Claims
- 1. An electrical circuit inspection apparatus comprising:
a first inspection functionality operative to obtain first attribute information with respect to a conductor location on an electrical circuit; a second inspection functionality operative to obtain second attribute information with respect to said conductor location on said electrical circuit; and a conductor attribute analyzer receiving said first attribute information and said second attribute information, and evaluating a combination of said first attribute information and said second attribute information to determine an inspection attribute of a conductor at said conductor location.
- 2. The electrical circuit inspection apparatus according to claim 1, wherein said first inspection functionality senses reflectivity at said conductor location as a basis for said first attribute information.
- 3. The electrical circuit inspection apparatus according to claim 2, wherein said first inspection functionality determines a top width dimension of said conductor based on said sensed reflectivity.
- 4. The electrical circuit inspection apparatus according to claim 1, wherein said second inspection functionality senses luminescence at said conductor location as a basis for said second attribute information.
- 5. The electrical circuit inspection apparatus according to claim 4, wherein said second inspection functionality determines a bottom width dimension of said conductor based on said sensed luminescence.
- 6. The electrical circuit inspection apparatus according to claim 3, wherein said second inspection functionality senses luminescence at said conductor location as a basis for said second attribute information.
- 7. The electrical circuit inspection apparatus according to claim 6, wherein said second inspection functionality determines a bottom width dimension of said conductor based on said sensed luminescence.
- 8. The electrical circuit inspection apparatus according to claim 7, wherein said inspection attribute is a cross section configuration of said conductor.
- 9. The electrical circuit inspection apparatus according claim 7, wherein said attribute analyzer comprises an impedance analyzer receiving said top width dimension and said bottom width dimension for a plurality of conductor locations, and determining therefrom an impedance attribute of said conductor.
- 10. An electrical circuit inspection method comprising:
obtaining first attribute information of a plurality of conductor locations on an electrical circuit; obtaining second attribute information of said plurality of locations; and determining an inspection attribute of a conductor at one or more of said conductor locations based on a combination of said first attribute information and said second attribute information.
- 11. The electrical circuit inspection method according to claim 10, wherein said providing of said first attribute information comprises sensing a reflectivity value.
- 12. The electrical circuit inspection method according to claim 11, wherein said providing of said first attribute information further comprises:
receiving said reflectivity value, for said one or more conductor locations; and determining therefrom a top width dimension of said conductor.
- 13. The electrical circuit inspection method according to claim 10, wherein said providing of said second attribute information comprises sensing a luminescence value.
- 14. The electrical circuit inspection method according to claim 13, wherein said providing of said second attribute information further comprises:
receiving said luminescence value for said one or more conductor locations; and determining therefrom a bottom width dimension of said conductor.
- 15. The electrical circuit inspection method according to claim 10, and wherein said providing of said second attribute information comprises sensing a height value.
- 16. The electrical circuit inspection method according to claim 15, wherein said providing of said second attribute information further comprises sensing set height value based on a topographical profile.
- 17. The electrical circuit inspection method to claim 12, wherein said providing of said second attribute information comprises sensing a luminescence value.
- 18. The electrical circuit inspection method according to claim 15, wherein said providing of said second attribute information further comprises:
receiving said luminescence value for said one or more conductor locations; and determining therefrom a bottom width dimension of said conductor.
- 19. The electrical circuit inspection method according to claim 16, further comprising determining, as said inspection attribute, a cross section configuration of said conductor based on said top width dimension and said bottom width dimension.
- 20. The electrical circuit inspection method according claim 16, further comprising determining, as said inspection attribute, an impedance attribute of said conductor, based on said top width dimension and said bottom width dimension for said one or more conductor locations.
- 21. The electrical circuit inspection method according claim 10, further comprising employing said inspection attribute to determine a defect in a process used to fabricate said electrical circuit.
- 22. The electrical circuit inspection method according to claim 10, further comprising making a production determination based on said inspection attribute.
- 23. The electrical circuit inspection method according to claim 22, wherein said production determination is one of:
approving said electrical circuit; discarding said electrical circuit; and repairing said electrical circuit.
- 24. Electrical circuit inspection apparatus comprising:
at least one inspection functionality operative to provide information regarding a cross-sectional configuration of a conductor; and an impedance calculator operative to employ said information regarding said cross-sectional configuration of said conductor in order to provide output data indicative of the impedance of said conductor.
- 25. Electrical circuit inspection apparatus according to claim 24 and wherein said at least one inspection functionality comprises:
a reflection sensor operative to sense reflectivity of said conductor; and a luminescence sensor operative to sense luminescence of said conductor.
- 26. Electrical circuit inspection apparatus comprising:
a top dimension calculator operative to calculate a top dimension of a conductor portion in an electrical circuit; a bottom dimension calculator operative to calculate a bottom dimension of a conductor in an electrical circuit; and a cross section configuration analyzer operative to receive top dimension calculations for a multiplicity of conductor portions, and bottom dimension calculations for said multiplicity of conductor portions and output a report of said top dimensions and said bottom dimensions.
- 27. An electrical circuit inspection method comprising:
inspecting at least one conductor to provide cross sectional information of a conductor; and employing said cross-sectional information to provide output data indicative of the impedance of said conductor.
- 28. An electrical circuit inspection method according to claim 27 and wherein said inspecting comprises:
sensing reflectivity of said conductor; and sensing luminescence of a substrate in a vicinity of said conductor.
- 29. Electrical circuit inspection method comprising:
calculating, at a plurality of sampling points, a surface dimension of a conductor portion in an electrical circuit; calculating, at said plurality of sampling points, a footprint dimension of said conductor portion in said electrical circuit; analyzing said surface dimensions and said footprint dimensions for said plurality of sampling points; and outputting a report based on said surface dimensions and said footprint dimensions.
- 30. A method for manufacturing an electrical circuit, comprising:
using equipment to provide a printed circuit board having at least one conductor on a substrate; inspecting said printed circuit board to obtain a surface dimension value corresponding to a surface dimension of said at least one conductor; inspecting said printed circuit board to obtain a footprint dimension value corresponding to a footprint dimension of said at least one conductor; and adjusting said equipment based on one or more of said surface dimension value and said footprint dimension value.
- 31. A method for manufacturing an electrical circuit, comprising:
forming at least one conductor on a substrate to provide a printed circuit board; inspecting said printed circuit board to obtain cross-section information for said at least one conductor; making a production determination based on said cross-section information.
- 32. The method for manufacturing an electrical circuit as set forth in claim 31, wherein said production determination is one of:
approving said printed circuit board; discarding said printed circuit board; and repairing said circuit board.
- 33. The method for manufacturing an electrical circuit as set forth in claim 31, wherein said cross-section information includes a surface dimension and a footprint dimension of said at least one conductor.
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is a continuation-in-part of U.S. application Ser. No. 09/939,682, filed Aug. 28, 2001.
[0002] This application claims the benefit of commonly owned U.S. Provisional Application No. 60/307,606, filed Jul. 26, 2001, which is incorporated by reference, herein, in its entirety.
[0003] This application is related to the commonly owned U.S. patent application Ser. No. ______, entitled “System and Method for Multi-Dimensional Optical Inspection”, filed on the same date as this application, and commonly owned by Orbotech Ltd., the disclosure of said application being incorporated by reference, herein, in its entirety, for its useful example of a suitable mode for operation of a height attribute processor.
Provisional Applications (1)
|
Number |
Date |
Country |
|
60307606 |
Jul 2001 |
US |
Continuation in Parts (1)
|
Number |
Date |
Country |
Parent |
09939682 |
Aug 2001 |
US |
Child |
10032098 |
Dec 2001 |
US |