Claims
- 1. A method of controlling and performing procedures with respect to a cryopump comprising, upon recovery of power after a power failure:determining whether a power fail recovery mode is on; if the power fail recovery mode is on, and temperature is below a setpoint, automatically cooling the cryopump; and if the power fail recovery mode is on, and the temperature is above the setpoint, automatically starting a regeneration cycle.
- 2. The method of claim 1, further comprising:if the power fail recovery mode is off, maintaining the cryopump in an off state.
- 3. A method of controlling and performing procedures with respect to a cryopump comprising:receiving a command to turn on a thermocouple (TC) gauge, the TC gauge for sensing pressure within the cryopump; determining whether there is a sufficient amount of gas to ignite; and turning on the TC gauge only if there is not a sufficient amount of gas to ignite.
- 4. The method of claim 3, there being an insufficient amount of gas to ignite if at least one of the following conditions is true:(1) a temperature is below a setpoint, and (2) the cryopump has been purged.
- 5. A method of controlling and performing procedures with respect to a cryopump comprising:receiving a command to turn on a roughing valve; displaying a warning if the cryopump is on; turning on the roughing valve only upon receiving an additional command to turn on the roughing valve.
- 6. A method of controlling a cryopump comprising:detecting whether a temperature-sensing diode is faulty; and if the diode is faulty, automatically turning off temperature control mode.
- 7. The method of claim 6, wherein the diode is determined to be faulty if the diode reads a temperature which is outside a range of normal temperature values.
- 8. A method of controlling and performing procedures with respect to a cryopump comprising, during a regeneration cycle:performing a purge test; if the purge test passes, turning on heaters; if the purge test fails, turning on heaters only if a temperature reaches a threshold within a predetermined period; and otherwise, aborting the regeneration.
- 9. An electronic controller which controls a cryopump, the controller including instructions to respond to a recovery of power after a power failure by:determining whether a power fail recovery mode is on; if the power fail recovery mode is on, and temperature is below a setpoint, automatically cooling the cryopump; and if the power fail recovery mode is on, and the temperature is above the setpoint, automatically starting a regeneration cycle.
- 10. The electronic controller of claim 9, further includes instructions to respond by maintaining the cryopump in an off state, if the power fail recovery mode is off.
- 11. An cryopump comprising:a cryopump chamber having pumping surfaces; and an electronic controller programmed with instructions to respond to a recovery of power after a power failure by: determining whether a power fail recovery mode is on; if the power fail recovery mode is on, and temperature is below a setpoint, automatically cooling the cryopump; and if the power fail recovery mode is on, and the temperature is above the setpoint, automatically starting a regeneration cycle.
- 12. The cryopump of claim 11 wherein the controller further includes instructions to respond by maintaining the cryopump in an off state, if the power fail recovery mode is off.
- 13. A system for controlling a cryopump in response to a recovery of power after a power failure the system comprising:a means for determining whether a power fail recovery mode is on; a means for automatically cooling a cryopump when a power fail recovery mode is on and a temperature is below a setpoint; and a means for starting a regeneration cycle if the power fail recovery mode is on, and the temperature is above the setpoint.
- 14. An electronic controller that controls a cryopump, the controller including instructions for:receiving a command to turn on a thermocouple (TC) gauge, the TC gauge for sensing pressure within the cryopump; determining whether there is a sufficient amount of gas to ignite; and turning on the TC gauge only if there is not a sufficient amount of gas to ignite.
- 15. An electronic controller of claim 14 wherein there is an insufficient amount of gas to ignite when at least one of the following conditions is true:(1) a temperature is below a setpoint, and (2) the cryopump has been purged.
- 16. A cryopump having an electronic controller which includes instructions for:receiving a command to turn on a thermocouple (TC) gauge, the TC gauge for sensing pressure within the cryopump; determining whether there is a sufficient amount of gas to ignite; and turning on the TC gauge only if there is not a sufficient amount of gas to ignite.
- 17. A cryopump according to claim 16 wherein there is an insufficient amount of gas to ignite when at least one of the following conditions is true:(1) a temperature is below a setpoint, and (2) the cryopump has been purged.
- 18. A system for controlling a cryopump comprising:a means for receiving a command to turn on a thermocouple (TC) gauge, the TC gauge for sensing pressure within the cryopump; a means for determining whether there is a sufficient amount of gas to ignite; and a means for turning on the TC gauge only if there is not a sufficient amount of gas to ignite.
- 19. A cryopump controller which controls a cryopump by:receiving a command to turn on a roughing valve; displaying a warning if the cryopump is on; and turning on the roughing valve only upon receiving an additional command to turn on the roughing valve.
- 20. A cryopump including an electronic controller, the controller includes instructions for:receiving a command to turn on a roughing valve; displaying a warning if the cryopump is on; and turning on the roughing valve only upon receiving an additional command to turn on the roughing valve.
- 21. A system for controlling a cryopump, the system comprising:a means for receiving a command to turn on a roughing valve; a means for displaying a warning if the cryopump is on; and a means for turning on the roughing valve only upon receiving an additional command to turn on the roughing valve.
- 22. An electronic controller for controlling a cryopump, the controller programed with instructions which:detects whether a temperature-sensing diode is faulty; and automatically turns off a temperature control mode when the diode is faulty.
- 23. A controller as in claim 22 wherein the diode is faulty when the diode provides a temperature reading outside a normal range of temperatures.
- 24. A cryopump including a controller which:detects whether a temperature-sensing diode is faulty; and automatically turns off a temperature control mode when the diode is faulty.
- 25. A cryopump as in claim 24 wherein the diode is faulty when the diode provides a temperature reading outside a normal range of temperatures.
- 26. A system for controlling a cryopump comprising:a means for detecting whether a temperature-sensing diode is faulty; and a means for automatically turns off a temperature control mode when the diode is faulty.
- 27. A cryopump controller which includes instructions for responding to a regeneration cycle by:performing a purge test; if the purge test passes, turning on heaters; if the purge test fails, turning on heaters only if a temperature reaches a threshold within a predetermined period; and otherwise, aborting the regeneration.
- 28. A cryopump having an electronic controller which includes instructions to respond to a regeneration cycle by:performing a purge test; if the purge test passes, turning on heaters; if the purge test fails, turning on heaters only if a temperature reaches a threshold within a predetermined period; and otherwise, aborting the regeneration.
- 29. A system for responding to a regeneration cycle comprising:a means for performing a purge test; a means for turning on heaters if the purge test passes; a means for turning on heaters if the purge test fails and if a temperature reaches a threshold within a predetermined period; and a means for otherwise aborting the regeneration.
RELATED APPLICATIONS
This application is a continuation of application Ser. No. 09/977,559, filed Oct. 15, 2001 now U.S. Pat. No. 6,460,351, which is a continuation of application Ser. No. 09/826,692, filed Apr. 5, 2001 now U.S. Pat No. 6,318,093, which is a continuation of application Ser. No. 09/454,358, filed Dec. 3, 1999 now U.S. Pat. No. 6,461,113, which is a continuation of Ser. No. 08/517,091, filed Aug. 21, 1995, now U.S. Pat. No. 6,022,195, which is a Continuation-in-Part of Ser. No. 08/092,692, filed Jul. 16, 1993, now U.S. Pat. No. 5,443,368 and a Continuation-In-Part application of Ser. No. 08/252,886, filed Jun. 2, 1994, now U.S. Pat. No. 5,450,316 which is a Divisional of Ser. No. 07/944,040, filed Sep. 11, 1992, now U.S. Pat. No. 5,343,708, which is a Divisional of Ser. No. 07/704,664, filed May 20, 1991, now U.S. Pat. No. 5,157,928, which is a File Wrapper Continuation of Ser. No. 07/461,534, filed Jan. 5, 1990, now abandoned, which is a Divisional of Ser. No. 07/243,707 filed Sep. 13, 1988, now U.S. Pat. No. 4,918,930, the entire teachings of which are incorporated herein by reference.
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Continuations (5)
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