This is a divisional of application Ser. No. 09/420,701 filed Oct. 19, 1999.
Number | Name | Date | Kind |
---|---|---|---|
3520300 | Flower, Jr. | Jul 1970 | A |
3550257 | Brown et al. | Dec 1970 | A |
3594863 | Erb | Jul 1971 | A |
3715192 | Wenz et al. | Feb 1973 | A |
3783588 | Hudis | Jan 1974 | A |
3993566 | Goldberg et al. | Nov 1976 | A |
3998916 | van Turnhout | Dec 1976 | A |
4215682 | Kubik et al. | Aug 1980 | A |
4233029 | Columbus | Nov 1980 | A |
4234324 | Dodge, Jr. | Nov 1980 | A |
4271119 | Columbus | Jun 1981 | A |
4277966 | Rambauske | Jul 1981 | A |
RE30782 | van Turnhout | Oct 1981 | E |
4313741 | Masuda et al. | Feb 1982 | A |
4317661 | Sasaoka et al. | Mar 1982 | A |
4323374 | Shinagawa et al. | Apr 1982 | A |
RE31285 | van Turnhout et al. | Jun 1983 | E |
4392362 | Little | Jul 1983 | A |
4413407 | Columbus | Nov 1983 | A |
4509958 | Masuda et al. | Apr 1985 | A |
4533352 | Van Beek et al. | Aug 1985 | A |
4579555 | Russo | Apr 1986 | A |
4592815 | Nakao | Jun 1986 | A |
4601861 | Pricone et al. | Jul 1986 | A |
4639748 | Drake et al. | Jan 1987 | A |
4668558 | Barber | May 1987 | A |
4715870 | Masuda et al. | Dec 1987 | A |
4750921 | Sugita et al. | Jun 1988 | A |
4758481 | Fauvel | Jul 1988 | A |
4775310 | Fischer | Oct 1988 | A |
4781736 | Cheney et al. | Nov 1988 | A |
4906439 | Grenner | Mar 1990 | A |
4913858 | Miekka et al. | Apr 1990 | A |
4940470 | Jaisinghani et al. | Jul 1990 | A |
4950549 | Rolando et al. | Aug 1990 | A |
4978372 | Pick | Dec 1990 | A |
4978450 | Drori | Dec 1990 | A |
5025052 | Crater et al. | Jun 1991 | A |
5057710 | Nishiura et al. | Oct 1991 | A |
5069403 | Marentic et al. | Dec 1991 | A |
5069404 | Bouchard | Dec 1991 | A |
5077870 | Melbye et al. | Jan 1992 | A |
5078925 | Rolando et al. | Jan 1992 | A |
5099026 | Crater et al. | Mar 1992 | A |
5133516 | Marentic et al. | Jul 1992 | A |
5152060 | Schubert et al. | Oct 1992 | A |
5158030 | DuBois et al. | Oct 1992 | A |
5158557 | Noreen et al. | Oct 1992 | A |
5175030 | Lu et al. | Dec 1992 | A |
5176667 | DeBring | Jan 1993 | A |
5200248 | Thompson et al. | Apr 1993 | A |
5249359 | Schubert et al. | Oct 1993 | A |
5256231 | Gorman et al. | Oct 1993 | A |
5368910 | Langdon | Nov 1994 | A |
5376252 | Ekström et al. | Dec 1994 | A |
5403383 | Jaisinghani | Apr 1995 | A |
5405434 | Inculet | Apr 1995 | A |
5411858 | McGeehan et al. | May 1995 | A |
5437651 | Todd et al. | Aug 1995 | A |
5440332 | Good | Aug 1995 | A |
5450235 | Smith et al. | Sep 1995 | A |
5456741 | Takahara et al. | Oct 1995 | A |
5472481 | Jones et al. | Dec 1995 | A |
5477891 | Benesi | Dec 1995 | A |
5496507 | Angadjivand et al. | Mar 1996 | A |
5514120 | Johnston et al. | May 1996 | A |
5527588 | Camarda et al. | Jun 1996 | A |
5651888 | Shimizu et al. | Jul 1997 | A |
5651900 | Keller et al. | Jul 1997 | A |
5656368 | Braun et al. | Aug 1997 | A |
5691846 | Benson, Jr. et al. | Nov 1997 | A |
5728446 | Johnston et al. | Mar 1998 | A |
5932315 | Lum et al. | Aug 1999 | A |
Number | Date | Country |
---|---|---|
42 10 072 | Mar 1993 | DE |
32 12 295 | Oct 1993 | DE |
44 21 859 | Jan 1996 | DE |
195 01 017 | Jul 1996 | DE |
0 582 286 | Feb 1994 | EP |
0 591 117 | Apr 1994 | EP |
1354502 | May 1974 | GB |
1338579 | Nov 1993 | GB |
2 308 320 | Jun 1997 | GB |
56-10312 | Feb 1981 | JP |
56-10313 | Feb 1981 | JP |
56-10314 | Feb 1981 | JP |
58-175560 | Oct 1983 | JP |
59-228919 | Dec 1984 | JP |
02174909 | Jul 1990 | JP |
3-238011 | Oct 1991 | JP |
4-4011 | Jan 1992 | JP |
4-176310 | Jun 1992 | JP |
7-214191 | Jan 1995 | JP |
7-144108 | Jun 1995 | JP |
7-213945 | Aug 1995 | JP |
7-241491 | Sep 1995 | JP |
8-713450 | Mar 1996 | JP |
10-174823 | Jun 1998 | JP |
11090133 | Apr 1999 | JP |
WO 8904628 | Jun 1989 | WO |
WO 9311727 | Jun 1993 | WO |
WO 9422557 | Oct 1994 | WO |
WO 9609879 | Apr 1996 | WO |
WO 9713633 | Apr 1997 | WO |
Entry |
---|
“Fabrication of Novel Three-Dimensional Microstructures by the Anisotropic Etching of (100) and (110) Silicon”, Ernest Bassous, IEEE Transactions on Electron Devices, vol. ED-25, No. 10, Oct. 1978. |
“Microtechnology Opens Doors to the Universe of Small Space”, Peter Zuska, Medical Device & Diagnostic Industry, Jan. 1997. |
“Fabrication of Microstructures with High Aspect Ratios and Great Structural Heights by Synchrotron Radiation Lithography, Galvanoforming, and Plastic Moulding (LIGA process)”, Becker et al., Microelectronic Engineering 4 (1986), pp. 35-56. |
“UV Laser Machined Polymer Substrates for the Development of Microdiagnostic Systems”, Roberts et al., Analytical Chemistry, vol. 69, No. 11, Jun. 1997. |
“Processing of Three-Dimensional Microstructures Using Macroporous n-Type Silicon”, Ottow et al., J. Electrochem. Soc., vol. 143, No. 1, Jan. 1996. |