Electrically tunable surface impedance structure with suppressed backward wave

Information

  • Patent Grant
  • 8436785
  • Patent Number
    8,436,785
  • Date Filed
    Wednesday, November 3, 2010
    14 years ago
  • Date Issued
    Tuesday, May 7, 2013
    11 years ago
Abstract
A method of delaying the onset of a backward wave mode in a frequency selective surface having a two dimensional array of conductive patches or elements and an RF ground plane, the two dimensional array of patches or elements being interconnected by variable capacitors, the method comprising separating grounds associated with the variable capacitors from the RF ground plane and providing a separate conductive mesh structure or arrangement as a bias voltage ground for the variable capacitors. A tunable impedance surface comprises a RF ground plane; a plurality of patches or elements disposed in an array a distance from the ground plane; a capacitor arrangement for controllably varying capacitance between at least selected ones of adjacent patches or elements in the array; and a grounding mesh associated with the capacitor arrangement for providing a control voltage ground to capacitors in the capacitor arrangement, the grounding mesh being spaced from the RF ground plane by dielectric material.
Description
CROSS REFERENCE TO RELATED APPLICATIONS

This application is related to the disclosure of U.S. patent application Ser. No. 10/537,923 filed Mar. 29, 2000 (now U.S. Pat. No. 6,538,621, issued Mar. 25, 2003) and of U.S. patent application Ser. No. 10/792,411 filed Mar. 2, 2004 (now U.S. Pat. No. 7,068,234, issued Jun. 27, 2006), the disclosures of which are hereby incorporated herein by reference.


TECHNICAL FIELD

This invention relates to an electrically tunable surface impedance structure with a suppressed backward wave. Surface impedance structures are a tunable electrically tunable surface impedance structure is taught by U.S. Pat. Nos. 6,538,621 and 7,068,234. This disclosure relates to a technique for reducing the propensity of the structures taught by U.S. Pat. Nos. 6,538,621 and 7,068,234 to generate a backward wave.


BACKGROUND


FIG. 1
a depicts a conceptual view of a frequency selective surface 20 without varactor diodes (which varactor diodes or other variable capacitance devices can be used to realize an electrically steerable surface wave antenna—see FIG. 2a). The surface 20 of FIG. 1a comprises a plane of periodic metal patches 22 separated from a ground plane 26 by a dielectric layer 21 (not shown in FIG. 1b, but see, for example, FIGS. 2a and 2b). An antenna (not shown) is typically mounted directly on the frequency selective surface 20. See, e.g., U.S. Pat. No. 7,068,234 issued Jun. 27, 2006. The thickness of the dielectric layer 26 can be less than 0.1 of a wavelength of operational frequency of the non-shown antenna. This surface 20 supports a fundamental TM surface wave as shown in its dispersion diagram (frequency vs. propagation constant) of FIG. 1b. The surface impedance of any TM surface wave structure can be calculated by using:

ZTM=jZo{(β/ko)2−1}


where Zo is characteristic impedance of free space, ko is the free space wavenumber and β is the propagation constant of the mode.



FIG. 1
a depicts the basic structure that supports a fundamental TM surface wave mode. A dielectric substrate 21 (see FIGS. 2a and 2b, not shown in FIG. 1a for ease of illustration) between the plane of metallic patches 22 and the ground plane 26 provides structural support and is also a parameter that determines the dispersion of the structure. This structure can be made using printed circuit board technology, with a 2-D array of metallic patches 26 formed on one major surface of the printed circuit board and a metallic ground plane 26 formed on an opposing major surface of the printed circuits board, with the dielectric of the printed circuit board providing structural support. The equivalent circuit model of the structure is superimposed over the physical elements of FIG. 1a: a series inductance (LR) is due to current flow on the patch 22, a shunt capacitance (CR) is due to voltage potential from patch 22 to ground plane 26, and a series capacitance (CL) is due to fringing fields between the gaps between the patches 22. The dispersion diagram of FIG. 1b shows that a fundamental TM forward wave mode (since the slope is positive) is supported.


In order to control the dispersion and thus the surface impedance at a fixed frequency of the surface shown in FIG. 1a, the gap capacitance (between neighboring metal patches 22) can be electrically controlled by the use of varactor diodes 30. The varactor diodes 30 are disposed in the gap between each patch 22 and are connected to neighboring patches 22 as shown in FIG. 2a. However, since a DC bias is required in order to control the capacitance of the varactor diodes 30, the structure of FIG. 1a has been modified to include not only varactor diodes 30 but also a biasing network supplying biasing voltages V1, V2, . . . Vn. FIG. 2b shows a cross-sectional view of the structure of FIG. 2a with varactor diodes and the aforementioned biasing network; every other patch is connected directly to the ground plane 26 by conductive grounding vias 24 and the remaining patches are connected to the biasing voltage network by conductive bias vias 28. See, for example, U.S. Pat. Nos. 6,538,621 and 7,068,234 for additional information.


However, the addition of the bias vias 28 penetrating the ground plane 26 at penetrations 32 introduces a shunt inductance to the equivalent circuit model superimposed in FIG. 1a. FIG. 3a depicts a model similar to that of FIG. 1a, but showing the effect of introducing the bias network of FIGS. 2a and 2b by a shunt inductance LL. As shown by FIG. 3b, TM backward wave is supported when a series capacitance and a shunt inductance are present, the latter of which is contributed by the bias via 28. The backward wave decreases the frequency/impedance range of the surface wave structure since one can couple to only a forward wave or to a backward wave at a given frequency.


It would be desirable to allow for control of the dispersion and thus the surface impedance of the frequency selective surface of FIG. 1a by using variable capacitors (such as, for example, varactor diodes) as taught by Sievenpiper (see, for example, U.S. Pat. No. 7,068,234) and in FIGS. 2a and 2b hereof, but without the introduction of a backward wave.


BRIEF DESCRIPTION OF THE INVENTION

In one aspect the present invention provides a method of delaying the onset of a backward wave mode in a frequency selective surface having a two dimensional array of conductive patches and an RF ground plane, the two dimensional array of patches being interconnected by variable capacitors, the method including separating grounds associated with the variable capacitors from the RF ground plane and providing a separate conductive mesh structure as a control voltage ground for the variable capacitors.


In another aspect the present invention provides a tunable impedance surface having: (a) a RF ground plane; (b) a plurality of elements disposed in an array a distance from the ground plane; (c) a capacitor arrangement for controllably varying capacitance between at least selected ones of adjacent elements in said array; and (d) a grounding mesh associated with said capacitor arrangement for providing a control voltage ground to capacitors in said capacitor arrangement, the grounding mesh being spaced from the RF ground plane by a dielectric.


In yet another aspect the present invention provides a method of tuning a high impedance surface for reflecting a radio frequency signal comprising: arranging a plurality of generally spaced-apart conductive surfaces in an array disposed essentially parallel to and spaced from a conductive RF ground plane and varying the capacitance between at least selected ones of adjacent conductive surfaces in to thereby tune the impedance of said high impedance surface using control voltages, the control voltages being referenced to a control voltage ground supplied via a grounding mesh which is isolated from said RF ground plane by a layer of dielectric material.


In still yet another aspect the present invention provides a tunable impedance surface for reflecting a radio frequency beam, the tunable surface comprising: (a) a ground plane; (b) a plurality of elements disposed in an array a distance from the ground plane, the distance being less than a wavelength of the radio frequency beam; (c) a capacitor arrangement for controllably varying the impedance along said array; and (d) means for suppressing a formation of a backward wave by said tunable impedance surface.


In another aspect the present invention provides a tunable impedance surface comprising: (a) a ground plane; (b) a plurality of discreet elements disposed in a two-dimensional array a distance from the ground plane; and (c) a plurality of capacitors coupling neighboring ones of the elements in said two dimensional array for controllably varying capacitive coupling between the neighboring ones of said elements in said two-dimensional array while at the same time suppressing a formation of a backward wave by the tunable impedance surface.





BRIEF DESCRIPTION OF THE DRAWINGS


FIG. 1
a depicts a perspective view of a prior art frequency selective surface consisting of a plane of periodic metal patches or elements separated from a ground plane by a dielectric layer;



FIG. 1
b is a graph of frequency vs. propagation constant for the surface of FIG. 1a;



FIG. 2
a is a top view of a prior art selective frequency surface with variable capacitors in the form of varactors, added to tunably control the impedance of the surface;



FIG. 2
b is a side elevational view of the surface if FIG. 2a;



FIG. 3
a depicts in a model similar to that of FIG. 1a, but showing the effect of introducing the bias network for controlling the varactors of FIGS. 2a and 2b;



FIG. 3
b is a graph of frequency vs. propagation constant for the surface of FIG. 3a;



FIGS. 4
a and 4b are plan and side elevational views of an embodiment of a frequency selective surface with variable capacitors to control surface impedance of the surface and a RF ground plane which is separated from a ground mesh used with the variable capacitors;



FIG. 5 is a graph of the numerical dispersion diagram of tunable surface wave impedance structure based on conventional biasing network as shown in FIGS. 2a and 2b.



FIG. 6 is a graph of the numerical dispersion diagram of tunable surface wave impedance structure based on biasing network as shown in FIGS. 4a and 4b. Surface wave impedance goes beyond j250 Ohm and is extended out to j310 Ohm and higher. Patch size and the dielectric layer between patch/RF ground are the same as used to generate FIG. 5.





DETAILED DESCRIPTION

This invention prevents a backward wave mode from occurring in a frequency selective surface while allowing for biasing of the varactor diodes used to control the dispersion and thus the surface impedance of the frequency selective surface at a fixed frequency. This improved frequency selective surface is realized by separating a RF ground plane from the bias network ground.



FIGS. 4
a and 4b show that the RF ground plane 26 has been separated from an open mesh-like arrangement 25 of conductors connecting the bias grounding vias 24 to a common potential. Note that the ground plane 26 is located above the mesh-like arrangement 25 of conductors in FIG. 4b so that from a radio frequency perspective, the ground plane 26 serves as a RF ground for the conductive patches or elements 22 without undue interference from their associated conductive control vias 24, 28 which penetrate the ground plane 26 at penetrations 32. The conductive control vias 24 are connected to the common potential (bias voltage ground 27) associated with the biasing voltages V1, V2, . . . Vn, via the conductive mesh 25 while conductive vias 28 are connected to the biasing voltages V1, V2, . . . Vn themselves. So the bias voltage ground 27 is separated from the RF ground 26.


The substrate 21 is preferably formed as a multi-layer substrate with, for example, three layers 21-1, 21-2, and 21-3 of dielectric material (as such, for example, a multi-layer printed circuit board). The conductive patches or elements 22 are preferably formed by metal patches or elements disposed on layer 21-1 of a multi-layer printed circuit board.


The bias ground network or mesh 25 preferably takes the form of a meshed structure, in which the connection lines 25 are disposed diagonally, in plan view, with respect to the conductive patches or elements 22 as shown in FIG. 4a. Relatively thin wires 25 are preferably used in the meshed bias network to provide a high impedance at RF frequencies of interest and are preferably printed between layers 21-2 and 21-3 of the multi-layer printed circuit board. Penetration 32 is designed to be small enough to provide a suitable RF ground at the RF frequencies of interest but large enough to avoid contacting conductive vias 24 and 28—in other words, the penetrations 32 should appear as essentially a short circuit at the RF frequencies of interest and as essentially an open circuit at the switching frequencies of the bias voltages V1, V2, . . . Vn. The RF return current follows the path of least impedance which, in the present invention, is provided by the RF ground plane 26 which is preferably formed as a layer of a conductor, such a copper, with openings 32 formed therein. When a surface wave is excited on the plane of the conductive patches or elements 22, some of the energy is guided between the bias voltage ground mesh 25 and the RF ground plane 26. Since the grounding vias 24 are not connected to the RF ground plane 26 (as done in the prior art), but rather to the bias ground network or mesh 25, no shunt inductance is observed by the propagating wave. As a result, a backward wave mode cannot exist since a shunt inductance is no longer present.


The bias ground network 25 need not necessarily assume the meshed structure shown in FIG. 4a as other arrangements of the wires making up the meshed structure will likely prove to be satisfactory in presenting a suitably high impedance at the RF frequencies of interest so that the RF frequencies of interest will not treat the bias ground network 25 as an RF ground. As the bias ground network 25 begins to appear more like an RF ground, the less effective the present invention is in suppressing the backward wave. So ideally the bias ground network 25 should have as high an impedance as possible at the RF frequencies of interest consistent with the need to provide a bias ground 27 for the bias voltages V1, V2, . . . Vn (which are at or near DC compared to the RF references of interest). The bias ground network 25 is depicted as being located below the RF ground plane 26 so that it is further from the array of conductive patches or elements 22 than is the RF ground plane 26. This location is believed to be preferable compared to switching the positions RF ground plane 26 and the bias ground network 25; but if the bias ground network 25 has a suitably high impedance at the RF frequencies of interest, it may function suitably even if it is located closer to the array of conductive patches or elements 22 than is the RF ground plane 26. Testing and/or simulation should be able to verify whether or not this is correct.


The term “wires” which make up the meshed structure of the bias ground network 25 is used without implication as to shape or material. While the wires are preferably provided by electrically conductive strips disposed on a printed circuit board, they might alternatively individual wires, they might be round or flat, coiled or straight and they might be formed by conductive regions on or in a semiconductor substrate.


The patch plane comprises a 2-D array of conductive patches or elements 22 of a type A cell (Cell A) and a type B cell (Cell B) forms; a type A cell is connected to the bias ground network 25 while a type B cell is connected to a separate bias voltage network of voltages V1, V2, . . . Vn. Only two cells are marked with dashed lines designating the cell types for ease of illustration in FIG. 4b, but they preferably repeat in a checkerboard fashion. A cell includes its patch/element 22, its associated portion of the RF ground plane 26, and its associated control electrode or via (via 24 for a type A cell or via 28 for a type B cell). As can be seen from FIGS. 4a and 4b, generally speaking the immediate neighbors of a type A cell are four type B cells and the immediate neighbors of a type B cell are four type A cells.


While the 2-D array of conductive patches or elements 22 are depicted as patches or elements of a square configuration, it should be appreciated that the individual patches or elements need not be square or as other geometric configurations can be employed if desired. See, for example, U.S. Pat. No. 6,538,621, issued Mar. 25, 2003, which is incorporated by reference herein, for other geometric configurations.


Dielectric layer 21-1 separates the conductive patches or elements 22 from the RF ground plane 26 and preferably provides structural support for surface 20. In addition, size and dielectric nature of the dielectric layer 21-1 is a parameter that dictates the RF properties of the structure 20. RF ground plane 26 provides a return path for the RF current; holes 32 are introduced in the RF ground plane 26 to allow the via 24 of Cell A type cells to connect to the meshed DC ground plane 25 and to allow the via 28 Cell B type cells to connect to the bias voltage network.


Dielectric layer 21-2 preferably acts a support structure for the bias ground network or mesh 25 and the bias voltage network. An optional dielectric layer 21-3 can be added beneath dielectric layer 21-1 and mesh 25 to provide additional power and/or signal connections for vias 28. Dielectric layers 21-1, 21-2 and 21-3 can each consist of multiple dielectric substrates sandwiched together, if desired.


The mesh DC ground plane 25 preferably comprises diagonal cross connections which are made up of thin metal traces for presenting high impedance from a RF standpoint. The via 24 of Cell A connects directly to the mesh DC ground plane 25. The ground plane 25 can likely take other forms than a mesh like structure, but the mesh structure shown in FIG. 4a is believed to yield a structure which is easy to manufacture and which will present a high impedance to the surface at RF frequencies of interest. The bias voltage network 25 connects to the conductive vias 28 of Cells B.


Numerical simulations were performed on a surface wave structure with a prior art biasing scheme as illustrated in FIGS. 2a and 2b and with the biasing scheme described herein and depicted in FIGS. 4a and 4b. Dispersion diagrams were obtained and are shown in FIG. 5 for the case of FIGS. 2 and 2b and in FIG. 6 for the case of FIGS. 4a and 4b. The conductive patch/element 22 and dielectric layer 21-1 details were the same for both cases.



FIG. 5 is a graph of the numerical dispersion diagram of tunable surface wave impedance structure based on conventional biasing network as shown in FIGS. 2a and 2b. FIG. 5 shows that by changing the varactor diode's capacitance (a range of 0.1 pF to 0.2 pF is shown), the surface impedance can be varied at fixed frequencies. However, the surface impedance range is limited to j250 Ohms after which a backward wave mode appears, which the source propagating wave cannot couple to. So after j250 Ohms, the mode appears to be cut-off due to the onset of backward wave propagation.



FIG. 6 is a graph of the numerical dispersion diagram of tunable surface wave impedance structure based on biasing network as shown in FIGS. 4a and 4b. Surface wave impedance goes beyond j250Ω and is extended out to j310Ω and higher. Patch size and the dielectric layer between patches 22 and the RF ground 26 are the same as used to generate FIG. 5. In the case of the present invention, surface impedance tuning is also possible by changing the varactor diode's capacitance (a range of 0.1 pF to 0.3 pF is shown in FIG. 6) and the surface impedance range is increased; the surface impedance range is extended to j310Ω and above.


MEMS capacitors and optically controlled varactors may be used in lieu of the voltage controlled capacitors (varactors) discussed above. If such optically controlled varactors need to be supplied with a bias voltage, then the conductive vias 24 and 28 discussed above are still needed, but a common bias voltage may be substituted for the bias voltages V1, V2, . . . Vn discussed above as the optically controlled varactors would be controlled, in terms of varying their capacitance, by optical fibers preferably routed through penetrations in substrate 21 located, for example, directly under the varactors 30 shown in FIG. 4a.


It should be understood that the above-described embodiments are merely some possible examples of implementations of the presently disclosed technology, set forth for a clearer understanding of the principles of this disclosure. Many variations and modifications may be made to the above-described embodiments of the invention without departing substantially from the principles of the invention. All such modifications and variations are intended to be included herein within the scope of this disclosure and the present invention and protected by the following claims.

Claims
  • 1. A method of delaying the onset of a backward wave mode in a frequency selective surface having a two dimensional array of conductive patches and an RF ground plane, the two dimensional array of patches being interconnected by variable capacitors, the method comprising separating grounds associated with the variable capacitors from the RF ground plane and providing a separate conductive mesh structure as a ground for said variable capacitors.
  • 2. The method of claim 1 wherein the separate conductive mesh structure is spaced from one side of said RF ground plane and wherein the two dimensional array of conductive patches is spaced from another side of said RF ground plane.
  • 3. The method of claim 2 wherein the patches each have a control line which is either coupled to said separate conductive mesh structure or which is connected to a biasing network supplying biasing voltages V1, V2, . . . Vn to an associated control line.
  • 4. The method of claim 1 wherein the variable capacitors are varactors.
  • 5. A tunable impedance surface comprising: (a) a RF ground plane;(b) a plurality of elements disposed in an array a distance from the ground plane;(c) a capacitor arrangement for controllably varying capacitance between at least selected ones of the elements in said array; and(d) a grounding mesh associated with said capacitor arrangement for providing a bias voltage ground to capacitors in said capacitor arrangement, the grounding mesh being spaced from the RF ground plane by dielectric material.
  • 6. The tunable impedance surface of claim 5 further including a substrate having at least first and second layers, said first layer being a first dielectric layer facing said ground plane on a first major surface thereof and facing said plurality of elements on a second major surface thereof and said second layer being a second dielectric layer and providing said dielectric material.
  • 7. The tunable impedance surface of claim 6 wherein said capacitor arrangement is adjustable to tune the impedance of said surface spatially.
  • 8. The tunable impedance surface of claim 5 wherein the RF ground plane has an array of openings formed herein for passing a connection from each of the plurality of elements to a selected one of either the grounding mesh or to a selected bias voltage.
  • 9. A method of tuning a high impedance surface for reflecting a radio frequency signal comprising: arranging a plurality of generally spaced-apart conductive surfaces in an array disposed essentially parallel to and spaced from a conductive RF ground plane, andvarying the capacitance between at least selected ones of adjacent conductive surfaces in to thereby tune the impedance of said high impedance surface using bias voltages, the bias voltages being referenced to a bias voltage ground supplied via a grounding mesh which is isolated from said RF ground plane by a layer of dielectric material.
  • 10. The method of claim 9 wherein said plurality of generally spaced-apart conductive surfaces are arranged on a multi-layered printed circuit board, said layer of dielectric forming at least one layer of said multi-layered printed circuit board.
  • 11. The method of claim 9 wherein the step varying the capacitance between adjacent conductive surfaces in said array includes connecting variable capacitors between said at least selected ones of adjacent conductive surfaces.
  • 12. The method of claim 9 wherein the capacitance is varied between all adjacent elements.
  • 13. The method of claim 9 wherein the step of varying the capacitance between at least selected ones of adjacent conductive surfaces includes applying said bias voltages to selected ones of said conductive surfaces and applying said bias voltage ground to other ones of said conductive surfaces.
  • 14. The method of claim 9 wherein spacing of each conductive surface from the RF ground plane is less than a wavelength of a radio frequency signal impinging said surface, and preferably less than one tenth of a wavelength of a radio frequency signal impinging said surface.
  • 15. A tunable impedance surface for reflecting a radio frequency beam, the tunable surface comprising: (a) a ground plane;(b) a plurality of elements disposed in an array a distance from the ground plane, the distance being less than a wavelength of the radio frequency beam;(c) a capacitor arrangement for controllably varying the impedance along said array; and(d) means for suppressing a formation of a backward wave by said tunable impedance surface.
  • 16. A tunable impedance surface comprising: (a) a ground plane; (b) a plurality of discreet elements disposed in a two-dimensional array a distance from the ground plane; and (c) a plurality of capacitors coupling neighboring ones of said elements in said two dimensional array for controllably varying capacitive coupling between said neighboring ones of said elements in said two-dimensional array while at the same time suppressing a formation of a backward wave by said tunable impedance surface.
  • 17. The reflecting surface of claim 16, wherein the plurality of capacitors is provided by a plurality of variable capacitors coupled to said neighboring ones of said elements in said two-dimensional array.
US Referenced Citations (173)
Number Name Date Kind
3267480 Lerner Aug 1966 A
3560978 Himmel et al. Feb 1971 A
3810183 Krutsinger et al. May 1974 A
3961333 Purinton Jun 1976 A
4045800 Tang et al. Aug 1977 A
4051477 Murphy et al. Sep 1977 A
4119972 Fletcher et al. Oct 1978 A
4123759 Hines et al. Oct 1978 A
4124852 Steudel Nov 1978 A
4127586 Rody et al. Nov 1978 A
4150382 King Apr 1979 A
4173759 Bakhru Nov 1979 A
4189733 Malm Feb 1980 A
4217587 Jacomini Aug 1980 A
4220954 Marchand Sep 1980 A
4236158 Daniel Nov 1980 A
4242685 Sanford Dec 1980 A
4266203 Saudreau et al. May 1981 A
4308541 Frosch et al. Dec 1981 A
4367475 Schiavone Jan 1983 A
4370659 Chu et al. Jan 1983 A
4387377 Kandler Jun 1983 A
4395713 Nelson et al. Jul 1983 A
4443802 Mayes Apr 1984 A
4590478 Powers et al. May 1986 A
4594595 Struckman Jun 1986 A
4672386 Wood Jun 1987 A
4684953 Hall Aug 1987 A
4700197 Milne Oct 1987 A
4737795 Nagy et al. Apr 1988 A
4749996 Tresselt Jun 1988 A
4760402 Mizuno et al. Jul 1988 A
4782346 Sharma Nov 1988 A
4803494 Norris et al. Feb 1989 A
4821040 Johnson et al. Apr 1989 A
4835541 Johnson et al. May 1989 A
4843400 Tsao et al. Jun 1989 A
4843403 Lalezari et al. Jun 1989 A
4853704 Diaz et al. Aug 1989 A
4903033 Tsao et al. Feb 1990 A
4905014 Gonzalez et al. Feb 1990 A
4916457 Foy et al. Apr 1990 A
4922263 Dubost et al. May 1990 A
4958165 Axford et al. Sep 1990 A
5021795 Masiulis Jun 1991 A
5023623 Kreinheder et al. Jun 1991 A
5070340 Diaz Dec 1991 A
5081466 Bitter, Jr. Jan 1992 A
5115217 McGrath et al. May 1992 A
5146235 Frese Sep 1992 A
5158611 Ura et al. Oct 1992 A
5208603 Yee May 1993 A
5235343 Audren et al. Aug 1993 A
5268696 Buck et al. Dec 1993 A
5268701 Smith Dec 1993 A
5278562 Martin et al. Jan 1994 A
5287116 Iwasaki et al. Feb 1994 A
5287118 Budd Feb 1994 A
5402134 Miller et al. Mar 1995 A
5406292 Schnetzer et al. Apr 1995 A
5519408 Schnetzer May 1996 A
5525954 Komazaki et al. Jun 1996 A
5531018 Saia et al. Jul 1996 A
5532709 Talty Jul 1996 A
5534877 Sorbello et al. Jul 1996 A
5541614 Lam et al. Jul 1996 A
5557291 Chu et al. Sep 1996 A
5581266 Peng et al. Dec 1996 A
5589845 Yandrofski et al. Dec 1996 A
5600325 Whelan et al. Feb 1997 A
5611940 Zettler Mar 1997 A
5619366 Rhoads et al. Apr 1997 A
5621571 Bantli et al. Apr 1997 A
5638946 Zavracky Jun 1997 A
5644319 Chen et al. Jul 1997 A
5694134 Barnes Dec 1997 A
5721194 Yandrofski et al. Feb 1998 A
5767807 Pritchett Jun 1998 A
5808527 De Los Santos Sep 1998 A
5874915 Lee et al. Feb 1999 A
5892485 Glabe et al. Apr 1999 A
5894288 Lee et al. Apr 1999 A
5905465 Olson et al. May 1999 A
5923303 Schwengler et al. Jul 1999 A
5926139 Korisch Jul 1999 A
5929819 Grinberg Jul 1999 A
5943016 Snyder, Jr. et al. Aug 1999 A
5945951 Monte et al. Aug 1999 A
5949382 Quan Sep 1999 A
5966096 Brachat Oct 1999 A
5966101 Haub et al. Oct 1999 A
6005519 Burns Dec 1999 A
6005521 Suguro et al. Dec 1999 A
6008770 Sugawara Dec 1999 A
6016125 Johansson Jan 2000 A
6028561 Takei Feb 2000 A
6028692 Rhoads et al. Feb 2000 A
6034644 Okabe et al. Mar 2000 A
6034655 You Mar 2000 A
6037905 Koscica et al. Mar 2000 A
6040803 Spall Mar 2000 A
6046655 Cipolla Apr 2000 A
6046659 Loo et al. Apr 2000 A
6054659 Lee et al. Apr 2000 A
6061025 Jackson et al. May 2000 A
6075485 Lilly et al. Jun 2000 A
6081235 Romanofsky et al. Jun 2000 A
6081239 Sabet et al. Jun 2000 A
6097263 Mueller et al. Aug 2000 A
6097343 Goetz et al. Aug 2000 A
6118406 Josypenko Sep 2000 A
6118410 Nagy Sep 2000 A
6127908 Bozler et al. Oct 2000 A
6150989 Aubry Nov 2000 A
6154176 Fathy et al. Nov 2000 A
6166705 Mast et al. Dec 2000 A
6175337 Jasper, Jr. et al. Jan 2001 B1
6175723 Rothwell, III Jan 2001 B1
6188369 Okabe et al. Feb 2001 B1
6191724 McEwan Feb 2001 B1
6198438 Herd et al. Mar 2001 B1
6198441 Okabe et al. Mar 2001 B1
6204819 Hayes et al. Mar 2001 B1
6218912 Mayer Apr 2001 B1
6218997 Lindenmeier et al. Apr 2001 B1
6246377 Aiello et al. Jun 2001 B1
6252473 Ando Jun 2001 B1
6285325 Nalbandian et al. Sep 2001 B1
6307519 Livingston et al. Oct 2001 B1
6317095 Teshirogi et al. Nov 2001 B1
6323826 Sievenpiper et al. Nov 2001 B1
6331257 Loo et al. Dec 2001 B1
6337668 Ito et al. Jan 2002 B1
6366254 Sievenpiper et al. Apr 2002 B1
6373349 Gilbert Apr 2002 B2
6380895 Moren et al. Apr 2002 B1
6388631 Livingston et al. May 2002 B1
6392610 Braun et al. May 2002 B1
6404390 Sheen Jun 2002 B2
6404401 Gilbert et al. Jun 2002 B2
6407719 Ohira et al. Jun 2002 B1
6417807 Hsu et al. Jul 2002 B1
6424319 Ebling et al. Jul 2002 B2
6426722 Sievenpiper et al. Jul 2002 B1
6440767 Loo et al. Aug 2002 B1
6469673 Kaiponen Oct 2002 B2
6473362 Gabbay Oct 2002 B1
6483480 Sievenpiper et al. Nov 2002 B1
6496155 Sievenpiper et al. Dec 2002 B1
6515635 Chiang et al. Feb 2003 B2
6518931 Sievenpiper Feb 2003 B1
6525695 McKinzie, III Feb 2003 B2
6538621 Sievenpiper et al. Mar 2003 B1
6552696 Sievenpiper et al. Apr 2003 B1
6624720 Allison et al. Sep 2003 B1
6642889 McGrath Nov 2003 B1
6657525 Dickens et al. Dec 2003 B1
6864848 Sievenpiper Mar 2005 B2
6897810 Dai et al. May 2005 B2
6940363 Zipper et al. Sep 2005 B2
7068234 Sievenpiper Jun 2006 B2
7164387 Sievenpiper Jan 2007 B2
7245269 Sievenpiper et al. Jul 2007 B2
7253699 Schaffner et al. Aug 2007 B2
7253780 Sievenpiper Aug 2007 B2
7276990 Sievenpiper Oct 2007 B2
7298228 Sievenpiper Nov 2007 B2
7911386 Itoh et al. Mar 2011 B1
8212739 Sievenpiper Jul 2012 B2
20020036586 Gothard et al. Mar 2002 A1
20030193446 Chen Oct 2003 A1
20030222738 Brown et al. Dec 2003 A1
20040227668 Sievenpiper Nov 2004 A1