ELECTROLUMINESCENCE DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC APPARATUS

Abstract

An organic electroluminescence device including: a substrate having conductivity on at least one side; a first insulation film, formed on one side of the substrate, while having an aperture which partially exposes the same side of the substrate; a semiconductor film, formed on the first insulation film, while covering a part of the first insulation film; a second insulation film formed on the first insulation film, while covering the semiconductor film and contacting the same side of the substrate via the aperture; a capacitor electrode, formed on the aperture, while sandwiching the second insulation film so as to face the substrate; a gate electrode formed on the semiconductor film, so as to sandwich the second insulation film; and an organic electroluminescence element, formed on the second insulation film, electrically connected to the semiconductor film.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

The invention will be described with reference to the accompanying drawings, wherein like numbers reference like elements.

FIG. 1 is a schematic drawing describing a basic structure of an organic EL device.

FIG. 2 is a schematic drawing describing the basic structure of the organic EL device.

FIG. 3 is a drawing describing an example of a circuitry composition of the organic EL device.

FIG. 4 is a drawing describing another example of the circuitry composition of the organic EL device.

FIG. 5 is a sectional drawing describing a structure of the organic EL device.

FIG. 6 is a sectional drawing describing another structure of the organic EL device.

FIG. 7 is a sectional drawing describing still another structure of the organic EL device.

FIG. 8A to 8D are process drawings indicated in cross-section, describing an example for a manufacturing method of the organic EL device.

FIG. 9A to 9D are process drawings indicated in cross-section, describing an example for the manufacturing method of the organic EL device.

FIG. 10A to 10C are process drawings indicated in cross-section, describing an example for the manufacturing method of the organic EL device.

FIG. 11A to 11D are process drawings indicated in cross-section, describing another example for the manufacturing method of the organic EL device.

FIG. 12A to 12D are process drawings indicated in cross-section, describing another example for the manufacturing method of the organic EL device.

FIG. 13A to 13C are process drawings indicated in cross-section, describing another example for the manufacturing method of the organic EL device.

FIG. 14A to 14D are process drawings indicated in cross-section, describing still another example for the manufacturing method of the organic EL device.

FIG. 15A to 15D are process drawings indicated in cross-section, describing still another example for the manufacturing method of the organic EL device.

FIG. 16A to 16D are process drawings indicated in cross-section, describing still example for the manufacturing method of the organic EL device.

FIG. 17A to 17C are oblique drawings showing illustrative examples of an electronic apparatus.

Claims

1. An organic electroluminescence device comprising: a substrate having conductivity on at least one side;a first insulation film, formed on one side of the substrate, while having an aperture which partially exposes the same side of the substrate;a semiconductor film, formed on the first insulation film, while covering a part of the first insulation film;a second insulation film formed on the first insulation film, while covering the semiconductor film and contacting the same side of the substrate via the aperture;a capacitor electrode, formed on the aperture, while sandwiching the second insulation film so as to face the substrate;a gate electrode formed on the semiconductor film, so as to sandwich the second insulation film; andan organic electroluminescence element, formed on the second insulation film, electrically connected to the semiconductor film.

2. An organic electroluminescence device comprising: a substrate having conductivity on at least one side;a first insulation film, formed on one side of the substrate, while having an aperture which partially exposes the same side of the substrate;a gate electrode, formed on the first insulation film, while covering a part of the first insulation film;a second insulation film formed on the first insulation film, while covering the gate electrode and contacting the same side of the substrate via the aperture;a capacitor electrode, formed on the aperture, while sandwiching the second insulation film so as to face the substrate;a semiconductor film formed on the gate electrode, so as to sandwich the second insulation film; andan organic electroluminescence element, formed on the second insulation film, electrically connected to the semiconductor film.

3. The organic electroluminescence device according to claim 1, wherein a film thickness of the second insulation film is smaller than the film thickness of the first insulation film.

4. The organic electroluminescence device according to claim 1, wherein a permittivity of the second insulation film is larger than the permittivity of the first insulation film.

5. The organic electroluminescence device according to claim 1, wherein the substrate includes a conductive substrate.

6. A method for manufacturing an organic electroluminescence device, comprising: forming a first insulation film on a side of a conductive substrate;forming, on the first insulation film, an aperture which partially exposes the side of the substrate;forming, on the first insulation film, a semiconductor substrate which covers a part of the first insulation film;forming, on the first insulation film, a second insulation film covering the semiconductor film and contacting the side of the substrate via the aperture;forming, on the aperture, a capacitor electrode sandwiching the second insulation film so as to face the substrate;forming, on the second insulation film, a gate electrode arranged on the semiconductor film while sandwiching the second insulation film; andforming, on the second insulation film, an organic electroluminescence element electrically connected to the semiconductor film.

7. A method for manufacturing an organic electroluminescence device, comprising: forming a first insulation film on a side of a conductive substrate;forming, on the first insulation film, an aperture which partially exposes the side of the substrate;forming, on the first insulation film, a gate electrode which covers a part of the first insulation film;forming, on the first insulation film, a second insulation film covering the gate electrode and contacting the side of the substrate via the aperture;forming, on the second insulation film, a semiconductor film arranged on the gate electrode while sandwiching the second insulation film;forming, on the aperture, a capacitor electrode sandwiching the second insulation film so as to face the substrate; andforming, on the second insulation film, an organic electroluminescence element electrically connected to the semiconductor film.

8. An electronic apparatus comprising the organic electroluminescence device according to claim 1.

9. The organic electroluminescence device according to claim 2, wherein a film thickness of the second insulation film is smaller than the film thickness of the first insulation film.

10. The organic electroluminescence device according to claim 2, wherein a permittivity of the second insulation film is larger than the permittivity of the first insulation film.

11. The organic electroluminescence device according to claim 2, wherein the substrate includes a conductive substrate.