Claims
- 1. An electrostatic acclerator for generating a particle beam of elecrically charged particles in the energy range of 200 keV and directing it onto a target within a closed vacuum system, comprising the following features:
- a) an ion source for the generation of a beam of charged particles,
- b) a staged accelerators structure arranged adjacent said ion source and including a number of drift tubes disposed adjacent to one another in axially aligned spaced relationship so as to permit passage of said beam therethrough, said drift tubes being insulated and spaced from one another by means of ceramic tube portions arranged one after the other in serial alignment and connected to said drift tubes so as to form, together, a tubular unitary structure, each of said drift tubes of the accelerator structure being provided with a radially projecting circumferential contact and centering disc having opposite sides to which the ends of the adjacent ceramic tube-portions are mounted, said contact and centering discs projecting radially beyond said ceramic tube portions and being sealing connected thereto by a U-shaped metallic spring ring which is open toward said disc and which has legs of unequal length, with the outer, longer legs being welded onto the circumferential edge of the radially projecting disc portions and the inner, shorter legs being soldered to the outside of the adjacent tube portions next to the end faces thereof,
- c) a high voltage multiplier for providing accelerator voltages applied to said drift tubes,
- d) a target disposed on a cooled carrier arranged at the end of said accelerator structure opposite said ion source, and
- e) said accelerator structure with said drift tubes being arranged coaxially within the high voltage multiplier and said high voltage multiplier being annular and extending over the whole length of the accelerator structure and also being divided into stages which are arranged adjacent the corresponding drift tubes to which they are connected for providing thereto said accelerator voltages.
- 2. An electrostatic accelerator according to claim 1, wherein said spring rings are connected with their legs of unequal length to said discs and said tube portion in such a manner that spacing grooves formed between the tube sections and the discs are bridged and closed up by said spring rings.
- 3. An electrostatic accelerator according to claim 1, wherein
- the various stages of the high-voltage multiplier have exits connected to the contact discs to the respective associated drift tubes by means of high-voltage resistant penetrations and resistor chains disposed around the respective ceramic tube portions.
- 4. An electrostatic accelerator according to claim 3, wherein,
- for supplying current to the contact discs, the resistor chains are in contact with the curved areas of the U-shaped spring rings.
Parent Case Info
This application is a continuation-in-part application of patent application Ser. No. 08/034,106, which was filed on Mar. 22, 1993, now abandoned.
US Referenced Citations (13)
Continuation in Parts (1)
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Number |
Date |
Country |
Parent |
34106 |
Mar 1993 |
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