1. Field of the Invention
The invention relates to an image display apparatus including an electron emitting device used for a flat panel display.
2. Description of the Related Art
Conventionally, there is known an electron emitting device in which a cathode and a gate are arranged in confrontation with each other and a confronting portion of the cathode and the gate is used as an electron emitting part. Then, an image is displayed by arranging an anode in a portion extending in an emitting direction of electrons emitted from the electron emitting device to accelerate the emitted electrons, further arranging a light emitting member behind the anode, and emitting the light emitting member by colliding electrons to the anode.
Japanese Patent Application Laid-Open No. 2001-167693 discloses an electron emitting device having a simple configuration and high electron emission efficiency and an image display apparatus including the electron emitting device. In the electron emitting device, a concave portion is formed on an insulation surface on a substrate and a cathode and a gate are formed across the concave portion so that electrons can be emitted from the cathode. To cope with recent high brightness and improved image quality required to an image display apparatus, there has been proposed to configure a display device using an electron emitting device having plural electron emitting parts in one pixel. When a device has plural electron emitting parts in one pixel, an electric field shape is made different because electrodes are differently arranged between a central portion and end portions. Accordingly, since emitted electron beams have different orbits between the central portion and the end portions, beam intensity may be made irregular in one pixel and adversely affect a displayed image.
The present invention provides an image display apparatus excellent in display quality by making orbits of electron beams uniform in pixels in an electron emitting device having plural electron emitting parts in one pixel.
An image display apparatus according to this invention is that,
an image display apparatus comprising
a rear plate having a first substrate, a gate and a cathode arranged on the substrate and a plurality of electron emitting devices which arrange a portion where the cathode confronts with the gate as an electron emitting part, and
a face plate having a second substrate, an anode arranged in confrontation with the electron emitting device of the rear plate and accelerating electrons emitted from the electron emitting device and a light emitting member which emits light by irradiation of the electrons,
wherein the plurality of electron emitting devices have a plurality of electron emitting parts in one direction parallel to a surface of the first substrate, and the gate and the cathode are arranged together in the same arrangement direction between the electron emitting parts adjacent in the one direction; and
an electron beam control electrode is arranged on the external side of an electron emitting part positioned in at least one of the outermost portions of the respective electron emitting devices in the one direction.
In the invention, in a configuration in which plural electron emitting parts are arranged in one direction and gates and cathodes are arranged in the same direction between adjacent electron emitting parts, since an electron beam control electrode is arranged on the external side of an electron emitting part at an end, orbits of electron beams can be made uniform. Accordingly, an image display apparatus of the invention can display an excellent image having a uniform distribution of brightness.
Further features of the present invention will become apparent from the following description of exemplary embodiments with reference to the attached drawings.
A configuration of an image display apparatus of the invention will be described using
M pieces of scan wirings 32 are connected to terminals Dx1, Dx2, . . . , Dxm. N pieces of modulation wirings 33 are connected to terminals Dy1, Dy2, . . . , Dyn (m and n are positive integers). Not illustrated interlayer insulating layers are arranged between the m pieces of the scan wirings 32 and the n pieces of the modulation wirings 33 to electrically separate them from one another. A high voltage terminal is connected to a metal back 45, and a direct current voltage of 10 [kV], for example, is supplied to the metal back 45. The voltage is an acceleration voltage for applying a sufficient energy for exciting a phosphor to electrons emitted from the electron emitting device.
The rear plate according to the invention has the plural electron emitting devices 34 connected in a matrix state by the scan wirings 32 and the modulation wirings 33. A scan circuit (not illustrated) is connected to the scan wirings 32 to apply a scan signal for selecting a row of the electron emitting devices arranged in an X-direction. In contrast, a modulation circuit (not illustrated) is connected to the modulation wirings 33 to modulate respective columns of the electron emitting device 34 arranged in a Y-direction in response to an input signal. A drive voltage applied to the respective electron emitting devices is supplied as a difference voltage between a scan signal and a modulation signal applied to the electron emitting devices. The drive voltage is preferably in a range of 10 V to 100 V and more preferable in a range of 10 V to 30 V.
The electron emitting device according to the invention includes the gate 4 and the cathode 6 arranged on a substrate. In the example, the cathode 6 is connected to a scan wiring 32, and a cathode potential is applied to the cathode 6. Further, the gate 4 is connected to a modulation wiring 33, and a gate potential is applied the gate 4. In the example, any of the cathode 6 and the gate 4 is formed in a comb-teeth shape, and the cathode 6 and the gate 4 are arranged so that the comb-teeth are located alternately in the X-direction. Further, each of the comb-shaped teeth of the cathode 6 is formed to have a portion projecting in confrontation with the gate 4. Although the example has the projecting portions located at four positions, the number of the portions is not limited thereto. Further, the gate 4 has a projecting portion 5 to correspond to the projecting portion of the cathode 6 so that it confronts the gate 4. Note that the projecting portion 5 is substantially a part of the gate 4. In the invention, the projecting portion 5 of the gate 4 and the projecting portions of the cathode 6 constitute the electron emitting part 12 by confronting one another.
As illustrated in
In the above configuration of the invention, electron beam control electrodes are arranged on the external side of an electron emitting part 12 positioned to at least one of outermost portions in the X-direction. In the example, an electron beam control electrode 13a is arranged on the external side of an electron emitting part 12 at a right end, and an electron beam control electrode 13b is arranged on the external side of an electron emitting part 12 at a left end, respectively.
An operation of the electron beam control electrodes 13a and 13b will be described using
In the invention, to sufficiently exhibit an effect obtained from a width W1 of the electron beam control electrode 13a and from a width W2 of the electron beam control electrode 13b in the X-direction, it is preferable to satisfy a relation of W1≧C, W2≧D between a width C of the cathode 6 and a width D of the gate 4.
Incidentally, in the example, the electron beam control electrode 13a, which is arranged on the external side of the gate 4, is connected to the cathode 6 and set to a cathode potential, and the electron beam control electrode 13b, which is arranged on the external side of the cathode 6, is connected the gate and set to a gate potential. Although the configuration is a preferable configuration to control potentials of the electron beam control electrodes 13a and 13b, the invention is not limited thereto. In the invention, it is sufficient that the periodic property of the electric field of the central portion is kept up to a periphery of the electron emitting part 12 on the outermost side and that orbits of electrons are made uniform, and potentials of the control electrodes 13a and 13b may be separately controlled in a range in which the effect can be obtained.
Next, a method of manufacturing the electron emitting device of the invention will be described by exemplifying a configuration example of
The substrate 1 is an insulating substrate for mechanically support a device. For example, a quartz glass, a glass in which a content of impurities such as Na is reduced, a blue sheet glass, and a silicon substrate may be used as the substrate 1. A function necessary for the substrate 1 is a resistance property to dry etching, wet etching, and alkaline and acid of a developer and the like and in addition to that it has a high mechanical strength. Further, when the substrate 1 is used as an integrated member such as a display panel, it is preferable that the substrate 1 has a small thermal expansion difference between it and a film forming material and other laminating material. Further, the substrate is desirably a material in which an alkaline element and the like are unlike to be diffused from the inside of a glass in a heat treatment.
As illustrated in
Further, the conductive layer 53 acts as the gate 4 of
Next, as illustrated in
Incidentally, the number n of the gates 4 arranged in the X-direction and a length D of each gate 4 in the X-direction, and an interval S between each gate 4 and an adjacent device may be appropriately changed. D is preferably in a range from 5 μm to 50 μm. Further, as described above, it is preferable to set W2≧D.
Next, as illustrated in
In the example, although a mode in which the insulating layers 2a and 2b are laminated, the invention is by no means limited thereto, and the concave portion 8 may be formed by removing a part of one insulating layer.
Next, as illustrated in
A length C of the cathode 6 in the X-direction may be appropriately changed. A length D is preferably in a range from 5 μm to 50 μm. Further, the length D is preferably set to W1≧C as described above.
A structure of the electron emitting device, which can be applied to the invention, is not limited to the mode described here. Any electron emitting device, which has plural gates for deflecting electrons emitted from plural electron emitting parts in the same direction asymmetrically, can be applied to the invention. As a configuration of the electron emitting part, any arbitrary configuration of a lateral electric field emission device of Spindt-type, a Metal-Insulator-Metal emitting device (MIM-type device), a surface conductive device (surface conductive emitting device), and the like may be employed.
An electron emitting device having the configuration illustrated in
A blue sheet glass was used as a substrate 1, and after the substrate 1 was sufficiently rinsed, a Si3N4 film having a thickness of 300 nm was deposited as an insulating layer 51 by sputtering, and next, a SiO2 film having a thickness of 20 nm was deposited as an insulating layer 52 by sputtering. Thereafter, TaN of 30 nm was deposited as a conductive layer 53 [
Next, a positive photoresist was spin-coated, a photo mask pattern was exposed and developed, and a resist pattern was formed. At the time, the resist pattern was formed so that it was set to D=10 μm, S=12 μm, and W2=20 μm. Thereafter, the conductive layer 53, the insulating layer 52, and the insulating layer 51 were dry-etched using CF4 gas and the patterned photoresist as a mask. The dry etching was stopped on the substrate 1, and a laminated body including insulating layers 2a and 2b, and a gate 4 or an electron beam control electrode 13b was formed [
Next, the thus formed laminated body was etched for 11 minutes using buffer-fluorinated (BHF) acid (LAL100 made by Stera Chemifa Corporation) as an etching solution, and the insulating layer 2b was selectively etched. A concave portion 8 was formed by etching the insulating layer 2b about 60 nm from a side surface of the laminated body [
Next, Mo having a thickness of 30 nm was selectively deposited as a projecting portion 5, a cathode 6, and an electron beam control electrode 13a by oblique deposition from an oblique direction of 45°. At the time, a resist pattern was formed so that it was set to C=10 μm, W1=20 μm [
An electron emitting device was made similarly to the example 1 except that the electron beam control electrode 13b was not formed at step 2.
An electron emitting device was made similarly to the example 1 except that the electron beam control electrode 13b was not formed at step 2 and further even the electron beam control electrode 13a was not formed at step 4.
An image display apparatus was made using each of the substrates to which the respective electron emitting devices of the examples 1, 2 and the comparative example 1 were formed as a rear plate and disposing the face plate illustrated in
While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. The scope of the following claims is to be accorded the broadest interpretation so as to encompass all such modifications and equivalent structures and functions.
This application claims the benefit of Japanese Patent Application No. 2009-098833, filed on Apr. 15, 2009, which is hereby incorporated by reference herein its entirety.
Number | Date | Country | Kind |
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2009-098833 | Apr 2009 | JP | national |