Patent Application
20080174872
1. Field of the Invention
The present invention relates to an electroconductive laminate, an electromagnetic wave shielding film for a plasma display having electromagnetic wave shielding properties for shielding electromagnetic noises generated from a plasma display panel (hereinafter referred to as a PDP) provided on the observer side of the PDP to protect the PDP main body, and a protective plate for a plasma display.
2. Discussion of Background
Electroconductive laminates having transparency are used as a transparent electrode of e.g. a liquid crystal display device, a windshield for an automobile, a heat mirror, electromagnetic wave shielding window glass, etc. For example, Patent Document 1 discloses a coated electroconductive laminate comprising a transparent substrate, and a transparent oxide layer comprising zinc oxide and a silver layer alternately laminated on the substrate in a total layer number of (2n+1) (wherein n≧2). Such an electroconductive laminate is described to have sufficient electrical conductivity (electromagnetic wave shielding properties) and visible light transparency. However, if the total thickness of all silver layers is increased by increasing the lamination number n to increase the number of silver layers, or by increasing the thickness of the respective silver layers so as to further improve electrical conductivity (electromagnetic wave shielding properties) of the electroconductive laminate, the visible light transparency tends to decrease.
Further, an electroconductive laminate is used also as an electromagnetic wave shielding film for a plasma display. Since electromagnetic waves are emitted from the front of a PDP, for the purpose of shielding the electromagnetic waves, an electromagnetic wave shielding film comprising a substrate such as a plastic film and an electroconductive film formed on the substrate is disposed on the observer side of a PDP.
For example, Patent Document 2 discloses a protective plate for a plasma display comprising, as an electroconductive film, a laminate having an oxide layer and a metal layer alternately laminated.
An electromagnetic wave shielding film is required to have a high transmittance and a low reflectance over the entire visible light region, i.e. to have a broad transmission/reflection band, and to have high shielding properties in the near infrared region. In order to broaden the transmission/reflection band, the number of lamination of the oxide layer and the metal layer should be increased. However, if the number of lamination is increased, such problems arose that the internal stress of the electromagnetic wave shielding film increases, whereby the film curls, or the electroconductive film may be broken to increase the resistance. Further, if the total thickness of all metal layers is increased by e.g. increasing the number of lamination so as to further improve electrical conductivity, the visible light transparency tends to decrease. Thus, heretofore, the number of lamination of the oxide layer and the metal layer and the increase in the thickness of the metal layer in the electroconductive film have been limited. An electromagnetic wave shielding film having a broad transmission/reflection band and having excellent electrical conductivity (electromagnetic wave shielding properties) and visible light transparency has not been known.
Patent Document 1: JP-B-8-32436
Patent Document 2: WO98/13850
It is an object of the present invention to provide an electroconductive laminate having a broad transmission/reflection band even in a small number of lamination or even with a small total thickness of all metal layer(s) and having excellent electrical conductivity (electromagnetic wave shielding properties), visible light transparency and near infrared shielding properties, an electromagnetic wave shielding film for a plasma display and a protective plate for a plasma display.
The present invention provides an electroconductive laminate comprising a substrate and an electroconductive film formed on the substrate, wherein the electroconductive film has a multilayer structure having a high refractive index layer containing an inorganic compound and a metal layer alternately laminated from the substrate side in a total layer number of (2n+1) (wherein n is an integer of from 1 to 12); the refractive index of the inorganic compound is from 1.5 to 2.7; the metal layer is a layer containing silver; the total thickness of all metal layer(s) is from 25 to 100 nm; and the resistivity of the electroconductive film is from 2.5 to 6.0 μΩcm.
The electroconductive laminate of the present invention has a broad transmission/reflection band since the total thickness of all metal layer(s) is small and the resistivity of the electroconductive film is small, and further has excellent electrical conductivity (electromagnetic wave shielding properties), visible light transparency and near infrared shielding properties.
The electromagnetic wave shielding film for a plasma display of the present invention has a broad transmission/reflection band even with a small total thickness of all metal layer(s) or even in a small number of lamination, and has excellent electrical conductivity (electromagnetic wave shielding properties), visible light transparency and near infrared shielding properties.
The protective plate for a plasma display of the present invention has excellent electromagnetic wave shielding properties, has a broad transmission/reflection band, has a high visible light transmittance and has excellent near infrared shielding properties.
1,2,3: protective plate (protective plate for a plasma display), 10: electroconductive laminate, 11: substrate, 12: electroconductive film, 12a: high refractive index layer, 12b: metal layer, 12c: barrier layer, 12d: protective film, 20: support, 30: color ceramic layer, 40: shatterproof film, 70: adhesive layer, 50: electrode, 80: electroconductive mesh film, 90: electrode
Now, one embodiment of the electroconductive laminate of the present invention will be described.
As a material of the substrate 11, a glass plate (including tempered glass such as air-cooled tempered glass or chemically tempered glass) or a transparent plastic material such as polyethylene terephthalate (PET), triacetyl cellulose (TAC), polycarbonate (PC) or polymethylmethacrylate (PMMA) may, for example, be mentioned.
The electroconductive film 12 has a multilayer structure having a high refractive index layer 12a and a metal layer 12b alternately laminated from the substrate 11 side in a total layer number of (2n+1) (wherein n is an integer of from 1 to 12).
In the electroconductive film 12, preferably from 2 to 8 metal layers, are provided, more preferably from 2 to 6. That is, in the electroconductive film 12, preferably n=2 to 8, more preferably n=2 to 6. When at least 2 metal layers are provided, the resistance can be sufficiently low, and when at most 12 metal layers are provided, the increase in the internal stress of the electroconductive laminate 10 can be more suppressed, and when at most 8 metal layers are provided, the increase in the internal stress can be more significantly suppressed.
The electroconductive film 12 is required to have a resistivity of from 2.5 to 6.0 μΩcm so as to secure sufficient electromagnetic wave shielding performance. The resistivity is preferably from 2.5 to 5.5 μΩcm, more preferably from 2.5 to 4.5 μΩcm. A more sufficient electromagnetic wave shielding effect will be obtained when the electroconductive film 12 has a resistivity of at most 6.0 μΩcm.
The resistivity of the electroconductive film 12 is calculated by a method disclosed in Examples.
The high refractive index layer 12a in the electroconductive film 12 contains an inorganic compound. The refractive index of the inorganic compound is from 1.5 to 2.7, preferably from 1.7 to 2.5, more preferably from 2.0 to 2.5. In the present invention, the “refractive index” is the refractive index at a wavelength of 550 nm. The content of the inorganic compound in the high refractive index layer is preferably at least 90 mass %, more preferably at least 95 mass %, particularly preferably at least 99 mass %.
The inorganic compound in the present invention may, for example, be preferably a metal oxide, a metal nitride or a metal sulfide.
The metal oxide may be at least one member selected from the group consisting of an oxide of a single metal selected from zinc, titanium, niobium, tantalum, indium, tin, chromium, hafnium, zirconium, magnesium, etc., and a composite oxide of two or more of the above metals.
The metal nitride may, for example, be at least one member selected from the group consisting of a nitride of a single metal selected from silicon, aluminum, etc., and a composite nitride of two or more of the above metals.
The metal sulfide may be at least one member selected from the group consisting of a sulfide of a single metal selected from zinc, lead, cadmium, etc., and a composite sulfide of two or more of the above metals.
The inorganic compound contained in the high refractive index 12a in the present invention is preferably a metal oxide, whereby the transmittance to visible light can be made high.
Preferred is a layer containing, as the metal oxide, a metal oxide having a high refractive index of at least 2.3 and zinc oxide as the main components (hereinafter sometimes referred to as a zinc oxide-containing layer). The zinc oxide-containing layer contains a high refractive index metal oxide having a refractive index of at least 2.3 and zinc oxide in a total content of preferably at least 90 mass %, more preferably at least 95 mass %, particularly preferably at least 99 mass %.
Among high refractive index metal oxides having a refractive index of at least 2.3, preferred is at least one member selected from titanium oxide (refractive index: 2.5) and niobium oxide (refractive index: 2.4) with a view to further broadening the refraction band.
By the presence of the high refractive index metal oxide, the refractive index of the zinc oxide-containing layer can be increased, and the transmission/reflection band of the electroconductive film 12 can be broadened. In the zinc oxide-containing layer, the ratio of metal atoms in the high refractive index metal oxide is preferably from 1 to 50 at %, particularly preferably from 5 to 20 at %, based on the total amount of the metal atoms and zinc atoms. Within this range, the transmission/reflection band can be maintained broad and further, an electroconductive film having favorable moisture resistance can be obtained. The reason is not necessarily clear but is considered to be because the stress of the high refractive index layer 12a and the metal layer 12b can be released while favorable physical properties of zinc oxide are maintained within this range.
The high refractive index layer 12a may contain a metal oxide other than zinc oxide, titanium oxide and niobium oxide within a range not to impair physical properties. For example, for the purpose of imparting electrical conductivity, gallium oxide, indium oxide, aluminum oxide, magnesium oxide, tin oxide or the like may be incorporated.
The geometrical film thickness (hereinafter referred to simply as the thickness) of the high refractive index layer 12a is preferably from 20 to 60 nm (particularly from 30 to 50 nm) in the case of a high refractive index layer closest to the substrate and a high refractive index layer farthest from the substrate and is preferably from 40 to 120 nm (particularly from 40 to 100 nm) in the case of other high refractive index layers. Each high refractive index layer 12a may be made of a single uniform layer or may be a multilayer film having two or more layers laminated.
The metal layer 12b is a layer containing silver. By the metal layer 12b containing silver, the resistance of the electroconductive film 12 can be made low. In the metal layer 12b, the silver content is preferably at least 90 mass %, more preferably at least 94 mass %. When the silver content is at least 90 mass %, the resistance of the electroconductive film 12 can be made low.
The metal layer 12b is preferably a layer made of pure silver with a view to lowering the resistance of the electroconductive film 12. In the present invention, the “pure silver” means that the metal layer 12b (100 mass %) contains silver in an amount of 99.9 mass % or more.
The metal layer 12b is preferably a layer made of a silver alloy further containing at least one member selected from gold, bismuth and palladium with a view to suppressing diffusion of silver and thus increasing moisture resistance. Particularly, a layer made of a silver alloy containing gold and/or bismuth is preferred. The total amount of gold and bismuth is preferably from 0.2 to 1.5 mass % in the metal layer 12b (100 mass %) so that the resistivity of the electroconductive film 12 will be at most 6.0 μΩcm.
The total thickness of all metal layer(s) 12b in the electroconductive layer 12 is from 25 to 100 nm. The total thickness is preferably from 25 to 80 nm, more preferably from 25 to 60 nm. Since the resistivities of the respective metal layers increase as the number of the metal layers increases, the total thickness tends to increase so as to lower the resistance.
The thickness of each metal layer 12b in the electroconductive film 12 is preferably from 5 to 25 nm, more preferably from 5 to 20 nm, furthermore preferably from 5 to 17 nm, most preferably from 10 to 17 nm. The thicknesses of the respective metal layers in the electroconductive film 12 may be all the same or may be different.
The method of forming the electroconductive film 12 (high refractive index layer 12a, metal layer 12b) on the substrate 11 is not particularly limited, and for example, sputtering, vacuum deposition, ion plating, chemical vapor deposition, etc. may be utilized. Among them, sputtering is suitable in view of the stability of quality and properties. The sputtering may, for example, be pulse sputtering or AC sputtering.
Formation of the electroconductive film 12 by sputtering may be carried out, for example, as follows. First, on the surface of the substrate 11, a high refractive index layer 12a is formed by pulse sputtering using a target of zinc oxide and a high refractive index metal oxide (hereinafter referred to as a ZnO mixed target) by introducing an argon gas with which an oxygen gas is mixed.
Then, a metal layer 12b is formed by pulse sputtering using a silver target or a silver alloy target by introducing an argon gas. These operations are repeatedly carried out, and finally a high refractive index layer 12a is formed by the same method as above to form an electroconductive film 12 having a multilayer structure.
The ZnO mixed target can be prepared by mixing high purity (usually 99.9%) powders of the respective components, followed by firing by hot pressing or HIP (hot isostatic pressing). In the case of hot pressing, specifically, a zinc oxide powder containing a high refractive index metal oxide is hot pressed in vacuum or in an inert gas atmosphere at a maximum temperature of from 1,000 to 1,200°0 C. to prepare the target. The ZnO mixed target is preferably one having porosity of at most 5.0% and having a resistivity less than 1 Ωcm.
In the electroconductive film 12 according to the present embodiment, a protective film 12d is provided on the uppermost high refractive index layer 12a. The protective film 12d protects the high refractive index layer 12a and the metal layer 12b from moisture and protects the high refractive index layer 12a from an adhesive (particularly an alkaline adhesive) when an optional resin film (e.g. a functional film such as moistureproof film, shatterproof film, antireflection film, protective film for e.g. near infrared shielding or near infrared-absorbing film) is bonded to the outermost high refractive index layer 12a. The protective film 12d is an optional constituent in the present invention and may be omitted.
Specifically, the protective film 12d may, for example, be a film of an oxide or nitride of a metal such as Sn, In, Ti or Si, particularly preferably an indium-tin oxide (ITO) film.
The thickness of the protective film 12d is preferably from 2 to 30 nm, more preferably from 3 to 20 nm.
As shown in
In the electroconductive layer in the present invention, which is placed the substrate side down, so long as the metal layer 12b is laminated on the high refractive index layer 12a in contact with each other, another layer may be inserted on the metal layer 12b or the barrier layer 12c. As the material used for such another layer, an organic compound, or an inorganic compound having a refractive index less than 1.5 or higher than 2.5 may, for example, be mentioned.
The electroconductive laminate of the present invention preferably has a luminous transmittance of at least 55%, more preferably at least 60%. Further, the electroconductive laminate of the present invention preferably has a transmittance at a wavelength of 850 nm of preferably at most 5%, particularly preferably at most 2%.
The electroconductive laminate of the present invention is excellent in electrical conductivity (electromagnetic wave shielding properties), visible light transparency and near infrared shielding properties, and when laminated on a support of e.g. glass, has a broad transmission/reflection band and is thereby useful as an electromagnetic wave shielding film for a plasma display.
Further, the electroconductive laminate of the present invention can be used as a transparent electrode of e.g. a liquid crystal display device. Such a transparent electrode has a low surface resistance and is thereby well responsive, and has a reflectance as low as that of glass and thereby provides good visibility.
Further, the electroconductive laminate of the present invention can be used as a windshield for an automobile. Such a windshield for an automobile exhibits function to prevent fogging or to melt ice by applying a current to the electroconductive film, the voltage required to apply the current is low since it has a low resistance, and it has a reflectance so low as that of glass, whereby visibility of a driver will not be impaired.
The electroconductive laminate of the present invention, which has a very high reflectance in the infrared region, can be used as a heat mirror to be provided on e.g. a window of a building.
Further, the electroconductive laminate of the present invention, which has a high electromagnetic wave shielding effect, can be used for an electromagnetic wave shielding window glass which prevents electromagnetic waves emitted from electrical and electronic equipment from leaking out of the room and prevents electromagnetic waves affecting electrical and electronic equipment from invading the interior from the outside.
Now, an example wherein the electroconductive laminate of the present invention is used as an electromagnetic wave shielding film of a protective plate for a plasma display (hereinafter referred to as a protective plate) will be described.
An adhesive layer 70 is provided between the electroconductive laminate 10 and the support 20, between the electroconductive laminate 10 and the protective film 60, and between the support 20 and the shatterproof film 40.
Further, this protective plate 1 is one having the electroconductive laminate 10 formed on the PDP side of the support 20.
The support 20 in the protective plate 1 is a transparent substrate having higher rigidity than that of the substrate 11 of the electroconductive laminate 10. By providing the support 20, no warpage will occur by the temperature difference caused between the surface on the PDP side and the opposite side, even if the material of the substrate 11 of the electroconductive laminate 10 is plastic such as PET.
As a material of the support 20, the same material as the above-described material of the substrate 11 of the electroconductive laminate 10 may, for example, be mentioned.
The color ceramic layer 30 is a layer to mask the electrode 50 so that it will not directly be seen from the observer side. The color ceramic layer 30 can be formed, for example, by printing on the support 20 or by bonding a color tape.
The shatterproof film 40 is a film to prevent flying of fragments of the support 20 when the support 20 is damaged. The shatterproof film 40 is not particularly limited, and one which is commonly used for a protective plate can be used.
The shatterproof film 40 may have an antireflection function. Various films having both shatterproof function and antireflection function are known, and any such film can be used. For example, ARCTOP (tradename) manufactured by Asahi Glass Company, Limited may be mentioned. ARCTOP (tradename) is a polyurethane type flexible resin film having self-healing properties and shatterproof properties, having a low refractive index antireflection layer made of an amorphous fluoropolymer formed on one side of the film to apply antireflection treatment. Further, a film comprising a plastic film such as PET and a low refractive index antireflection layer formed thereon wetly or dryly may also be mentioned.
The electrode 50 is provided to be electrically in contact with the electroconductive film 12 so that the electromagnetic wave shielding effect of the electroconductive film 12 of the electroconductive laminate 10 is exhibited.
The electrode 50 is preferably provided on the entire peripheral portion of the electroconductive film 12 with a view to securing the electromagnetic wave shielding effect of the electroconductive film 12.
As a material of the electrode 50, one having a lower resistance is superior in view of the electromagnetic wave shielding properties. For example, one prepared by applying a silver (Ag) paste (a paste containing Ag and glass frit) or a copper (Cu) paste (a paste containing Cu and glass frit), followed by firing is suitably used.
The protective film 60 is a film to protect the electroconductive film 12 of the electroconductive laminate 10. Specifically, to protect the electroconductive film 12 from moisture, a moisture-proof film is provided. The moisture-proof film is not particularly limited, and one which is commonly used for a protective plate may be used, such as a plastic film of e.g. PET or polyvinylidene chloride.
Further, as the protective film 60, the above-described shatterproof film may be used.
As an adhesive of the adhesive layer 70, a commercially available adhesive can be used. Preferred specific examples include adhesives such as an acrylic ester copolymer, a polyvinyl chloride, an epoxy resin, a polyurethane, a vinyl acetate copolymer, a styrene/acrylic copolymer, a polyester, a polyamide, a polyolefin, a styrene/butadiene copolymer type rubber, a butyl rubber and a silicone resin. Particularly, an acrylic adhesive is preferred, with which favorable moistureproof properties are achieved.
Further, in this adhesive layer 70, various functional additives such as an ultraviolet absorber may be incorporated.
In this embodiment, the same constituents as in the first embodiment are expressed by the same symbols as in
The protective plate 2 according to the second embodiment is one having the electroconductive laminate 10 provided on the observer side of the support 20.
In the third embodiment, the same constituents as in the first embodiment are expressed by the same symbols as in
The electroconductive mesh film 80 is one comprising a transparent film and an electroconductive mesh layer made of copper formed on the transparent film. Usually, it is produced by bonding a copper foil to a transparent film, and processing the laminate into a mesh.
The copper foil may be either rolled copper or electrolytic copper, and known one is used property according to need. The copper foil may be subjected to surface treatment. The surface treatment may, for example, be chromate treatment, surface roughening, acid wash or zinc chromate treatment. The thickness of the copper foil is preferably from 3 to 30 μm, more preferably from 5 to 20 μm, particularly preferably from 7 to 10 μm. When the thickness of the copper foil is at most 30 μm, the etching time can be shortened, and when it is at least 3 μm, high electromagnetic wave shielding properties will be achieved.
The open area of the electroconductive mesh layer is preferably from 60 to 95%, more preferably from 65 to 90%, particularly preferably from 70 to 85%.
The shape of the openings of the electroconductive mesh layer is an equilateral triangle, a square, an equilateral hexagon, a circle, a rectangle, a rhomboid or the like. The openings are preferably uniform in shape and aligned in a plane.
With respect to the size of the openings, one side or the diameter is preferably from 5 to 200 μm, more preferably from 10 to 150 μm. When one side or the diameter of the openings is at most 200 μm, electromagnetic wave shielding properties will improve, and when it is at least 5 μm, influences over an image of a PDP will be small.
The width of a metal portion other than the openings is preferably from 5 to 50 μm. That is, the mesh pitch of the openings is preferably from 10 to 250 μm. When the width of the metal portion is at least 5 μm, processing will be easy, and when it is at most 50 μm, influences over an image of a PDP will be small.
If the sheet resistance of the electroconductive mesh layer is lower than necessary, the film tends to be thick, and such will adversely affect optical performance, etc. of the protective plate 3, such that no sufficient openings can be secured. On the other hand, if the sheet resistance of the electroconductive mesh layer is higher than necessary, no sufficient electromagnetic wave shielding properties will be obtained. Accordingly, the sheet resistance of the electroconductive mesh layer is preferably from 0.01 to 10Ω/□, more preferably from 0.01 to 2Ω/□, particularly preferably from 0.05 to 1Ω/□.
The sheet resistance of the electroconductive mesh layer can be measured by a four-point probe method using electrodes at least five times larger than one side or the diameter of the opening with a distance between electrodes at least five times the mesh pitch of the openings. For example, when 100 μm square openings are regularly arranged with metal portions with a width of 20 μm, the sheet resistance can be measured by arranging electrodes with a diameter of 1 mm with a distance of 1 mm. Otherwise, the electroconductive mesh film is processed into a stripe, electrodes are provided on both ends in the longitudinal direction to measure the resistance R therebetween thereby to determine the sheet resistance from the length a in the longitudinal direction and the length b in the lateral direction in accordance with the following formula:
Sheet resistance=R×b/a
To laminate a copper foil on a transparent film, a transparent adhesive is used. The adhesive may, for example, be an acrylic adhesive, an epoxy adhesive, a urethane adhesive, a silicone adhesive or a polyester adhesive. As a type of the adhesive, a two-liquid type or a thermosetting type is preferred. Further, the adhesive is preferably one having excellent chemical resistance.
As a method of processing a copper foil into a mesh, a photoresist process may be mentioned. In the print process, the pattern of the openings is formed by screen printing. By the photoresist process, a photoresist material is formed on a copper foil by e.g. roll coating, spin coating, overall printing or transferring, followed by exposure, development and etching to form the pattern of the openings. As another method of forming the electroconductive mesh layer, a method of forming the pattern of the openings by the print process such as screen printing may be mentioned.
The electrode 90 is to electrically connect the electroconductive film 12 of the electroconductive laminate 10 to the electroconductive mesh layer of the electroconductive mesh film 80. The electrode 90 may, for example, be an electroconductive tape. By connecting the electroconductive film 12 of the electroconductive laminate 10 to the electroconductive mesh layer of the electroconductive mesh film 80, the whole sheet resistance can be further decreased, whereby the electromagnetic wave shielding effect will further improve.
As each of the protective plates 1 to 3 is disposed in front of a PDP, it preferably has a visible light transmittance of at least 40% so as not to prevent an image of the PDP from being seen. Further, the visible light reflectance is preferably less than 6%, particularly preferably less than 3%. Further, the transmittance at a wavelength of 850 nm is preferably at most 5%, particularly preferably at most 2%.
Each of the protective plates 1 to 3 according to the above-described first to third embodiments comprises a support 20, an electroconductive laminate 10 provided on the support 20, and an electrode 50 or an electrode 90 electrically in contact with an electroconductive film 12 of the electroconductive laminate 10. Further, as described above, the electroconductive film 12 of the electroconductive laminate 10 has a multilayer structure having a high refractive index layer 12a and a metal layer 12b alternately laminated from the substrate 11 side in a total layer number of (2n+1) (wherein n is an integer of from 1 to 12), the high refractive index layer 12a is a layer containing an inorganic compound having a refractive index of from 1.5 to 2.5, and the metal layer 12b contains silver. With such an electroconductive laminate 10, in which the refractive index of the high refractive index layer 12a in the electroconductive film 12 is from 1.5 to 2.5, a protective plate with a broad transmission/reflection band can be obtained.
Particularly when the high refractive index layer 12a is a zinc oxide-containing layer, since a high refractive index metal oxide is contained, the electroconductive laminate 10 can have a broad transmission/reflection band.
With such an electroconductive laminate 10, since the high refractive index layer 12a of the electroconductive film 12 contains a high refractive index metal oxide, the transmission/reflection band can be broadened. Thus, a protective plate with a broad transmission/reflection band can be obtained even without an increase in the lamination number. Further, by not increasing the lamination number, the visible light transparency can be increased. Further, since zinc oxide contained in the high refractive index layer 12a has crystallinity, the metal in the metal layer 12b formed on the high refractive index layer 12a is also likely to be crystallized and is less likely to undergo migration. As a result, the protective plate has high electrical conductivity and has high electromagnetic wave shielding properties.
The shape of the metal (such as pure metal or a silver alloy) in the metal layer in the present invention is considered to be an assembly of grains having a specific grain size. It is considered that if the grain size of the metal grains is too large, the area of contact among the grains tends to be small, whereby no desired electroconductive performance will be obtained. Further, if the grain size of the metal grains is too small, migration of the metal tends to occur, and as a result, the electroconductive performance will be low. Namely, in the present invention, since the metal grains have a proper grain size, the area of contact among grains can be made large and at the same time, migration of the metal can be suppressed, whereby the resistivity of the electroconductive film will be low. It is considered that the electroconductive laminate is excellent in the electroconductive performance resultingly. The grain size of the metal grains in the metal layer in the present invention is preferably from 5 to 35 nm, more preferably from 5 to 30 nm, furthermore preferably from 10 to 30 nm. Further, in the metal layer, preferably at least 70%, more preferably at least 80%, furthermore preferably at least 90%, of grains among all metal grains have grain sizes within the above range. The grain sizes of the grains are preferably uniform without small dispersion, whereby the area of contact among the grains can be made large. Further, each of the metal grains preferably comprises a metal single crystal.
In order that the metal grains in the metal layer have proper grain sizes, it is considered that the metal grains have a desired grain size, for example, by adjusting the grain size of grains of the inorganic compound in the high refractive index layer to be a base layer of the metal layer to be substantially the same as the desired metal grain size, and then laminating a metal on the high refractive index layer by a method such as sputtering. The grain size of the inorganic compound grains in the high refractive index layer in the present invention is preferably from 5 to 35 nm, more preferably from 5 to 30 nm, furthermore preferably from 10 to 30 nm. Further, in the high refractive index layer, at least 70%, more preferably at least 80%, furthermore preferably at least 90%, of grains among all inorganic compound grains have grain sizes within the above range.
Specifically for example, when a zinc oxide-containing layer is employed as the high refractive index layer, the grains in the zinc oxide-containing layer have a very preferred grain size, and accordingly, the metal grains in the metal layer laminated on the zinc oxide-containing layer also have a proper grain size (e.g. 20 nm). Thus, even if the total thickness of all metal layer(s) is thin, the resistivity of the electroconductive film can be made low. Thus, an electroconductive laminate having a high visible light transmittance and having excellent electrical conductivity i.e. electromagnetic wave shielding performance will be obtained.
Further, the protective plate of the present invention is not limited to the above-described embodiments. For example, in the above-described embodiment, films are laminated via an adhesive layer 70, but bonding by heat is possible without using an adhesive or a bonding agent in some cases.
Further, the protective plate of the present invention may have an antireflection film or an antireflection layer which is a low refractive index thin film as the case requires. The refractive index of the low refractive index thin film is preferably at most 1.7, more preferably from 1.3 to 1.5. The antireflection film is not particularly limited and one which is usually used for a protective plate may be used. Particularly when a fluororesin type film is used, more excellent antireflection properties will be achieved.
With respect to the antireflection layer, in order that the reflectance of the protective plate to be obtained is low and the preferred reflected color will be obtained, the wavelength at which the reflectance of the antireflection layer by itself in the visible range is minimum, is preferably from 500 to 600 nm, particularly preferably from 530 to 590 nm.
Further, the protective plate may be made to have near infrared shielding function. As a method to make the protective plate have near infrared shielding function, a method of using a near infrared shielding film, a method of using a near infrared absorbing substrate, a method of using an adhesive having a near infrared absorber incorporated therein at the time of laminating films, a method of adding a near infrared absorber to an antireflection resin film or the like to make the film or the like have near infrared absorbing function, or a method of using an electroconductive film having near infrared reflection function may, for example, be mentioned.
Now, the present invention will be described in further detail with reference to Examples. However, it should be understood that the present invention is by no means restricted to such specific Examples.
A high purity zinc oxide powder and a high purity titanium oxide powder were mixed in a ball mill so that the mass ratio of zinc oxide:titanium oxide=80:20 to prepare a powder mixture. The powder mixture was put in a carbon mold for hot pressing, and hot pressing was carried out under conditions where the mold was held in an argon gas atmosphere at 1,100°0 C. for one hour to obtain a mixed target of zinc oxide and titanium oxide. The pressure of the hot press was 100 kg/cm2.
An electroconductive laminate shown in
First, dry cleaning by ion beams was carried out as follows for the purpose of cleaning the surface of a PET film with a thickness of 100 μm as a substrate 11. First, about 30% of oxygen was mixed with an argon gas, and an electric power of 100 W was charged. Argon ions and oxygen ions ionized by an ion beam source were applied to the surface of the substrate.
Then, on the surface of the substrate to which the dry cleaning treatment was applied, pulse sputtering was carried out using the mixed target of zinc oxide and titanium oxide (zinc oxide:titanium oxide=80:20 (mass ratio)) by introducing a gas mixture of an argon gas and 10 vol % of an oxygen gas under a pressure of 0.73 Pa at a frequency of 50 kHz at an electric power density of 4.5 W/cm2 at a reverse pulse duration of 2 μsec to form a high refractive index layer 12a with a thickness of 35 nm. As measured by Rutherford backscattering spectrometry, in the high refractive index layer 12a, zinc occupied 80 at % and titanium occupied 20 at % based on the total amount (100 at %) of zinc and titanium. Further, in the high refractive index layer 12a, zinc occupied 34.3 at %, titanium occupied 8.0 at % and oxygen occupied 57.7 at % based on all atoms (100 at %). Converted to ZnO and TiO2, the total amount of oxides was 96.7 mass %.
Then, pulse sputtering was carried out using a silver alloy target doped with 1.0 mass % of gold by introducing an argon gas under a pressure of 0.73 Pa at a frequency of 50 kHz at an electric power density of 2.3 W/cm2 with a reverse pulse duration of 10 μsec to form a metal layer 12b with a thickness of 10 nm.
Then, pulse sputtering was carried out using a zinc oxide target doped with 5 mass % of alumina by introducing an argon gas under a pressure of 0.45 Pa at a frequency of 50 kHz at an electric power density of 2.7 W/cm2 with a reverse pulse duration of 2 μsec to form a zinc oxide film (barrier layer 12c) with a thickness of 5 nm.
Then, pulse sputtering was carried out by using the mixed target of zinc oxide and titanium oxide (zinc oxide:titanium oxide=80:20 (mass ratio)) by introducing a gas mixture of an argon gas and 10 vol % of an oxygen gas under a pressure of 0.73 Pa at a frequency of 50 kHz at an electric power density of 4.5 W/cm2 with a reverse pulse duration of 2 μsec to form a zinc oxide/titanium oxide mixed film with a thickness of 65 nm. A high refractive index layer 12a was formed by the zinc oxide film and the zinc oxide/titanium oxide mixed film thus obtained.
Then, pulse sputtering was carried out using a silver alloy target doped with 1.0 mass % of gold by introducing an argon gas under a pressure of 0.73 Pa at a frequency of 50 kHz at an electric power density of 2.3 W/cm2 with a reverse pulse duration of 10 μsec to form a metal layer 12b with a thickness of 14 nm.
Then, pulse sputtering was carried out using a zinc oxide target doped with 5 mass % of alumina by introducing an argon gas under a pressure of 0.45 Pa at a frequency of 50 kHz at an electric power density of 2.7 W/cm2 with a reverse pulse duration of 2 μsec to form a zinc oxide film (barrier layer 12c) with a thickness of 5 nm.
Then, pulse sputtering was carried out by using the mixed target of zinc oxide and titanium oxide (zinc oxide:titanium oxide=80:20 (mass ratio)) by introducing a gas mixture of an argon gas and 10 vol % of an oxygen gas under a pressure of 0.73 Pa at a frequency of 50 kHz at an electric power density of 4.5 W/cm2 with a reverse pulse duration of 2 μsec to form a zinc oxide/titanium oxide mixed film with a thickness of 65 nm. A high refractive index layer 12a was formed by the zinc oxide film and the zinc oxide/titanium oxide mixed film thus obtained.
Then, pulse sputtering was carried out using a silver alloy target doped with 1.0 mass % of gold by introducing an argon gas under a pressure of 0.73 Pa at a frequency of 50 kHz at an electric power density of 2.3 W/cm2 with a reverse pulse duration of 10 μsec to form a metal layer 12b with a thickness of 14 nm.
Then, pulse sputtering was carried out using a zinc oxide target doped with 5 mass % of alumina by introducing an argon gas under a pressure of 0.45 Pa at a frequency of 50 kHz at an electric power density of 2.7 W/cm2 with a reverse pulse duration of 2 μsec to form a zinc oxide film (barrier layer 12c) with a thickness of 5 nm.
Then, pulse sputtering was carried out by using the mixed target of zinc oxide and titanium oxide (zinc oxide:titanium oxide=80:20 (mass ratio)) by introducing a gas mixture of an argon gas and 10 vol % of an oxygen gas under a pressure of 0.73 Pa at a frequency of 50 kHz at an electric power density of 4.5 W/cm2 with a reverse pulse duration of 2 μsec to form a zinc oxide/titanium oxide mixed film with a thickness of 65 nm. A high refractive index layer 12a was formed by the zinc oxide film and the zinc oxide/titanium oxide mixed film thus obtained.
Then, pulse sputtering was carried out using a silver alloy target doped with 1.0 mass % of gold by introducing an argon gas under a pressure of 0.73 Pa at a frequency of 50 kHz at an electric power density of 2.3 W/cm2 with a reverse pulse duration of 10 μsec to form a metal layer 12b with a thickness of 10 nm.
Then, pulse sputtering was carried out using a zinc oxide target doped with 5 mass % of alumina by introducing an argon gas under a pressure of 0.45 Pa at a frequency of 50 kHz at an electric power density of 2.7 W/cm2 with a reverse pulse duration of 2 μsec to form a zinc oxide film (barrier layer 12c) with a thickness of 5 nm.
Then, pulse sputtering was carried out by using the mixed target of zinc oxide and titanium oxide (zinc oxide:titanium oxide=80:20 (mass ratio)) by introducing a gas mixture of an argon gas and 10 vol % of an oxygen gas under a pressure of 0.73 Pa at a frequency of 50 kHz at an electric power density of 4.5 W/cm2 with a reverse pulse duration of 2 μsec to form a zinc oxide/titanium oxide mixed film with a thickness of 30 nm. A high refractive index layer 12a was formed by the zinc oxide film and the zinc oxide/titanium oxide mixed film thus obtained.
Then, on the uppermost high refractive index layer 12a, pulse sputtering was carried out using an ITO target (indium:tin=90:10 (mass ratio)) by introducing a gas mixture of argon and 5 vol % of an oxygen gas, under a pressure of 0.35 Pa at a frequency of 100 kHz at an electric power density of 1.3 W/cm2 with a reverse pulse duration of 1 μsec to form an ITO film with a thickness of 5 nm as a protective film 12d.
In such a manner, an electroconductive laminate 10 comprising the high refractive index layers 12a containing titanium oxide and zinc oxide as the main components and the metal layers 12b made of a gold/silver alloy alternately laminated on the substrate 11, in a number of the high refractive index layers 12a of 5 and a number of the metal layers 12b of 4, was obtained.
Of the electroconductive laminate in Example 1, the luminous transmittance (stimulus Y stipulated in JIS Z8701) measured by color analyzer TC1800 manufactured by Tokyo Denshoku co., Ltd. was 71.40%, and the luminous reflectance was 6.50%. Further, the transmittance at a wavelength of 850 nm was 0.96%.
Further, the resistance (R) was 0.942Ω as a result of measurement (electric current applied: 10 mA) in accordance with “Testing method for resistivity of conductive plastics with a four-point probe array” in JIS K7194 using Loresta EP manufactured by DIA INSTRUMENTS CO., LTD. The resistivity was obtained from the formula :resistivity=R×t, where t (thickness of a sample)=48 nm (total thickness of the metal layers). That is, the resistivity of the electroconductive film was 4.5 μΩcm. The results are shown in Table 1.
The grain sizes of metal grains in the metal layer 12b are actually measured in a SEM photograph (magnification: 50,000 times), whereupon at least 80% of grains have grains sizes within a range of from 10 to 30 nm.
Then, an adhesive layer was provided on the surface on the substrate 11 side of the electroconductive laminate 10.
Using the electroconductive laminate 10, a protective plate 1 shown in
A glass plate as a support 20 was cut into a predetermined size, chamfered and cleaned, and an ink for a color ceramic layer was applied at the periphery of the glass plate by screen printing and sufficiently dried to form a color ceramic layer 30. Then, as the glass tempering treatment, this glass plate was heated to 660°0 C. and then air cooled to apply glass tempering treatment.
The above electroconductive laminate 10 was bonded on the color ceramic layer 30 side of the glass plate via an adhesive layer 70. Then, for the propose of protecting the electroconductive laminate 10, a protective film 60 (ARCTOP CP21, tradename, manufactured by Asahi Glass Company, Limited) was bonded on the electroconductive laminate 10 via an adhesive layer 70. Here, for the purpose of forming electrodes, a portion (electrode formation portion) on which no protective film was bonded was left at the peripheral portion.
Then, on the electrode formation portion, a silver paste (AF4810 manufactured by TAIYO INK MFG. CO., LTD.) was applied by screen printing with a nylon mesh #180 with an emulsion thickness of 20 μm, followed by drying in a circulating hot air oven at 85° C. for 35 minutes to form an electrode 50.
Then, on the back side of the glass plate (a side opposite to the side where the electroconductive laminate 10 was bonded), a polyurethane flexible resin film (ARCTOP URP2199, tradename, manufactured by Asahi Glass Company, Limited) as a shatterproof film 40 was bonded via an adhesive layer 70. This polyurethane flexible resin film also has an antireflection function. Usually, a coloring agent is added to this polyurethane flexible resin film for color tone correction and Ne cut to improve color reproducibility, but in this Example, the resin film was not colored since no evaluation of the color tone correction and the Ne cut was carried out.
Of the protective plate in Example 1, the luminous transmittance (stimulus Y stipulated in JIS Z8701) measured by color analyzer TC1800 manufactured by Tokyo Denshoku co., Ltd. was 71.5%, and the luminous reflectance was 1.92%. Further, the transmittance at a wavelength of 850 nm was 0.76%. The results are shown in Table 2. The reflection spectrum and the transmission spectrum of this protective plate are shown in
An electroconductive laminate and a protective plate were prepared in the same manner as in Example 1 except that a mixed target of zinc oxide and titanium oxide in a mass ratio of zinc oxide:titanium oxide=50:50 was used. In the high refractive index layer 12a in Example 2, zinc occupied 50 at % and titanium occupied 50 at % based on the total amount (100 at %) of zinc and titanium. Further, in the high refractive index layer 12a, zinc occupied 23.6 at %, titanium occupied 16.7 at % and oxygen occupied 59.7 at % based on all atoms (100 at %). Converted to ZnO and TiO2, the total amount of oxides was 97.7 mass %.
Of the electroconductive laminate in Example 2, the luminous transmittance (stimulus Y stipulated in JIS Z8701) measured by color analyzer TC1800 manufactured by Tokyo Denshoku co., Ltd. was 62.94%, and the luminous reflectance was 4.96%. Further, the transmittance at a wavelength of 850 nm was 0.69%.
Further, the resistance R was 0.965 as a result of measurement (electric current applied: 10 mA) in accordance with “Testing method for resistivity of conductive plastics with a four-point probe array” in JIS K7194 using Loresta EP manufactured by DIA INSTRUMENTS CO., LTD., and the resistivity of the electroconductive film was 4.6 μΩcm as obtained in the same manner as in Example 1. The results are shown in Table 1.
The grain sizes of metal grains in the metal layer 12b are actually measured in a SEM photograph (magnification: 50,000 times), whereupon it is confirmed that at least 80% of grains have grains sizes within a range of from 10 to 30 nm.
Of the protective plate in Example 2, the luminous transmittance (stimulus Y stipulated in JIS Z8701) measured by color analyzer TC1800 manufactured by Tokyo Denshoku co., Ltd. was 62.6%, and the luminous reflectance was 1.92%. Further, the transmittance at a wavelength of 850 nm was 0.51%. The results are shown in Table 2. The reflection spectrum and the transmission spectrum of this protective plate are shown in
An electroconductive laminate and a protective plate were obtained in the same manner as in Example 1 except that the electroconductive laminate was prepared as follows.
First, dry cleaning by ion beams was carried out as follows for the purpose of cleaning the surface of a PET film with a thickness of 100 μm as a substrate. First, about 30% of oxygen was mixed with an argon gas, and an electric power of 100 W was charged, and argon ions and oxygen ions ionized by an ion beam source were applied to the surface of the substrate.
Then, on the surface of the substrate to which dry cleaning treatment was applied, pulse sputtering was carried out using a zinc oxide target doped with 5 mass % of alumina by introducing a gas mixture of an argon gas and 3 vol % of an oxygen gas, under a pressure of 0.35 Pa at a frequency of 100 kHz at an electric power density of 5.8 W/cm2 with a reverse pulse duration of 1 μsec to form an oxide layer with a thickness of 40 nm.
Then, pulse sputtering was carried out using a silver alloy target doped with 1.0 mass % of gold by introducing an argon gas, under a pressure of 0.5 Pa at a frequency of 100 kHz at an electric power density of 0.6 W/cm2 with a reverse pulse duration of 5 μsec to form a metal layer with a thickness of 9 nm.
Then, pulse sputtering was carried out using a zinc oxide target doped with 5 mass % of alumina by introducing a gas mixture of an argon gas and 3 vol % of an oxygen gas, under a pressure of 0.35 Pa at a frequency of 100 kHz at an electric power density of 5.8 W/cm2 with a reverse pulse duration of 1 μsec to form an oxide layer with a thickness of 80 nm.
Then, pulse sputtering was carried out using a silver alloy target doped with 1.0 mass % of gold by introducing an argon gas, under a pressure of 0.5 Pa at a frequency of 100 kHz at an electric power density of 0.9 W/cm2 with a reverse pulse duration of 5 μsec to form a metal layer with a thickness of 11 nm.
Then, pulse sputtering was carried out using a zinc oxide target doped with 5 mass % of alumina by introducing a gas mixture of argon and 3% of an oxygen gas, under a pressure of 0.35 Pa at a frequency of 100 kHz at an electric power density of 5.8 W/cm2 with a reverse pulse duration of 1 μsec to form an oxide layer with a thickness of 80 nm.
Then, pulse sputtering was carried out using a silver alloy target doped with 1.0 mass % of gold by introducing an argon gas, under a pressure of 0.5 Pa at a frequency of 100 kHz at an electric power density of 1.0 W/cm2 with a reverse pulse duration of 5 μsec to form a metal layer with a thickness of 13 nm.
Then, pulse sputtering was carried out using a zinc oxide target doped with 5 mass % of alumina by introducing a gas mixture of argon and 3% of an oxygen gas, under a pressure of 0.35 Pa at a frequency of 100 kHz at an electric power density of 5.8 W/cm2 with a reverse pulse duration of 1 μsec to form an oxide layer with a thickness of 80 nm.
Then, pulse sputtering was carried out using a silver alloy target doped with 1.0 mass % of gold by introducing an argon gas, under a pressure of 0.5 Pa at a frequency of 100 kHz at an electric power density of 1.0 W/cm2 with a reverse pulse duration of 5 μsec to form a metal layer with a thickness of 13 nm.
Then, pulse sputtering was carried out using a zinc oxide target doped with 5 mass % of alumina by introducing a gas mixture of argon and 3% of an oxygen gas, under a pressure of 0.35 Pa at a frequency of 100 kHz at an electric power density of 5.8 W/cm2 with a reverse pulse duration of 1 μsec to form an oxide layer with a thickness of 80 nm.
Then, pulse sputtering was carried out using a silver alloy target doped with 1.0 mass% of gold by introducing an argon gas, under a pressure of 0.5 Pa at a frequency of 100 kHz at an electric power density of 0.9 W/cm2 with a reverse pulse duration of 5 μsec to form a metal layer with a thickness of 11 nm.
Then, pulse sputtering was carried out using a zinc oxide target doped with 5 mass % of alumina by introducing a gas mixture of argon and 3% of an oxygen gas, under a pressure of 0.35 Pa at a frequency of 100 kHz at an electric power density of 5.8 W/cm2 with a reverse pulse duration of 1 μsec to form an oxide layer with a thickness of 80 nm.
Then, pulse sputtering was carried out using a silver alloy target doped with 1.0 mass % of gold by introducing an argon gas, under a pressure of 0.5 Pa at a frequency of 100 kHz at an electric power density of 0.6 W/cm2 with a reverse pulse duration of 5 μsec to form a metal layer with a thickness of 9 nm.
Then, pulse sputtering was carried out using a zinc oxide target doped with 5 mass % of alumina by introducing a gas mixture of argon and 3 % of an oxygen gas, under a pressure of 0.35 Pa at a frequency of 100 kHz at an electric power density of 5.2 W/cm2 with a reverse pulse duration of 1 μsec to form an oxide layer with a thickness of 35 nm.
Then, on the uppermost oxide layer, pulse sputtering was carried out using an ITO target (indium:tin=90:10, mass ratio) by introducing a gas mixture of argon and 5 vol % of an oxygen gas, under a pressure of 0.35 Pa at a frequency of 100 kHz at an electric power density of 0.5 W/cm2 with a reverse pulse duration of 1 μsec to form an ITO film with a thickness of 5 nm as a protective film.
In such a manner, an electroconductive laminate comprising the oxide layers made of AZO and the metal layers made of a gold/silver alloy alternately laminated on the substrate, in a number of the oxide layers of 7 and a number of the metal layers of 6, was obtained.
Of the electroconductive laminate in Comparative Example 1, the luminous transmittance (stimulus Y stipulated in JIS Z8701) measured by color analyzer TC1800 manufactured by Tokyo Denshoku co., Ltd. was 59.75%, and the luminous reflectance was 5.79%. Further, the transmittance at a wavelength of 850 nm was 0.5%.
Further, the resistance R was 0.957 as a result of measurement (electric current applied: 10 mA) in accordance with “Testing method for resistivity of conductive plastics with a four-point probe array” in JIS K7194 using Loresta EP manufactured by DIA INSTRUMENTS CO., LTD., and the resistivity of the electroconductive film was 6.3 μΩcm as obtained in the same manner as in Example 1. The results are shown in Table 1.
The grain sizes of metal grains in the metal layer are actually measured in a SEM photograph (magnification: 50,000 times), whereupon it is confirmed that grains have significantly non-uniform grain sizes of from 30 to 60 nm.
Of the protective plate in Comparative Example 1, the luminous transmittance (stimulus Y stipulated in JIS Z8701) measured by color analyzer TC1800 manufactured by Tokyo Denshoku co., Ltd. was 60.3%, and the luminous reflectance was 1.98%. Further, the transmittance at a wavelength of 850 nm was 0.28%. The results are shown in Table 2. The reflection spectrum and the transmission spectrum are shown in
An electroconductive laminate and a protective plate were obtained in the same manner as in Example 1 except that the electroconductive laminate was prepared as follows.
First, dry cleaning by ion beams was carried out as follows for the purpose of cleaning the surface of a PET film as a substrate. First, about 30% of oxygen was mixed with an argon gas, and an electric power of 100 W was charged. Argon ions and oxygen ions ionized by an ion beam source were applied to the surface of the substrate.
Then, on the surface of the substrate to which dry cleaning treatment was applied, pulse sputtering was carried out using a zinc oxide target doped with 5 mass % of alumina by introducing a gas mixture of an argon gas and 3 vol % of an oxygen gas, under a pressure of 0.35 Pa at a frequency of 100 kHz at an electric power density of 5.7 W/cm2 with a reverse pulse duration of 1 μsec to form an oxide layer with a thickness of 40 nm.
Then, pulse sputtering was carried out using a silver alloy target doped with 1.0 mass % of gold by introducing an argon gas, under a pressure of 0.5 Pa at a frequency of 100 kHz at an electric power density of 0.6 W/cm2 with a reverse pulse duration of 5 μsec to form a metal layer with a thickness of 14 nm.
Then, pulse sputtering was carried out using a zinc oxide target doped with 5 mass % of alumina by introducing a gas mixture of an argon gas and 3 vol % of an oxygen gas, under a pressure of 0.35 Pa at a frequency of 100 kHz at an electric power density of 4.7 W/cm2 with a reverse pulse duration of 1 μsec to form an oxide layer with a thickness of 80 nm.
Then, pulse sputtering was carried out using a silver alloy target doped with 1.0 mass % of gold by introducing an argon gas, under a pressure of 0.5 Pa at a frequency of 100 kHz at an electric power density of 0.9 W/cm2 with a reverse pulse duration of 5 μsec to form a metal layer with a thickness of 17 nm.
Then, pulse sputtering was carried out using a zinc oxide target doped with 5 mass % of alumina by introducing a gas mixture of argon and 3% of an oxygen gas, under a pressure of 0.35 Pa at a frequency of 100 kHz at an electric power density of 4.7 W/cm2 with a reverse pulse duration of 1 μsec to form an oxide layer with a thickness of 80 nm.
Then, pulse sputtering was carried out using a silver alloy target doped with 1.0 mass % of gold by introducing an argon gas, under a pressure of 0.5 Pa at a frequency of 100 kHz at an electric power density of 1.0 W/cm2 with a reverse pulse duration of 5 μsec to form a metal layer with a thickness of 17 nm.
Then, pulse sputtering was carried out using a zinc oxide target doped with 5 mass % of alumina by introducing a gas mixture of argon and 3% of an oxygen gas, under a pressure of 0.35 Pa at a frequency of 100 kHz at an electric power density of 4.7 W/cm2 with a reverse pulse duration of 1 μsec to form an oxide layer with a thickness of 80 nm.
Then, pulse sputtering was carried out using a silver alloy target doped with 1.0 mass % of gold by introducing an argon gas, under a pressure of 0.5 Pa at a frequency of 100 kHz at an electric power density of 0.6 W/cm2 with a reverse pulse duration of 5 μsec to form a metal layer with a thickness of 14 nm.
Then, pulse sputtering was carried out using a zinc oxide target doped with 5 mass % of alumina by introducing a gas mixture of argon and 3% of an oxygen gas, under a pressure of 0.35 Pa at a frequency of 100 kHz at an electric power density of 5.2 W/cm2 with a reverse pulse duration of 1 μsec to form an oxide layer with a thickness of 35 nm.
Then, on the uppermost oxide layer, pulse sputtering was carried out using an ITO target (indium:tin=90:10) by introducing a gas mixture of argon and 3 vol % of an oxygen gas, under a pressure of 0.35 Pa at a frequency of 100 kHz at an electric power density of 1.0 W/cm2 with a reverse pulse duration of 1 μsec to form an ITO film with a thickness of 5 nm as a protective film.
In such a manner, an electroconductive laminate comprising the oxide layers made of AZO and the metal layers made of a gold/silver alloy alternately laminated on the substrate, in a number of the oxide layers of 5 and a number of the metal layers of 4, was obtained.
Of the electroconductive laminate in Comparative Example 2, the luminous transmittance (stimulus Y stipulated in JIS Z8701) measured by color analyzer is TC1800 manufactured by Tokyo Denshoku co., Ltd. was 60.9%, and the luminous reflectance was 6.85%. Further, the transmittance at a wavelength of 850 nm was 0.40%.
Further, the resistance R was 0.981 as a result of measurement (electric current applied: 10 mA) in accordance with “Testing method for resistivity of conductive plastics with a four-point probe array” in JIS K7194 using Loresta EP manufactured by DIA INSTRUMENTS CO., LTD., and the resistivity of the electroconductive film was 6.1 μΩcm as obtained in the same manner as in Example 1. The results are shown in Table 1.
The grain sizes of metal grains in the metal layer are actually measured in a SEM photograph (magnification: 50,000 times), whereupon it is confirmed that grains have significantly non-uniform grain sizes of from 30 to 60 nm.
Of the protective plate in Comparative Example 2 , the luminous transmittance (stimulus Y stipulated in JIS Z8701) measured by color analyzer TC1800 manufactured by Tokyo Denshoku co., Ltd. was 61.8%, and the luminous reflectance was 4.22%. Further, the transmittance at a wavelength of 850 nm was 0.27%. The results are shown in Table 2. The reflection spectrum and the transmission spectrum of this protective plate are shown in
The protective plate in Example 1 wherein the high refractive index layer contains zinc oxide and titanium oxide as the main components and the metal layer contains a silver alloy as the main component, had a broad transmission/reflection band and was excellent in electrical conductivity and visible light transparency, even though the number of the metal layers was 4.
On the other hand, the protective plate in Comparative Example 1 wherein the oxide layer contains AZO as the main component and the number of the metal layers is 6, had a low visible light transparency.
The protective plate in Comparative Example 2 wherein the oxide layer contains AZO as the main component and the number of the metal layers is 4, had a narrow transmission/reflection band.
An electroconductive laminate shown in
First, dry cleaning by ion beams was carried out as follows for the purpose of cleaning the surface of a PET film with a thickness of 100 μm as a substrate 11. First, about 30% of oxygen was mixed with an argon gas, and an electric power of 100 W was charged. Argon ions and oxygen ions ionized by an ion beam source were applied to the surface of the substrate.
Then, on the surface of the substrate to which the dry cleaning treatment was applied, pulse sputtering was carried out using a mixed target of zinc oxide and titanium oxide (zinc oxide:titanium oxide=85:15 (mass ratio)) by introducing a gas mixture of an argon gas and 15 vol % of an oxygen gas under a pressure of 0.73 Pa at a frequency of 50 kHz at an electric power density of 4.5 W/cm2 at a reverse pulse duration of 2 μsec to form a high refractive index layer 12a with a thickness of 40 nm. As measured by Rutherford backscattering spectrometry, in the high refractive index layer 12a, zinc occupied 85 at% and titanium occupied 15 at % based on the total amount (100 at %) of zinc and titanium. Further, in the high refractive index layer 12a, zinc occupied 37.0 at %, titanium occupied 6.2 at % and oxygen occupied 56.8 at % based on all atoms (100 at %). Converted to ZnO and TiO2, the total amount of oxides was 96.7 mass %.
Then, pulse sputtering was carried out using a silver alloy target doped with 1.0 mass % of gold by introducing an argon gas under a pressure of 0.73 Pa at a frequency of 50 kHz at an electric power density of 2.3 W/cm2 with a reverse pulse duration of 10 μsec to form a metal layer 12b with a thickness of 10 nm.
Then, pulse sputtering was carried out using a mixed target of zinc oxide and titanium oxide (zinc oxide:titanium oxide=85:15 (mass ratio)) by introducing a gas mixture of an argon gas and 15 vol% of an oxygen gas, under a pressure of 0.73 Pa at a frequency of 50 kHz at an electric power density of 4.5 W/cm2 with a reverse pulse duration of 2 μsec to form a high refractive index layer 12a with a thickness of 80 nm.
Then, pulse sputtering was carried out using a silver alloy target doped with 1.0 mass % of gold by introducing an argon gas under a pressure of 0.73 Pa at a frequency of 50 kHz at an electric power density of 2.3 W/cm2 with a reverse pulse duration of 10 μsec to form a metal layer 12b with a thickness of 14 nm.
Then, pulse sputtering was carried out using a mixed target of zinc oxide and titanium oxide (zinc oxide:titanium oxide=85:15 (mass ratio)) by introducing a gas mixture of an argon gas and 15 vol% of an oxygen gas, under a pressure of 0.73 Pa at a frequency of 50 kHz at an electric power density of 4.5 W/cm2 with a reverse pulse duration of 2 μsec to form a high refractive index layer 12a with a thickness of 80 nm.
Then, pulse sputtering was carried out using a silver alloy target doped with 1.0 mass % of gold by introducing an argon gas under a pressure of 0.73 Pa at a frequency of 50 kHz at an electric power density of 2.3 W/cm2 with a reverse pulse duration of 10 μsec to form a metal layer 12b with a thickness of 14 nm.
Then, pulse sputtering was carried out using a mixed target of zinc oxide and titanium oxide (zinc oxide:titanium oxide=85:15 (mass ratio)) by introducing a gas mixture of an argon gas and 15 vol % of an oxygen gas, under a pressure of 0.73 Pa at a frequency of 50 kHz at an electric power density of 4.5 W/cm2 with a reverse pulse duration of 2 μsec to form a high refractive index layer 12a with a thickness of 80 nm.
Then, pulse sputtering was carried out using a silver alloy target doped with 1.0 mass % of gold by introducing an argon gas under a pressure of 0.73 Pa at a frequency of 50 kHz at an electric power density of 2.3 W/cm2 with a reverse pulse duration of 10 μsec to form a metal layer 12b with a thickness of 10 nm.
Then, pulse sputtering was carried out using a mixed target of zinc oxide and titanium oxide (zinc oxide:titanium oxide=85:15 (mass ratio)) by introducing a gas mixture of an argon gas and 15 vol % of an oxygen gas, under a pressure of 0.73 Pa at a frequency of 50 kHz at an electric power density of 4.5 W/cm2 with a reverse pulse duration of 2 μsec to form a high refractive index layer 12a with a thickness of 35 nm.
Then, on the uppermost high refractive index layer 12a, pulse sputtering was carried out using an ITO target (indium:tin=90:10 (mass ratio)) by introducing a gas mixture of argon and 5 vol % of an oxygen gas, under a pressure of 0.35 Pa at a frequency of 100 kHz at an electric power density of 1.3 W/cm2 with a reverse pulse duration of 1 μsec to form an ITO film with a thickness of 5 nm as a protective film 12d.
In such a manner, an electroconductive laminate comprising the high refractive index layers 12a containing titanium oxide and zinc oxide as the main components and the metal layers 12b made of a gold/silver alloy alternately laminated on the substrate 11, in a number of the high refractive index layers of 5 and a number of the metal layers of 4, was obtained.
Of the electroconductive laminate in Example 3, the luminous transmittance (stimulus Y stipulated in JIS Z8701) measured by color analyzer TC1800 manufactured by Tokyo Denshoku co., Ltd. was 67.7%, and the luminous reflectance was 5.88%. Further, the transmittance at a wavelength of 850 nm was 0.78%.
Further, the resistance R was 0.968 as a result of measurement (electric current applied: 10 mA) in accordance with “Testing method for resistivity of conductive plastics with a four-point probe array” in JIS K7194 using Loresta EP manufactured by DIA INSTRUMENTS CO., LTD., and the resistivity of the electroconductive film was 4.7 μΩcm as obtained in the same manner as in Example 1. The results are shown in Table 1.
The grain sizes of metal grains in the metal layer 12b are actually measured in a SEM photograph (magnification: 50,000 times), whereupon it is confirmed that at least 80% of grains have grain sizes of from 10 to 30 nm.
Using this electroconductive laminate 10, a protective plate 1 shown in
Of the protective plate in Example 3, the luminous transmittance (stimulus Y stipulated in JIS Z8701) measured by color analyzer TC1800 manufactured by Tokyo Denshoku co., Ltd. was 68.0%, and the luminous reflectance was 2.52%. Further, the transmittance at a wavelength of 850 nm was 0.68%. The results are shown in Table 2.
The electroconductive laminate of the present invention has excellent electrical conductivity (electromagnetic wave shielding properties), visible light transparency and near infrared shielding properties, and when laminated on a support, provides a broad transmission/reflection band, and is thereby useful as an electromagnetic wave shielding film and a protective plate for a plasma display. Further, the electroconductive laminate of the present invention can be used as a transparent electrode of e.g. a liquid crystal display device, a windshield for an automobile, a heat mirror or electromagnetic wave shielding window glass.
The entire disclosure of Japanese Patent Application No. 2006-151790 filed on May 31, 2006 including specification, claims, drawings and summary is incorporated herein by reference in its entirety.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2006-151790 | May 2006 | JP | national |
