Electron Beam Imagable Polyimides

Information

• NSF Award
• 8420386

Owner

• BREWER SCIENCE, INC.

• Award Id

  8420386

• Award Effective Date

  8/1/1985 - 39 years ago

• Award Expiration Date

  1/31/1988 - 36 years ago

• Award Amount

  $ 251,374.00

• Award Instrument

  Continuing grant

This work will investigate several polyimide precursors to choose one which will be directly imagable by electron beams and which will be a dielectric with properties suitable for use in the semiconductor industry. Phase I research demonstrated that a polyimide precursor can be made a negative or a positive resist, and the sensitivity can be enhanced, by the addition of a small percentage of a polymeric additive. One positive- and two negative-acting polyimide resists will be studied during Phase II to provide an explanation for this effect. This information will be used to improve the properties of one material. Integrated circuit process tests which include thickness and uniformity of coatings, adhesion tests, and thermal stability will be performed. Lithographic properties (electron beam sensitivity and resolution) and dielectric properties (resistivity, dielectric strength, dielectric constant, and dissipation factor) will be tested.

• Program Officer

  Ritchie B. Coryell

• Min Amd Letter Date

  8/22/1985 - 39 years ago

• Max Amd Letter Date

  6/2/1989 - 35 years ago

• ARRA Amount

• Name

  Brewer Science Incorporated

• City

  ROLLA

• State

  MO

• Country

  United States

• Address

  2401 BREWER DR

• Postal Code

  654017003

• Phone Number

  5733640300

• First Name

  Terry

• Last Name

  Brewer

• Start Date

  8/1/1985 12:00:00 AM

• Name

  Telecommunications

• Code

  206000

• Name

  Engineering-Electrical

• Code

  55