ELECTROOPTICAL DEVICE, ELECTRONIC APPARATUS, AND PROJECTOR

Abstract

An electrooptical device includes a substrate having pixel regions arranged in a matrix, pixel electrodes disposed in the pixel regions of the substrate, switching elements disposed between the pixel regions of the substrate and electrically connected to the pixel electrodes, capacitors disposed between the pixel regions of the substrate to hold electrical charge on the pixel electrodes, wiring disposed between the pixel regions of the substrate, and grooves disposed in a surface of the substrate so as to extend between the pixel regions thereof. The capacitors each include a first capacitor electrode, an insulating film, and a second capacitor electrode. The wiring includes data lines and scanning lines corresponding to the switching elements. The capacitors are at least partially disposed in the grooves.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

The invention will be described with reference to the accompanying drawings, wherein like numbers reference like elements.

FIG. 1A is a plan view of the overall structure of a liquid crystal device according to a first embodiment of the invention.

FIG. 1B is a sectional view of the overall structure of the liquid crystal device according to this embodiment.

FIG. 2 is an equivalent circuit diagram of the liquid crystal device according to this embodiment.

FIG. 3 is a plan view of the liquid crystal device according to this embodiment.

FIG. 4 is a sectional view of the liquid crystal device according to this embodiment.

FIG. 5 is another sectional view of the liquid crystal device according to this embodiment.

FIG. 6 is a perspective view of the wiring structure of the liquid crystal device according to this embodiment.

FIG. 7 is a diagram illustrating a step of a process for producing the liquid crystal device according to this embodiment.

FIG. 8 is a diagram illustrating another step of the process for producing the liquid crystal device according to this embodiment.

FIG. 9 is a diagram illustrating another step of the process for producing the liquid crystal device according to this embodiment.

FIG. 10 is a diagram illustrating another step of the process for producing the liquid crystal device according to this embodiment.

FIG. 11 is a diagram illustrating another step of the process for producing the liquid crystal device according to this embodiment.

FIG. 12 is a diagram illustrating another step of the process for producing the liquid crystal device according to this embodiment.

FIG. 13 is a diagram illustrating another step of the process for producing the liquid crystal device according to this embodiment.

FIG. 14 is a sectional view showing transmission of light through the liquid crystal device.

FIG. 15 is a plan view of a liquid crystal device according to a second embodiment of the invention.

FIG. 16 is a sectional view of the liquid crystal device according to this embodiment.

FIG. 17 is a plan view of a liquid crystal device according to a third embodiment of the invention.

FIG. 18 is a sectional view of the liquid crystal device according to this embodiment.

FIG. 19 is another sectional view of the liquid crystal device according to this embodiment.

FIG. 20 is a plan view of a liquid crystal device according to a fourth embodiment of the invention.

FIG. 21 is a sectional view of the liquid crystal device according to this embodiment.

FIG. 22 is a sectional view of a liquid crystal device according to a fifth embodiment of the invention.

FIG. 23 is a plan view of the liquid crystal device according to this embodiment.

FIG. 24A is a diagram showing the intensity distribution of light.

FIG. 24B is a graph taken along line XXIVB-XXIVB of FIG. 24A.

FIG. 25 is a sectional view of a liquid crystal device according to a sixth embodiment of the invention.

FIG. 26 is a sectional view of a liquid crystal device according to a seventh embodiment of the invention.

FIG. 27 is a sectional view of a liquid crystal device according to an eighth embodiment of the invention.

FIG. 28 is a sectional view of a liquid crystal device according to a ninth embodiment of the invention.

FIG. 29 is a sectional view of a liquid crystal device according to a tenth embodiment of the invention.

FIG. 30 is a diagram of a projector according to another embodiment of the invention.

FIG. 31 is a diagram of an electronic apparatus according to another embodiment of the invention.

Claims

1. An electrooptical device comprising: a substrate having pixel regions arranged in a matrix;pixel electrodes disposed in the pixel regions of the substrate;switching elements disposed between the pixel regions of the substrate and electrically connected to the pixel electrodes;capacitors disposed between the pixel regions of the substrate to hold electrical charge on the pixel electrodes, each including a first capacitor electrode, an insulating film, and a second capacitor electrode;wiring disposed between the pixel regions of the substrate, including data lines and scanning lines corresponding to the switching elements; andgrooves disposed in a surface of the substrate so as to extend between the pixel regions thereof, the capacitors being at least partially disposed in the grooves.

2. An electrooptical device comprising: a substrate having pixel regions arranged in a matrix;pixel electrodes disposed in the pixel regions of the substrate;switching elements disposed between the pixel regions of the substrate and electrically connected to the pixel electrodes;capacitors disposed between the pixel regions of the substrate to hold electrical charge on the pixel electrodes, each including a first capacitor electrode, an insulating film, and a second capacitor electrode;wiring disposed between the pixel regions of the substrate, including data lines and scanning lines corresponding to the switching elements; andgrooves disposed in a surface of the substrate so as to extend between the pixel regions thereof, the data lines being at least partially disposed in the grooves between the switching elements and the substrate.

3. An electrooptical device comprising: a substrate having pixel regions arranged in a matrix;pixel electrodes disposed in the pixel regions of the substrate;switching elements disposed between the pixel regions of the substrate and electrically connected to the pixel electrodes;capacitors disposed between the pixel regions of the substrate to hold electrical charge on the pixel electrodes, each including a first capacitor electrode, an insulating film, and a second capacitor electrode;wiring disposed between the pixel regions of the substrate, including data lines and scanning lines corresponding to the switching elements; andgrooves disposed in a surface of the substrate so as to extend between the pixel regions thereof, the capacitors being at least partially disposed in the grooves, the data lines being at least partially disposed in the grooves between the switching elements and the substrate.

4. The electrooptical device according to claim 1, wherein the scanning lines are at least partially disposed in the grooves.

5. The electrooptical device according to claim 1, wherein the cross-sectional area of the grooves is larger on the opening side thereof than on the bottom side thereof.

6. The electrooptical device according to claim 1, further comprising light-shielding portions that cover intersection regions of the data lines and the scanning lines in plan view and do not overlap the pixel regions in plan view, wherein the width of the data lines and the scanning lines is smaller than the maximum width of the light-shielding portions.

7. The electrooptical device according to claim 1, further comprising light-shielding portions covering intersection regions of the data lines and the scanning lines in plan view and overlapping the pixel regions in plan wherein the width of the data lines and the scanning lines is smaller than the maximum width of the light-shielding portions.

8. The electrooptical device according to claim 1, wherein the grooves extend along the capacitor electrodes of the capacitors and the wiring;the capacitor electrodes and the wiring are at least partially disposed in the grooves and are separated by insulating films; andthe capacitor electrodes extend through the grooves along the wiring.

9. The electrooptical device according to claim 8, wherein the capacitor electrodes are closer to side surfaces of the grooves than the wiring.

10. The electrooptical device according to claim 7, wherein the capacitor electrodes are formed along bottom and side surfaces of the grooves.

11. The electrooptical device according to claim 6, wherein the switching elements overlap the intersection regions of the wiring in plan view;the wiring has flat portions electrically connected thereto and extending from regions of the grooves corresponding to the intersection regions; andthe switching elements and the flat portions are connected via contact holes.

12. The electrooptical device according to claim 6, wherein the switching elements are disposed in regions covered by the light-shielding portions in plan view.

13. The electrooptical device according to claim 1, further comprising microlenses that collect light into the pixel regions.

14. An electronic apparatus comprising the electrooptical device according to claim 1.

15. A projector comprising the electrooptical device according to claim 1.