Edge ring

Information

  • Patent Grant
  • D1034491
  • Patent Number
    D1,034,491
  • Date Filed
    Monday, July 27, 2020
    4 years ago
  • Date Issued
    Tuesday, July 9, 2024
    4 months ago
  • US Classifications
    Field of Search
    • US
    • D13 123
    • D13 154
    • D13 173
    • D13 178
    • D13 182
    • D13 184
    • D13 199
    • D15 144
    • D15 1441
    • D15 199
    • D24 127
    • D24 129
    • CPC
    • H01L21/67303
    • H01L21/67306
    • H01L21/67309
    • H01L21/67126
    • H01L21/67757
    • H01L21/67748
    • H01L21/683
    • H01L21/68728
    • H01L21/6875
    • H01L51/56
    • H01L51/0001
    • H01L43/12
    • H01L43/22
    • H01L31/18
    • H01L35/34
    • H01L39/24
    • C23C16/44
    • C23C16/45
    • C30B25/10
  • International Classifications
    • 1303
    • Term of Grant
      15Years
Abstract
Description


FIG. 1 is a front isometric top view of an edge ring.



FIG. 2 is a top plan view thereof.



FIG. 3 is a bottom plan view thereof.



FIG. 4 is a first side view thereof.



FIG. 5 is a second side view thereof.



FIG. 6 is an enlarged partial view of the section 6 shown in FIG. 1.



FIG. 7 is a cross sectional view along line 7-7 of FIG. 2 thereof.



FIG. 8 is an enlarged partial side view thereof.



FIG. 9 is an enlarged partial view of the section 9 shown in FIG. 2.



FIG. 10 is an enlarged partial cross sectional view of the section 10 shown in FIG. 7.



FIG. 11 is another front isometric top view thereof assembled with an overhang ring.



FIG. 12 is another top plan view thereof assembled with the overhang ring.



FIG. 13 is a third side view thereof assembled with the overhang ring; and,



FIG. 14 is an enlarged partial cross sectional view along line 14-14 of FIG. 12 thereof assembled with an overhang ring.


The broken lines appearing in FIGS. 1-14 illustrate portions of the edge ring assembly that form no part of the claimed design. The dot-dot-dash broken lines show boundaries of cross sectional or enlarged views that form no part of the claimed design.


Claims
  • The ornamental design for an edge ring, as shown and described.
US Referenced Citations (22)
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Foreign Referenced Citations (6)
Number Date Country
1134791 Sep 2001 EP
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3020150042908 Aug 2015 KR
10-2124766 Jun 2020 KR
3011572730001 Jul 2020 KR
3011572730002 Jul 2020 KR
Non-Patent Literature Citations (4)
Entry
Korean Office Action dated Oct. 28, 2021 for Application No. 30-2020-63868 (M001).
Korean Office Action dated Oct. 28, 2021 for Application No. 30-2020-63868 (M002).
Japanese Office Action dated Jul. 20, 2021, for Japanese Patent Application No. 2021-001755.
International Search Report and Written Opinion dated Apr. 26, 2021 for Application No. PCT/US2020/063774.