Claims
- 1. A photonic bandgap microcavity comprising:
a membrane structure that can experience strain; and a photonic bandgap waveguide element formed on said membrane structure having a defect so that when said membrane structure is strained, said photonic bandgap waveguide element is tuned to a selective amount.
- 2. The photonic bandgap microcavity of claim 1, wherein said membrane structure comprises a sub-micron SiO2 layer.
- 3. The photonic bandgap microcavity of claim 1, wherein said photonic bandgap waveguide element comprises a 1-dimensional photonic crystal.
- 4. The photonic bandgap microcavity of claim 3, wherein said photonic bandgap waveguide element comprises a plurality of periodic holes.
- 5. The photonic bandgap microcavity of claim 4, wherein said defect breaks the periodicity of said periodic holes.
- 6. The photonic bandgap microcavity of claim 1, wherein said selective amount comprises approximately 1%.
- 7. The photonic bandgap microcavity of claim 1 further comprising at least one actuator that is coupled to said membrane so as to produce said strain.
- 8. The photonic bandgap microcavity of claim 7, wherein said at least one actuator produces strain on said membrane between 0.2 and 0.3%.
- 9. The photonic bandgap microcavity of claim 7, wherein said at least one actuator comprises a top electrode.
- 10. The photonic bandgap microcavity of claim 9, wherein said at least one actuator comprises a bottom electrode.
- 11. The photonic bandgap microcavity of claim 7, wherein said at least one actuator comprises a PZT piezoelectric actuator.
- 12. A method of forming a photonic bandgap microcavity comprising:
providing a membrane structure that can experience strain; and forming a photonic bandgap waveguide element on said membrane structure having a defect so that when said membrane structure is strained, said photonic bandgap waveguide element is tuned to a selective amount.
- 13. The method of claim 12, wherein said membrane structure comprises a sub-micron SiO2 layer.
- 14. The method of claim 12, wherein said photonic bandgap waveguide element comprises a 1-dimensional photonic crystal.
- 15. The method of claim 14, wherein said photonic bandgap waveguide element comprises a plurality of periodic holes.
- 16. The method of claim 15, wherein said defect breaks the periodicity of said periodic holes.
- 17. The method of claim 12, wherein said selective amount comprises approximately 1%.
- 18. The method of claim 12 further comprising providing at least one actuator that is coupled to said membrane so as to produce said strain.
- 19. The method of claim 7, wherein said at least one actuator produces strain on said membrane between 0.2 and 0.3%.
- 20. The method of claim 7, wherein said at least one actuator comprises a top electrode.
- 21. The method of claim 9, wherein said at least one actuator comprises a bottom electrode.
- 22. The method of claim 7, wherein said at least one actuator comprises a PZT piezoelectric actuator.
PRIORITY INFORMATION
[0001] This application claims priority from provisional application Ser. No. 60/395,926 filed Jul. 15, 2002, provisional application Ser. No. 60/467,854 filed on May 5, 2003, and is a continuation-in-part of application Ser. No. Unknown filed Jul. 14, 2003 (Express Mail No. EV271853767US), entitled “Reconfigurable Microphotonics Devices Via Deformable Membrane Platforms,” by common assignee.
Provisional Applications (2)
|
Number |
Date |
Country |
|
60395926 |
Jul 2002 |
US |
|
60467854 |
May 2003 |
US |
Continuation in Parts (1)
|
Number |
Date |
Country |
Parent |
10619203 |
Jul 2003 |
US |
Child |
10620072 |
Jul 2003 |
US |