Number | Date | Country | Kind |
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199 39 011 | Aug 1999 | DE |
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3239444 | Heldenbrand | Mar 1966 | A |
4790925 | Miller et al. | Dec 1988 | A |
5063081 | Cozzette et al. | Nov 1991 | A |
5344546 | Kiesele et al. | Sep 1994 | A |
5518602 | Kessel | May 1996 | A |
5855750 | Kiesele | Jan 1999 | A |
5906718 | Hance et al. | May 1999 | A |
Number | Date | Country |
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196 39 311 | Apr 1998 | DE |
197 45 486 | Apr 1999 | DE |
0 647 318 | Apr 1995 | EP |
Entry |
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US published application 6,251,244 B1, Jun. 26, 2001.* |
André Perret et al. 21/97 Carbon-Based Materials for Microdevices Materials for Microsystems. |