This is a divisional of application Ser. No. 09/420,701 filed Oct. 19, 1999.
| Number | Name | Date | Kind |
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| 3550257 | Brown et al. | Dec 1970 | A |
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| 4215682 | Kubik et al. | Aug 1980 | A |
| 4233029 | Columbus | Nov 1980 | A |
| 4234324 | Dodge, Jr. | Nov 1980 | A |
| 4271119 | Columbus | Jun 1981 | A |
| 4277966 | Rambauske | Jul 1981 | A |
| RE30782 | van Turnhout | Oct 1981 | E |
| 4313741 | Masuda et al. | Feb 1982 | A |
| 4317661 | Sasaoka et al. | Mar 1982 | A |
| 4323374 | Shinagawa et al. | Apr 1982 | A |
| RE31285 | van Turnhout et al. | Jun 1983 | E |
| 4392362 | Little | Jul 1983 | A |
| 4413407 | Columbus | Nov 1983 | A |
| 4509958 | Masuda et al. | Apr 1985 | A |
| 4533352 | Van Beek et al. | Aug 1985 | A |
| 4579555 | Russo | Apr 1986 | A |
| 4592815 | Nakao | Jun 1986 | A |
| 4601861 | Pricone et al. | Jul 1986 | A |
| 4639748 | Drake et al. | Jan 1987 | A |
| 4668558 | Barber | May 1987 | A |
| 4715870 | Masuda et al. | Dec 1987 | A |
| 4750921 | Sugita et al. | Jun 1988 | A |
| 4758481 | Fauvel | Jul 1988 | A |
| 4775310 | Fischer | Oct 1988 | A |
| 4781736 | Cheney et al. | Nov 1988 | A |
| 4906439 | Grenner | Mar 1990 | A |
| 4913858 | Miekka et al. | Apr 1990 | A |
| 4940470 | Jaisinghani et al. | Jul 1990 | A |
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| 5025052 | Crater et al. | Jun 1991 | A |
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| 5099026 | Crater et al. | Mar 1992 | A |
| 5133516 | Marentic et al. | Jul 1992 | A |
| 5152060 | Schubert et al. | Oct 1992 | A |
| 5158030 | DuBois et al. | Oct 1992 | A |
| 5158557 | Noreen et al. | Oct 1992 | A |
| 5175030 | Lu et al. | Dec 1992 | A |
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| 5200248 | Thompson et al. | Apr 1993 | A |
| 5249359 | Schubert et al. | Oct 1993 | A |
| 5256231 | Gorman et al. | Oct 1993 | A |
| 5368910 | Langdon | Nov 1994 | A |
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| 5450235 | Smith et al. | Sep 1995 | A |
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| 5514120 | Johnston et al. | May 1996 | A |
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| 5651888 | Shimizu et al. | Jul 1997 | A |
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| 5728446 | Johnston et al. | Mar 1998 | A |
| 5932315 | Lum et al. | Aug 1999 | A |
| Number | Date | Country |
|---|---|---|
| 42 10 072 | Mar 1993 | DE |
| 32 12 295 | Oct 1993 | DE |
| 44 21 859 | Jan 1996 | DE |
| 195 01 017 | Jul 1996 | DE |
| 0 582 286 | Feb 1994 | EP |
| 0 591 117 | Apr 1994 | EP |
| 1354502 | May 1974 | GB |
| 1338579 | Nov 1993 | GB |
| 2 308 320 | Jun 1997 | GB |
| 56-10312 | Feb 1981 | JP |
| 56-10313 | Feb 1981 | JP |
| 56-10314 | Feb 1981 | JP |
| 58-175560 | Oct 1983 | JP |
| 59-228919 | Dec 1984 | JP |
| 02174909 | Jul 1990 | JP |
| 3-238011 | Oct 1991 | JP |
| 4-4011 | Jan 1992 | JP |
| 4-176310 | Jun 1992 | JP |
| 7-214191 | Jan 1995 | JP |
| 7-144108 | Jun 1995 | JP |
| 7-213945 | Aug 1995 | JP |
| 7-241491 | Sep 1995 | JP |
| 8-713450 | Mar 1996 | JP |
| 10-174823 | Jun 1998 | JP |
| 11090133 | Apr 1999 | JP |
| WO 8904628 | Jun 1989 | WO |
| WO 9311727 | Jun 1993 | WO |
| WO 9422557 | Oct 1994 | WO |
| WO 9609879 | Apr 1996 | WO |
| WO 9713633 | Apr 1997 | WO |
| Entry |
|---|
| “Fabrication of Novel Three-Dimensional Microstructures by the Anisotropic Etching of (100) and (110) Silicon”, Ernest Bassous, IEEE Transactions on Electron Devices, vol. ED-25, No. 10, Oct. 1978. |
| “Microtechnology Opens Doors to the Universe of Small Space”, Peter Zuska, Medical Device & Diagnostic Industry, Jan. 1997. |
| “Fabrication of Microstructures with High Aspect Ratios and Great Structural Heights by Synchrotron Radiation Lithography, Galvanoforming, and Plastic Moulding (LIGA process)”, Becker et al., Microelectronic Engineering 4 (1986), pp. 35-56. |
| “UV Laser Machined Polymer Substrates for the Development of Microdiagnostic Systems”, Roberts et al., Analytical Chemistry, vol. 69, No. 11, Jun. 1997. |
| “Processing of Three-Dimensional Microstructures Using Macroporous n-Type Silicon”, Ottow et al., J. Electrochem. Soc., vol. 143, No. 1, Jan. 1996. |