Claims
- 1. A pixel structure for an active matrix liquid crystal display, said structure comprising:
- a substrate;
- a thin film transistor including a gate deposited on said substrate, a nitride layer on said gate, and a layer of amorphous silicon on the nitride layer, a first layer of titanium-tungsten above a portion of the layer of amorphous silicon, a layer of aluminum on the first layer of titanium-tungsten, and a second layer of titanium-tungsten on the layer of aluminum;
- a passivation layer deposited on said thin film transistor, the passivation layer having a cut above the second layer of titanium-tungsten; and
- a pixel of electrode of indium-tin-oxide deposited on said passivation layer.
- 2. A method of making a pixel structure for an active matrix liquid crystal display having a substrate, the steps of said method comprising:
- A) forming a thin film transistor on said substrate, said thin film transistor including a gate deposited on said substrate, a nitride layer on said gate, and including a layer of amorphous silicon on the nitride layer, the thin film transistor including a drain above a portion of the layer of amorphous silicon, the thin film transistor including a first layer and a second layer of titanium tungsten and a layer of aluminum, the first layer of titanium-tungsten being on the drain, the layer of aluminum being on the first layer of titanium-tungsten, and the second layer of titanium-tungsten being on the layer of aluminum;
- B) depositing a passivation layer on said thin film transistor, the passivation layer having a cut exposing a portion of the second layer of titanium-tungsten; and
- C) depositing a pixel electrode on said passivation layer, the pixel electrode comprising indium-tin-oxide and contacting the second layer of titanium-tungsten through the cut in the passivation layer.
Parent Case Info
This application is a continuation of application Ser. No. 08/235,009, filed Apr. 28, 1994, now abandoned.
US Referenced Citations (7)
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Kaneko, E. Liquid Crystal TV Displays: Principles and Applications of Liquid Crystal Displays. KTK Scientific Publishers/Tokyo, .COPYRGT.1987, pp. 211-277. |
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Continuations (1)
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Number |
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Parent |
235009 |
Apr 1994 |
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