The technology described herein relates to an electronic component board, a display panel, and a method of producing them.
A display panel that has a configuration in which an electrooptic material such as a liquid crystal is sealed between two boards that are opposed to each other has been known. One of the boards is an electronic component board that includes at least thin film transistors (TFTs) and pixel electrodes. The TFTs function as switching components. The pixel electrodes are disposed in a layer upper than the TFTs via an insulating film. In a display area of the electronic component board, signal lines that include gate lines and source lines are disposed in a grid. Each TFT is disposed at an intersection of the signal lines. The pixel electrodes are disposed in cells of the grid defined by the lines. As a result, pixels, which are display units, are formed. Each TFT includes a gate electrode, a source electrode, a drain electrode, and a channel region. The gate electrode and the source electrode are prepared from a conductive film and connected to the signal lines, respectively. The drain electrode is prepared from a conductive film and connected to the pixel electrode. The channel region is prepared from a semiconductor film to connect the source electrode to the drain electrode. In such a display panel, when electrical signals that are supplied from an external device to the signal lines are transmitted to the pixel electrodes via the TFTs with predefined timing and electric fields are applied to the electrooptic material, optical characteristics of the electrooptic material vary and images are displayed in the display area.
In general, a light blocking layer is disposed in non-display areas such as areas in which the gate lines and source lines are disposed and areas that overlap areas in which the TFTs are disposed. To improve aperture ratios by reducing the areas of the light blocking layer for improving the definition and brightness of display images, it is preferable that widths of the lines and the areas of the TFTs are reduced. However, if the widths of the lines are simply reduced, electrical resistances increase. Japanese Unexamined Patent Application Publication No. 2005-317983 discloses a semiconductor device in which lines are prepared from a multilayer film that contains aluminum (Al) that has lower electrical resistance to reduce electrical resistances of the lines.
Another method of reducing the electrical resistances of the lines without reducing the aperture ration may include increasing the thickness. If the thickness of the gate metal film that forms the gate electrodes of the TFTs is increased, the gate resistance can be reduced. However, if the thickness of the gate metal film is increased, steps formed due to the gate metal film increase and the gate insulating film that covers the side surfaces and the top surface of the gate metal film may not be tolerate the steps. As a result, cracks may occur in the gate insulating film. Because the side surfaces and the top surface of the conductive film on the substrate are covered with the insulating film, water from above the electronic component board is blocked by the insulating film and less likely to reach the conductive film. However, if the crack is present in the insulating film, the water may reach the conductive film through the crack and affect conductive performance. For example, if the crack is present in the gate insulating film, the gate resistance may vary and the TFT may malfunction. The thickness of the insulating film may be increased so that the crack is less likely to present in the insulating film. However, if the thickness of the insulating film that is formed substantially in solid on the substrate is increased, a stress caused by the insulating film may increase and problems including a warp of the substrate may occur.
The technology described herein was made in view of the above circumstances. An object is to restrict moisture from reaching a conductive film and to provide an electronic component board with higher reliability.
An embodiment of the technology described herein is an electronic component board that includes a conductive film, an insulating film, and a transparent electrode film. The insulating film is disposed in a layer upper than the conductive film to cover a side surface and an upper surface of the conductive film. The transparent electrode film is disposed in a layer upper than the insulating film. The transparent electrode film includes an electrode portion and a covering portion. The electrode portion includes an electrode. The electrode portion is electrically connected to the conductive film. The covering portion is separated from the electrode portion and electrically insulated from the conductive film and the electrode portion to overlap the conductive film and the insulating film that covers the conductive film.
An embodiment will be described with reference to
The liquid crystal panel 10 may be used for a display panel in a display device includes in a smartphone or a tablet-type portable terminal. The technology described herein is especially preferable for a display panel that is required to have higher definition and brightness. The liquid crystal panel 10 has a screen size in a range from some inches to a dozen inches, which is generally classified into a small size or a small-to-middle size panel. The screen size is not limited to the above range. The technology described herein may be applied to display panels having screen sizes in several inches, which are generally classified into a middle size or a large size (or an extra-large size) panels.
The liquid crystal panel 10 in this embodiment is a transmissive liquid crystal panel. The liquid crystal panel 10 includes a front plate surface that is configured as a display surface on which images are displayed. The liquid crystal panel 10 is configured to display images that are viewed from the front side. A backlight unit, which is not illustrated, is disposed behind the liquid crystal panel. The liquid crystal panel 10 is illuminated with light from the backlight unit from the back side. The liquid crystal panel 10 may have a known configuration. As illustrated in
One of the boards 20 and 30 illustrated in
As illustrated in
In this embodiment section, the liquid crystal panel 10 that includes a common electrode 25 on the CF board 20 and operates in vertical alignment (VA) mode will be described. As illustrated in
As illustrated in
Among the films, each of the first metal film 31 and the second metal film 34 is prepared from a single-layer film made of one kind of metal selected from copper (Cu), titanium (Ti), aluminum (Al), molybdenum (Mo), and tungsten (W). Each of the gate insulating film 32 and the protective insulating film 35 is made of silicon nitride (SiNx) or silicon oxide (SiO2). The semiconductor film 33 may be a silicon thin film or an oxide thin film. The silicon thin film may be made of amorphous silicon or low temperature polycrystalline silicon. The oxide thin film is prepared from one kind of an oxide semiconductor that contains indium (In), gallium (Ga), and zinc (Zn). The organic insulating film 36 may be prepared from an acrylic-based resin film (e.g., polymethylmethacrylate resin (PMMA)). The transparent electrode film 37 may be made of a transparent electrode material that contains a transparent metal oxide such as ITO and ZnO.
With the films, the TFTs 60 and the pixel electrodes 55 are arranged in a matrix along a row direction (the X-axis direction) and a column direction (the Y-axis direction) on the inner surface of the electronic component board 30 in the display area as illustrated in
As illustrated in
As illustrated in
The electronic component board 30 in this embodiment includes covering portions 56 that are prepared from the transparent electrode film 37 and disposed to cover the tops of the TFTs 60. In the electronic component board 30 in this embodiment, to reduce the gate resistance of each TRT 60, a thickness of the first metal film 31 that forms the gate electrodes 61 is relatively large. A thickness t31 of each gate electrode 61 is set larger than a thickness t32 of the gate insulating film 32 (t31>t32). The gate insulating film 32 cannot tolerate steps formed by the gate electrodes 61 on the glass substrate GS and thus cracks CR may occur in the gate insulating film 32.
In the electronic component board 30 in this embodiment, as illustrated in
Next, a method of producing the electronic component board 30 that has the above configuration will be described. The films in the electronic component board 30 can be formed by a known method without any limitations. The following processes (a) to (h) are examples but the technology described herein is not limited to the processes.
(a) The first metal film 31 is formed on the upper surface of the glass substrate GS (on the front side, the surface on the liquid crystal layer 40 side) by spattering. A photoresist film that includes portions to form the gate electrodes 61, the gate lines 51, and the capacitive lines 53 is formed on the first metal film 31. The portions are prepared by patterning. Portions of the first metal film 31 not covered with the photoresist film are removed by etching to form the gate electrodes 61, the gate lines 51, and the capacitive lines 53 ((A) a conductive film forming process). The photoresist film is removed by plasma asking using oxygen. In this embodiment, the first metal film 31 is formed with the thickness t31, which is relatively large.
(b) The gate insulating film 32 is formed on an upper surface of the first metal film 31 by a plasma CVD method. The gate insulating film 32 is formed in solid to cover side surfaces and upper surfaces of the gate electrodes 61, the gate lines 51, and the capacitive lines 53 ((B) an insulating film forming process). The thickness t32 of the gate insulating film 32 in this embodiment is set smaller than the thickness t31 of the first metal film 31 (t32<t31).
(c) The semiconductor film 33 is formed on an upper surface of the gate insulating film 32 by a plasma CVD method. Unnecessary portions of the semiconductor film 33 re removed by the photolithography method used in the process (a). Through this process, the channel regions 64 are prepared from the semiconductor film 33.
(d) The second metal film 34 is formed on an upper surface of the semiconductor film 33 by a plasma CVD method. Unnecessary portions are removed by the photolithography method used in the process (a). Through this process, the source electrodes 62, the drain electrodes 63, and the source lines 52 are prepared.
(e) The protective insulating film 35 and the organic insulating film 36 are formed on an upper surface of the second metal film 34 in sequence. The insulating films 35 and 36 may be formed in solid by a plasma CVD method.
(f) The contact holes 50 that are through holes are formed in the protective insulating film 35 and the organic insulating film 36.
(g) The transparent electrode film 37 is formed on an upper surface of the organic insulating film 36 that includes the contact holes 50 by spattering. A photoresist film that includes portions to form the pixel electrode 55 and the covering portions 56 using a photomask (a pattern) is formed on the transparent electrode film 37. Portions of the transparent electrode film 37 not covered with the photoresist film are removed by etching. Through the process, the pixel electrodes 55 and the covering portions 56 are prepared at the same time ((C) a transparent electrode forming process). The pixel electrodes 55 are connected to the conductive lines 53 that are exposed to bottoms of openings in the contact holes 50. The covering portions 56 are separated and insulated from the pixel electrodes 55 and other conductive films.
(h) The alignment film 38 is formed on an upper surface of the transparent electrode film 37. Alignment processing may be performed as necessary. Through the processes, the electronic component board 30 is produced.
The liquid crystal panel 10 is provided with the electronic component board 30 that is produced as described above. The electronic component board 30 is bonded to the CF board 20, which is produced by a known method, with a known sealant. The space between the boards 20 and 30 is filled with the liquid crystal material using the one-drop filling method or the vacuum filling method.
As described earlier, the electronic component board 30 in this embodiment includes the first metal film 31 (the conductive film), the gate insulating film 32 (the insulating film), and the transparent electrode film 37. The gate insulating film 32 is disposed in the layer upper than the first metal film 31 to cover the side surfaces and the top surfaces of the first metal film 31. The transparent electrode film 37 is disposed in the layer upper than the gate insulating film 32. The transparent electrode film 37 includes portions configured as the pixel electrodes 55 (the electrode portions) and portions configured as the covering portions 56. The pixel electrodes 55 are electrodes electrically connected to the first metal film 31. The covering portions are separated from the pixel electrodes 55 and electrically insulated from the first metal film 31 and the pixel electrodes 55. The covering portions overlap the first metal film and the gate insulating film 32 that covers the first metal film 31.
According to the configuration of this embodiment, even if a crack is present in the gate insulating film 32 that covers the first metal film 31, the corresponding covering portion 56 blocks water from entering from above. Therefore, the water is less likely to reach the first metal film 31. As a result, failures due to the water that reaches the first metal film 31 are less likely to occur and thus the electronic component board 30 is provided with higher reliability. Because the covering portions 56 that block the water are prepared from the transparent electrode film 37 that forms the pixel electrodes 55, the pixel electrodes 55 and the covering portions 56 can be patterned with the photoresist film using the photomask and the material at the same time. This method has advantages in material procurement management, production process, and cost. The covering portion 56 are separated and electrically insulated from the first metal film 31 and the pixel electrodes 55. Therefore, the covering portions 56 do not affect the electrical performance of components prepared from the first metal film 31.
In the electronic component board 30 in this embodiment, the thickness t31 of the first metal film 31 is larger than the thickness t32 of the gate insulating film 32 (t31>t32).
According to the configuration of this embodiment, in the electronic component board 30 having the configuration in which the crack CR is more likely to be present in the gate insulating film 32 due to the increased thickness of the first metal film 31, the water is less likely to reach the first metal film 31. Therefore, the electronic component board 30 having less electrical resistances and higher reliability can be achieved.
The electronic component board 30 in this embodiment further includes the semiconductor film 33, the second metal film 34 (the other conductive film), the protective insulating film 35 (an example of the other insulating film) or the organic insulating film 36 (an example of the other insulating film). The semiconductor film 33 is disposed in the layer upper than the gate insulating film 32. The second metal film 34 is disposed on the semiconductor film 33. The protective insulating film 35 or the organic insulating film 36 is disposed in the layer upper than the second metal film 34. The transparent electrode film 37 is disposed in the layer upper than the protective insulating film 35 and the organic insulating film 36. The electronic component board 30 includes the TFTs 60 (an example of the transistors) that include the gate electrodes 61, the source electrodes, the drain electrodes 63, and the channel regions 64. The gate electrodes 61 are prepared from the first metal film 31. The source electrodes 62 and the drain electrodes 63 are prepared from the second metal film 34 and disposed above the semiconductor film 33 with the gap. Each channel region 64 is prepared from the semiconductor film 33 and disposed between a connecting portion with the source electrode 62 and a connecting portion with the drain electrode 63.
According to the configuration of this embodiment, in the electronic component board 30 that includes the inversely staggered-type TFTs 60 that include the gate electrodes 61 with the increased thickness and the reduced gate resistance, the water is less likely to enter the gate electrodes 61 and thus reliability improves.
The liquid crystal panel 10 in this embodiment is the display panel that includes the electronic component board 30.
According to the configuration of this embodiment, the liquid crystal panel 10 can be provided with lower driving power and higher reliability without a reduction in the aperture ratio.
The method of producing the electronic component board in this embodiment includes: (A) the conductive film forming process of forming the first metal film 31 on the glass substrate GS (the substrate); (B) the insulating film forming process of forming the gate insulating film 32 in the layer upper than the first metal film 31 to cover side surfaces and the top surfaces off the first metal film 31; and (C) the transparent electrode film forming process of forming the transparent electrode film 37 in the layer upper than the gate insulating film 32. The transparent electrode film 37 includes the covering portions 56 and the pixel electrodes 55. The covering portions 56 overlap the first metal film and the gate insulating film 32 that covers the first metal film 31. The pixel electrodes 55 are separated from the covering portions 56.
According to the configuration of this embodiment, the covering portion 56 restrict the water from reaching the first metal film 31. Therefore, the electronic component board 30 can be provided with higher reliability. The covering portions 56 that restrict the water are prepared from the transparent electrode film 37 that forms the pixel electrodes 55 in the transparent electrode film forming process in which the pixel electrodes 55 are prepared. This configuration has advantages in material procurement management and production process.
In the method of producing the electronic component board 30 in this embodiment, the covering portions 56 and the pixel electrodes 55 are formed at the same time through patterning using the pattern (e.g., the photoresist film using the photomask).
According to the configuration of this embodiment, the pixel electrodes and the covering portions 56 are formed through patterning using the pattern. Therefore, the covering portions 56 can be formed without an increase in complexity of the production process or in the number of components required for the production. Especially, the form the covering portions 56 and the pixel electrodes 55 are formed through patterning by etching without an increase in the number of expensive photomasks. This method has an advantage in reduction of the production cost.
The method of producing the liquid crystal panel 10 in this embodiment includes the production process of the electronic component board 30.
According to the configuration of this embodiment, the liquid crystal panel 10 can be provided with lower driving power and higher reliability without an increase in complexity of the production process or the production cost.
The technology described herein is not limited to the embodiments described in the above descriptions and drawings. The following embodiments may be included in the technical scope of the technology described herein.
(1) Known materials may be used for the transparent electrode film, the insulating film, and the conductive film, that is, the materials are not limited to those described earlier. However, it is preferable that the transparent electrode film is provided with lower permeability. The transparent electrode film may be formed by a known method. The method of forming the transparent electrode film is not limited to a specific method. The transparent electrode film may be patterned to include the electrode portions and the covering portions by screen printing or by transferring instead of by etching.
(2) In the above embodiment, the liquid crystal panel 10 that is configured to operate in the VA mode. However, the image display mechanism and the operation mode of the liquid crystal panel are not limited to specific mechanism and mode. The technology described herein may be applied to liquid crystal panels each operate in in-plane switching (IPS) mode, fringe field switching (FFS) mode, twisted nematic (TN) mode, and other operation mode. Furthermore, application of the technology described herein is not limited to an electronic component board in a liquid crystal panel. The technology described herein may be applied to electronic component boards in other types of display panels (organic EL panels, plasma display panels (PDPs), electrophoretic display (EPD) panels, micro electro mechanical systems (MEMS)).
(3) The technology described herein may be applied to electronic component boards used for different uses other than the electronic component board used for the display panel.
This application claims priority from U.S. Provisional Patent Application No. 62/725,295 filed on Aug. 31, 2018. The entire contents of the priority application are incorporated herein by reference.
Number | Date | Country | |
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62725295 | Aug 2018 | US |