ELECTRIC OUTPUT PROMOTING AND FABRICATING METHOD OF PIEZOELECTRIC/CONDUCTIVE HYBRID POLYMER THIN FILM

Abstract

A method of fabricating a piezoelectric/conductive hybrid polymer thin film is provided, which is promoting an electric output of a piezoelectric polymer and includes: a mixing step including: forming a piezoelectric solution by dissolving a PVDF-TrFE in an active solvent; forming a conductive solution by dissolving a PEDOT:PSS in a water; and forming a piezoelectric/conductive hybrid polymer solution by mixing the piezoelectric solution and the conductive solution; a filming step, wherein the piezoelectric/conductive hybrid polymer solution is heated, thus the piezoelectric/conductive hybrid polymer thin film is formed; and an anneal step, wherein the piezoelectric/conductive hybrid polymer thin film is recrystallized and a nano-sized protruding structure is formed on a surface of the piezoelectric/conductive hybrid polymer thin film.

Description

RELATED APPLICATIONS

This application claims priority to Taiwan Application Serial Number 102148724, filed Dec. 27, 2013, which is herein incorporated by reference.

BACKGROUND

1. Technical Field

The present disclosure relates to a method of fabricating a piezoelectric/conductive polymer hybrid polymer thin film and its performance boosting in electric output.

2. Description of Related Art

The piezoelectric material is one kind of the electric material with a characteristic of electric to mechanical energy conversion. It is applied to the sensor, energy converter, and actuator based on the converse piezoelectric effect which is about a mechanical transformation with an electric field, and on the direct piezoelectric effect which is about converting mechanical energy to electric energy.

The piezoelectric material can be classified in two categories as polymer and inorganic. At present, the main research direction in the piezoelectric polymer material is focus on PDF (polyvinylidene fluoride), The PVDF-based member group of the piezoelectric polymer material has the advantage of low resistance, low density, and high malleability, which the point is its easy processing and low cost result in rapid development. But the PVDF-based member group of the piezoelectric polymer material has the lower piezoelectricity compared with the piezoelectric inorganic material.

For the reason to promote the piezoelectricity of the piezoelectric polymer material, In 2008 Chunyan Li et al, issued a paper entitled “Flexible dome and bump shape piezoelectric tactile sensors using pvdf-trfe copolymer” (Journal of Microelectromechanical Systems, Vol. 17, pp. 334-341, 2008), which reports a PVDF-TrFE (poly(vinylidenefluoride-co-trifluoroethylene)) thin film, and formed a dome and bump micro-structure on the PVDF-TrFE thin film for promoting the piezoelectricity of PVDF-TrFE.

In 2012, Rachid Hadi et al, issued a paper entitled “Preparation and Characterization of P(VDF-TrFE)/Al2O3 Nanocomposite” (IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL, Vol. 59, No. 1, pp. 163-167, 2012), which reports a method for mixing PVDF-TrFE and Al2O3 nanocomposite so as to promote the piezoelectricity of PVDF-TrFE.

Furthermore, the fact that mixing PVDF-TrFE and ZnO nanoparticle can also promote the piezoelectricity of PVDF-TrFE, which is disclosed via John S. Dodds et al. on “Piezoelectric Characterization of PVDF-TrFE Thin Films Enhanced With ZnO Nanoparticles” (IEEE SENSORS JOURNAL, Vol. 12, No. 6, pp. 1889-1890, 2012).

However, the piezoelectric material itself has no piezoelectricity when it is in steady-state condition. Since the crystal lattices of the piezoelectric material has spontaneous dipole moments which are mostly arranged in unfixed direction result in the cancellation between the dipole moment. Thus, it is necessary to utilize a polarize process for enhancing or generating the piezoelectricity of the piezoelectric material. Otherwise, the unpolarized piezoelectric material only regards as a dielectric material.

Generally speaking, the polarize process of the piezoelectric material thin film is utilized by the method with high electric field parallel plate, in which the electric field of polarization of the piezoelectric material thin film is about 40-100 MV/m. But the over-thick piezoelectric material thin film makes the higher electric field intensity, it is difficult to provide high electric field to polarize the piezoelectric material thin film with the higher electric field intensity. By contrast, it is an easy way to apply the lower electric field on the thinner piezoelectric material thin film. Even though, the following process of micro/nanostructure on the surface of the thinner piezoelectric material thin film makes the thinner piezoelectric material thin film punctured easily, and that generates the problem of the short between the top and bottom electrode which on the piezoelectric material thin film.

At previously demonstrated, the purpose of all forgoing disclosures is promoting the piezoelectricity of PVDF-TrFE composite by mixing the inorganic piezoelectric powder and PVDF-TrFE powder. In this way, the dried powder is difficult to uniformly mixed with each other, and cannot be controlled the internal electric property (such as capacitive and resistive character) of the PVDF-TrFE composite.

SUMMARY

According to one embodiment of the present disclosure, a method for promoting an electric output of a piezoelectric/conductive hybrid polymer is provided, the method includes the following step: the piezoelectric/conductive hybrid polymer is performed by mixing a poly(vinylidene fluoride-trifluoroethylene) (PVDF-TrFE) and poly(3,4-ethylenedioxythiophene):po;y(styrenesulfonate) (PEDOT:PSS) so as to increase an output current and an output power of the piezoelectric/conductive hybrid polymer; and a surface structure of the piezoelectric/conductive hybrid polymer is changed by a nano-imprint process for promoting a piezoelectricity of the piezoelectric/conductive hybrid polymer, thereby, an output voltage, the output current and the output power of the piezoelectric/conductive hybrid polymer can be further increased.

According to another embodiment of the present disclosure, a method of fabricating a piezoelectric/conductive hybrid polymer thin film is provided, which is promoting an electric output of a piezoelectric polymer. The method includes a mixing step, a filming step, and an annealing step. The mixing step includes: a piezoelectric solution is formed by dissolving a PVDF-TrFE in an active solvent; a conductive solution is formed by dissolving a PEDOT:PSS in a water; and a piezoelectric/conductive hybrid polymer solution is formed by mixing the piezoelectric solution and the conductive solution. In the filming step, the piezoelectric/conductive hybrid polymer solution is heated, thus the piezoelectric/conductive hybrid polymer thin film is formed. In the annealing step, the piezoelectric/conductive hybrid polymer thin film is recrystallized and a nano-sized protruding structure is formed on a surface of the piezoelectric/conductive hybrid polymer thin film.

BRIEF DESCRIPTION OF THE DRAWINGS

The present disclosure can be more fully understood by reading the following detailed description of the embodiment, with reference made to the accompanying drawings as follows:

FIG. 1 is a flow chart illustrating a method of fabricating a piezoelectric/conductive hybrid polymer thin film according to an embodiment of the present disclosure.

FIG. 2 is a surface morphology diagram of the piezoelectric/conductive hybrid polymer thin film of Fig. I.

FIG. 3 is a curve chart illustrating capacitance (pF)—weight percentage (wt %) of samples A-F.

FIG. 4 is a curve chart illustrating resistance (kΩ)—weight percentage (wt %) of samples A-F.

FIG. 5 is a curve chart illustrating amplitude (mV)—distance (nm) of sample A-F.

FIG. 6 is a curve chart illustrating output current (A)—weight percentage (wt %) of sample A-J with/without a vibration of a motor.

FIG. 7 is a curve chart illustrating output current (A)—frequency (Hz) of sample B.

FIG. 8 is a curve chart illustrating normalized output current with a unit of force (V/lbs)—frequency (Hz) of sample B of FIG. 7.

FIG. 9 is a curve chart illustrating output voltage (V)—frequency (Hz) of sample B.

FIG. 10 is a curve chart illustrating normalized output voltage with a unit of force (V/lbs)—frequency (Hz) of sample B of FIG. 10.

FIG. 11 is a bar chart illustrating output current ratio (ΔI) of sample B, sample F, sample G, and sample K, wherein the output current ratio between sample B, sample F, sample G, and sample K are based on the output current ration of sample F being 1.

FIG. 12 is a curve chart illustrating output voltage ratio (ΔV) of sample B, sample F, sample G, and sample K, wherein the output voltage ratio between sample B, sample F, sample G, and sample K are based on the output voltage ration of sample F being 1.

FIG. 13 is a curve chart illustrating output current (A)—times (s) of sample B, sample F, and sample K, which is forced by the cantilever with 99.86 mN.

FIG. 14 is a flow chart illustrating a method of fabricating piezoelectric/conductive hybrid polymer thin film according to another embodiment of the present disclosure;

FIG. 15 is a surface morphology view of nanograss of the piezoelectric/conductive hybrid polymer thin film of FIG. 14.

FIG. 16 is a curve chart illustrating output current (A)—times of sample B (without nanograss) and sample B (with nanograss).

FIG. 17 is a curve chart illustrating output voltage (V)—times (s) of sample B (without nanograss) and sample B′ (with nanograss).

FIG. 18 is a flow chart illustrating a method for promoting an electric output of a piezoelectric/conductive hybrid polymer according to the other embodiment of the present disclosure.

DETAILED DESCRIPTION

FIG. 1 is a flow chart illustrating a method of fabricating a piezoelectric/conductive hybrid polymer thin film according to an embodiment of the present disclosure. In FIG. 1, the method of fabricating a piezoelectric/conductive hybrid polymer thin film is for promoting an electric output of a piezoelectric polymer and includes a mixing step 100, a filming step 200, and an annealing step 300.

The mixing step 100 includes a step 110, a step 120 and a step 130. In the step 110, a piezoelectric solution is formed by dissolving a PVDF-TrFE in an active solvent, wherein PVDF-TrFE is heated at a temperature within a range of 70° C. to 80° C. and is stirred to be dissolved in the active solvent. In the step 120, a conductive solution is formed by dissolving a PEDOT:PSS in a water, wherein a weight percentage of the PEDOT:PSS is 4.3% to 5.2% based on a weight percentage of the conductive solution being 100%. In the step 130, a piezoelectric/conductive hybrid polymer solution is formed by mixing the piezoelectric solution and the conductive solution, wherein a weight percentage range of the PEDOT:PSS is 0.78% to 2% based on a weight percentage of the piezoelectric/conductive hybrid polymer solution being 100%.

In detail PEDOT:PSS is mixed into PVDF-TrFE according to the like dissolve like principle. In the “like dissolve like” principle, the polarity of the solvent determines whether a substance or a solvent is dissolved therein or not. The permittivity of butanone is 18.5 by a measurement of the dielectric constant or the electric dipole moment. The mutual solubility between PEDOT:PSS and PVDF-TrFE is poor when PEDOT:PSS is mixed directly with PVDF-TrFE. However, the permittivity of water is 80.1, which makes PEDOT:PSS and water can completely be dissolved with each other, and the fact is known that water and butaone can completely be dissolved with each other. Therefore, the piezoelectric solution is formed by dissolving PVDF-TrFE in butaone and water as a third-party solvent to solve the problem butaone and PEDOT:PSS cannot be dissolved with each other, thereby, the piezoelectric/conductive hybrid polymer solution can be formed with mixing PEDOT:PSS and PVF-TrFE.

In the filming step 200, the piezoelectric/conductive hybrid polymer solution is heated, thus the piezoelectric/conductive hybrid polymer thin film is formed by a vaporization of the active solvent and the water, wherein the active solvent can be abovementioned butanone solvent. The filming step 200 is performed by a casting process to heat and cure the piezoelectric/conductive hybrid polymer solution, thereby the piezoelectric/conductive hybrid polymer thin film is formed. An insulating substrate is covered an electrode as a carrier of the casting process for the follow-up experiment. Specifically, the piezoelectric/conductive hybrid polymer solution is cast on the carrier, heated to 80° C. for 1 minute for the vaporization of the butaone solvent, and gradiently heated to 100° C. for the vaporization of the water, in which the piezoelectric/conductive hybrid polymer thin film is formed for 30 seconds to 3 minutes. The above are based on film forming abilities of PVDF-TrFE and the differences of the boiling point between the butaone solvent and the water. The method of gradiently heating after the vaporization of the butaone solvent is performed that the piezoelectric/conductive hybrid polymer solutions is heated slowly form 80° C. to 90° C. for 1 minute, and then heated to 100° C. for 1 minute by soft-baking for a vaporization of the water, in order to solve the problem of forming film on the surface of the piezoelectric/conductive hybrid polymer thin film caused by boiling with vapor-liquid phase transition.

In the annealing step 300, the piezoelectric/conductive hybrid polymer thin film is recrystallized at a recrystallization temperature between a Curie point (Tc) 120° C. and a melting point (Tm) 142° C. for 2 hour to 5 hour, thereby changing a crystallinity of the piezoelectric/conductive hybrid polymer thin film. FIG. 2 shows a surface morphology diagram of the piezoelectric/conductive hybrid polymer thin film fabricated by the method of FIG. 1, wherein the surface morphology diagram is captured by a SEM (Scanning Electronic Microscope). In FIG. 2, a nano-sized protruding structure is formed on the surface of the piezoelectric/conductive hybrid polymer thin film, in which a maximum width of a protruding part of the nano-sized protruding structure is 300 nm to 500 nm. Also, a thickness of the piezoelectric/conductive hybrid polymer thin film is 10 um to 10000 um.

The following describes an analysis of experiment date according to the abovementioned embodiments, thereby proving an efficacy of the present disclosure fabricating process of the piezoelectric/conductive hybrid polymer thin film. It must be explained first, the experimental samples are made of the method of fabricating the piezoelectric/conductive hybrid polymer thin film according to the present disclosure, and the fabricating parameters and conditions are stated as follows: the formation time of the piezoelectric/conductive hybrid polymer thin film is 3 minute in the filming step 200, the recrystallization temperature is 140° C. and the recrystallization time is 2 hour in the annealing step 300, but only a mixing concentration of the piezoelectric solution and the conductive solution as a variance in the step 130.

FIG. 3 illustrates capacitance (pF)—weight percentage (wt %) of samples A-F. FIG. 4 illustrates resistance (kΩ)—weight percentage (wt %) of samples A-F. Analysis of variable weight percentage (wt %) of PEDOT:PSS in the piezoelectric/conductive hybrid polymer thin film which mixing PVDF-TrFE and PEDOT:PSS is taken by a impedance analyzer with frequency being 500 Hz. The weight percentages of PEDOT:PSS of samples A-F are listed in TABLE 1 below, wherein the weight percentages of PEDOT:PSS is based on a weight percentage of the piezoelectric/conductive hybrid polymer solution being 100%.

TABLE 1
Sample   PEDOT:PSS (wt %)
Sample A 0.78
Sample B 1
Sample C 2
Sample D 6
Sample E 10
Sample F 0

From FIG. 3 and FIG. 4, the capacitance of simple F is 62.3 pF, and the resistance of simple F is 331,37 KΩ. The capacitance of simple B and simple C is up to 67.5 pF and 88.9 pF, the resistance of simple B and simple C is 239.72 KΩ and 274.73 KΩ, and the capacitive reactance of simple B and simple C is 4.72 MΩ and 3.58 MΩ. The resistance of sample D and sample E should be decreased due to the high weight percentage of PEDOT:PSS. However, pores on the piezoelectric/conductive hybrid polymer thin film is formed during the annealing step 300, so that the resistance would be risen.

The crystallinity of the piezoelectric/conductive hybrid polymer thin film with variable concentration conditions (weight percentage) of PEDOT:PSS is analyzed by XRD (X-ray Diffraction). The technology of XRD is well known to those of ordinary skill in the art, and will not be described particularly herein. The results in diffraction analysis with XRD are listed in TABLE 2 and TABLE 3 below:

TABLE 2
Sample (weight percentage of PEDOT:PSS) 2θ (degree)
Sample A (0.78 wt %)             20.12
Simple B (1 wt %)                20.14
Simple C (2 wt %)                20.04
Simple D (6 wt %)                Unshown
Simple E (10 wt %)               Unshown
Simple F (0 wt %)                20.20

According to TABLE 2, no peak is expressed as 2θ angle position of sample D and sample E, that is, sample D and sample E are not crystallized with a beta crystalline phase. All of sample A, sample B, sample C and sample F have peak as the same angle position (2θ, is about 20°) that is sample A, sample B, sample C and sample F are crystallized with the beta crystalline phase. The magnitude and the shift of the peak changes with the weight percentage of PEDOT:PSS in the piezoelectric/conductive hybrid polymer thin film.

TABLE 3
Sample
(weight percentage of PEDOT:PSS)	FWHM (degree)	Grain size (nm)
Sample A (0.78 wt %)	0.80	1.9
Sample B (1 wt %)	0.82	1.9
Sample C (2 wt %)	0.98	1.6
Sample F (0 wt %)	0.72	2.1

According to TABLE 3, the larger grain size of the crystal is, the narrower FWHM (Full Width half Maximum) of the peak is, that is, the higher crystallinity of the piezoelectric/conductive hybrid polymer thin film is obtained.

The piezoelectricity of the piezoelectric/conductive hybrid polymer thin film with variable concentration conditions (weight percentage) of PEDOT:PSS is analyzed by PFM (Piezorespnse Force Microscopy). FIG. 5 illustrates amplitude (mV)—distance (nm) of sample A-F. The weight percentage of PEDOT:PSS is increased result in an inverse piezoelectricity of the piezoelectric/conductive hybrid polymer thin film decreases. That is, the inverse piezoelectricity of the piezoelectric/conductive hybrid polymer thin film is decreased because of mixing with PEDOT:PSS.

The following analysis is about measuring of direct piezoelectric signals and output current signals of the piezoelectric/conductive hybrid polymer thin film with a vibration of a motor which with adjustment of the voltage to control the vibration frequency, thereby, the piezoelectricity of the piezoelectric/conductive hybrid polymer thin film can be measured.

The vibration frequency of the motor is set as 250 Hz, and the additional samples apart from abovementioned sample A-F are listed in the table 4 below:

TABLE 4
Sample   PEDOT:PSS (wt %)
Sample G 100
Sample H 0.5
Sample I 0.5
Sample J 0.9

In addition, the best concentration condition (weight percentage) of the PEDOT:PSS in the piezoelectric/conductive hybrid polymer thin film can be obtained by a EA (Electrochemical Analyzer).

FIG. 6 illustrates output current (A)—weight percentage (wt %) of sample A-J with/without a vibration of a motor. The results in FIG. 6 prove the fact that adding PEDOT:PSS to PVDF-TrFE can decrease the original high resistance of PVDF-TrFE thereby enhancing the output current. And it also demonstrates the best concentration condition (weight percentage) of PEDOT:PSS in the piezoelectric/conductive hybrid polymer thin film is 1 wt % as sample B, in which the output current is 214 nA. The output current is increased from 111 nA to 214 nA due to an initial vibration current of the motor is 111 nA.

FIG. 7 illustrates output current (A)—frequency (Hz) of sample B. FIG. 8 illustrates normalized output current with a unit of force (A/lbs)—frequency (Hz) of sample B of FIG. 7. For the reason to obtain a frequency in according with a maximum output current, that must apply a sensor to sense forces with variable vibration frequencies from the motor, and divide the output current according to FIG. 7 by the forces with variable vibration frequencies. The output current of sample B reach a maximum variation while the vibration frequency of the motor is 92 Hz.

FIG. 9 illustrates output voltage (V)—frequency (Hz) of sample B. FIG. 10 illustrates normalized output voltage with a unit of force (V/lbs)—frequency (Hz) of sample B of FIG. 10. For the reason to obtain a frequency in according with a maximum output voltage, that must divide the output voltage according to FIG. 9 by the abovementioned forces with variable vibration frequencies. The output voltage of sample B reach a maximum variation while the vibration frequency of the motor is 136 Hz.

FIG. 11 illustrates output current ratio (←I) of sample B, sample F, sample G, and sample K, wherein the output current ratio between sample B, sample F, sample G, and sample K are based on the output current ration of sample F being 1. FIG. 12 illustrates output voltage ratio (ΔV) of sample B, sample F, sample G, and sample K. wherein the output voltage ratio between sample B, sample F, sample G, and sample K are based on the output voltage ration of sample F being 1.Thus, the abovementioned results demonstrate efficiency of the piezoelectricity depends on the variable concentration (weight percentage) conditions of the piezoelectric/conductive hybrid polymer thin film. In the results of FIG. 11, the output current of the sample B is increased by 1.67 times. In the results of FIG. 12, the out voltage of the sample B is decreased by 0.9 times. That is a sacrifice of the piezoelectricity of the PVDF-TrFE makes a reducing of a collision between the free electrons, thereby, both the conductivity and the output current of PVDF-TrFE is increased. However, the overall efficiency of sample B is 1.45 times higher than the overall efficiency of sample K, and is 1.5 times higher than the overall efficiency of sample F.

The following analysis is about measuring of direct piezoelectric signals of the piezoelectric/conductive hybrid polymer thin film by a preset force from a cantilever applying on thereof, as the piezoelectric/conductive hybrid polymer thin film is forced by the cantilever which with adjustment of a height between the cantilever and the piezoelectric/conductive hybrid polymer thin film to control the preset force, thereby, the piezoelectricity of the piezoelectric/conductive hybrid polymer thin film can be obtained. To perform this analysis must set a predetermined height between the cantilever and the piezoelectric/conductive hybrid polymer thin film. While the cantilever is lifted to the predetermined height and then released, a potential energy of the cantilever is converted to a kinetic energy as the preset force on the piezoelectric/conductive hybrid polymer thin film.

A maximum of the preset force which the cantilever provided herein is 99.86 mN, the maximum force is forced on sample B, sample F, and sample K. FIG. 13 illustrates output current (A)—times (s) of sample B, sample F, and sample K, which is forced by the cantilever with 99.86 mN. It is noted that an experiment of the output voltage (not shown) would be a priority before an experiment of the output current of the sample B, sample F, and sample K. As a result, the output current of the sample K is 635 nA at the output voltage which is 745 mV, the output current of the sample F is 583 nA at the output voltage which is 845 mV, the output current of the sample B is 630 nA at the output voltage which is 788 mV.

FIG. 14 shows a method of fabricating a piezoelectric/conductive hybrid polymer thin film according to another embodiment of the present disclosure. FIG. 15 is a surface morphology view of nanograss of the piezoelectric/conductive hybrid polymer thin film of FIG. 14. The method in FIG. 14 further includes an imprinting step 400 after the anneal step 300 in FIG. 1, in order to promote the piezoelectricity of the piezoelectric/conductive hybrid polymer thin film, in which nanograss on the nano-sized protruding structure on the surface of the piezoelectric/conductive hybrid polymer thin film is formed by imprinting the nano-sized protruding structure on the surface of the piezoelectric/conductive hybrid polymer thin film. In detailed, the imprinting step 400 is performed by a thermal nanoimprinting mold process to form nanograss on the nano-sized protrusive on the surface of the piezoelectric/conductive hybrid polymer thin film, in which a height of nanograss is sub-20 nm (as shown in FIG. 15).

A specific implement of the thermal nanoimprinting mold process applies on sample B as sample B′ is following; performing a fluorination for an mold with nanograss structure, and then imprinting the mold on the surface of the piezoelectric/conductive hybrid polymer thin film with uniform heating and pressurizing, thereby forming the piezoelectric/conductive hybrid polymer thin film with nanograss. The mold surface has a cover layer of fluorine, a contact angle between the mole and the piezoelectric/conductive hybrid polymer thin film becomes larger, so that an adhesive force between the mole and the piezoelectric/conductive hybrid polymer thin film will be decreased.

Furthermore, the output current and the output voltage piezoelectric/conductive hybrid polymer thin film with nanograss on the nano-sized protrusive on the surface are analyzed by the abovementioned method with the vibration of the motor. FIG. 16 illustrates output current (A)—times (s) of sample B (without nanograss) and sample B′ (with nanograss). FIG. 17 illustrates output voltage (V)—times (s) of sample B (without nanograss) and sample B′ (with nanograss), As a result, the output voltage of sample B is 0.212 V, but the output voltage of sample B′ is rise to 0.265 V. The output current of sample B is 214 nA, but the output current of sample B′ is rise to 304 nA.

FIG. 18 is a flow chart illustrating a method for promoting an electric output of a piezoelectric/conductive hybrid polymer according to the other embodiment of the present disclosure. In FIG. 18, the method for promoting an electric output of a piezoelectric/conductive hybrid polymer is provided, the method includes a step 500, and a step 600. In the step 500, the piezoelectric/conductive hybrid polymer is performed, by mixing a poly(vinylidene fluoride-trifluoroethylene) (PVDF-TrFE) and poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) (PEDOT:PSS) so as to increase an output current and an output power of the piezoelectric/conductive hybrid polymer. In the step 600, a surface structure of the piezoelectric/conductive hybrid polymer is changed, by a nano-imprint process for promoting a piezoelectricity of the piezoelectric/conductive hybrid polymer, thereby, an output voltage, the output current and the output power of the piezoelectric/conductive hybrid polymer can be increased. However, in the step 500, the PEDOT:PSS decreases the piezoelectricity of the piezoelectric/conductive hybrid polymer, whereas the output current and the overall output power of the piezoelectric/conductive hybrid polymer still be increased.

Although the present invention has been described in considerable detail with reference to certain embodiments thereof, other embodiments are possible. Therefore, the spirit and scope of the appended claims should not be limited to the description of the embodiments contained herein.

It will be apparent to those skilled in the art that various modifications and variations can be made to the structure of the present invention without departing from the scope or spirit of the invention. In view of the foregoing, it is intended that the present invention cover modifications and variations of this invention provided they fall within the scope of the following claims.

Claims

1. A method for promoting an electric output of a piezoelectric/conductive hybrid polymer, comprising: performing the piezoelectric/conductive hybrid polymer by mixing a poly(vinylidene fluoride-trifluoroethylene) (PVDF-TrFE) and a poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) (PEDOT:PSS) so as to increase an output current and an output power of the piezoelectric/conductive hybrid polymer; andchanging a surface structure of the piezoelectric/conductive hybrid polymer by a nanoimprinting process for promoting a piezoelectricity of the piezoelectric/conductive hybrid polymer, wherein an output voltage, the output current and the output power of the piezoelectric/conductive hybrid polymer are increased by promoting the piezoelectricity thereof.

2. A method of fabricating a piezoelectric/conductive hybrid polymer thin film, which is for promoting an electric output of a piezoelectric/conductive polymer, the method comprising: a mixing step, comprising: forming a piezoelectric solution by dissolving a PVDF-TrFE in an active solvent;forming a conductive solution by dissolving a PEDOT:PSS in a water; andforming a piezoelectric/conductive hybrid polymer solution by mixing the piezoelectric solution and the conductive solution;a filming step, wherein the piezoelectric/conductive hybrid polymer solution is heated, thus the piezoelectric/conductive hybrid polymer thin film is formed; andan annealing step, wherein the piezoelectric/conductive hybrid polymer thin film is recrystallized, and a nano-sized protruding structure is formed on a surface of the piezoelectric/conductive hybrid polymer thin film.

3. The method of claim 2, wherein after the anneal step, the method further comprises: an imprinting step, wherein a nanograss is formed on the nano-sized protruding structure of the piezoelectric/conductive hybrid polymer thin film.

4. The method of claim 3, wherein the imprinting step is performed by a thermal nanoimprinting mold process to form the nanograss on the nano-sized protrusive on the surface of the piezoelectric/conductive hybrid polymer thin film, wherein a height of the nanograss is sub-20 nm.

5. The method of claim 2, wherein the active solvent is a butanone solvent.

6. The method of claim 5, wherein the PVDF-TrFE is dissolved in the active solvent at a temperature from 70° C. to 80° C.

7. The method of claim 6, wherein a weight percentage range of the PEDOT:PSS is 4.3% to 5.2% based on a weight percentage of the conductive solution being 100%.

8. The method of claim 7, wherein the weight percentage of PEDOT:PSS in the conductive solution is 4.77%.

9. The method of claim 5, wherein a weight percentage range of the PEDOT:PSS is 0.78% to 2% based on a weight percentage of the piezoelectric/conductive hybrid polymer solution being 100%.

10. The method of claim 9, wherein the weight percentage of PEDOT:PSS in the piezoelectric/conductive hybrid polymer solution is 1%.

11. The method of claim 10, wherein the filming step is performed by heating the piezoelectric/conductive hybrid polymer solution at a temperature of 80° C. for a vaporization of the butanone solvent, and gradiently heating the piezoelectric/conductive hybrid polymer solution at a temperature from 80° C. to 100° C. to for a vaporization of the water.

12. The method of claim 11, wherein the filming step is performed by a casting process to heat the piezoelectric/conductive hybrid polymer solution.

13. The method of claim 12, wherein the filming step is performed for 30 seconds to 3 minutes.

14. The method of claim 13, wherein the filming step is performed for 3 minutes.

15. The method of claim 2, wherein the annealing step is performed by heating the piezoelectric/conductive hybrid polymer thin film at a recrystallization temperature between a Curie point (Tc) and a melting point (Tm).

16. The method of claim 15, wherein the recrystallization temperature is 140° C.

17. The method of claim 16, wherein the annealing step is performed at the recrystallization temperature for 2 hours to 5 hours.

18. The method of claim 17, wherein the annealing step is performed at the recrystallization temperature for 2 hours.

19. The method of claim 2, wherein a thickness of the piezoelectric/conductive hybrid polymer thin film is 10 um to 10000 um.