Claims
- 1. An electrostatic lens for focusing an electron beam produced by an electron beam formation region of an electron gun, comprising:a tubular substrate; and a resistive structure having a predetermined resistance distribution, said resistive structure satisfying the following equation: Cm=(1-a)·M4·Cs·(VsV0)32+a·Fwhere:Cm equals a minimized beam spot coefficient; a equals a modification parameter; M equals a magnification of the electrostatic lens; Cs equals a spherical aberration coefficient of the electrostatic lens; Vs equals an emission-side voltage; V0 equals an incidence-side voltage; and F equals an aberration-independent function.
- 2. The electrostatic lens of claim 1, wherein said aberration-independent function is determined in accordance with the following equation: F=(MM0)4·C0where:M0 equals a minimum value of the magnification M; and C0 equals a minimum beam spot coefficient value.
- 3. The electrostatic lens of claim 1, wherein said modification parameter a is within the range 0<a<1.
- 4. The electrostatic lens of claim 1, wherein a film thickness of said resistive film on said emission side of said electron beam is thinner than an average film thickness of an entire resistance film.
Priority Claims (1)
Number |
Date |
Country |
Kind |
8-89221 |
Apr 1996 |
JP |
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Parent Case Info
This application is a division of application Ser. No. 09/593,137, filed on Jun. 14, 2000, now U.S. Pat. No. 6,270,390, which application is a continuation-in-part application of application Ser. No. 08/827,714, filed on Apr. 8, 1997, abandoned, the subject matter of which is expressly incorporated herein by reference in its entirety.
US Referenced Citations (9)
Foreign Referenced Citations (3)
Number |
Date |
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63225464 |
Sep 1988 |
JP |
5258683 |
Oct 1993 |
JP |
7-73818 |
Mar 1995 |
JP |
Non-Patent Literature Citations (3)
Entry |
“A Generalized Comparison Of Spherical Aberration Of Magnetic And Electrostatic Lenses”, by A. Gorkum et al., appearing on pp. 134-136 of Optik, vol. 72, No. 4 (1986). |
T.G. Spanjer, entitled “Optimization of the Configuration of Spinal Lenses for Minimum Spherical Aberration” pp. 18-29. |
K.R. Spangenberg, entitled “Vacuum Tubes” pp. 342-343. |
Continuation in Parts (1)
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Number |
Date |
Country |
Parent |
08/827714 |
Apr 1997 |
US |
Child |
09/593137 |
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US |