Electrode cover for a plasma processing apparatus

Information

  • Patent Grant
  • D840364
  • Patent Number
    D840,364
  • Date Filed
    Tuesday, July 18, 2017
    7 years ago
  • Date Issued
    Tuesday, February 12, 2019
    6 years ago
  • US Classifications
    Field of Search
    • US
    • D13 158-177
    • D13 182
    • D13 184
    • 204 286100
    • 204 297100
    • 205 118000
    • 205 123000
    • 200 0010R0
    • 200 0050R0
    • 200 0520R0
    • 200 315000
    • 200 310000
    • 200 0060A0
    • 200 302100
    • 200 308000
    • 200 314000
    • 200 317000
    • 200 0110R0
    • 200 0160B0
    • CPC
    • C25D17/10
    • C25D17/12
    • C25D17/14
    • C25D17/06
    • C25D17/08
    • C25D7/12
    • C25D7/10
    • H01L21/283
    • H01H9/02
    • H01H9/0214
    • H01H9/04
    • H01H9/161
    • H01H13/04
    • H01H13/06
    • H01H13/023
    • H01H21/08
    • H01H19/025
  • International Classifications
    • 1303
    • Term of Grant
      15Years
      Disclaimer
      This patent is subject to a terminal disclaimer.
Abstract
Description

This application contains subject matter related to the following co-pending U.S. design patent applications:


Application Ser. No. 29/610,995, filed herewith and entitled “Electrode Cover for a Plasma Processing Apparatus”;


Application Ser. No. 29/610,998, filed herewith and entitled “Ring for a Plasma Processing Apparatus”;


Application Ser. No. 29/610,999, filed herewith and entitled “Cover Ring for a Plasma Processing Apparatus”; and


Application Ser. No. 29/611,001, filed herewith and entitled “Discharge Chamber for a Plasma Processing Apparatus”.



FIG. 1 is a front, top and right side perspective view of an electrode cover for a plasma processing apparatus, showing our new design;



FIG. 2 is a front, bottom and right side perspective view thereof;



FIG. 3 is a front elevational view thereof;



FIG. 4 is a rear elevational view thereof;



FIG. 5 is a right side elevational view thereof;



FIG. 6 is a left side elevational view thereof;



FIG. 7 is a top plan view thereof;



FIG. 8 is a bottom plan view thereof;



FIG. 9 is a cross-sectional view taken along line 9-9 of FIG. 3; and,



FIG. 10 is an enlarged view of the portion shown in BOX 10 in FIG. 9.


The box labeled FIG. 10 in FIG. 9 is shown in broken lines and forms no part of the claimed design.


Claims
  • The ornamental design for an electrode cover for a plasma processing apparatus, as shown and described.
Priority Claims (1)
Number Date Country Kind
2017-001753 Jan 2017 JP national
US Referenced Citations (27)
Number Name Date Kind
D404372 Ishii Jan 1999 S
D494551 Doba Aug 2004 S
D557226 Uchino et al. Dec 2007 S
D557425 Nakamura et al. Dec 2007 S
D559993 Nagakubo Jan 2008 S
D559994 Nagakubo et al. Jan 2008 S
D699199 Kuwabara Feb 2014 S
D699200 Nagakubo Feb 2014 S
D709536 Yoshimura Jul 2014 S
D709537 Kuwabara Jul 2014 S
D709538 Mizukami Jul 2014 S
D709539 Kuwabara Jul 2014 S
D717746 Lau Nov 2014 S
D729730 Gillespie-Brown May 2015 S
D770992 Tauchi et al. Nov 2016 S
D783922 Kirkland Apr 2017 S
D789888 Jang Jun 2017 S
D797691 Joubert Sep 2017 S
D803917 Harada Nov 2017 S
D804556 Harada Dec 2017 S
D810705 Krishnan Feb 2018 S
D813181 Okajima Mar 2018 S
20040077167 Willis Apr 2004 A1
20090050272 Rosenberg Feb 2009 A1
20120263569 Priddy Oct 2012 A1
20150024330 Tian Jan 2015 A1
20160002788 Nal Jan 2016 A1
Foreign Referenced Citations (3)
Number Date Country
D1210213 Jun 2004 JP
D1361441 Jun 2009 JP
D1551512 Jun 2014 JP
Non-Patent Literature Citations (4)
Entry
Ichino et al., Design U.S. Appl. No. 29/610,995, filed Jul. 18, 2017.
Ichino et al., Design U.S. Appl. No. 29/610,998, filed Jul. 18, 2017.
Ichino et al., Design U.S. Appl. No. 29/610,999, filed Jul. 18, 2017.
Nunomura et al., Design U.S. Appl. No. 29/611,001, filed Jul. 18, 2017.