Claims
- 1. An electrostatic lens for focusing an electron beam produced by an electron beam formation region of an electron gun, comprising:
a tubular substrate; and a resistive structure having a predetermined resistance distribution, said resistive structure satisfying the following equation:
14Cm=(1-a)·M4·Cs·(VsV0)32+a·Fwhere: Cm equals a minimized beam spot coefficient; a equals a modification parameter; M equals a magnification of the electrostatic lens; Cs equals a spherical aberration coefficient of the electrostatic lens; Vs equals an emission-side voltage; V0 equals an incidence-side voltage; and F equals an aberration-independent function.
- 2. The electrostatic lens of claim 1, wherein said aberration-independent function is determined in accordance with the following equation:
15F=(MM0)4·C0
- 3. The electrostatic lens of claim 1, wherein said modification parameter a is within the range 0<a<1.
- 4. The electrostatic lens of claim 1, wherein a film thickness of said resistive film on said emission side of said electron beam is thinner than an average film thickness of an entire resistance film.
Priority Claims (1)
Number |
Date |
Country |
Kind |
8-89221 |
Apr 1996 |
JP |
|
Parent Case Info
[0001] This application is a division of application Ser. No. 09/593,137, filed on Jun. 14, 2000, pending, while application is a continuation-in-part application of application Ser. No. 08/827,714, filed on Apr. 8, 1997, abandoned, the subject matter of which is expressly incorporated herein by reference in its entirety.
Divisions (1)
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Number |
Date |
Country |
Parent |
09593137 |
Jun 2000 |
US |
Child |
09845302 |
May 2001 |
US |
Continuation in Parts (1)
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Number |
Date |
Country |
Parent |
08827714 |
Apr 1997 |
US |
Child |
09593137 |
Jun 2000 |
US |