Patent Grant
8850908
This present teachings relate to a scanning system and, more particularly, to a constant distance contactless device and process for using the device.
Precision positioning and gap control between two or more surfaces is of importance in many fields such as semiconductor manufacturing, micrometrology and nanometrology, flexible display manufacturing, inkjet printing, etc, Prior methods and structures for precision positioning and gap control are referred to as aerodynamic floating, which are described in U.S. Pat. Nos. 6,119,536 and 8,169,210, the disclosures of which are incorporated herein by reference in their entirety. The aerodynamic floating technique can employ the use of a precise gap control apparatus and method for use with surfaces and/or substrates moving relative to a head of the aerodynamically floatable device. The aerodynamic floating head can move in a linear direction (up and down) relative to the surface positioned adjacent to the head to maintain a space between the head and the surface. Pressurized air output by the aerodynamic floating device maintains the space between a measurement electrode and the surface. The surface can rotate or otherwise move relative to the measurement electrode which the space is maintained by the pressurized air.
While aerodynamic floating devices of the above-described design can provide a suitable gap control and measurement solution for many uses, the sensitivity of the apparatus can be negatively affected by an imperfect mechanical surface over which the aerodynamic floating apparatus floats, as well as tilt alignment of the aerodynamic floating device head. An aerodynamically floating device design which has enhanced transient response to disturbances on a moving surface or substrate, better sensitivity to axial and angular motions, and improved response along multiple directions which are highly asymmetric in 3D space than previous aerodynamically floating devices would be desirable.
The following presents a simplified summary in order to provide a basic understanding of some aspects of one or more embodiments of the present teachings. This summary is not an extensive overview, nor is it intended to identify key or critical elements of the present teachings nor to delineate the scope of the disclosure. Rather, its primary purpose is merely to present one or more concepts in simplified form as a prelude to the detailed description presented later.
In an embodiment of the present teachings, an apparatus including a non-contact gap control device for maintaining a distance between surfaces can include a pliable platform including a flexible sheet, a frame having an opening therethrough, wherein the pliable platform is secured to the frame and within the opening in the frame, a floating head attached to the pliable platform, and a pressurized gas source attached to the floating head.
In another embodiment of the present teachings, a method for measuring a substrate can include positioning a floating head device adjacent to a substrate, wherein, the floating head device comprises a pliable platform including a flexible sheet, a frame having an opening therethrough, wherein the pliable platform is secured to the frame and within the opening in the frame, a floating head attached to the pliable platform, and a pressurized gas source attached to the floating head. The method can further include ejecting a pressurized gas through a channel within the floating head and onto the substrate, and measuring the substrate using the floating head during the ejection of the pressurized gas wherein, during the measurement of the substrate, the pliable platform flexes to self-adjust a distance between the floating head and the adjacent substrate.
In another embodiment of the present teachings, an apparatus including a non-contact gap control device for maintaining a distance between surfaces can include a pliable platform including a flexible sheet having a center portion and flexural hinges, wherein each flexural hinge is proximate to a vertex of the center portion of the pliable platform.
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the present teachings and together with the description, serve to explain the principles of the disclosure. In the figures:
It should be noted that some details of the FIGS. have been simplified and are drawn to facilitate understanding of the present teachings rather than to maintain strict structural accuracy, detail, and scale.
Reference will now be made in detail to exemplary embodiments of the present teachings, examples of which are illustrated in the accompanying drawings. Wherever possible, the same reference numbers will be used throughout the drawings to refer to the same or like parts.
An embodiment of the present teachings can provide an aerodynamic floating (AF) device which includes an elastically deformable parallel support member to hold an AF device head. The elastically deformable parallel support member can include three flexure hinges which can be sensitive to at least six degrees of motion of the AF head in 3D space. Flexural hinge design equations are discussed in the article “Review of circular flexure hinge design equations and derivation of empirical formulations,” Yong, Y. K., et al., Precision Engineering, 2008, 32, pp. 63-70, which is incorporated herein by reference in its entirety. The parallel design may allow the AF head to move with little or no blacklash, wear, and/or friction, and can have good dynamic properties for applications where the surface adjacent to the AF head has a high speed of movement or rotation. Coupling of different degrees of freedom motion can be reduced to provide improved linear relation between head motions and disturbance from diverse directions. The flexure hinge design can promote smooth and continuous motion of the head, and has a high sensitivity to all degree of freedom disturbances. The AF device design of the present teachings permits sustained unattended operation, including mechanical robustness and vibration dampening. The device can be manufactured at a reasonable cost and may be customized for specific design requirements, An AF device platform (parallel stage) can be manufactured from curable elastomeric materials such as polydimethylsiloxane (PDMS), polysiloxane, polyalkylsiloxane, polyurethane, polyester, polyfluorosilioxanes, polyolefin, fluoroelastomer, synthetic rubber, natural rubber, and mixtures thereof. A material such as PDMS has good chemical stability in harsh environments such as humid settings.
An embodiment of the present teachings can include the formation of an AF device platform 10 as depicted in
The platform 10 can be manufactured from a flexible sheet, for example a pliable polymer such as a curable elastomer. In an embodiment, the pliable platform can include polysiloxane, polyalkylsiloxane, polyurethane, polyester, polyfluorosilioxanes, polyolefin, fluoroelastomer, synthetic rubber, natural rubber, and mixtures thereof. In an embodiment, a center portion of the platform 10 generally has the shape of an equilateral triangle 11. It will be understood that the equilateral triangle 11 is a descriptive element, and that the center portion of the platform 10 defined by three edges of the platform 10 generally has the appearance of 11 equilateral triangle 11. The platform 10 can include three flexural hinges 12, with each flexural hinge 12 being located in proximity to a vertex of the equilateral triangle 11 as depicted in
It will be understood that the FIGS. herein represent generalized schematic illustrations and that other components may added or existing components may be removed or modified. For example, the pliable platform 10 can have a shape other than the triangular 11 shape depicted in
To form the platform, a mold can be manufactured using, for example, a 3D commercial printer to form a printed mold. The mold can include a platform-shaped cavity. A suitable liquid material, such as a PDMS elastomeric polymer solution or a solution of one of the other materials described above, is dispensed into the cavity and then cured using a curing technique suitable for the material used. After curing, a platform can have a thickness of between about 0.25 mm and about 25 mm, or between about 0.25 mm and about 15 mm, or between about 3.5 mm and about 6.5 mm, or between about 0.5 and about 20 mm, for example between about 4.8 mm and about 5.1 mm. Other platform thicknesses can be used, depending on the specific material.
Next, the three tabs 14 of the platform 10 are placed into the three recesses 22 of the frame 20 as depicted in the plan view of
Subsequently, as depicted in the cross section of
The AF head 40 can include a measurement probe 42, such as an amplified capacitive probe, attached to a first end of a cable 44 such as a coaxial cable, A coupling 45 can physically attach the cable 44 to the floating head 40.
During use, the AF head 40 can be positioned adjacent to a surface of the substrate 60, for example a rotating drum, a semiconductor wafer, or another substrate which is to be measured, tested, and/or characterized (hereinafter, collectively, “measured”) by the probe 42 of the AF head 40.
During operation, the pressurized air source 52 can deliver pressurized gas to the AF head 40 through the flexible hose 46. The gas pressure can depend on various factors such as the weight of the AF head 40 and the size of the orifice 56 in the channel 54. In an embodiment, for an AF head weighing about 12 grams, gas can be delivered to the AF head 40 at a pressure of between about 10 psi and about 80 psi, or between about 25 psi and about 70 psi, or between about 40 psi and about 60 psi, The pressurized gas delivered to the AF head at a first location 50 is ejected from the orifice and delivered onto the substrate 60, which maintains a distance d1 between the lower surface of the floating head 40 and the substrate 60. A gas pressure of between about 40 psi and about 60 psi can result in a 12 gram head which floats between about 10 μm and about 100 μm above the substrate 60. As depicted in
The design of the flexural hinges 12 can promote smooth and continuous motions of the AF head 40 during measurement of the substrate 60. The platform 14 can self-adjust to irregularities in the adjacent substrate 60. While the frame 20 can remain immobile during the measurement and/or characterization of the substrate 60, the pliable platform 10, in conjunction with the pressurized air being emitted from the orifice 56, flexes the platform 10 to generally maintain a distance d1 (
While some prior designs allow movement in only two directions (i.e., up and down relative to the substrate being measured) the flexible platform 10 can have a high sensitivity to all degree of freedom disturbances from multiple directions, including X-, Y-, and Z-directions, the rotational direction about the Z-axis perpendicular to the surface of the platform 10 (i.e., yaw), and about a horizontal axis parallel to the surface of the platform 10 (i.e., roll).
Additionally, the characteristics of the flexible platform 10 can be tailored for a specific use. If the platform 10 is to be used for a substrate 60 which is known to have generally even surface, the platform 10 can be manufactured to be more rigid so that a distance d1 is maintained over the even surface. In contrast, if the platform 10 is to be used for a substrate 60 which is known to have a variable surface, the platform can be manufactured to be more pliable so that it more quickly adjusts to variations in the substrate 60 being measured. The characteristics of a platform 10 can be adjusted during design of the platform, or example depending on the material thickness, material composition, cross sectional area of the flexural hinges 12, etc. For example, a thicker platform will generally be more rigid, while a thinner platform will be more pliable. A platform which is excessively thick may be excessively rigid, which may reduce the amplitude and reaction time of the AF head in response to contours of the an adjacent substrate being measured, and may result in physical contact between the AF head 10 and the adjacent substrate 60. A platform 10 which is excessively thin may be excessively pliable, which may result in an excessive amplitude in response to contours of the surface, and can also result in physical contact between the AF head 40 and the adjacent substrate 60. In an embodiment, each flexural hinge 12 at its thinnest point can have a measurement of between about 1 mm and about 10 mm, or between about 3 mm and about 8 mm, or between about 4 mm and about 6 mm. In an embodiment, each flexural hinge 12 can have a cross sectional area, at its thinnest point, of between about 1 mm2 and about 100 mm2, or between about 3 mm2 and about 50 mm2, or between about 10 mm2 and about 25 mm2.
Design and testing resulted in a device with the configuration similar to that shown in the schematic depiction of
During operation, the pressurized air source 52 can deliver pressurized gas to the AF head 40 through the flexible hose 46, The gas pressure can depend on various factors, such as the weight of the AF head 40 and the size of the orifice 56 in the channel 54. During design and testing of a device similar to that of the schematic depiction of
As depicted in the plan view of
Notwithstanding that the numerical ranges and parameters setting forth the broad scope of the present teachings are approximations, the numerical values set forth in the specific examples are reported as precisely as possible. Any numerical value, however, inherently contains certain errors necessarily resulting from the standard deviation found in their respective testing measurements. Moreover, all ranges disclosed herein are to be understood to encompass any and all sub-ranges subsumed therein. For example, a range of “less than 10” can include any and all sub-ranges between (and including) the minimum value of zero and the maximum value of 10, that is, any and all sub-ranges having a minimum value of equal to or greater than zero and a maximum value of equal to or less than 10, e.g., 1 to 5. In certain cases, the numerical values as stated for the parameter can take on negative values. In this case, the example value of range stated as “less than 10” can assume negative values, e.g. −1, −2, −3, −10, −20, −30, etc.
While the present teachings have been illustrated with respect to one or more implementations alterations and/or modifications can be made to the illustrated examples without departing from the spirit and scope of the appended claims. For example, it will be appreciated that while the process is described as a series of acts or events, the present teachings are not limited by the ordering of such acts or events. Some acts may occur in different orders and/or concurrently with other acts or events apart from those described herein. Also, not all process stages may be required to implement a methodology in accordance with one or more aspects or embodiments of the present teachings. It will be appreciated that structural components and/or processing stages can be added or existing structural components and/or processing stages can be removed or modified. Further, one or more of the acts depicted herein may be carried out in one or more separate acts and/or phases. Furthermore, to the extent that the terms “including,” “includes,” “having,” “has,” “with,” or variants thereof are used in either the detailed description and the claims, such terms are intended to be inclusive in a manner similar to the term “comprising.” The term “at least one of” is used to mean one or more of the listed items can be selected. Further, in the discussion and claims herein, the term “on” used with respect to two materials, one “on” the other, means at least some contact between the materials, while “over” means the materials are in proximity, but possibly with one or more additional intervening materials such that contact is possible but not required. Neither “on” nor “over” implies any directionality as used herein. The term “conformal” describes a coating material in which angles of the underlying material are preserved by the conformal material. The term “about” indicates that the value listed may be somewhat altered, as long as the alteration does not result in nonconformance of the process or structure to the illustrated embodiment. Finally, “exemplary” indicates the description is used as an example, rather than implying that it is an ideal. Other embodiments of the present teachings will be apparent to those skilled in the art from consideration of the specification and practice of the disclosure herein. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the present teachings being indicated by the following claims.
Terms of relative position as used in this application are defined based on a plane parallel to the conventional plane or working surface of a workpiece, regardless of the orientation of the workpiece. The term “horizontal” or “lateral” as used in this application is defined as a plane parallel to the conventional plane or working surface of a workpiece, regardless of the orientation of the workpiece. The term “vertical” refers to a direction perpendicular to the horizontal. Terms such as “on” “side” (as in “sidewall”), “higher,” “lower,” “over,” “top,” and “under” are defined with respect to the conventional plane or working surface being on the top surface of the workpiece, regardless of the orientation of the workpiece.
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| Entry |
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| Number | Date | Country | |
|---|---|---|---|
| 20140096629 A1 | Apr 2014 | US |
