Electro-explosive device with laminate bridge

Information

  • Patent Grant
  • 6772692
  • Patent Number
    6,772,692
  • Date Filed
    Friday, April 18, 2003
    21 years ago
  • Date Issued
    Tuesday, August 10, 2004
    20 years ago
Abstract
A semiconductor bridge (SCB) device. In one embodiment, the SCB device includes a laminate layer on top of an insulating material, wherein the laminate layer comprises a series of layers of at least two reactive materials, and wherein the laminate layer comprises two relatively large sections that substantially cover the surface area of the insulating material, and a bridge section joining the two relatively large sections. At least one conductive contact pad is coupled to at least one of the series of layers, wherein a predetermined current through the conductive contact pad causes the bridge section to initiate a reaction in which the laminate layer is involved. In one embodiment, the SCB device includes an integrated diode formed by an interface of the insulating material with another material, such as a metal.
Description




FIELD OF THE INVENTION




This invention generally relates to an electro-explosive device. More particularly, the invention relates to a device having a laminate bridge that initiates a reaction of relatively high output energy for relatively low input energy.




BACKGROUND TO THE INVENTION




In general, an electro-explosive device (EED) receives electrical energy and initiates a mechanical shock wave and/or an exothermic reaction, such as combustion, deflagration, or detonation. EEDs have been used in both commercial and government applications for a variety of purposes, such as to initiate the inflation of airbags in automobiles or to activate an energy source in an ordnance system.




Prior art EEDs include those that use a bridgewire to ignite an ordnance material. A bridgewire is a thin resistive wire attached between two contacts. The ordnance material surrounds the bridgewire. When current is passed through the bridgewire ohmic heating results. When the bridgewire reaches the ignition temperature of the ordnance material, the ordnance material initiates. Typically, the ordnance material is a primary or pyrotechnic charge which ignites a secondary charge, which in turn ignites a main charge. EEDs that use a bridgewire have significant disadvantages in modem applications. For example, EEDs are subjected to increasing levels of electromagnetic interference (EMI) in many military and civilian applications. High levels of EMI present a serious danger because the EMI may couple electromagnetic energy through a direct or indirect path to an EED, causing it to fire unintentionally. EEDs may also be unintentionally fired by electrostatic discharge (ESD). Conventional devices to protect against unintentional discharge, such as passive filter circuits and EMI shielding, present their own space and weight problems in typical applications.




In order to reduce the sensitivity of an EED to stray signals, the total energy of the firing signal which is necessary to ignite the EED may be increased. As a result, low level stray signals may be conducted through the bridgewire without causing any ignition and only the higher level firing signal would have sufficient energy to ignite the EED. A higher magnitude firing signal, however, is not always desirable. In many applications, such as in automobile airbags, available power is severely limited, making it necessary to provide an EED that has a low firing energy, which may be near the energy level of potential spurious signals such as those from ESD or EMI sources.




One type of EED that alleviates some problems with accidental firing is called a semiconductor bridge, or SCB. An SCB may use less energy than that used by a bridgewire EED for the same no-fire level. For example, the energy required by an SCB may be an order of magnitude less than that required by a bridgewire device with the same no-fire performance. An SCB is a ordnance material initiating device built on a semiconductor substrate. The SCB typically ignites the ordnance material with a hot plasma. When the SCB fires, it creates a high temperature plasma (for example, greater than 4000 K in some cases) with high power density that ignites the ordnance material. The SCB may generate plasma in less than several microseconds as compared to the bridgewire, which may heat to the point of initiation in hundreds of microseconds. The ordnance material ignited by the SCB is typically an adjacent ordnance material or primary explosive that is ignited in a matter of microseconds and in turn ignites an output charge. The excellent heat transfer characteristics of the semiconductor provide a high capacity heat sink for the SCB and thus a relatively high no-fire level. Generally an SCB should be driven by a low impedance voltage source or a capacitive discharge to properly support an avalanche condition that results in plasma creation.




The use of EEDs in automobile airbags and other safety critical applications presents several problems in addition to the prevention of unintentional firing. For example, the reliability of an airbag EED is critical. The airbag EED must fire reliably, and must be manufactured in a way that allows some verification of reliability. Conventional SCBs have some disadvantages that make it difficult to produce verifiably reliable SCB EEDs. For example, SCBs provide a very hot but low energy ignition source that lasts only for microseconds. In typical SCBs the amount of energy output is dependent upon, and is less than, the level of energy input. In cases in which only a very small amount of output energy can be produced, the output energy may not be sufficient to provide reliable ignition.




Reliability of conventional SCB components is also difficult to verify. One reason for this is that in conventional SCBs, the ordnance material and the SCB must be tightly coupled in order to transmit the small energy output of the SCB to the primary ordnance material. That is, at the ordnance material/SCB interface the ordnance material must be in intimate contact with the SCB at all times for SCB firing to reliably ignite the ordnance material. Test methods have been developed to attempt to verify the ordnance material/SCB interface in bridgewire devices but these test methods, generally do not work well for semiconductor devices. For example, it may be possible to verify the presence of the proper amount of ordnance material by weighing, but it is very difficult to verify a proper interface, or intimate contact between the SCB and the ordnance material. Even if a proper interface exists at manufacture, it is difficult to determine whether an interface in a particular device is degraded over time, for example by vibration or shock. Even given a proper interface, without positive retention of the SCB against the ordnance material, the ordnance material may be thrown off by the shock generated by the SCB firing, rather than ignited. Positive retention introduces its own problems, however, including added cost and complexity without resolving verification of continued reliability in the field. In addition, the forces applied to the SCB in positive retention may break the SCB and/or connection bonds in the device.




SUMMARY OF THE INVENTION




A semiconductor bridge (SCB) device on a substrate with a laminate bridge is disclosed. In one embodiment, the SCB device comprises multiple, alternating layers of a thermally and electrically insulating material and a conducting material that is exothermically reactive with the insulating material. The multiple alternating layers form a laminate layer on an insulator on the surface area of the substrate. In one embodiment, the substrate is silicon. In one embodiment, boron is the insulating material and titanium is the conductive material. The laminate layer is typically continuous. In a top view, however, the laminate layer appears as two large sections that substantially cover the surface area of the substrate and are joined by a bridge section. The bridge section has a small cross-sectional area relative to the direction of current flow. The laminate layer is constructed as a series of individual, alternating insulating and reactive layers. The bridge section is reacted when current is passed through contacts on top of the laminate, which initiates the remainder of the laminate. As one layer of the laminate is consumed, another layer is exposed and becomes part of the conductive circuit. The output energy produced is sufficient to ignite ordnance material across a gap.











BRIEF DESCRIPTION OF THE DRAWINGS





FIG. 1

is a top view of an embodiment of a semiconductor bridge (SCB).





FIG. 2

is a cross-section view of the SCB of FIG.


1


.





FIG. 3

is a top view of an embodiment of an SCB.





FIG. 4

is a cross-section view of the SCB of FIG.


3


.





FIG. 5

is a cross-section view of an electro-explosive device (EED).











DETAILED DESCRIPTION OF THE INVENTION





FIGS. 1 and 2

illustrate one embodiment of an SCB. SCB


101


has integrally formed shunting diodes for protection against ESD events and an enhanced bridge overcoating for increased firing efficiency. Referring first to

FIG. 1

, the SCB


101


is formed on a silicon wafer substrate


102


that is generally square but may also be any convenient shape. A first generally triangular land


103


is deposited on one side of the substrate


102


and a second generally triangular land


104


is deposited on the opposite side of the substrate


102


. The lands


103


and


104


are generally spaced apart and electrically isolated from each other except for a relatively narrow conductive bridge


106


that couples and electrically connects the lands together. In one embodiment, the land


103


is formed partially of a deposited layer of palladium


107


, and the land


104


is similarly formed partially of a deposited layer


108


of palladium. In one embodiment, the bridge


106


is also formed of palladium. The lands


103


and


104


and the bridge


106


are further deposited as a single layer of palladium using common integrated circuit etching and deposition techniques.




A first diode


112


is formed beneath and is electrically coupled to the palladium layer


107


of the first land


103


and, similarly, a second diode


113


is formed beneath and electrically coupled to the palladium layer of the second land


104


. The formation and structure of these diodes is described in more detail below. A first contact pad,


109


which preferably is formed of composite layers of titanium, nickel, and gold Ti/Ni/Au) is deposited on the palladium layer


107


of the first land


103


and a second similar contact pad


111


is deposited on the palladium layer


108


of the second land


104


. The contact pads provide a suitable surface to which electrical leads can be connected to the lands by means of solder, conductive epoxy or the like for supplying firing current to the device. A chemically explosive composite overcoating


114


, described in more detail below, is provided on the bridge


106


for enhancing output energy and increasing the dispersion of a firing event.




Referring now to

FIG. 2

, which is view of cross section A—A of

FIG. 1

, the substrate


102


is a silicon chip


116


processed in a conventional manner. A layer


117


of silicon dioxide is formed on the surface of the chip and functions as an electrical insulator. Two spaced-apart triangular shaped openings


118


and


119


are etched in the silicon dioxide layer using any appropriate etching technique to expose the surface of the silicon chip. A first layer or pad


121


of aluminum is then deposited over the first etched opening


118


and a second layer or pad


122


of aluminum is deposited over the second etched opening


119


. The aluminum pads may be deposited on the chip using any appropriate technique such as, for example, vapor deposition. The first aluminum pad


121


forms a first Schottky barrier junction


123


with the surface of the silicon chip


116


and the second aluminum pad


122


forms a second Schottky barrier junction


124


with the surface of the silicon chip


116


. Accordingly, a pair of spaced apart Schottky diodes


112


and


113


are integrally formed with the SCB


101


.




The SCB


101


includes a bowtie shaped layer


126


of palladium deposited over the surface of the chip. The layer


126


of palladium is configured to define a first area


107


, a second area


108


, and a bridge


106


that extends between and electrically couples the larger areas


107


and


108


of the bowtie shaped area


126


. The first area


107


of the bowtie covers and is electrically bonded to the first Schottky diode


112


and the second area


108


of the bowtie covers and is electrically bonded to the second Schottky diode


113


.




The first contact pad


109


is deposited on the surface of the first area


107


of the bowtie shaped palladium layer and the second contact pad


111


is deposited on the surface of the second area


108


of the bowtie shaped palladium layer. The contact pads


109


and


111


, in one embodiment, are composite layers of Ti/Ni/Au. The contact pads


109


and


111


are contacts to which electrical leads may be bonded to the areas


107


and


108


of the bowtie shaped palladium layer


126


. The electrical leads supply firing current to the bowtie shaped palladium layer


126


.




The deposition, etching, and shaping of the various layers of materials on the surface of the chip


116


is accomplished using conventional integrated circuit fabrication techniques. The choices of metals for the various layers, the shape of the layers, and the relative sizes of the various portions of the layers may be different in different embodiments according to particular requirements. For example, gold or aluminum might be substituted for the palladium of the bowtie and other combinations of appropriate metals could be substituted for the Ti/Ni/Au of the contact pads.




A composite overcoat


114


is deposited atop the bridge


106


. As illustrated in

FIG. 2

, the composite overcoat


114


includes a layer


125


of zirconium deposited on the bridge and a layer


129


of an oxidizer such as, for example, copper oxide or iron oxide, also known as thermite, deposited atop the zirconium layer


128


. Copper oxide and iron oxide are formed of molecules with relatively weak chemical bonds and thus tend to donate their oxygen readily in a chemical reaction contributing to high temperature exothermic reactions. The composite overcoat


114


can be deposited on the bridge


106


using any of a variety of known deposition techniques. Furthermore, the composite overcoat need not necessarily be deposited in layers, but could be deposited as a single layer of a mixture of metal and oxidizer. In addition, substitutes may be made for the thermite components, the zirconium and the oxidizer. For example, other weak oxides and metal fuels may be used. Any appropriate chemically explosive overcoating might be substituted in other embodiments.




In operation, the contact pads


109


and


111


are each electrically connected to a respective pair of leads by means, for example, of wirebond, conductive epoxy, or solder. The leads are then coupled to a switchable source of firing potential. When in its dormant state prior to an intentional firing, the SCB is protected from inadvertent firing, such as by ESD events, by the shunt diodes


112


and


113


and the nofire energy of the bridge. More specifically, electric potential induced across the contacts by an ESD event typically is much higher than the turn-on voltage of the diodes formed on the SCB. Thus, the diodes appear to ESD induced potentials as closed circuit shunts and electric current above the shunt threshold is conducted away from the resistive bridge to prevent ohmic heating of the bridge and consequent accidental firing.




In order to fire the bridge of the SCB, a firing potential that is near or above the turn-on voltage of the diodes


112


and


113


is applied to the contacts from a source capable of delivering sufficient firing potential for an appropriate length of time. The firing potential can be provided, for example, by switching a charged capacitor in series with the SCB. The portion of the firing potential that is less than the turn-on voltage of the diodes is applied across the bridge. Current then flows through the bridge causing it to heat rapidly and to vaporize in a relatively high energy plasma reaction.




The heat generated in the palladium bridge by the firing current is directly coupled to the composite overcoat


114


of the SCB. As a consequence, the overcoat is also heated rapidly until the zirconium layer of the overcoat also begins to vaporize in a plasma. This in turn initiates a chemically explosive reaction between the zirconium of the overcoat and the oxidizer layer. The result is a chemical/plasma reaction in the vicinity of the bridge


106


that is substantially more energetic than the plasma explosion of a conductive bridge alone. The explosion generates a plasma filled fireball that projects outwardly from the surface of the SCB. Thus, the composite overcoat


114


greatly enhances the efficiency of the SCB in igniting a ordnance mix packed against its surface while the integral diode shunt protects the bridge from ESD events.





FIGS. 3 and 4

illustrate another embodiment of an SCB. The SCB


90


includes a greater amount of reactive materials layered over a greater surface area of the SCB as compared to the SCB


101


. The SCB


90


has significantly greater energy output upon firing than for example the SCB


101


, without appreciably increased energy input. The SCB


90


requires only enough energy to start and minimally sustain a reaction between two reactive materials that explode in plasma projecting outward from the surface of the SCB


90


, as further described below. The SCB


90


further includes integrally formed shunting diodes for protection against ESD events.




The sensitivity of the SCB


90


may be adjusted to operate at an input electrical power level required of an application independent of the required energy level to ignite the output ordnance material. The SCB


90


may ignite insensitive materials or materials which require a large amount of heat to ignite.




Significantly, the SCB


90


provides reliable ignition across a gap between the bridge and the ordnance material. This greatly enhances reliability because an intimate interface between the bridge and the ordnance material does not need to be guaranteed for proper operation. Verification of the interface between the bridge and ordnance material is thus not required. It is only necessary to verify, using conventional techniques, that the semiconductor wafer has been correctly processed. The presence of an output charge may be easily verified by weighing or X-ray. This also reduces production costs.





FIG. 3

is a top view of the SCB


90


showing the outlines of a series of material layers set on top of each other as they would appear on a substrate (not shown).

FIG. 4

is a simplified diagram of a cross-section of the SCB


90


. The SCB


90


includes alternating layers of different materials which are chemically reactive with each other. Typically, one of the materials is a metal. Typically, one of the materials is an insulator, in that it has a high resistivity and low thermal conductivity relative to the metal. In one embodiment, boron is used as the insulator and titanium is used as the metal. In other embodiments, other materials may be used. For example, the metal used may be one or more of aluminum, magnesium, and zirconium, as well as other metals. The insulator used may be one or more of calcium, manganese, and silicon, as well as other insulators.




Alternating layers, or sublayers


502


of titanium and sublayers


504


of boron are built up on a silicon dioxide insulating layer


306


. The top layer of the series of layers is a “bridge” layer


203


of titanium that is in contact with the contacts pads


202


. The alternating sublayers


502


and


504


, and the top bridge layer


203


make up a laminate layer. The layers


502


,


504


, and


203


are integrally bonded in situ during the semiconductor fabrication process that produces the substrate upon which the layers appear. The resulting structure, including a bridge and fuel, is therefore monolithic. This is in contrast to prior devices which may be fabricated by depositing the fuel as powders after the semiconductor fabrication process, and then mechanically pressing the powder fuel around a bridge.




The top bridge layer


203


, as shown in

FIG. 3

, is a continuous layer of a metal, in this case titanium, that includes two relatively large sections


203


A and


203


B joined by a bridge section


203


C. In other embodiments, the top layer may be boron or some other reactive material. The bridge section


203


C has a small cross-sectional area relative to the direction of current flow from the contact pads


202


. The cross-sectional area and geometry of the bridge section


203


C determine how much energy is required to heat the bridge. The materials used in the bridge, and their geometry and thickness, affect the starting resistance of the bridge section


203


C. In various embodiments, the contact pads


202


may be electrically connected to the top bridge layer


203


only, or to the top bridge layer


203


and multiple sublayers


502


and


504


. The number of layers electrically connected to the contact pads


202


affects the resistance and heating characteristics of the bridge section


203


C. In the case of a single layer in contact with the contact pads


202


, the resistance of the layer may be reduced by the addition of a thin layer of a material with a lower resistivity, such as gold. The resistance of the bridge may thus be adjusted to meet specific requirements.




The insulating layer


306


is built on the silicon substrate


304


substantially covers the surface area of the substrate


304


. In one embodiment the insulating layer


306


is silicon dioxide. The boron layers


504


and titanium layers


502


and


203


are each approximately 0.25 microns thick. Boron is a relatively poor conductor of heat and has relatively high sheet electrical resistivity compared to titanium. Boron and titanium may be processed with standard semiconductor techniques. The boron sublayers


504


and titanium sublayers


502


are built up under the top bridge layer


203


, which includes the bridge section


203


C, in a series of layers until the desired thickness is achieved. The thickness of the laminate layer is dependent upon the amount of plasma required to be produced and the desired no-fire level. The thickness of the laminate layer is practically limited only by semiconductor processing technology. A stoichiometry that yields relatively high output energy is one titanium atom per two boron atoms. To achieve this, layer thicknesses may be 250 nm for titanium and 220 nm for boron. A practical number of layers, considering such factors as total processing time, is four layers of titanium and four layers of boron. In most applications, the laminate layer (which includes boron sublayers


504


and titanium sublayers


502


and bridge layer


203


) may have a thickness of between two microns and fourteen microns.




The contact pads


202


are titanium/nickel/gold (Ti/Ni/Au) in one embodiment. The contact pads


202


are formed by selectively covering part of the top bridge layer


203


with a standard Ti/Ni/Au coat to form electrical contacts that can be connected, for example, via wire bonds, solder, or conductive epoxy. Titanium has adhesion characteristics that promote bonding to other materials. Nickel provides a solderable contact, if one is desired. Gold is an excellent conductor for providing a conductive path to the layered reactants, and also helps keep the nickel from readily oxidizing. As shown in

FIG. 4

, the contact pads


202


extend over and through the sublayers


502


and


504


to the aluminum


312


. The SCB


90


includes diodes


204


which are integrally formed by the interface of the aluminum


312


with the silicon substrate


304


. Two spaced apart triangular shaped openings are etched in the silicon dioxide layer


306


using any appropriate etching technique to expose the surface of the silicon chip


304


. Layers or pads


312


of aluminum are then deposited over the etched openings using any appropriate technique such as, for example, vapor deposition. One aluminum pad forms a first barrier junction


204


A with the surface of the silicon chip


304


and the other aluminum pad forms a second barrier junction


204


B with the surface of the silicon chip


304


. The doping of the substrate determines the breakdown voltage of the diode. In applications such as automobile airbag initiators, for example, a breakdown voltage of seven to eight volts provides significant ESD protection. Other application requiring less sensitive bridges may use higher breakdown voltages.




The length and width of the laminate layer formed by layers


203


,


502


, and


504


extends significantly beyond the length and width of the small bridge section


203


C. When current is applied to the small bridge section


203


C, the top layer


203


is ohmically heated until it is hot enough to react with the adjoining boron layer. An exothermic reaction results, producing titanium and various titanium compounds, which are expelled as hot plasma. The boron acts as an insulator so that only the plasma arc and the exposed portions of metal layers act as a conductive path. The reaction ceases when the source electrical energy (for example, from a capacitor) is depleted or all of the layers are consumed to a distance at which the plasma arc is extinguished. The output energy is used to heat the ordnance material that is ignited by the plasma. The heat transferred to the sublayers


502


and


504


aids in the reaction instead of being lost to the silicon substrate.




In reactive processes in which the heat released is more than the heat absorbed by the substrate or lost in plasma release, or other mechanisms, the reactive process will continue until all available reactants are consumed. In cases in which the losses exceed the energy output, the reaction will be sustained by the addition of electrical energy via the plasma until the electrical energy is discontinued or the arc length requires more voltage than the source can supply.




Tests of SCB


90


have shown that ignition of ordnance materials occurs across a gap. This eliminates the need to assure contact between the bridge and the primary ordnance material, greatly simplifying manufacture. Additionally, not having to maintain contact between the bridge and the primary ordnance material eliminates many of the reliability problems that may result, such as breaking of wire bonds during powder pressing operations. The SCB


90


can thus be reliably assembled in quantity.




In other embodiments, the area of the SCB


90


covered by layers of reactive material may be varied according to performance requirements. The shape of the area covered may also be varied. For example, multiple layers of boron and titanium, or some other appropriate materials, may be stacked as high as practicable only in the narrow bridge area between the contacts of the SCB.





FIG. 5

is a diagram of a cross-section of an electro-explosive device (EED)


60


. An SCB


50


is attached to a header


62


, which is formed from a ceramic or metal alloy. The SCB


50


may be similar to the SCB


101


or the SCB


90


. The SCB


50


is typically attached with a nonconductive epoxy. An electrical attachment


64


, for example conductive epoxy or wire bond, is applied between pins


66


on the header


62


, and cap


68


is placed on the header


62


to form an enclosure filled with ordnance material


69


.




In operation, a firing signal supplied to the initiator


60


is routed through the pins


66


, through the electrical attachment


64


, and to the reactive bridge section of the SCB


50


, firing the reactive bridge and initiating a reaction that involves all of the reactive material layers on the SCB.




The invention has been described with reference to specific examples. Various modifications may be made by one of ordinary skill in the art without departing from the spirit and scope of the invention as defined in the following claims. For example, alternative material and alternative configurations are within the scope of the invention as claimed.



Claims
  • 1. An electro-explosive device fabricated on the surface of a substrate, the electro-explosive device comprising:(a) a laminate layer deposited on the surface of the substrate, the laminate layer comprising a series of alternating layers of a reactive metal and a reactive insulator, the reactive insulator having a resistivity that is high relative to the resistivity of the reactive metal, the laminate layer being configured to define a bridge joining two relatively large sections, (b) comprising, (i) two relatively large sections that substantially cover the surface area of the substrate; and (ii) bridge section joining the two relatively large sections; and (c) a conductive contact pad coupled to each of the at least one of the series of alternating layers, wherein a predetermined current through the at least one conductive contact pad causes the bridge section to initiate a reaction in which the laminate layer is involved.
  • 2. The SCB device of claim 1, wherein the reactive metal is titanium an wherein the reactive insulator is boron.
  • 3. The SCB device of claim 1, wherein each layer of the series of layers is approximately 0.25 microns thick.
  • 4. The SCB device of claim 3, wherein the series of layers has a thickness of between two microns and fourteen microns.
  • 5. The SCB device of claim 1, further comprising an integrated diode formed by an interface of the substrate with another material.
  • 6. The SCB device of claim 1, wherein the at least one conductive contact pad comprises a material selected from one of the following: titanium, nickel, gold, or any mixtures thereof.
  • 7. The SCB device of claim 1, wherein the reactive metal is selected from one of the following: titanium, aluminum, magnesium, or zirconium.
  • 8. The SCB device of claim 1, wherein the reactive insulator is selected from one of the following: boron, silicon, calcium, or manganese.
  • 9. A semiconductor bridge (SCB) device, comprising:a laminate layer on top of an insulating material, wherein the laminate layer comprises at least a first layer of a first material, at least a second layer of a second material, at least a third layer of the first material, and at least a fourth layer of the second material, and wherein the laminate layer further comprises, two relatively large sections that substantially cover the surface area of the insulating material, and a bridge section joining the two relatively large sections; for each of the two relatively large sections, at least one conductive contact pad coupled to at least one of the layers of that relatively large section, wherein a predetermined current between at least one conductive contact pad on one of the relatively large sections and at least one conductive pad on the other of the relatively large sections causes the bridge section to initiate a reaction in which the laminate layer is involved.
  • 10. The SCB device of claim 9 wherein as one layer is consumed, another layer is exposed and becomes part of a conductive circuit.
  • 11. The SCB device of claim 9, wherein the first material comprises a reactive insulator and the second material comprises a reactive metal, wherein the reactive insulator has a resistivity that is high relative to a resistivity of the reactive metal, and wherein the reactive metal is in contact with the at least one conductive contact pad.
  • 12. The SCB device of claim 11, wherein the reactive metal is titanium an wherein the reactive insulator is boron.
  • 13. The SCB device of claim 9, wherein each layer of the series of layers is approximately 0.25 microns thick.
  • 14. The SCB device of claim 13, wherein the series of layers has a thickness of between two microns and fourteen microns.
  • 15. The SCB device of claim 9, further comprising an integrated diode formed by an interface of the insulating material with another material.
  • 16. The SCB device of claim 9, wherein the at least one conductive contact pad comprises a material selected from one of the following: titanium, nickel, gold, or any mixtures thereof.
  • 17. The SCB device of claim 9, wherein the reactive metal is selected from one of the following: titanium, aluminum, magnesium, or zirconium.
  • 18. The SCB device of claim 9, wherein the reactive insulator is selected from one of the following: boron or silicon.
  • 19. A semiconductor bridge (SCB) device, comprising:a laminate layer comprising: a plurality of first sublayers, each comprising a first material; a plurality of second sublayers, each comprising a second material; a plurality of second sublayers, each comprising a second material; and wherein the laminate layer comprises, two relatively large sections that substantially cover the surface area of the insulating material, and a bridge section joining the two relatively large sections; for each of the two relatively large sections, at least one conductive contact pad coupled to at least one of the sublayers of that relatively large section.
  • 20. A semiconductor bridge (SCB) device, comprising:a laminate layer on top of an insulating material, wherein the laminate layer comprises a series of layers wherein the layers comprise at least two layers of a first reactive material and at least two layers of a second reactive material, and wherein the laminate layer comprises, two relatively large sections that substantially cover the surface area of the insulating material, and a bridge section joining the two relatively large sections; for each of the two relatively large sections, at least one conductive contact pad coupled to at least one of the series of layers of that relatively large section, wherein the contact pad extends vertically to be in contact with a plurality of layers of the laminate.
  • 21. The SCB device of claim 19 wherein as one layer is consumed, another layer is exposed and becomes part of a conductive circuit.
  • 22. The SCB device of claim 19, wherein each sublayer of the plurality of sublayers is approximately 0.25 microns thick.
  • 23. The SCB device of claim 19, wherein the plurality of sublayers each has a thickness of between two microns and fourteen microns.
  • 24. The SCB device of claim 19, further comprising an integrated diode formed by an interface of the insulating material with another material.
  • 25. The SCB device of claim 19, wherein the at least one conductive contact pad comprises a material selected from one of the following: titanium, nickel, gold, or any mixtures thereof.
  • 26. The SCB device of claim 19, wherein the second material is a reactive metal is selected from one of the following: titanium, aluminum, magnesium, or zirconium.
  • 27. The SCB device of claim 19, wherein the first material is a reactive insulator is from one of the following: boron, silicon, calcium, or manganese.
  • 28. The SCB device of claim 20 wherein as one layer is consumed, another layer is exposed and becomes part of a conductive circuit.
  • 29. The SCB device of claim 20, wherein the second reactive material is titanium an wherein the first reactive material is boron.
  • 30. The SCB device of claim 20, wherein each layer of the series of layers is approximately 0.25 microns thick.
  • 31. The SCB device of claim 20, wherein the series of layers has a thickness of between two microns and fourteen microns.
  • 32. The SCB device of claim 20, further comprising an integrated diode formed by an interface of the insulating material with another material.
  • 33. The SCB device of claim 20, wherein the at least one conductive contact pad comprises a material selected from one of the following: titanium, nickel, gold, or any mixtures thereof.
  • 34. The SCB device of claim 20, wherein the second reactive metal is selected from one of the following: titanium, aluminum, magnesium, or zirconium.
  • 35. The SCB device of claim 20, wherein the first reactive layer is selected from one of the following: boron, silicon, calcium, or manganese.
  • 36. The SCB device of claim 1, wherein the reactive metal is in contact with the at least one conductive contact pad.
CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No. 09/656,523, filed Sep. 7, 2000, now abandoned which is incorporated into this application by reference. U.S. patent application Ser. No. 09/656,523 claims the priority under 35 USC 119(e) of Provisional Application No. 60/206,864, filed May 24, 2000.

US Referenced Citations (57)
Number Name Date Kind
2821139 Apstein et al. Jan 1958 A
3211096 Forney et al. Oct 1965 A
3420174 Potter Jan 1969 A
3572247 Warshall Mar 1971 A
3640224 Petrick et al. Feb 1972 A
3669022 Dahn et al. Jun 1972 A
3682096 Lüdke et al. Aug 1972 A
3735705 Hudson, Jr. et al. May 1973 A
3753403 Menichelli Aug 1973 A
3831523 Thomas et al. Aug 1974 A
3882324 Smolker et al. May 1975 A
3974424 Lee Aug 1976 A
4061088 Ueda Dec 1977 A
4271453 Yajima et al. Jun 1981 A
4304184 Jones Dec 1981 A
4378738 Proctor et al. Apr 1983 A
4422381 Barrett Dec 1983 A
4428292 Riggs Jan 1984 A
4517895 Rucker May 1985 A
4586435 Bock May 1986 A
4592280 Shores Jun 1986 A
4690056 Brede et al. Sep 1987 A
4708060 Bickes, Jr. et al. Nov 1987 A
4729315 Proffit et al. Mar 1988 A
4779532 Riley et al. Oct 1988 A
4819560 Patz et al. Apr 1989 A
4840122 Nerheim Jun 1989 A
4893563 Baginski Jan 1990 A
4944224 Fiedler et al. Jul 1990 A
4967665 Baginski Nov 1990 A
4976200 Benson et al. Dec 1990 A
4977105 Okamoto et al. Dec 1990 A
5085146 Baginski Feb 1992 A
5088412 Patrichi Feb 1992 A
5088413 Huber et al. Feb 1992 A
5099762 Drapala Mar 1992 A
5179248 Hartman et al. Jan 1993 A
5309841 Hartman et al. May 1994 A
5370054 Reams et al. Dec 1994 A
5439847 Chittipeddi et al. Aug 1995 A
5448114 Kondoh et al. Sep 1995 A
5454320 Hilden et al. Oct 1995 A
5648634 Avory et al. Jul 1997 A
5672841 Monk et al. Sep 1997 A
5763814 Avory et al. Jun 1998 A
5798475 Reynes et al. Aug 1998 A
5831203 Ewick Nov 1998 A
5847309 Baginski Dec 1998 A
5905226 Baginski May 1999 A
5912427 Willis et al. Jun 1999 A
5992326 Martinez-Tovar et al. Nov 1999 A
6054760 Martinez-Tovar et al. Apr 2000 A
6105503 Baginski Aug 2000 A
6133146 Martinez-Tovar et al. Oct 2000 A
6192802 Baginski Feb 2001 B1
6199484 Martinez-Tovar et al. Mar 2001 B1
6272965 Baginski et al. Aug 2001 B1
Foreign Referenced Citations (4)
Number Date Country
581316 Aug 1959 CA
39 18 408 Dec 1990 DE
0 567 959 Nov 1993 EP
WO 9742462 Nov 1997 WO
Non-Patent Literature Citations (1)
Entry
Baginski and Hodel, “The semiconductor junction ingniter: a novel RF and ESD insensitive electro-explosive device”, IEEE Trans. Ind. Appl., 29(2), 412-418 (1993).
Provisional Applications (1)
Number Date Country
60/206864 May 2000 US
Continuations (1)
Number Date Country
Parent 09/656523 Sep 2000 US
Child 10/418647 US