drawings, in which like reference characters identify corresponding elements throughout. In the drawings, like reference numbers generally indicate identical, functionally similar, and/or structurally similar elements. Additionally, generally, the left-most digit(s) of a reference number identifies the drawing in which the reference number first appears. Unless otherwise indicated, the drawings provided throughout the disclosure should not be interpreted as to-scale drawings.
This specification discloses one or more aspects that incorporate the features of this present invention. The disclosed aspect(s) merely exemplify the present invention. The scope of the invention is not limited to the disclosed aspect(s). The present invention is defined by the claims appended hereto.
The aspect(s) described, and references in the specification to “one aspect,” “an aspect,” “an example aspect,” “an exemplary aspect,” etc., indicate that the aspect(s) described may include a particular feature, structure, or characteristic, but every aspect may not necessarily include the particular feature, structure, or characteristic. Moreover, such phrases are not necessarily referring to the same aspect. Further, when a particular feature, structure, or characteristic is described in connection with an aspect, it is understood that it is within the knowledge of one skilled in the art to effect such feature, structure, or characteristic in connection with other aspects whether or not explicitly described.
Spatially relative terms, such as “beneath,” “below,” “lower,” “above,” “on,” “upper” and the like, may be used herein for ease of description to describe one element or feature's relationship to another element(s) or feature(s) as illustrated in the figures. The spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. The apparatus may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein may likewise be interpreted accordingly.
The term “about” or “substantially” or “approximately” as used herein indicates the value of a given quantity that can vary based on a particular technology. Based on the particular technology, the term “about” or “substantially” or “approximately” can indicate a value of a given quantity that varies within, for example, 1-15% of the value (e.g., ±1%, ±2%, ±5%, ±10%, or ±15% of the value).
The term “dynamic random-access memory” or “DRAM” as used herein indicates a volatile memory that uses charge stored on a capacitor to represent information. DRAM stores each bit in a memory cell that includes a transistor and a capacitor (e.g., 1T1C). The 1T1C design can be based on metal-oxide-semiconductor (MOS) technology. Charge levels greater than a certain threshold can represent a first logic level (e.g., 1 state) and charge levels less than another threshold amount can represent a second logic level (e.g., 0 state). Leakage currents and various parasitic effects limit the length of time a capacitor can hold charge. Each time data is read, it must be rewritten to ensure retention and regular data refresh cycles must be performed. DRAM retention times can be as low as 32 ms during high temperature operations (e.g., greater than 85° C.) and can require refresh rates of about 31 Hz.
The term “flash memory” or “flash” as used herein indicates a non-volatile memory that uses charge stored on a floating gate to represent information. Flash stores each bit in a memory cell that includes a transistor with a floating gate. The amount of charge on the floating gate will determine whether the transistor will conduct when a fixed set of read bias conditions are applied. Flash can retain charge for a long period of time (e.g., about 10 years at 85° C.) since the floating gate is completely surrounded by insulators. Further, the act of reading the data can be performed non-destructively without loss of the information. In addition, flash can quickly erase data and entire blocks or pages of data can be erased simultaneously.
The term “NAND” as used herein indicates memory designs or architectures that resemble NAND logic gates (e.g., an inverted AND gate) and connect to memory cells in series (e.g., memory strings). In NAND flash, the relationship between a bit line and a word line resembles a NAND logic gate and can be used for fast writes and high-density arrays. NAND flash can access data sequentially since the transistors in the array are connected in series (e.g., memory strings). NAND flash can be read, programmed (written), and erased in blocks or pages. NAND flash can have a smaller cell size than DRAM but can require additional circuitry to implement.
The term “surrounding gate transistor” or “SGT” as used herein indicates a memory device that has a gate surrounding a channel region of a transistor on all sides.
The term “dynamic flash memory” or “DFM” as used herein indicates a volatile memory that uses a dual gate SGT. The dual gates of the dual gate SGT can include a word line (WL) gate and a plate line (PL) gate. DFM can be capacitor-free and can store charge on a channel region of a transistor. DFM can still requires a refresh cycle but can offer longer retention times, faster operation speeds, and higher density than compared to DRAM or other types of volatile memory. Further, similar to flash, DFM can offer block refresh and block erase operations.
The term “bit line” or “BL” as used herein indicates an array connection to address a particular memory cell in a memory array. A bit line can be connected to a drain of a transistor (e.g., DFM device). A bit line can be connected to two or more serially connected memory cells (e.g., memory strings). Different voltage combinations applied to the bit line can define read, program (write), and erase operations in the memory cell.
The term “source line” or “SL” as used herein indicates an array connection to address a particular memory cell in a memory array. A source line can be connected to a source of a transistor (e.g., DFM device). A source line can be connected to two or more serially connected memory cells (e.g., memory strings). Different voltage combinations applied to the source line can define read, program (write), and erase operations in the memory cell.
The term “word line” or “WL” as used herein indicates an array connection to provide a voltage to a particular memory cell in a memory array to select which row of bits is to be read, programmed, or erased. A word line can act as a top select gate (TSG). A word line can be connected to a portion of a channel or a portion of a body of a transistor (e.g., DFM device). Different voltage combinations applied to the word line can define read, program (write), and erase operations in the memory cell. When the word line is activated, current flows only if charge is already on the memory cell. If there is charge on the channel or body of the memory cell, the read operation recharges the memory cell and is non-destructive. If there is no charge on the channel or body of the memory cell, no current flows and the read is also non-destructive.
The term “plate line” or “PL” as used herein indicates an array connection to provide a voltage to a particular memory cell in a memory array to read, program, or erase charge on the memory cell. A plate line can be connected to a portion of a channel or a portion of a body of a transistor (e.g., DFM device). Different voltage combinations applied to the plate line can define read, program (write), and erase operations in the memory cell. When the plate line is activated, charge flows from the source line (source) to the bit line (drain). When the plate line is deactivated, any remaining charge is stored in the channel or body of the memory cell.
The term “dummy line” or “DMY” as used herein indicates an array connection, separate from a word line, to provide an additional voltage to a particular memory cell in a memory array to increase operating efficiency. A dummy line can be used for impact ionization programming to rapidly increase charge (e.g., holes) conduction generated at a word line contact to flow and increase charge (e.g., holes) in a channel of a memory cell. A dummy line can increase a program (write) rate of a memory cell.
The term “top select gate line” or “TSG” as used herein indicates an array connection to provide a voltage to a particular memory cell in a memory array to select which row of bits is to be read, programmed, or erased. The top select gate line can be used for gate-induced drain leakage (GIDL) programming to create a charge (e.g., hole) barrier to provide selective programming (writing) in a channel of a memory cell. A top select gate line can provide selective programming (writing) and increase a program (write) rate. A top select gate line can provide charge separation between a plate line and a bit line and thereby increase charge retention times and decrease refresh rates in a memory cell. A top select gate line can provide charge separation between a plate line and a bit line and thereby decrease junction leakage. A top select gate line can increase a depletion area of a memory cell.
The term “bottom select gate line” or “BSG” as used herein indicates an array connection to provide a voltage to a particular memory cell in a memory array to select which row of bits is to be read, programmed, or erased. The bottom select gate line can be used for gate-induced source leakage (GISL) programming to create a charge (e.g., hole) barrier to provide selective programming (writing) in a channel of a memory cell. A bottom select gate line can provide selective programming (writing) and increase a program (write) rate. A bottom select gate line can provide charge separation between a plate line and a source line and thereby increase charge retention times and decrease refresh rates in a memory cell. A bottom select gate line can provide charge separation between a plate line and a source line and thereby decrease junction leakage. A bottom select gate line can increase a depletion area of a memory cell.
The term “impact ionization” or “collision ionization” as used herein indicates a programming method to generate electrical charge on a channel through interactions or collisions with charge carriers (e.g., holes). Impact ionization is a carrier generation process by which one energetic charge carrier loses energy through the creation of other charge carriers. For example, an electron with sufficient energy can release a bound electron in the valence band of the semiconductor material to the conduction band thereby creating an electron-hole pair.
The term “gate-induced drain leakage” or “GIDL” as used herein indicates a programming method to generate electrical charge on a channel through drain leakage. GIDL is caused by high electric fields in a drain junction of a memory cell. When a gate is at zero or negative voltage and a bit line has a positive voltage (e.g., above a threshold voltage), various charge generation effects (e.g., avalanche multiplication, band-to-band tunneling) will increase. For example, band-to-band tunneling can occur at the drain-channel junction of the memory cell. Minority carriers (e.g., holes) underneath the gate can flow to the source line to complete the GIDL path.
The term “gate-induced source leakage” or “GISL” as used herein indicates a programming method to generate electrical charge on a channel through source leakage. GISL is caused by high electric fields in a source junction of a memory cell. When a gate is at zero or negative voltage and a source line has a positive voltage (e.g., above a threshold voltage), various charge generation effects (e.g., avalanche multiplication, band-to-band tunneling) will increase. For example, band-to-band tunneling can occur at the source-channel junction of the memory cell. Minority carriers (e.g., holes) underneath the gate can flow to the drain (bit) line to complete the GISL path.
The term “substrate” as used herein indicates a planar wafer on which subsequent layers can be deposited, formed, or grown. A substrate can be formed of a single element (e.g., Si) or a compound material (e.g., GaAs), and may be doped or undoped. For example, a substrate can include silicon (Si), germanium (Ge), silicon-germanium (SiGe), gallium arsenide (GaAs), gallium nitride (GaN), gallium phosphide (GaP), gallium antimonide (GaSb), indium phosphide (InP), indium antimonide (InSb), a Group IV semiconductor, a Group III-V semiconductor, a Group II-VI semiconductor, graphene, sapphire, and/or any other semiconductor material. A substrate can be a monocrystalline material (e.g., monocrystalline Si).
The term “Group III-V semiconductor” as used herein indicates comprising one or more materials from Group III of the periodic table (e.g., group 13 elements: boron (B), aluminum (Al), gallium (Ga), indium (In), thallium (Tl)) with one or more materials from Group V of the periodic table (e.g., group 15 elements: nitrogen (N), phosphorus (P), arsenic (As), antimony (Sb), bismuth (Bi)). The compounds have a 1:1 combination of Group III and Group V regardless of the number of elements from each group. Subscripts in chemical symbols of compounds refer to the proportion of that element within that group. For example, Al0.25GaAs means the Group III part comprises 25% Al, and thus 75% Ga, while the Group V part comprises 100% As.
The term “Group IV semiconductor” as used herein indicates comprising two or more materials from Group IV of the periodic table (e.g., group 14 elements: carbon (C), silicon (Si), germanium (Ge), tin (Sn), lead (Pb)). Subscripts in chemical symbols of compounds refer to the proportion of that element. For example, Si0.25Ge0.75 means the Group IV part comprises 25% Si, and thus 75% Ge.
The term “Group II-VI semiconductor” as used herein indicates comprising one or more materials from Group II of the periodic table (e.g., group 12 elements: zinc (Zn), cadmium (Cd), mercury (Hg)) with one or more materials from Group VI of the periodic table (e.g., group 16 elements: oxygen (O), sulfur (S), selenium (Se), tellurium (Te)). The compounds have a 1:1 combination of Group II and Group VI regardless of the number of elements from each group. Subscripts in chemical symbols of compounds refer to the proportion of that element within that group.
The term “doping” or “doped” as used herein indicates that a layer or material contains a small impurity concentration of another element (dopant) which donates (donor) or extracts (acceptor) charge carriers from the parent material and therefore alters the conductivity. Charge carriers may be electrons or holes. A doped material with extra electrons is called n-type while a doped material with extra holes (fewer electrons) is called p-type.
The term “crystalline” as used herein indicates a material or layer with a single crystal orientation. In epitaxial growth or deposition, subsequent layers with the same or similar lattice constant follow the registry of the previous crystalline layer and therefore grow with the same crystal orientation or crystallinity.
The term “monocrystalline” as used herein indicates a material or layer having a continuous crystal lattice throughout the material or layer. Monocrystalline can indicate a single crystal or monocrystal (e.g., Si, Ge, GaAs, etc.).
The term “monolithic” as used herein indicates a layer, element, or substrate comprising bulk (e.g., single) material throughout. A monolithic element (e.g., a pillar) can be formed from a single bulk material (e.g., Si).
The term “deposit” or “deposition” as used herein indicates the depositing or growth of a layer on another layer or substrate. Deposition can encompass vacuum deposition, thermal evaporation, arc vaporization, ion beam deposition, e-beam deposition, sputtering, laser ablation, pulsed laser deposition (PLD), physical vapor deposition (PVD), atomic layer deposition (ALD), chemical vapor deposition (CVD), plasma-enhanced CVD (PECVD), low pressure CVD (LPCVD), metal-organic chemical vapor deposition (MOCVD), liquid source misted chemical deposition, spin-coating, epitaxy, vapor-phase epitaxy (VPE), liquid-phase epitaxy (LPE), solid-phase epitaxy (SPE), MBE, atomic layer epitaxy (ALE), molecular-beam epitaxy (MBE), powder bed deposition, and/or other known techniques to deposit material in a layer.
The term “dielectric” as used herein indicates an electrically insulating layer.
Dielectric can encompass oxide, nitride, oxynitride, ceramic, glass, spin-on-glass (SOG), polymer, plastic, thermoplastic, resin, laminate, high-k dielectric, and/or any other electrically insulating material.
The term “high-k dielectric” as used herein indicates a material with a high dielectric constant k or κ (kappa), for example, relative to the dielectric constant of silicon dioxide (SiO2). High-k dielectrics can be used as a gate dielectric or as another dielectric layer in an electronic device.
The term “high-k metal gate” or “high-k dielectric and conductive gate” or “HKMG” as used herein indicates a process of forming a high-k dielectric layer and a conductive (metal) layer stack in a memory device. HKMG technology can reduce gate leakage, increase transistor capacitance, and provide low power consumption for devices. Two process flows to pattern the HKMG stack are gate-first and gate-last.
The term “epitaxy” or “epitaxial” or “epitaxially” as used herein indicates crystalline growth of material, for example, via high temperature deposition.
The term “selective epitaxial growth” or “SEG” as used herein indicates local growth of an epitaxial layer through a pattern mask on a substrate or a layer. SEG provides epitaxial growth only on the exposed substrate or layer and other regions are masked by a dielectric film or other material that is not reactive to epitaxy.
The term “alternating dielectric stack” as used herein indicates a stack of different alternating dielectric layers in succession. For example, the first dielectric layer can be an oxide (e.g., silicon oxide) and the second dielectric layer can be a nitride (e.g., silicon nitride). The alternating dielectric stack can be arranged in a staircase pattern.
The term “gate line trench” as used herein indicates a trench or hole extending through an alternating dielectric stack of a memory device. The gate line trench can be used to form a gate line slit in the memory device.
The term “gate line slit” or “GLS” as used herein indicates a conductive pathway through an alternating dielectric stack, for example, between adjacent memory blocks or adjacent memory cells. The GLS can provide connection to a HKMG stack in a memory device. The GLS can extend vertically through the alternating dielectric stack and extend horizontally between two adjacent arrays of memory blocks or memory cells.
The term “HIGH level voltage” as used herein indicates an applied voltage not equal to zero (e.g., ±1 V) for a “high” logic state. In some aspects, HIGH level voltage indicates an acceptable input signal voltage range from about 0.8 V to about 5 V for a “high” logic state. In some aspects, HIGH level voltage indicates an acceptable input signal voltage range from about −0.8 V to about −5 V for a “high” logic state.
The term “LOW level voltage” as used herein indicates an applied voltage equal to or greater than zero (e.g., 0 V) for a “low” logic state. In some aspects, LOW level voltage indicates an acceptable input signal voltage range from about 0 V to about 0.8 V for a “low” logic state.
The term “GND” as used herein indicates a ground voltage level (e.g., 0 V).
Aspects of the disclosure may be implemented in hardware, firmware, software, or any combination thereof. Aspects of the disclosure may also be implemented as instructions stored on a machine-readable medium, which may be read and executed by one or more processors. A machine-readable medium may include any mechanism for storing or transmitting information in a form readable by a machine (e.g., a computing device). For example, a machine-readable medium may include read only memory (ROM); random access memory (RAM); magnetic disk storage media; optical storage media; flash memory devices; dynamic flash memory (DFM) devices, electrical, optical, acoustical or other forms of propagated signals (e.g., carrier waves, infrared signals, digital signals, etc.), and others. Further, firmware, software, routines, and/or instructions may be described herein as performing certain actions. However, it should be appreciated that such descriptions are merely for convenience and that such actions in fact result from computing devices, processors, controllers, or other devices executing the firmware, software, routines, instructions, etc.
Before describing such aspects in more detail, however, it is instructive to present example environments in which aspects of the present disclosure may be implemented.
As shown in
3D memory device 100 can include substrate 102, for example, silicon (e.g., single crystalline silicon), silicon-germanium (SiGe), gallium arsenide (GaAs), germanium (Ge), silicon on insulator (SOI), or any other suitable materials. 3D memory device 100 can include peripheral device 162 on substrate 102. Peripheral device 162 can be formed “on” substrate 102, where the entirety or part of peripheral device 162 is formed in substrate 102 (e.g., below the top surface of substrate 102) and/or directly on substrate 102. Peripheral device 162 can include transistors 104 formed on substrate 102. Isolation regions (e.g., shallow trench isolations (STIs)) and doped regions (e.g., source regions and drain regions of transistors 104) can be formed in substrate 102 as well. In some aspects, peripheral device 162 can be formed on substrate 102 using complementary metal-oxide-semiconductor (CMOS) technology.
3D memory device 100 can include interconnect layer 106 above transistors 104 to transfer electrical signals to and from transistors 104. Interconnect layer 106 can include a plurality of interconnects (also referred to herein as “contacts”), including interconnect lines 108 and vertical interconnect access (via) contacts 110. As used herein, the term “interconnects” can broadly include any suitable types of interconnects, such as front-end-of-line (FEOL) interconnects, middle-end-of-line (MEOL) interconnects, and/or BEOL interconnects.
Interconnect layer 106 can further include one or more interlayer dielectric (ILD) layers (also known as “intermetal dielectric (IMD) layers”) in which interconnect lines 108 and via contacts 110 can form. That is, interconnect layer 106 can include interconnect lines 108 and via contacts 110 in multiple ILD layers. Interconnect lines 108 and via contacts 110 in interconnect layer 106 can include conductive materials including, but not limited to, tungsten (W), cobalt (Co), copper (Cu), aluminum (Al), silicides, or any combination thereof. The ILD layers in interconnect layer 106 can include dielectric materials including, but not limited to, silicon oxide, silicon nitride, silicon oxynitride, low dielectric constant (low-k) dielectrics, or any combination thereof.
In some aspects, interconnect layer 106 can further include bonding contacts 112 at the top surface of interconnect layer 106. Bonding contacts 112 can include conductive materials including, but not limited to, W, Co, Cu, Al, silicides, or any combination thereof. The remaining areas at the top surface of interconnect layer 106 can be formed with dielectric materials including, but not limited to, silicon oxide, silicon nitride, silicon oxynitride, low-k dielectrics, or any combination thereof. Conductive materials (e.g., of bonding contacts 112) and dielectric materials at the top surface of interconnect layer 106 can be used for hybrid bonding as described below in detail.
3D memory device 100 can include memory array 160 above peripheral device 162. It is noted that X, Y, and Z axes are shown in
In some aspects, 3D memory device 100 is a NAND flash memory device in which memory cells are provided in the form of an array of NAND memory strings 114 each extending vertically above peripheral device 162 (e.g., transistors 104) and substrate 102. Memory array 160 can include NAND memory strings 114 that extend vertically through a plurality of alternating conductive/dielectric layer pairs, each including conductor layer 116 and dielectric layer 118. The stacked conductor/dielectric layer pairs are also referred to herein as memory stack 120. Conductor layers 116 and dielectric layers 118 in memory stack 120 alternate in the vertical direction. In other words, except at the top or bottom of memory stack 120, each conductor layer 116 can be adjoined by two dielectric layers 118 on both sides, and each dielectric layer 118 can be adjoined by two conductor layers 116 on both sides. Conductor layers 116 can each have the same thickness or different thicknesses. Similarly, dielectric layers 118 can each have the same thickness or different thicknesses. Conductor layers 116 can include conductive materials including, but not limited to, W, Co, Cu, Al, doped silicon, silicides, or any combination thereof. Dielectric layers 118 can include dielectric materials including, but not limited to, silicon oxide, silicon nitride, silicon oxynitride, or any combination thereof
Memory stack 120 can include an inner region (also known as a “core array region”) and an outer region (also known as a “staircase region”). In some aspects, the inner region is the center region of memory stack 120 where NAND memory strings 114 are formed, and the outer region is the remaining region of memory stack 120 surrounding the inner region (including the sides and edges). As shown in
In some aspects, each two adjacent conductor/dielectric layer pairs in staircase structure 122 are offset by a nominally same distance in the vertical direction (Z-direction) and a nominally same distance in the lateral direction (X-direction). Each offset thus can form a “landing area” for word line fan-out in the vertical direction. Some conductor layers 116 in the conductor/dielectric layer pairs can function as word lines of 3D memory device 100 and extend laterally into staircase structure 122 for interconnection. As shown in
As shown in
In some aspects, NAND memory strings 114 further include a plurality of control gates (each being part of a word line). Each conductor layer 116 in memory stack 120 can act as a control gate for each memory cell of NAND memory string 114. Each NAND memory string 114 can include a source select gate at its upper end and a drain select gate at its lower end. As used herein, the “upper end” of a component (e.g., NAND memory string 114) is the end farther away from substrate 102 in the Z-direction, and the “lower end” of the component (e.g., NAND memory string 114) is the end closer to substrate 102 in the Z-direction. For each NAND memory string 114, the drain select gate can be disposed below the source select gate in 3D memory device 100.
In some aspects, 3D memory device 100 further includes semiconductor layer 130 disposed above and in contact with NAND memory strings 114, for example, on the upper end of each NAND memory string 114. Memory stack 120 can be disposed below semiconductor layer 130. Semiconductor layer 130 can be a thinned substrate on which memory stack 120 is formed. In some aspects, semiconductor layer 130 includes semiconductor plugs 132 electrically separated by isolation regions (e.g., STIs). In some aspects, each semiconductor plug 132 is disposed at the upper end of corresponding NAND memory string 114 and functions as the source of corresponding NAND memory string 114 and thus, can be considered as part of corresponding NAND memory string 114. Semiconductor plug 132 can include single crystalline silicon. Semiconductor plug 132 can be undoped, partially doped (in the thickness direction and/or the width direction), or fully doped by p-type or n-type dopants. In some aspects, semiconductor plug 132 can include SiGe, GaAs, Ge, or any other suitable materials.
In some aspects, 3D memory device 100 can further include gate line slit (GLS) 134 that extends vertically in the Z-direction through memory stack 120. GLS 134 can extend along the X-direction which is parallel to staircase structure 122 extending along the X-direction.
In some aspects, 3D memory device 100 can include local interconnects that are formed in one or more ILD layers and in contact with components in memory stack 120, such as the word lines (e.g., conductor layers 116) and NAND memory strings 114. The interconnects are referred to herein as “local interconnects” as they are in contact with the components in memory stack 120 directly for fan-out. The local interconnects can include word line contacts 136, bit line contacts 138, and source line contacts 140. Each local interconnect can include an opening (e.g., a via hole or a trench) filled with conductive materials including, but not limited to, W, Co, Cu, Al, silicides, or any combination thereof.
Word line contacts 136 can extend vertically through one or more ILD layers. Each word line contact 136 can have its lower end in contact with corresponding conductor layer 116 (e.g., at the landing area) in staircase structure 122 of memory stack 120 to individually address a corresponding word line of 3D memory device 100. In some aspects, each word line contact 136 is disposed above corresponding conductor layer 116. Each bit line contact 138 can be disposed below memory stack 120 and have its upper end in contact with the lower end (e.g., the drain end) of corresponding NAND memory string 114 to individually address corresponding NAND memory string 114. Multiple bit line contacts 138 are disposed below and in contact with multiple NAND memory strings 114, respectively, according to some aspects. As shown in
Similar to peripheral device 162, memory array 160 of 3D memory device 100 can also include interconnect layers for transferring electrical signals to and from NAND memory strings 114. As shown in
As shown in
In some aspects, 3D memory device 100 further includes one or more through array contacts (TACs) that extend vertically through memory stack 120. Each TAC can extend through the entirety of memory stack 120, (e.g., all the conductor/dielectric layer pairs therein) and have its upper end in contact with BEOL interconnect layer 150 and its lower end in contact with array interconnect layer 142. TACs can thus make electrical connections between interconnect layer 106 and BEOL interconnect layer 150 and carry electrical signals from peripheral device 162 to BEOL interconnect layer 150 of 3D memory device 100.
Bonding interface 158 can be formed between interconnect layer 106 and array interconnect layer 142. Bonding contacts 112 and be bonded with array bonding contacts 148 at bonding interface 158. As shown in
In some aspects, a first semiconductor structure (e.g., memory array 160), including
NAND memory strings 114, semiconductor layer 130 (e.g., a thinned substrate), array interconnect layer 142, BEOL interconnect layer 150, and word line contacts 136, can be bonded to a second semiconductor structure (e.g., peripheral device 162), including substrate 102, transistors 104, and interconnect layer 106, in a face-to-face manner at bonding interface 158. Array interconnect layer 142 can contact interconnect layer 106 at bonding interface 158. Peripheral device 162 and memory array 160 can be bonded using hybrid bonding (also known as “metal/dielectric hybrid bonding”), which is a direct bonding technology (e.g., forming bonding between surfaces without using intermediate layers, such as solder or adhesives) and can obtain metal-metal bonding and dielectric- dielectric bonding simultaneously. The metal-metal bonding can be formed between array bonding contacts 148 and bonding contacts 112, and the dielectric-dielectric bonding can be formed between the dielectric materials at the remaining areas at bonding interface 158.
As shown in
SGT cell 240 can include word line (WL) 242 and plate line (PL) 246. WL 242 can be configured to address pillar 210 in dual gate SGT device 200 and act as a first gate connection to pillar 210. In some aspects, WL 242 can act as a top select gate connection. In some aspects, WL 242 can provide a voltage to read, program, or erase charge on pillar 210. PL 246 can be configured to address pillar 210 in dual gate SGT device 200 and act as a second gate connection of pillar 210. In some aspects, PL 246 can act as a traditional current-valve gate (e.g., similar to a metal-oxide-semiconductor field-effect transistor (MOSFET) gate) for pillar 210 and cover a majority of a length of pillar 210. In some aspects, PL 246 can provide a voltage to read, program, or erase charge on pillar 210. In some aspects, dual gate SGT device 200 can form part of DFM device 300 shown in
As shown in
BL 320 can be configured to address pillar 310 in DFM device 300 and be coupled to BL contact 322. BL contact 322 can be configured to act as a drain connection to pillar 310. In some aspects, BL contact 322 can be n-type (e.g., n+) and pillar 310 can be p-type (e.g., p). SL 330 can be configured to address pillar 310 in DFM device 300 and be coupled to SL contact 332. SL contact 332 can be configured to act as a source connection to pillar 310. In some aspects, SL contact 332 can be n-type (e.g., n+) and pillar 310 can be p-type (e.g., p). DFM cell 340 can be configured to address pillar 310 in DFM device 300 and act as a gate connection to pillar 310. In some aspects, different voltage combinations applied to BL 320, SL 330, and DFM cell 340 can define read, program (write), and erase operations in DFM device 300.
DFM cell 340 can include word line (WL) 342, WL contact 344, plate line (PL) 346, and PL contact 348. WL 342 can be configured to address pillar 310 in DFM device 300 and be coupled to WL contact 344. WL contact 344 can be configured to act as a first gate connection to pillar 310. WL contact 344 can surround dielectric 312 which surrounds pillar 310 thereby forming a first concentric transistor. In some aspects, WL contact 344 can include a conductive material (e.g., metal, polysilicon, tungsten, etc.). In some aspects, WL 342 can act as a top select gate connection. In some aspects, WL 342 can provide voltage to WL contact 344, thereby inducing an electric field within pillar 310, to read, program, or erase charge on pillar 310.
PL 346 can be configured to address pillar 310 in DFM device 300 and be coupled to PL contact 348. PL contact 348 can be configured to act as a second gate connection to pillar 310. PL contact 348 can surround dielectric 312 which surrounds pillar 310 thereby forming a second concentric transistor. In some aspects, PL contact 348 can include a conductive material (e.g., metal, polysilicon, tungsten, etc.). In some aspects, PL 346 can act as a traditional current-valve gate (e.g., similar to a MOSFET gate) for pillar 310 and cover a majority of a length of pillar 310. In some aspects, PL 346 can provide voltage to PL contact 348, thereby inducing an electric field within pillar 310, to read, program, or erase charge on pillar 310.
As shown in
As discussed above, DRAM is a volatile memory that uses charge stored on a capacitor to represent information. DRAM stores each bit in a memory cell that includes a transistor and a capacitor (e.g., 1T1C). Charge levels greater than a certain threshold can represent a first logic level (e.g., 1 state) and charge levels less than another threshold amount can represent a second logic level (e.g., 0 state). Leakage currents and various parasitic effects limit the length of time a capacitor can hold charge. Each time data is read, it must be rewritten to ensure retention and regular data refresh cycles must be performed. DRAM retention times can be as low as 32 ms during high temperature operations (e.g., greater than 85° C.) and can require refresh rates of about 31 Hz.
Flash is a non-volatile memory that uses charge stored on a floating gate to represent information. Flash stores each bit in a memory cell that includes a transistor with a floating gate. The amount of charge on the floating gate will determine whether the transistor will conduct when a fixed set of read bias conditions are applied. Flash can retain charge for a long period of time since the floating gate is completely surrounded by insulators. Further, the act of reading the data can be performed non-destructively without loss of the information. In addition, flash can quickly erase entire blocks or pages of data simultaneously (e.g., NAND flash).
Current 1T1C DRAM is approaching a process limit. The manufacturing of 1T1C DRAM devices with small-node capacitors to retain charge is becoming more difficult due to increased current leakage, increased power consumption, degraded operating voltage margins, and decreased retention times. Further, current single transistor (1T) capacitor-free DRAM (e.g., ZRAM, TTRAM, ARAM, etc.) devices need further improvement and optimization for manufacturable integration and operation solutions. Current 1T DRAM devices have serious problems due to junction leakage and large capacitive coupling between word lines and the transistor floating body. In addition, current 1T DRAM devices have extremely narrow operational voltage margins between first and second logic levels (e.g., 1 state and 0 state).
Aspects of tri-gate DFM apparatuses, systems, and methods as discussed below can provide a capacitor-free dynamic random-access memory device to increase memory storage storage efficiency, provide tri-gate control, provide different programming options (e.g., impact ionization, GIDL, GISL), increase read, program, and erase operation rates, decrease leakage current, decrease junction current, decrease power consumption, increase charge retention times, and/or decrease refresh rates.
Tri-gate DFM device 500 can be configured to operate as a volatile capacitor-free dynamic random-access 3D memory device. Tri-gate DFM device 500 can be further configured to increase memory storage efficiency. Tri-gate DFM device 500 can be further configured to provide tri-gate control and different programming options (e.g., impact ionization, GIDL, GISL). Tri-gate DFM device 500 can be further configured to increase read, program, and erase operation rates. Tri-gate DFM device 500 can be further configured to decrease leakage current, decrease junction current, and decrease power consumption. Tri-gate DFM device 500 can be further configured to increase charge retention times (e.g., greater than 100 ms at 85° C. operating temperature) and decrease refresh rates (e.g., less than 10 Hz).
Tri-gate DFM device 500 can be further configured to provide faster operation speeds and higher density than DRAM or other types of volatile memory. Tri-gate DFM device 500 can be further configured to provide block refresh and block erase operations similar to flash memory functionality. Although tri-gate DFM device 500 is shown in
As shown in
Substrate 502 can be configured to support pillar 510, dielectric 512, BL contact 522, SL contact 532, and DFM cell 540. Substrate 502 can be coupled to SL contact 532. In some aspects, substrate 502 can be a p-type semiconductor (e.g., p), for example, doped silicon. In some aspects, substrate 502 can include any planar wafer material, for example, Si, Ge, SiGe, GaAs, Group IV semiconductor, Group III-V semiconductor, Group II-VI semiconductor, graphene, sapphire, and/or any other semiconductor.
Pillar 510 can be configured to store electrical charge (e.g., holes). Pillar 510 can be between BL contact 522 and SL contact 532. In some aspects, pillar 510 can include a semiconductor material, for example, Si, doped Si, Ge, SiGe, GaAs, Group IV semiconductor, Group III-V semiconductor, Group II-VI semiconductor, graphene, sapphire, and/or any other semiconductor. In some aspects, pillar 510 can be doped (e.g., p-type). In some aspects, pillar 510 can have a doping concentration of about 1×1016 cm−3 to about 5×1018 cm−3. For example, pillar 510 can have a doping concentration of about 1×1018 cm−3. In some aspects, pillar 510 can have a diameter of about 1 nm to about 100 nm. For example, pillar 510 can have a diameter of about 50 nm. In some aspects, pillar 510 can be monolithic. For example, as shown in
Dielectric 512 can be configured to provide electrical insulation between pillar 510 and DFM cell 540. Dielectric 512 can surround pillar 510. In some aspects, dielectric 512 can include a dielectric material, for example, oxide, nitride, oxynitride, ceramic, glass, SOG, polymer, plastic, thermoplastic, resin, laminate, high-k dielectric, a combination thereof, and/or any other electrically insulating material. In some aspects, dielectric 312 can be a high-k dielectric configured to increase a gate capacitance and decrease a leakage current in pillar 510. In some aspects, dielectric 512 can have a radial thickness of about 1 nm to about 30 nm. For example, dielectric 512 can have a radial thickness of about 3 nm. In some aspects, dielectric 512 can be monolithic. For example, as shown in
BL 520 can be configured to address pillar 510 in tri-gate DFM device 500. BL 520 can be further configured to flow electrical charge through DFM cell 540. BL 520 can be coupled to BL contact 522. BL contact 522 can be configured to act as a drain connection to pillar 510. BL contact 522 can be coupled to a top side of DFM cell 540. In some aspects, BL contact 522 can be n-type (e.g., n+) and pillar 510 can be p-type (e.g., p). In some aspects, BL contact 522 can include a conductive material, for example, a metal, a doped semiconductor, polysilicon, tungsten, and/or any other suitable conductor.
SL 530 can be configured to address pillar 510 in tri-gate DFM device 500. SL 530 can be further configured to flow electrical charge through DFM cell 540. SL 530 can be coupled to SL contact 532. SL contact 532 can be configured to act as a source connection to pillar 510. SL contact 532 can be coupled to a bottom side of DFM cell 540. In some aspects, SL contact 532 can be n-type (e.g., n+) and pillar 510 can be p-type (e.g., p). In some aspects, SL contact 532 can include a conductive material, for example, a metal, a doped semiconductor, polysilicon, tungsten, and/or any other suitable conductor. In some aspects, different voltage combinations applied to BL 520, SL 530, and DFM cell 540 can define read, program (write), and erase operations in tri-gate DFM device 500.
DFM cell 540 can be configured to read, program, and erase electrical charge on pillar 510. DFM cell 540 can be coupled to BL contact 522 and SL contact 532. DFM cell 540 can include word line (WL) 542, WL contact 544, plate line (PL) 546, PL contact 548, dummy line (DMY) 550, and DMY contact 552. In some aspects, DFM cell 540 can be configured for impact ionization programming, GIDL programming, or both.
WL 542 can be configured to address pillar 510 in tri-gate DFM device 500. WL 542 can be further configured to address and non-destructively read electrical charge on pillar 510. In some aspects, WL 542 can act as a top select gate connection. WL 542 can be coupled to WL contact 544. WL contact 544 can be configured to act as a first gate connection to pillar 510. WL contact 544 can surround a first portion of dielectric 512 which surrounds a first portion of pillar 510 thereby forming a first concentric transistor in DFM cell 540. In some aspects, WL contact 544 can include a conductive material (e.g., metal, polysilicon, tungsten, etc.). In some aspects, WL 542 can provide voltage to WL contact 544, thereby inducing an electric field within pillar 510, to read, program, or erase charge on pillar 510. In some aspects, as shown in
PL 546 can be configured to address pillar 510 in tri-gate DFM device 500. PL 546 can be further configured to program (e.g., write) pillar 510. In some aspects, PL 546 can act as a traditional current-valve gate (e.g., similar to a MOSFET gate) for pillar 510 and cover a majority of a length of pillar 510. PL 546 can be coupled to PL contact 548. PL contact 548 can be configured to act as a second gate connection to pillar 510. PL contact 548 can surround a second portion of dielectric 512 which surrounds a second portion of pillar 510 thereby forming a second concentric transistor in DFM cell 540. In some aspects, PL contact 548 can include a conductive material (e.g., metal, polysilicon, tungsten, etc.). In some aspects, PL 546 can provide voltage to PL contact 548, thereby inducing an electric field within pillar 510, to read, program, or erase charge on pillar 510. In some aspects, DFM cell 540 can form a DFM device, for example, DFM device 300 shown in
DMY 550 can be configured to address pillar 510 in tri-gate DFM device 500. DMY 550 can be further configured to program (e.g., write) pillar 510. In some aspects, DMY 550 can control electrical charge conduction in pillar 510. For example, DMY 550 can control electrical charge conduction between WL contact 544 and PL contact 546. DMY 550 can be coupled to DMY contact 552. DMY contact 552 can be configured to act as a third gate connection to pillar 510. DMY contact 552 can surround a third portion of dielectric 512 which surrounds a third portion of pillar 510 thereby forming a third concentric transistor in DFM cell 540. In some aspects, DMY contact 552 can include a conductive material (e.g., metal, polysilicon, tungsten, etc.). In some aspects, as shown in
In some aspects, DMY 550 can be configured to increase a program (write) rate of pillar 510. For example, for impact ionization programming, DMY 550 can increase a charge flow from WL contact 544 to PL contact 548 thereby increasing the program (write) rate (e.g., a write rate greater than 100 MHz with less than 10 ns write time). In some aspects, DMY 550 can increase a charge flow in pillar 510. For example, the charge flow can have a charge density greater than about 1×1017 cm−3.
In some aspects, DMY 550 can decrease a program (write) time in tri-gate DFM device 500 to about 20 ns to about 1 ns. For example, the program (write) time can be about 5 ns. In some aspects, DMY 550 can increase a program (write) rate in tri-gate DFM device 500 to about 50 MHz to about 1 GHz. For example, the program (write) rate can be about 200 MHz.
In some aspects, DMY 550 can decrease a read time in tri-gate DFM device 500 to about 10 ns to about 100 ps. For example, the read time can be about 1 ns. In some aspects, DMY 550 can increase a read rate in tri-gate DFM device 500 to about 100 MHz to about 10 GHz. For example, the read rate can be about 1 GHz.
In some aspects, DMY 550 can decrease an erase time in tri-gate DFM device 500 to about 20 ns to about 1 ns. For example, the erase time can be about 5 ns. In some aspects, DMY 550 can increase an erase rate in tri-gate DFM device 500 to about 50 MHz to about 1 GHz. For example, the erase rate can be about 200 MHz.
As shown in
As shown in
As shown in
Tri-gate DFM device 900 can be configured to operate as a volatile capacitor-free dynamic random-access 3D memory device. Tri-gate DFM device 900 can be further configured to increase memory storage efficiency. Tri-gate DFM device 900 can be further configured to provide tri-gate control and different programming options (e.g., impact ionization, GIDL, GISL). Tri-gate DFM device 900 can be further configured to increase read, program, and erase operation rates. Tri-gate DFM device 900 can be further configured to decrease leakage current, decrease junction current, and decrease power consumption. Tri-gate DFM device 900 can be further configured to increase charge retention times (e.g., greater than 100 ms at 85° C. operating temperature) and decrease refresh rates (e.g., less than 10 Hz).
Tri-gate DFM device 900 can be further configured to provide faster operation speeds and higher density than DRAM or other types of volatile memory. Tri-gate DFM device 900 can be further configured to provide block refresh and block erase operations similar to flash memory functionality. Although tri-gate DFM device 900 is shown in
As shown in
Substrate 902 can be configured to support pillar 910, dielectric 912, BL contact 922, SL contact 932, and DFM cell 940. Substrate 902 can be coupled to SL contact 932. In some aspects, substrate 902 can be a p-type semiconductor (e.g., p), for example, doped silicon. In some aspects, substrate 902 can include any planar wafer material, for example, Si, Ge, SiGe, GaAs, Group IV semiconductor, Group III-V semiconductor, Group II-VI semiconductor, graphene, sapphire, and/or any other semiconductor.
Pillar 910 can be configured to store electrical charge (e.g., holes). Pillar 910 can be between BL contact 922 and SL contact 932. In some aspects, pillar 910 can include a semiconductor material, for example, Si, doped Si, Ge, SiGe, GaAs, Group IV semiconductor, Group III-V semiconductor, Group II-VI semiconductor, graphene, sapphire, and/or any other semiconductor. In some aspects, pillar 910 can be doped (e.g., p-type). In some aspects, pillar 910 can have a doping concentration of about 1×1016 cm−3 to about 5×1018 cm−3. For example, pillar 910 can have a doping concentration of about 1×1018 cm−3. In some aspects, pillar 910 can have a diameter of about 1 nm to about 100 nm. For example, pillar 910 can have a diameter of about 50 nm. In some aspects, pillar 910 can be monolithic. For example, as shown in
Dielectric 912 can be configured to provide electrical insulation between pillar 910 and DFM cell 940. Dielectric 912 can surround pillar 910. In some aspects, dielectric 912 can include a dielectric material, for example, oxide, nitride, oxynitride, ceramic, glass, SOG, polymer, plastic, thermoplastic, resin, laminate, high-k dielectric, a combination thereof, and/or any other electrically insulating material. In some aspects, dielectric 912 can be a high-k dielectric configured to increase a gate capacitance and decrease a leakage current in pillar 910. In some aspects, dielectric 912 can have a radial thickness of about 1 nm to about 30 nm. For example, dielectric 912 can have a radial thickness of about 3 nm. In some aspects, dielectric 912 can be monolithic. For example, as shown in
BL 920 can be configured to address pillar 910 in tri-gate DFM device 900. BL 920 can be further configured to flow electrical charge through DFM cell 940. BL 920 can be coupled to BL contact 922. BL contact 922 can be configured to act as a drain connection to pillar 910. BL contact 922 can be coupled to a top side of DFM cell 940. In some aspects, BL contact 922 can be n-type (e.g., n+) and pillar 910 can be p-type (e.g., p). In some aspects, BL contact 922 can include a conductive material, for example, a metal, a doped semiconductor, polysilicon, tungsten, and/or any other suitable conductor.
SL 930 can be configured to address pillar 910 in tri-gate DFM device 900. SL 930 can be further configured to flow electrical charge through DFM cell 940. SL 930 can be coupled to SL contact 932. SL contact 932 can be configured to act as a source connection to pillar 910. SL contact 932 can be coupled to a bottom side of DFM cell 940. In some aspects, SL contact 932 can be n-type (e.g., n+) and pillar 910 can be p-type (e.g., p). In some aspects, SL contact 932 can include a conductive material, for example, a metal, a doped semiconductor, polysilicon, tungsten, and/or any other suitable conductor. In some aspects, different voltage combinations applied to BL 920, SL 930, and DFM cell 940 can define read, program (write), and erase operations in tri-gate DFM device 900.
DFM cell 940 can be configured to read, program, and erase electrical charge on pillar 910. DFM cell 940 can be coupled to BL contact 922 and SL contact 932. DFM cell 940 can include top select gate line (TSG) 942, TSG contact 944, plate line (PL) 946, PL contact 948, bottom select gate line (BSG) 950, and BSG contact 952. In some aspects, DFM cell 940 can be configured for impact ionization programming, GIDL programming, or both.
TSG 942 can be configured to address pillar 910 in tri-gate DFM device 900. TSG 942 can be further configured to address and non-destructively read electrical charge on pillar 910. In some aspects, TSG 942 can be configured as a word line. TSG 942 can be coupled to TSG contact 944. TSG contact 944 can be configured to act as a first gate connection to pillar 910. TSG contact 944 can surround a first portion of dielectric 912 which surrounds a first portion of pillar 910 thereby forming a first concentric transistor in DFM cell 940. In some aspects, TSG contact 944 can include a conductive material (e.g., metal, polysilicon, tungsten, etc.). In some aspects, TSG 942 can provide voltage to TSG contact 944, thereby inducing an electric field within pillar 910, to read, program, or erase charge on pillar 910. In some aspects, as shown in
In some aspects, TSG 942 can increase a program (write) rate in DFM cell 940. For example, TSG 942 can increase charge flow to PL 946 thereby increasing the program (write) rate. In some aspects, TSG 942 can be configured to increase a program (write) rate in pillar 910. For example, for GIDL programming, TSG 942 can increase a charge flow from BL contact 922 to PL contact 948 thereby increasing the program (write) rate (e.g., a write rate greater than 100 MHz with less than 10 ns write time). In some aspects, TSG 942 can increase a charge flow in pillar 910. For example, the charge flow can have a charge density greater than about 1×1017 cm−3.
In some aspects, TSG 942 can be used for GIDL programming to create a charge (e.g., hole) barrier to provide selective programming (writing) in pillar 910. In some aspects, for GIDL programming, TSG 942 can be configured to create a charge barrier between BL contact 922 and PL contact 948 to selectively program pillar 910. For example, the charge barrier can have a charge density no greater than 1×1017 cm−3.
In some aspects, TSG 942 can provide charge separation between PL 946 and BL 920 thereby increasing charge retention times in pillar 910 and decreasing refresh rates in DFM cell 940. For example, TSG 942 can increase charge retention times to at least 100 ms at 85° C. operating temperature and decrease refresh rates to no greater than 10 Hz. In some aspects, TSG 942 can provide charge separation between PL 946 and BL 920 thereby decreasing junction leakage between pillar 910 and BL contact 922. In some aspects, TSG 942 can increase charge flow in pillar 910 thereby increasing a depletion area in pillar 910.
In some aspects, TSG 942 can decrease a program (write) time in tri-gate DFM device 900 to about 20 ns to about 1 ns. For example, the program (write) time can be about 5 ns. In some aspects, TSG 942 can increase a program (write) rate in tri-gate DFM device 900 to about 50 MHz to about 1 GHz. For example, the program (write) rate can be about 200 MHz.
In some aspects, TSG 942 can decrease a read time in tri-gate DFM device 900 to about 10 ns to about 100 ps. For example, the read time can be about 1 ns. In some aspects, TSG 942 can increase a read rate in tri-gate DFM device 900 to about 100 MHz to about 10 GHz. For example, the read rate can be about 1 GHz.
In some aspects, TSG 942 can decrease an erase time in tri-gate DFM device 900 to about 20 ns to about 1 ns. For example, the erase time can be about 5 ns. In some aspects, TSG 942 can increase an erase rate in tri-gate DFM device 900 to about 50 MHz to about 1 GHz. For example, the erase rate can be about 200 MHz.
PL 946 can be configured to address pillar 910 in tri-gate DFM device 900. PL 946 can be further configured to program (e.g., write) pillar 910. In some aspects, PL 946 can act as a traditional current-valve gate (e.g., similar to a MOSFET gate) for pillar 910 and cover a majority of a length of pillar 910. PL 946 can be coupled to PL contact 948. PL contact 948 can be configured to act as a second gate connection to pillar 910. PL contact 948 can surround a second portion of dielectric 912 which surrounds a second portion of pillar 910 thereby forming a second concentric transistor in DFM cell 940. In some aspects, PL contact 948 can include a conductive material (e.g., metal, polysilicon, tungsten, etc.). In some aspects, PL 946 can provide voltage to PL contact 948, thereby inducing an electric field within pillar 910, to read, program, or erase charge on pillar 910. In some aspects, DFM cell 940 can form a DFM device, for example, DFM device 300 shown in
BSG 950 can be configured to address pillar 910 in tri-gate DFM device 900. BSG 950 can be further configured to address and non-destructively read electrical charge on pillar 910. In some aspects, BSG 950 can be configured as a word line. BSG 950 can be coupled to BSG contact 952. BSG contact 952 can be configured to act as a third gate connection to pillar 910. BSG contact 952 can surround a third portion of dielectric 912 which surrounds a third portion of pillar 910 thereby forming a third concentric transistor in DFM cell 940. In some aspects, BSG contact 952 can include a conductive material (e.g., metal, polysilicon, tungsten, etc.). In some aspects, BSG 950 can provide voltage to BSG contact 952, thereby inducing an electric field within pillar 910, to read, program, or erase charge on pillar 910. In some aspects, as shown in
In some aspects, BSG 950 can increase a program (write) rate in DFM cell 940. For example, BSG 950 can increase charge flow to PL 946 thereby increasing the program (write) rate. In some aspects, BSG 950 can be configured to increase a program (write) rate in pillar 910. For example, for GISL programming, BSG 950 can increase a charge flow from SL contact 932 to PL contact 948 thereby increasing the program (write) rate (e.g., a write rate greater than 100 MHz with less than 10 ns write time). In some aspects, BSG 950 can increase a charge flow in pillar 910. For example, the charge flow can have a charge density greater than about 1×1017 cm−3.
In some aspects, BSG 950 can be used for GISL programming to create a charge (e.g., hole) barrier to provide selective programming (writing) in pillar 910. In some aspects, for GISL programming, BSG 950 can be configured to create a charge barrier between SL contact 932 and PL contact 948 to selectively program pillar 910. For example, the charge barrier can have a charge density no greater than 1×1017 cm−3.
In some aspects, BSG 950 can provide charge separation between PL 946 and SL 930 thereby increasing charge retention times in pillar 910 and decreasing refresh rates in DFM cell 940. For example, BSG 950 can increase charge retention times to at least 100 ms at 85° C. operating temperature and decrease refresh rates to no greater than 10 Hz. In some aspects, BSG 950 can provide charge separation between PL 946 and SL 930 thereby decreasing junction leakage between pillar 910 and SL contact 932. In some aspects, BSG 950 can increase charge flow in pillar 910 thereby increasing a depletion area in pillar 910.
In some aspects, BSG 950 can decrease a program (write) time in tri-gate DFM device 900 to about 20 ns to about 1 ns. For example, the program (write) time can be about 5 ns. In some aspects, BSG 950 can increase a program (write) rate in tri-gate DFM device 900 to about 50 MHz to about 1 GHz. For example, the program (write) rate can be about 200 MHz.
In some aspects, BSG 950 can decrease a read time in tri-gate DFM device 900 to about 10 ns to about 100 ps. For example, the read time can be about 1 ns. In some aspects, BSG 950 can increase a read rate in tri-gate DFM device 900 to about 100 MHz to about 10 GHz. For example, the read rate can be about 1 GHz.
In some aspects, BSG 950 can decrease an erase time in tri-gate DFM device 900 to about 20 ns to about 1 ns. For example, the erase time can be about 5 ns. In some aspects, BSG 950 can increase an erase rate in tri-gate DFM device 900 to about 50 MHz to about 1 GHz. For example, the erase rate can be about 200 MHz.
As shown in
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As shown in
In step 1300A, as shown in the example of
In step 1300B, as shown in the example of
In some aspects, first and second channel trenches 1320, 1322 can be formed by etching in alternating dielectric stack, for example, anisotropic etching.
In step 1300C, as shown in the example of
In step 1300D, as shown in the example of
In step 1300E, as shown in the example of
In step 1300F, as shown in the example of
In step 1300G, as shown in the example of
In step 1300H, as shown in the example of
In step 1300I, as shown in the example of
The aspects of interconnects 1395 shown in
In step 1300J, as shown in the example of
In step 1402, as shown in the example of
In step 1404, as shown in the example of
In some aspects, first and second pillars 1340, 1342 can be configured to form first and second memory cells (e.g., DFM cell 540 shown in
In step 1406, as shown in the example of
In step 1408, as shown in the example of
In step 1410, as shown in the example of
In step 1412, as shown in the example of
In step 1414, as shown in the example of
It is to be understood that the phraseology or terminology herein is for the purpose of description and not of limitation, such that the terminology or phraseology of the present specification is to be interpreted by those skilled in relevant art(s) in light of the teachings herein.
The term “substrate” as used herein describes a material onto which material layers are added. In some aspects, the substrate itself may be patterned and materials added on top of it may also be patterned, or may remain without patterning.
The following examples are illustrative, but not limiting, of the aspects of this disclosure. Other suitable modifications and adaptations of the variety of conditions and parameters normally encountered in the field, and which would be apparent to those skilled in the relevant art(s), are within the spirit and scope of the disclosure.
While specific aspects have been described above, it will be appreciated that the aspects may be practiced otherwise than as described. The description is not intended to limit the scope of the claims.
It is to be appreciated that the Detailed Description section, and not the Summary and Abstract sections, is intended to be used to interpret the claims. The Summary and Abstract sections may set forth one or more but not all exemplary aspects as contemplated by the inventor(s), and thus, are not intended to limit the aspects and the appended claims in any way.
The aspects have been described above with the aid of functional building blocks illustrating the implementation of specified functions and relationships thereof. The boundaries of these functional building blocks have been arbitrarily defined herein for the convenience of the description. Alternate boundaries can be defined so long as the specified functions and relationships thereof are appropriately performed.
The foregoing description of the specific aspects will so fully reveal the general nature of the aspects that others can, by applying knowledge within the skill of the art, readily modify and/or adapt for various applications such specific aspects, without undue experimentation, without departing from the general concept of the aspects. Therefore, such adaptations and modifications are intended to be within the meaning and range of equivalents of the disclosed aspects, based on the teaching and guidance presented herein.
The breadth and scope of the aspects should not be limited by any of the above-described exemplary aspects, but should be defined only in accordance with the following claims and their equivalents.
